Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
05/2012
05/23/2012CN102473757A Process for production of photoelectric conversion device
05/23/2012CN102473749A 太阳能电池的制造方法和制造装置 Solar cell manufacturing method and a manufacturing apparatus
05/23/2012CN102473745A 太阳能电池用透明导电性基板及太阳能电池 A solar cell substrate and the transparent conductive solar cell
05/23/2012CN102473670A 处理装置及其动作方法 Apparatus and method for processing the operation
05/23/2012CN102473616A 成膜方法 Film forming method
05/23/2012CN102473612A Plasma CVD apparatus, plasma electrode, and method for manufacturing semiconductor film
05/23/2012CN102473611A 气相生长装置 Vapor phase growth apparatus
05/23/2012CN102473609A 成膜装置 Film forming apparatus
05/23/2012CN102473608A 成膜装置 Film forming apparatus
05/23/2012CN102473607A 膜沉积装置 The film deposition apparatus
05/23/2012CN102471932A Method for preserving a gallium nitride substrate, preserved gallium nitride substrate, semiconductor device, and manufacturing method therefor
05/23/2012CN102471931A Iii nitride semiconductor substrate, epitaxial substrate, and semiconductor device
05/23/2012CN102471896A 用于车削钢的涂层切割工具刀片 Coated cutting tool for turning of steel blades
05/23/2012CN102471888A 纹理化dlc涂层的方法及由此纹理化的dlc涂层 Textured dlc coating method and thus the texture of the coating dlc
05/23/2012CN102471887A 用于原子层沉积的设备 Apparatus for atomic layer deposition
05/23/2012CN102471886A Apparatus for forming deposited film and method for forming deposited film
05/23/2012CN102471885A Metal nitride containing film deposition using combination of amino-metal and halogenated metal precursors
05/23/2012CN102471884A 用于形成层的设备 Apparatus for forming a layer
05/23/2012CN102471883A 抑制沉积物在制造系统中的形成的方法 Inhibit the formation of deposits in the method of manufacturing systems
05/23/2012CN102471882A 制备涂覆基材的方法、涂覆的基材及其用途 The method of preparing a coated substrate, the coated substrate and its use
05/23/2012CN102471881A Apparatus for producing a thin-film lamination
05/23/2012CN102471866A 涂覆的刀具 Coated tool
05/23/2012CN102470537A 剃刀上的原子层沉积涂层 Atomic layer deposition coating on razor
05/23/2012CN102468437A 相变存储器的制作方法 The method of manufacturing a phase change memory
05/23/2012CN102468173A 晶体管的制作方法 Production methods transistor
05/23/2012CN102468141A Vaporizing polymer spray deposition system
05/23/2012CN102467987A 封装用导线及其制造方法 Package with a wire and its manufacturing method
05/23/2012CN102465306A Hydrofluoric acid adding device and adding method
05/23/2012CN102465283A Chuck and semiconductor processing device
05/23/2012CN102465282A 直接式pecvd生产中节省气体的方法 The method of direct pecvd save gas production
05/23/2012CN102465281A Film deposition system and method and gas supplying apparatus being used therein
05/23/2012CN102465280A 双面生长型mocvd反应器 Mocvd sided growth type reactor
05/23/2012CN102465279A 真空处理装置的组装方法以及真空处理装置 Method of assembling a vacuum processing apparatus and a vacuum processing apparatus
05/23/2012CN102465278A View port device for plasma process and process observation device of plasma apparatus
05/23/2012CN102465277A 逆径向式mocvd反应器 Inverse Radial mocvd reactor
05/23/2012CN102465275A 镀膜装置 Coating apparatus
05/23/2012CN102465260A Chamber assembly and semiconductor processing equipment with application of same
05/23/2012CN101962769B Method for preparing hydrophobic film on surface of material
05/23/2012CN101956180B Antireflective film SiNx:H surface in-situ NH3 plasma treatment method
05/23/2012CN101911252B Placing table apparatus, processing apparatus and temperature control method
05/23/2012CN101901758B MOCVD growth method of non-polar m-surface GaN film based on m-surface SiC substrate
05/23/2012CN101802976B Substrate placing mechanism, substrate processing apparatus, method for suppressing film deposition on substrate placing mechanism
05/23/2012CN101736322B Chemical vapor deposition reactor
05/23/2012CN101680086B New metal precursors for semiconductor applications
05/23/2012CN101647103B Vacuum processing apparatus
05/23/2012CN101528975B Method for easy-to-clean substrates and articles therefrom
05/23/2012CN101523593B Semiconductor device manufacturing method and semiconductor device
05/23/2012CN101517706B Planar heater and semiconductor heat treatment apparatus provided with the heater
05/23/2012CN101488449B Semiconductor processing system including vaporizer and method for using same
05/23/2012CN101356626B Metal film decarbonizing method, film forming method and semiconductor device manufacturing method
05/23/2012CN101348904B Semiconductor manufacturing device
