Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
05/2012
05/30/2012CN102482776A 用于气态气相沉积的薄膜暗盒 For gaseous vapor deposited film cartridge
05/30/2012CN102482775A Deposited film formation device and deposited film formation method
05/30/2012CN102482774A 用于沉积层的cvd反应器和方法 Cvd reactor and process for the deposition of layers
05/30/2012CN102482773A 层施用的工艺 Layer application process
05/30/2012CN102482772A 用于形成含钛薄膜的组合物和使用方法 Compositions and methods for forming a titanium-containing film
05/30/2012CN102482771A Titanium-containing precursors for vapor deposition
05/30/2012CN102482758A 基板处理方法 The substrate processing method
05/30/2012CN102482099A Co2 Recycling Method And Co2 Reduction Method And Device
05/30/2012CN102479879A 非晶硅热敏薄膜及非制冷非晶硅微测辐射热计的制备方法 Uncooled amorphous silicon and amorphous silicon thin film thermal preparation of micro-bolometer
05/30/2012CN102479678A 芯片薄膜的生成方法及生成芯片薄膜的载体 Vector generation method and generation chip film chip film
05/30/2012CN102479672A 形成氮氧化硅层的方法 The method of forming a silicon oxynitride layer,
05/30/2012CN102477548A 一种用mocvd技术制备功能梯度材料的方法 A mocvd functionally graded materials preparation methods and techniques used
05/30/2012CN102477547A Plasma processing apparatus
05/30/2012CN102477546A 具有冷却模块的薄膜沉积装置 The thin film deposition apparatus having a cooling module
05/30/2012CN102477545A 进气装置和具有它的等离子体化学气相沉积设备 Intake means and has its plasma chemical vapor deposition apparatus
05/30/2012CN102477544A 制备多孔材料内壁薄膜的原子层沉积方法及其设备 Preparation of the inner wall of the porous material film atomic layer deposition method and apparatus
05/30/2012CN102477543A 旋转式空间隔离化学气相淀积方法及其设备 Rotary spatial isolation chemical vapor deposition method and apparatus
05/30/2012CN102477542A 紧固件表面二氧化铪薄膜的制备方法及其产品 Fastener product surface preparation and hafnium dioxide film
05/30/2012CN102477541A 紧固件表面三氧化二铝薄膜的制备方法及其产品 Fastener product surface preparation method and a thin film of aluminum oxide
05/30/2012CN102061458B Gas distribution system and method for substrate coating device
05/30/2012CN101935837B Copper-based mosaic structure interface diamond coating and preparation method and application thereof
05/30/2012CN101783286B Method for manufacturing capacitor of metal-insulator-metal structure
05/30/2012CN101768732B Inline vacuum processing apparatus, method of controlling the same, and information recording medium manufacturing method
05/30/2012CN101675514B Tungsten digitlines and methods of forming and operating the same
05/30/2012CN101667527B Method for repairing display device and apparatus for same
05/30/2012CN101627148B Floating slit valve for transfer chamber interface
05/30/2012CN101426953B Apparatus and methods for chemical vapor deposition
05/30/2012CN101355022B Film formation method and apparatus for semiconductor process
05/30/2012CN101298666B Gas source supply method
05/30/2012CN101222021B Formulation and method for depositing a material on a substrate
05/30/2012CN101198719B Method and device for manufacturing photosensitive body
05/30/2012CN101039801B Gas barrier laminated film and manufacture method thereof
05/30/2012CN101037566B Wear resistant low friction coating composition, coated components, and method for coating thereof
05/29/2012US8188458 Non-polar (Al,B,In,Ga)N quantum well and heterostructure materials and devices
05/29/2012US8187731 Metal ferrite spinel energy storage devices and methods for making and using same
05/29/2012US8187722 Copper foil with carrier sheet, method for manufacturing copper foil with carrier sheet, and surface-treated copper foil with carrier sheet
05/29/2012US8187678 Ultra-thin microporous/hybrid materials
05/29/2012US8187663 Measurement, monitoring and control of directed product movements in a Wurster-arrangement and suitable systems
05/29/2012US8187430 Method of making a coated cemented carbide insert
05/29/2012US8187416 Interior antenna for substrate processing chamber
05/29/2012US8187414 Anchoring inserts, electrode assemblies, and plasma processing chambers
05/29/2012US8187413 Electrode assembly and plasma processing chamber utilizing thermally conductive gasket
05/29/2012US8187412 Apparatus for providing device with gaps for capacitance reduction
05/29/2012US8187386 Temporally variable deposition rate of CdTe in apparatus and process for continuous deposition
05/29/2012US8187385 Conveying unit and vacuum deposition device
05/29/2012US8187384 Vacuum processing apparatus
05/29/2012US8186301 Apparatus for manufacturing gas barrier plastic container, method for manufacturing the container, and the container
05/29/2012US8186300 Plasma processing apparatus
05/29/2012US8186299 Evaporation apparatus and thin film forming method using the same
