Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes
Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
05/2012
05/09/2012EP2450958A1 Production method and production device for solar battery
05/09/2012EP2450957A2 Metallic contacts for photovoltaic devices and low temperature fabrication processes thereof
05/09/2012CN202214416U Graphite boat carrying trolley for PECVD procedure
05/09/2012CN202214415U Chemical vapor deposition coating device
05/09/2012CN102449190A Method for forming an organic material layer on a substrate
05/09/2012CN102449189A Arrangement for processing substrate and substrate carrier
05/09/2012CN102448996A Material having a low dielectric konstant and method of making the same
05/09/2012CN102447013A Thin-film solar cell fabrication process, deposition method for solar cell precursor layer stack, and solar cell precursor layer stack
05/09/2012CN102446715A Systems and methods for forming semiconductor materials by atomic layer deposition
05/09/2012CN102443786A Method for strengthening uniformity of chemical vapor deposition film by improved plasma
05/09/2012CN102443785A Functional film and method of manufacturing functional film
05/09/2012CN102443784A Apparatus and method for controlled application of reactive vapors to produce thin films and coatings
05/09/2012CN102443783A Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition
05/09/2012CN102443782A Film forming apparatus and film forming method
05/09/2012CN102443781A Gas spraying module and gas spraying scanning device thereof
05/09/2012CN102443780A Gas discharge pipe and associated method
05/09/2012CN102443779A Plasma assisted selenylation technology and device for preparing copper-indium-gallium-selenium film
05/09/2012CN102443778A Hollow graphite die and applications thereof
05/09/2012CN102443769A Method for recovering physical vapor deposition (PVD) false sheets
05/09/2012CN102443764A Dlc-coated member
05/09/2012CN102441686A Blade-breakage-resisting surface coating cutting tool with excellent performance of hard coating layer
05/09/2012CN101988192B Compound electrode plate and PECVD deposition box and PECVD system
05/09/2012CN101748385B Substrate processing device for chemical vapor deposition (CVD)
05/09/2012CN101716481B Hypergravity fluidization vapor deposition reaction device
05/09/2012CN101707225B Method for improving characteristics of antireflecting film of monocrystalline silicon solar battery
05/09/2012CN101681785B Apparatus and methods for improving treatment uniformity in a plasma process
05/09/2012CN101668879B Roll-to-roll plasma enhanced chemical vapor deposition method of barrier layers comprising silicon and carbon
05/09/2012CN101615569B Vacuum processor
05/09/2012CN101450995B Low dielectric constant plasma polymerized thin film and manufacturing method thereof
05/09/2012CN101397652B Metal microfiber-nano carbon composite material and preparation method
05/09/2012CN101348902B Diffuser plate with slit valve compensation
05/08/2012US8175736 Method and system for performing a chemical oxide removal process
05/08/2012US8173754 Process for the synthesis and preparation of polymeric materials for use in optical applications such as plastic lenses
05/08/2012US8173681 Method for the protection of materials
05/08/2012US8173214 Substrate processing method
05/08/2012US8173213 Process stability of NBDE using substituted phenol stabilizers
05/08/2012US8173212 Method for manufacturing carbon nano tube
05/08/2012US8173010 Method of dry reforming a reactant gas with intermetallic catalyst
05/08/2012US8172980 Device with self aligned gaps for capacitance reduction
05/08/2012US8172949 Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program
05/08/2012US8172948 De-fluoridation process
05/08/2012US8172947 Substrate processing apparatus and attaching/detaching method of reaction vessel
05/08/2012US8172946 Semiconductor device manufacturing apparatus and manufacturing method of semiconductor device
05/08/2012US8171880 Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
05/08/2012US8171877 Backside mounted electrode carriers and assemblies incorporating the same
05/03/2012WO2012057889A1 Atomic layer deposition film with tunable refractive index and absorption coefficient and methods of making
05/03/2012WO2012057884A1 Nitrogen-containing ligands and their use in atomic layer deposition methods
05/03/2012WO2012057883A1 Bisamineazaallylic ligands and their use in atomic layer deposition methods
