Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
---|
04/25/2012 | CN102427103A 氮化镓基ⅲ-ⅴ族化合物半导体led外延片及其生长方法以及包括其的led显示装置 GaN-based ⅲ-ⅴ compound semiconductor epitaxial wafer led its growth method and apparatus including led display |
04/25/2012 | CN102424958A 用于连续制造金属薄膜太阳能电池的淀积设备及方法 The deposition apparatus and method for continuously manufacturing a metal thin film for a solar cell |
04/25/2012 | CN102424957A Multi-layer product support for vapor deposition, and chemical vapor deposition reaction chamber |
04/25/2012 | CN102424956A 用于金属有机化合物化学气相沉积设备的喷淋装置 Spray means for metal organic chemical vapor deposition apparatus |
04/25/2012 | CN102424955A 一种新型匀气结构 A new uniform gas structure |
04/25/2012 | CN102424954A Shutdown clean scheme for reducing particles of high density plasma chemical vapor deposition process |
04/25/2012 | CN101914761B 用于mocvd反应腔中反应气体输送与均匀分布控制的装置 Gas delivery and uniform distribution of the reaction chamber to control the reaction mocvd means for |
04/25/2012 | CN101770932B 等离子体处理设备 The plasma processing apparatus |
04/25/2012 | CN101605923B 对切削工具的表面处理方法 Of the cutting tool surface treatment method |
04/25/2012 | CN101581036B 一种SiC纤维表面C/AlN复合梯度涂层制备方法 One kind of SiC fiber surface C / AlN composite gradient coating preparation |
04/25/2012 | CN101563763B Methods and systems for low interfacial oxide contact between barrier and copper metallization |
04/25/2012 | CN101528973B 用于原子层沉积的涡流室盖 Atomic layer deposition is used to cover the vortex chamber |
04/25/2012 | CN101419904B 等离子体约束装置及等离子体处理装置 The plasma processing apparatus and plasma confinement apparatus |
04/25/2012 | CN101325160B 半导体处理用的成膜方法和装置 Forming a semiconductor processing method and apparatus used in |
04/25/2012 | CN101302610B 具有覆盖钇铝层的部件的处理腔 A cover member having a layer of yttrium aluminum processing chamber |
04/25/2012 | CN101276775B 载置台的表面处理方法 The surface treatment method of the stage |
04/25/2012 | CN101118841B 半导体处理用的热处理装置 Heat treatment apparatus used in semiconductor processing |
04/24/2012 | US8163647 Method for growing carbon nanotubes, and electronic device having structure of ohmic connection to carbon element cylindrical structure body and production method thereof |
04/24/2012 | US8163404 Chlorine, fluorine and lithium co-doped transparent conductive films and methods for fabricating the same |
04/24/2012 | US8163403 Epitaxial layers on oxidation-sensitive substrates and method of producing same |
04/24/2012 | US8163344 Heating a mixture of a boron containing vapor and a titanium tetrachloride dopant vapor to produce doped boron and exposing the doped boron to magnesium vapor; superconductors |
04/24/2012 | US8163343 Method of forming an aluminum oxide layer |
04/24/2012 | US8163342 zinc containing compound, oxygen-containing compound, and aluminum- or gallium-containing compound are mixed together for a sufficient time that an aluminum or gallium doped zinc oxide coating is formed on the surface; high deposition rates |
04/24/2012 | US8163341 Methods of forming metal-containing structures, and methods of forming germanium-containing structures |
04/24/2012 | US8163340 Carbon nanotube film structure and method for making the same |
04/24/2012 | US8163339 Edge densification for film boiling process |
04/24/2012 | US8163338 Precursor selection method for chemical vapor deposition techniques |
04/24/2012 | US8163337 Vapour deposition method |
04/24/2012 | US8163128 Plasma processing apparatus |
04/24/2012 | US8163090 Methods structures and apparatus to provide group VIA and IA materials for solar cell absorber formation |
04/24/2012 | US8163088 Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates |
04/24/2012 | US8163087 Plasma enhanced atomic layer deposition system and method |
04/24/2012 | US8161906 Clamped showerhead electrode assembly |
04/24/2012 | CA2500505C Method for aluminide coating a hollow article |
04/19/2012 | WO2012051485A1 Ald coating system |
04/19/2012 | WO2012051182A2 Fabrication of single-crystalline graphene arrays |
04/19/2012 | WO2012050866A1 Method of and apparatus for multiple-channel pulse gas delivery system |
04/19/2012 | WO2012050442A1 Apparatus and method for atomic layer deposition on a surface |
04/19/2012 | WO2012050117A1 Supporting body and wafer film formation method |
04/19/2012 | WO2012049943A1 Silicon nitride film-forming device and method |
04/19/2012 | WO2012027357A3 Thermally stable volatile precursors |
04/19/2012 | WO2012012457A3 Polycrystalline silicon production |
04/19/2012 | WO2012005471A3 Method for the surface treatment of an implant unit using plasma, implant unit manufactured using same, and apparatus for plasma surface treatment of the implant unit. |
04/19/2012 | WO2011149678A3 Linear batch chemical vapor deposition system |
04/19/2012 | WO2011056438A3 Conveyance system including opposed fluid distribution manifolds |
04/19/2012 | US20120094505 Method for selective oxidation, device for selective oxidation, and computer-readable memory medium |
04/19/2012 | US20120094483 Film forming method, film forming apparatus and method for manufacturing a semiconductor device |
04/19/2012 | US20120094474 Method for equipping an epitaxy reactor |
04/19/2012 | US20120094432 Self cleaning large scale method and furnace system for selenization of thin film photovoltaic materials |