05/24/2012WO2012067455A1 Thin film deposition method using silicon precursor compound
05/24/2012WO2012067439A2 Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same
05/24/2012WO2012067300A1 Film for cutting tool
05/24/2012WO2012067112A1 Method for producing epitaxial silicon carbide single crystal substrate
05/24/2012WO2012066977A1 Method for producing semiconductor device, method for substrate treatment, and device for substrate treatment
05/24/2012WO2012066941A1 Method for manufacturing semiconductor device
05/24/2012WO2012066752A1 Susceptor and method of manufacturing epitaxial wafer
05/24/2012WO2012066096A1 Method for connecting substrates, and composite structure obtainable thereby
05/24/2012WO2012065802A1 Method for coating micromechanical parts with dual diamond coating
05/24/2012WO2012065467A1 Process integration system for led chip and processing method thereof
05/24/2012WO2012065220A1 Surface treatment of metal objects
05/24/2012US20120129324 Semiconductor structure made using improved multiple ion implantation process
05/24/2012US20120129296 Method for forming an organic material layer on a substrate
05/24/2012US20120129208 Honeycomb shrink wells for stem cell culture
05/24/2012US20120128897 Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
05/24/2012US20120128896 Stain-resistant container and method
05/24/2012US20120128895 Carbon film forming method, magnetic-recording-medium manufacturing method, and carbon film forming apparatus
05/24/2012US20120128892 Surface processing method and surface processing apparatus
05/24/2012US20120128886 Nuclear power plant, method of forming corrosion-resistant coating therefor, and method of operating nuclear power plant
05/24/2012US20120128880 Carbon nanotube growth on metallic substrate using vapor phase catalyst delivery
05/24/2012US20120128878 Nano-Filler for Composites
05/24/2012US20120127578 Antireflective transparent emi shielding optical filter
05/24/2012US20120126488 Piston ring
05/24/2012US20120126379 Die bond film, dicing die bond film, method of manufacturing die bond film, and semiconductor device having die bond film
05/24/2012US20120126376 Silicon dioxide film and process for production thereof, computer-readable storage medium, and plasma cvd device
05/24/2012US20120126355 Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus
05/24/2012US20120126199 Preparing nanoparticles and carbon nanotubes
05/24/2012US20120125891 Plasma processing apparatus and plasma processing method
05/24/2012US20120125260 System for Abating the Simultaneous Flow of Silane and Arsine
05/24/2012US20120125258 Extended Reactor Assembly with Multiple Sections for Performing Atomic Layer Deposition on Large Substrate
05/24/2012DE102010060762A1 Plasmabearbeitungsvorrichtung The plasma processing apparatus
05/24/2012DE102010044114A1 Verfahren zum Verbinden von Substraten und damit erhältliche Verbundstruktur A method for bonding substrates, and thus available composite structure
05/23/2012EP2455945A1 Apparatus for manufacturing coated fuel particles for high-temperature gas-cooled reactor
05/23/2012EP2455944A1 Apparatus for manufacturing coated fuel particles for high-temperature gas-cooled reactor
05/23/2012EP2455511A1 Method for producing diamond-like carbon film body.
05/23/2012EP2454395A1 Method for texturing dlc coatings, and thus-textured dlc coatings
05/23/2012EP2454394A1 A method of inhibiting formation of deposits in a manufacturing system
05/23/2012EP2454057A1 Atomic layer deposition coatings on razor
05/23/2012EP2079783B1 Picvd coating for plastic containers
05/23/2012EP1940576B1 Production of nano-scale metal particles
05/23/2012EP1081749B1 Protective member for inner surface of chamber and plasma processing apparatus
05/23/2012EP1039990B1 Fluorine-doped diamond-like coatings
05/23/2012CN202226918U Tubular plasma enhanced chemical vapor deposition (PECVD) anticollision device
05/23/2012CN202226917U Electrode lead-in device
05/23/2012CN202226916U Special gas pipeline for plate type PECVD (plasma-enhanced chemical vapor deposition) device
05/23/2012CN202226915U Tubular plasma enhanced chemical vapor deposition (PECVD) device preventing furnace door from hitting graphite boat
05/23/2012CN202224377U Spray header cleaning device
05/23/2012CN1798876B Titanium article having improved corrosion resistance
05/23/2012CN1669796B Device for manufacturing display basic board and blow head combination assemblaging therein
05/23/2012CN102474974A Electromagnetic-radiation power-supply mechanism and microwave introduction mechanism
05/23/2012CN102473759A Photoelectric converter and method for producing same