| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/21/2012 | US20120153265 Solid solution inducing layer for weak epitaxy growth of non-planar phthalocyanine |
| 06/21/2012 | US20120153048 Method and apparatus to help promote contact of gas with vaporized material |
| 06/21/2012 | US20120152294 Thermoelectric material including coating layers, method of preparing the thermoelectric material, and thermoelectric device including the thermoelectric material |
| 06/21/2012 | US20120152172 Gas-discharging device and substrate-processing apparatus using same |
| 06/21/2012 | US20120152171 Gas injection apparatus and substrate processing apparatus using same |
| 06/21/2012 | US20120152170 Method of manufacturing semiconductor device and substrate processing apparatus |
| 06/21/2012 | US20120152169 Plasma deposition device |
| 06/21/2012 | US20120152168 Semiconductor device having oxidized metal film and manufacture method of the same |
| 06/21/2012 | DE112010003311T5 Verfahren zur Herstellung von Silizium-Epitaxiewafern Process for the preparation of silicon epitaxial wafers |
| 06/21/2012 | DE112010003306T5 Verfahren zur Herstellung eines epitaktischen Siliziumwafers A method for producing an epitaxial silicon wafer |
| 06/21/2012 | DE102010055155A1 Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht Method for plasma treatment of workpieces and workpiece having a gas barrier layer |
| 06/21/2012 | DE102010054854A1 Strukturiertes Colorshift-Sicherheitselement Structured color shift security element |
| 06/20/2012 | EP2466665A1 Hybrid layers for use in coatings on electronic devices or other articles |
| 06/20/2012 | EP2466633A1 High efficiency electrostatic chuck assembly for semiconductor wafer processing |
| 06/20/2012 | EP2465972A2 Method and system for thin film deposition |
| 06/20/2012 | EP2465971A2 Apparatus for forming layer |
| 06/20/2012 | EP2465970A1 Diamond-coated tool |
| 06/20/2012 | EP2465861A1 Amino vinylsilane precursors for compressively stressed SiN films |
| 06/20/2012 | EP2465832A2 Method and device for manufacturing an anti-reflective coating |
| 06/20/2012 | EP2464761A1 Sliding element, in particular a piston ring, having a coating |
| 06/20/2012 | EP2464760A1 High pressure chemical vapor deposition apparatuses, methods, and compositions produced therewith |
| 06/20/2012 | EP2464652A2 Hafnium- and zirconium-containing precursors and methods of using the same |
| 06/20/2012 | EP2242870B1 Method using new metal precursors containing beta-diketiminato ligands |
| 06/20/2012 | EP1807371B1 Method for producing a glass-ceramic article with barrier layer |
| 06/20/2012 | EP1269528B1 Method of forming a dielectric film |
| 06/20/2012 | CN202279857U 等离子辅助化学气相沉积设备 Plasma assisted chemical vapor deposition apparatus |
| 06/20/2012 | CN202279856U 双波纹管结构的化学气相沉积设备 Chemical vapor deposition apparatus dual bellows configuration |
| 06/20/2012 | CN1936073B Method of coating a substrate for adhesive bonding |
| 06/20/2012 | CN1934287B Apparatuses and methods for atomic layer deposition of hafnium-containing high-k dielectric materials |
| 06/20/2012 | CN102511075A Epitaxial substrate and method for producing same |
| 06/20/2012 | CN102505115A Vacuum coating apparatus |
| 06/20/2012 | CN102505114A Preparation method of graphene on SiC substrate based on Ni film-aided annealing |
| 06/20/2012 | CN102505113A Preparation method of large-area graphene based on Cl2 reaction |
| 06/20/2012 | CN102505112A Device and method for sticking graphene film |
| 06/20/2012 | CN102505111A Method for preparing carbon nano-fiber thin film in one step by using copper substrate |
| 06/20/2012 | CN102505107A Process method for plating film on surface of wooden pencil |
| 06/20/2012 | CN101958284B Method for improving current carrier migration rate of MOS transistor |
| 06/20/2012 | CN101919028B Polysilicon deposition apparatus |
| 06/20/2012 | CN101910459B Film forming method and film forming apparatus |
| 06/20/2012 | CN101796618B Method and apparatus for diagnosing status of parts in real time in plasma processing equipment |
| 06/20/2012 | CN101770971B Wafer bearing device |
| 06/20/2012 | CN101720363B Showerhead electrode assemblies for plasma processing apparatuses |
| 06/20/2012 | CN101715602B Film forming method and film forming apparatus |
| 06/20/2012 | CN101688303B Vacuum processing system |
| 06/20/2012 | CN101608533B Drill bit impregnated with diamond film and manufacturing method thereof |
| 06/20/2012 | CN101567230B Preparation method of transparent conductive thin film |
| 06/20/2012 | CN101328578B Plasma reinforcement cyclic deposition method for depositing a metal silicon nitride film |
| 06/19/2012 | US8203103 Plasma arc coating system and method |
| 06/19/2012 | US8202809 Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus |
| 06/19/2012 | US8202621 Opaque low resistivity silicon carbide |