04/19/2012 | US20120094430 Crystalline silicon manufacturing apparatus and method of manufacturing solar cell using the same |
04/19/2012 | US20120094423 Device for jetting gas and solar cell manufacturing method using the same |
04/19/2012 | US20120094213 Solid oxide electrolyte membrane, method of manufacturing the same and fuel cell including the solid oxide electrolyte membrane |
04/19/2012 | US20120094149 Deposition of layer using depositing apparatus with reciprocating susceptor |
04/19/2012 | US20120094148 Process for depositing a coating for protection against oxidation and against hot corrosion on a superalloy substrate, and coating obtained |
04/19/2012 | US20120094117 Carbon material covered with diamond thin film and method of manufacturing same |
04/19/2012 | US20120094101 Method for treating a surface of a substrate |
04/19/2012 | US20120094099 Method and coating for protecting and repairing an airfoil surface |
04/19/2012 | US20120094074 Dlc film-forming method and dlc film |
04/19/2012 | US20120094033 Nanoparticles with grafted organic molecules |
04/19/2012 | US20120094022 Method of forming metal thin film |
04/19/2012 | US20120094014 Vapor deposition apparatus and vapor deposition method |
04/19/2012 | US20120094011 Film deposition apparatus and film deposition method |
04/19/2012 | US20120094010 Substrate processing apparatus, temperature controlling method of substrate processing apparatus, and heating method of substrate processing apparatus |
04/19/2012 | US20120094009 Magnetic write head fabrication with integrated electrical lapping guides |
04/19/2012 | US20120092410 Solvent resistant printhead |
04/19/2012 | US20120091855 Atomic layer deposition encapsulation for acoustic wave devices |
04/19/2012 | US20120091451 Zinc Oxide Nanostructures and Sensors Using Zinc Oxide Nanostructures |
04/19/2012 | US20120091098 High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformity |
04/19/2012 | US20120090990 Deposition Apparatus and Methods to Reduce Deposition Asymmetry |
04/19/2012 | US20120090785 Antenna unit for generating plasma and substrate processing apparatus including the same |
04/19/2012 | US20120090784 Chamber lid heater ring assembly |
04/19/2012 | US20120090783 Plasma processing apparatus and processing gas supply structure thereof |
04/19/2012 | US20120090691 Quartz showerhead for nanocure uv chamber |
04/19/2012 | US20120090548 Wafer carrier track |
04/19/2012 | US20120090547 System and method of vapor deposition |
04/19/2012 | US20120090546 Source supplying unit, method for supplying source, and thin film depositing apparatus |
04/19/2012 | US20120090545 Vapor based combinatorial processing |
04/19/2012 | US20120090544 Thin film deposition apparatus for continuous deposition, and mask unit and crucible unit included in thin film deposition apparatus |
04/19/2012 | US20120090543 Thin film depositing apparatus |
04/19/2012 | DE102011014875B3 Verfahren für die Herstellung poröser Granulatteilchen aus anorganischem Werkstoff sowie deren Verwendung A process for the preparation of porous granules of inorganic material and the use thereof |
04/19/2012 | DE102010056021B3 Nozzle assembly useful in a chemical vapor deposition reactor, comprises a nozzle body having an inlet, an outlet and a flow space between the inlet and outlet, and a control unit having an adjusting member and a fixing part |
04/19/2012 | DE102010048960A1 Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken Method and apparatus for plasma treatment of workpieces |
04/19/2012 | DE102009007667B4 Medizinisches Arbeitsmittel sowie Verfahren und Vorrichtung zur Herstellung eines derartigen medizinischen Arbeitsmittels Medical work equipment and method and apparatus for producing such a medical work equipment |
04/19/2012 | DE102008033938B4 Verfahren zur Abscheidung von Schichten auf einem Substrat A process for the deposition of layers on a substrate |
04/18/2012 | EP2442364A1 Gate stack structure for semiconductor flash memory device and preparation method thereof |
04/18/2012 | EP2441860A1 Apparatus and method for atomic layer deposition on a surface |
04/18/2012 | EP2441859A1 Plasma processing apparatus and plasma processing method |
04/18/2012 | EP2441858A1 DLC-coated member |
04/18/2012 | EP2441086A2 Continuous feed chemical vapor deposition system |
04/18/2012 | EP2441085A2 Roll-to-roll chemical vapor deposition system |
04/18/2012 | EP2440686A1 Vapor deposition reactor and method for forming thin film |
04/18/2012 | EP2440685A1 Substrate structure grown by plasma deposition |
04/18/2012 | EP2440684A1 Method for coating micromechanical components of a micromechanical system, in particular a watch and related micromechanical coated component |
04/18/2012 | EP2440683A2 System and method for vapor phase reflow of a conductive coating |
04/18/2012 | EP2268846B1 A method for stable hydrophilicity enhancement of a substrate by atmospheric pressure plasma deposition |
04/18/2012 | EP1660697B1 Vertical flow rotating disk reactor and method using the same |
04/18/2012 | EP1483426B1 Apparatus and method for applying diamond-like carbon coatings |
04/18/2012 | CN202193845U 一种应用于薄膜沉积工艺的硅片载板 Applied to silicon thin film deposition process carrier board |
04/18/2012 | CN202193844U 大直径mocvd反应器的喷淋头 Mocvd large diameter reactor sprinklers |
04/18/2012 | CN202193843U 气体分配装置 Gas distribution means |