05/23/2012CN101260520B Flat plate silicon nitride film PECVD deposition system
05/23/2012CN101225509B Metal conducting wire repairing method and repairing apparatus
05/23/2012CN101210316B Heat treatment method for preparing carbon coating nano composite particles by using gas carbon source
05/23/2012CN101192534B Film formation apparatus for semiconductor process and method for using the same
05/23/2012CN101121733B Organometallic compounds
05/23/2012CN101120124B Process for producing silicon carbide single crystal
05/23/2012CN101111628B Method and apparatus for monolayer deposition (mld)
05/23/2012CN101061254B Alloyed tungsten produced by chemical vapour deposition
05/22/2012US8184963 Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
05/22/2012US8183502 Mounting table structure and heat treatment apparatus
05/22/2012US8183150 Semiconductor device having silicon carbide and conductive pathway interface
05/22/2012US8182884 Process for application of a hydrophilic coating to fuel cell bipolar plates
05/22/2012US8182870 Method for generating small and ultra small apertures, slits, nozzles and orifices
05/22/2012US8182869 Method for controlling temperature of a mounting table
05/22/2012US8182862 Ion beam-assisted high-temperature superconductor (HTS) deposition for thick film tape
05/22/2012US8182861 Methods and devices for monitoring and controlling thin film processing
05/22/2012US8182608 Deposition system for thin film formation
05/22/2012US8182600 Electrode for electrochemical processes and method for producing the same
05/22/2012US8181597 Plasma generating apparatus having antenna with impedance controller
05/19/2012CA2758781A1 Ceramic coated orthopaedic implants and method of making such implants
05/18/2012WO2012063779A1 Plasma-induced cvd method
05/18/2012WO2012063515A1 Surface-coated cutting tool
05/18/2012WO2012063318A1 Substrate for cvd diamond deposition and method for forming deposition surface
05/18/2012WO2012020295A8 Optical elements having long-lasting hydrophilic and anti-fog properties and method for their preparation
05/18/2012WO2012015267A3 Method for preparing graphene, graphene sheet, and device using same
05/17/2012US20120122319 Coating method for coating reaction tube prior to film forming process
05/17/2012US20120122317 Pulsed Laser Deposition with Exchangeable Shadow Masks
05/17/2012US20120122302 Apparatus And Methods For Deposition Of Silicon Carbide And Silicon Carbonitride Films
05/17/2012US20120122276 Thermal evaporation apparatus, use and method of depositing a material
05/17/2012US20120122269 Plasma processing apparatus and method for manufacturing photovoltaic element using same
05/17/2012US20120122018 Fuel cell separator and method for surface treatment of the same
05/17/2012US20120121932 Molecular Layer Deposition Process For Making Organic Or Organic-Inorganic Polymers
05/17/2012US20120121927 Steel sheet provided with a corrosion protection system and method for coating steel sheet with such a corrosion protection system
05/17/2012US20120121891 3-dimensional nanostructure having nanomaterials stacked on graphene substrate and fabrication method thereof
05/17/2012US20120121870 Multilayer structure comprising a precious metal stuck onto a dielectric substrate, and an associated method and use
05/17/2012US20120121817 Method for producing diamond-like carbon film body
05/17/2012US20120121807 Film deposition system and method and gas supplying apparatus being used therein
05/17/2012US20120121806 Complexes Of Imidazole Ligands
05/17/2012US20120121794 Deposition quantity measuring apparatus, deposition quantity measuring method, and method for manufacturing electrode for electrochemical element
05/17/2012US20120121349 New product and method for its manufacture within material processing
05/17/2012US20120121067 Hybrid organic photodiode
05/17/2012US20120120549 Mixed Composition Interface Layer and Method of Forming
05/17/2012US20120119337 Substrate processing apparatus, method of manufacturing semiconductor device and semiconductor device
05/17/2012US20120119223 Gallium Nitride Semiconductor Structures with Compositionally-Graded Transition Layer
05/17/2012US20120119022 Application of insulating coating
05/17/2012US20120118686 Wear resistant coating for brake disks with unique surface appearance and methods for coating
05/17/2012US20120118505 Plasma processing apparatus and cooling device for plasma processing apparatus
05/17/2012US20120118504 Processing apparatus and method for operating same
05/17/2012US20120118235 Film coating device