05/03/2012WO2012057770A2 Reactor clean
05/03/2012WO2012057128A1 Film forming device and film forming method employing same
05/03/2012WO2012056928A1 Method for manufacturing optical element
05/03/2012WO2012056707A1 Plasma cvd apparatus
05/03/2012WO2012055906A2 Alumina layer with multitexture components
05/03/2012WO2012055561A1 Gas lock, and coating apparatus comprising a gas lock
05/03/2012WO2012055510A1 Gas lock, and coating apparatus comprising a gas lock
05/03/2012WO2012023760A3 Apparatus for forming gas blocking layer and method thereof
05/03/2012WO2011071069A9 Method for cleaning film forming apparatus, film forming method, and film forming apparatus
05/03/2012US20120108077 Substrate processing apparatus and semiconductor device manufacturing method
05/03/2012US20120108061 Substrate processing apparatus and method of manufacturing a semiconductor device
05/03/2012US20120108041 Patterning of Nanostructures
05/03/2012US20120108005 METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM
05/03/2012US20120108002 Apparatus, method and system for depositing layer of solar cell
05/03/2012US20120107990 Method for manufacturing semiconductor light emitting device and semiconductor crystal growth apparatus
05/03/2012US20120107613 Corrosion-resistant article coated with aluminum nitride
05/03/2012US20120107586 Barrier film and method of manufacturing the same
05/03/2012US20120107536 Amorphous alloy housing and method for making same
05/03/2012US20120107525 CO2 Recycling Method and CO2 Reduction Method and Device
05/03/2012US20120107524 Thin-film manufacturing method and apparatus
05/03/2012US20120107505 METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM
05/03/2012US20120107504 Evaporation system and method
05/03/2012US20120107503 Smoothing Agents to Enhance Nucleation Density in Thin Film Chemical Vapor Deposition
05/03/2012US20120107502 Bisamineazaallylic Ligands And Their Use In Atomic Layer Deposition Methods
05/03/2012US20120107501 Coating device and coating method
05/03/2012US20120107487 Roll to roll patterned deposition process and system
05/03/2012US20120107486 Sealant coating device and dispensing method thereof
05/03/2012US20120106974 Formation of an optical waveguide
05/03/2012US20120103519 Plasma Etch Resistant, Highly Oriented Yttria Films, Coated Substrates and Related Methods
05/03/2012US20120103518 Film formation apparatus
05/03/2012US20120103398 Surface-treated substrate, light-receiving-side protective sheet for solar cell using the same, and solar cell module
05/03/2012US20120103330 Medicinal inhalation device
05/03/2012US20120103265 Vapor phase growth apparatus
05/03/2012US20120103264 Methods and apparatus for depositing a uniform silicon film with flow gradient designs
05/03/2012US20120103263 Pre-heat ring designs to increase deposition uniformity and substrate throughput
05/03/2012US20120103261 Apparatus and systems for intermixing cadmium sulfide layers and cadmium telluride layers for thin film photovoltaic devices
05/03/2012US20120103260 Apparatus for manufacturing semiconductor
05/03/2012US20120103259 Thin film depositing apparatus
05/03/2012US20120103258 Chemical Vapor Deposition Apparatus and Cooling Block Thereof
05/03/2012US20120103257 Deposition ring and electrostatic chuck for physical vapor deposition chamber
05/03/2012US20120103256 Vertical heat treatment apparatus
05/03/2012US20120103255 Alignment method, alignment apparatus, and organic el element manufacturing apparatus
05/03/2012DE102010049861A1 Gasschleuse sowie Beschichtungsvorrichtung mit einer Gasschleuse Gas lock and coating apparatus with a gas lock
05/02/2012EP2446988A1 Cutting tool insert with an alpha-alumina layer having a multi-components texture
05/02/2012EP2119815B1 Method for manufacturing self-supporting nitride semiconductor substrate
05/02/2012CN202208760U Electrode box structure
05/02/2012CN202208759U MOCVD (Metal Organic Chemical Vapor Deposition) system and exhaust device for reaction gas in MOCVD system
05/02/2012CN202208755U Metal mask device with magnetic protecting film
05/02/2012CN1904136B Method of forming film and pattern, and method of manufacturing electronic device using thereof
05/02/2012CN102439712A Thermocouple and temperature measuring system
05/02/2012CN102439698A Vapor phase growth apparatus
05/02/2012CN102439197A Optoelectronic component and method for the production thereof
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