| 06/19/2012 | US8202575 Vapor deposition systems and methods |
| 06/19/2012 | US8202574 Process for the vapor phase aluminization of a turbomachine metal part and donor liner and turbomachine vane comprising such a liner |
| 06/19/2012 | US8202565 Flux spraying system and method |
| 06/19/2012 | US8202393 Alternate gas delivery and evacuation system for plasma processing apparatuses |
| 06/19/2012 | US8202368 Apparatus and methods for manufacturing thin-film solar cells |
| 06/19/2012 | US8202367 Atomic layer growing apparatus |
| 06/19/2012 | US8202366 Atomic layer deposition system utilizing multiple precursor zones for coating flexible substrates |
| 06/14/2012 | WO2012079066A2 Method for producing graphene oxide with tunable gap |
| 06/14/2012 | WO2012078464A2 Article and method of making and using the same |
| 06/14/2012 | WO2012078139A1 Process for manufacturing electro-mechanical systems |
| 06/14/2012 | WO2012077680A1 Method for producing substrate, method for producing semiconductor device, and substrate treatment device |
| 06/14/2012 | WO2012077513A1 Group iii nitride semiconductor device and method for producing same |
| 06/14/2012 | WO2012077401A1 Method for manufacturing solar cell |
| 06/14/2012 | WO2012077071A1 Apparatus and method for depositing a layer onto a substrate |
| 06/14/2012 | WO2012076817A1 Method for producing lithium-based layers by cvd |
| 06/14/2012 | WO2012076146A1 Rear-side cover of a photovoltaic module |
| 06/14/2012 | WO2012075992A2 Process and apparatus for applying layers to a component |
| 06/14/2012 | WO2012053774A3 Method for performing an antistatic treatment on a surface of a work stage, and work stage to the surface of which an antistatic treatment is applied according to the method |
| 06/14/2012 | WO2012005983A3 Precise temperature control for teos application by heat transfer fluid |
| 06/14/2012 | US20120149213 Bottom up fill in high aspect ratio trenches |
| 06/14/2012 | US20120149212 Cvd method and cvd reactor |
| 06/14/2012 | US20120149210 Systems, apparatuses, and methods for chemically processing substrates using the coanda effect |
| 06/14/2012 | US20120149182 Dopant Applicator System and Method of Applying Vaporized Doping Compositions to PV Solar Wafers |
| 06/14/2012 | US20120149176 Method and apparatus for forming a iii-v family layer |
| 06/14/2012 | US20120148871 Magnesium Components with Improved Corrosion Protection |
| 06/14/2012 | US20120148769 Method of fabricating a component using a two-layer structural coating |
| 06/14/2012 | US20120148763 Surface wave plasma cvd apparatus and layer formation method |
| 06/14/2012 | US20120148762 Nanocomposites containing nanodiamond |
| 06/14/2012 | US20120148761 Integrated microwave wave guide with impedance transition |
| 06/14/2012 | US20120148756 Method of producing compound nanorods and thin films |
| 06/14/2012 | US20120148746 Method of manufacturing thin film |
| 06/14/2012 | US20120148745 Aminovinylsilane for CVD and ALD SiO2 Films |
| 06/14/2012 | US20120148744 Substrate processing apparatuses and systems |
| 06/14/2012 | US20120148743 Method and apparatus for depositing led organic film |
| 06/14/2012 | US20120148742 Combinatorial site-isolated deposition of thin films from a liquid source |
| 06/14/2012 | US20120148728 Methods and apparatus for the production of high purity silicon |
| 06/14/2012 | US20120148726 Alignment film printing method of lcd substrate and device thereof |
| 06/14/2012 | US20120148475 Augmented reactor for chemical vapor deposition of ultra-long carbon nanotubes |
| 06/14/2012 | US20120146500 Luminescent element, preparation method thereof and luminescence method |
| 06/14/2012 | US20120146191 Apparatus and method for manufacturing compound semiconductor, and compound semiconductor manufactured thereby |
| 06/14/2012 | US20120145215 Thermoelectric module and method of sealing the same |
| 06/14/2012 | US20120145184 Self-cleaning catalytic chemical vapor deposition apparatus and cleaning method thereof |
| 06/14/2012 | US20120145080 Substrate support unit, and apparatus and method for depositing thin layer using the same |
| 06/14/2012 | US20120145079 Loadlock batch ozone cure |
| 06/14/2012 | US20120145078 Showerhead integrating intake and exhaust |
| 06/14/2012 | US20120145041 Methods and apparatus for particle processing |
| 06/14/2012 | DE102011005834A1 Monitoring plasma or flame at atmospheric pressure, comprises measuring optical emission of plasma or flame by spectrometer and determining based on characteristics of plasma or flame, and using intensity-calibrated spectrometer |
| 06/14/2012 | CA2757187A1 Augmented reactor for chemical vapor deposition of ultra-long carbon nanotubes |
| 06/13/2012 | EP2463404A1 Aminovinylsilane for cvd and ald sio2 films |
| 06/13/2012 | EP2463403A1 Product having functional layer and method for fabricating the same |