| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 06/13/2012 | EP2463402A1 Apparatus for producing a thin-film lamination |
| 06/13/2012 | EP2462626A2 Barrier-coated thin-film photovoltaic cells |
| 06/13/2012 | EP2462612A2 Formation of silicon oxide using non-carbon flowable cvd processes |
| 06/13/2012 | EP2462256A1 Apparatus |
| 06/13/2012 | EP2462255A2 Connector for gas or liquid lines and use thereof |
| 06/13/2012 | EP2462148A1 High molecular weight alkyl-allyl cobalttricarbonyl complexes and use thereof for preparing dielectric thin films |
| 06/13/2012 | EP1516350B1 Plasma processor with electrode simultaneously responsive to plural frequencies |
| 06/13/2012 | EP1017266B1 System for delivering a substantially constant vapor flow to a chemical process reactor |
| 06/13/2012 | CN202272949U Control system for plasma chemical vapor deposition device |
| 06/13/2012 | CN202272948U 一种复合型布气板 A composite type gas distribution plate |
| 06/13/2012 | CN102498546A Film formation apparatus |
| 06/13/2012 | CN102498545A Method for manufacturing silicon epitaxial wafer |
| 06/13/2012 | CN102498237A Improved polyurethane foaming processes and foam properties using halogenated olefin blowing agent |
| 06/13/2012 | CN102498236A Apparatus and method for atomic layer deposition |
| 06/13/2012 | CN102498235A Protective film and method for producing same |
| 06/13/2012 | CN102496658A Preparation method for antireflective film of solar cell |
| 06/13/2012 | CN102492945A Ice coating prevention surface of bionic micro-nano composite structure and preparation method thereof |
| 06/13/2012 | CN102492939A Atomic layer deposition apparatus integrated with Fourier transform infrared in-situ monitoring system |
| 06/13/2012 | CN102492938A Single-contact rotation-revolution base boat |
| 06/13/2012 | CN102492937A Inlet spray head used for reaction chamber of metal chemical vapor deposition equipment |
| 06/13/2012 | CN102492936A Method for depositing antireflection film |
| 06/13/2012 | CN102492935A Treatment method of silicon substrate for preparing GaN epitaxy material with low dislocation density |
| 06/13/2012 | CN102492934A Apparatus and method used for preparing graphene, and obtained graphene |
| 06/13/2012 | CN102492933A Two-step growth method for preparing microcrystalline silicon thin film without hatching layer |
| 06/13/2012 | CN102492932A In-situ surface passivation method in ALD (atomic layer deposition) production of GaAs-based MOS (Metal Oxide Semiconductor) devices |
| 06/13/2012 | CN101888736B Gas distributor and apparatus using the same |
| 06/13/2012 | CN101836284B Plasma processing apparatus and gas exhaust method |
| 06/13/2012 | CN101815807B Methods of preparing thin films by atomic layer deposition using monocyclopentadienyl trialkoxy hafnium and zirconium precursors |
| 06/13/2012 | CN101785089B Vaporizer, material gas supply system including vaporizer and film forming apparatus using such system |
| 06/13/2012 | CN101499415B Method for producing group III nitride-based compound semiconductor, wafer, and group III nitride-based compound semiconductor device |
| 06/13/2012 | CN101448740B Amorphous carbon film, method for forming amorphous carbon film, electroconductive member comprising amorphous carbon film, and separator for fuel battery |
| 06/13/2012 | CN101429649B Producing method of semiconductor device and substrate processing apparatus |
| 06/13/2012 | CN101355018B Gas-tight module and exhaust method therefor |
| 06/13/2012 | CN101333666B Plasma generating method, cleaning method, substrate processing method |
| 06/12/2012 | US8197915 Method of depositing silicon oxide film by plasma enhanced atomic layer deposition at low temperature |
| 06/12/2012 | US8197912 Precision separation of PV thin film stacks |
| 06/12/2012 | US8197900 Coating method and coating apparatus |
| 06/12/2012 | US8197898 Method and system for depositing a layer from light-induced vaporization of a solid precursor |
| 06/12/2012 | US8197721 Thermochromic coatings II |
| 06/12/2012 | US8197638 Semiconductor manufacturing device and method for manufacturing semiconductor devices |
| 06/12/2012 | US8197636 Systems for plasma enhanced chemical vapor deposition and bevel edge etching |
| 06/12/2012 | US8197635 Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus |
| 06/12/2012 | US8197634 Plasma processing apparatus |
| 06/12/2012 | US8197603 Method and apparatus for treating a substrate with dense fluid and plasma |
| 06/12/2012 | US8197601 Vaporizer, vaporization module and film forming apparatus |
| 06/12/2012 | US8197600 Vaporizer and semiconductor processing system |
| 06/12/2012 | US8197599 Gas head and thin-film manufacturing apparatus |
| 06/12/2012 | US8197597 Gallium trichloride injection scheme |
| 06/12/2012 | US8197591 Pearlescent pigments having a secondary coating comprising α-silanes and method for the production thereof |
| 06/12/2012 | US8196600 High-temperature jointed assemblies and wear-resistant coating systems therefor |
| 06/12/2012 | CA2622895C High performance alloys with improved metal dusting corrosion resistance |
| 06/12/2012 | CA2512731C High-speed diamond growth using a microwave plasma in pulsed mode |
| 06/07/2012 | WO2012075017A2 Apparatus and process for atomic layer deposition |
| 06/07/2012 | WO2012073938A1 Method for manufacturing semiconductor device, method for processing substrate, and apparatus for processing substrate |
| 06/07/2012 | WO2012073384A1 Plasma cvd device, magnetic recording medium and method for manufacturing same |
| 06/07/2012 | WO2012072483A1 Sliding element, in particular a piston ring, having a coating |
| 06/07/2012 | WO2012072246A1 Apparatus for coating a substrate |
| 06/07/2012 | WO2012072215A1 Method for producing a carbon-containing layer system and apparatus for implementing the method |
| 06/07/2012 | WO2012071929A1 Tray device and crystal membrane growth apparatus |
| 06/07/2012 | WO2012071902A1 Preprocessing equipment and preprocessing method thereof |
| 06/07/2012 | WO2012054688A3 Methods for enhancing tantalum filament life in hot wire chemical vapor deposition processes |
| 06/07/2012 | WO2012033717A3 Embedded catalyst for atomic layer deposition of silicon oxide |
| 06/07/2012 | WO2012031238A3 Uniform multilayer graphene by chemical vapor deposition |
| 06/07/2012 | WO2011117234A3 Method for the supply of fluorine |
| 06/07/2012 | US20120142197 Combinatorial process system |
| 06/07/2012 | US20120142172 Pecvd deposition of smooth polysilicon films |
| 06/07/2012 | US20120142138 Deposition box for silicon-based thin film solar cell |
| 06/07/2012 | US20120142137 Movable jig for silicon-based thin film solar cell |
| 06/07/2012 | US20120141818 Metal-resin composite, method for producing the same, busbar, module case, and resinous connector part |
| 06/07/2012 | US20120141800 Method for coating micromechanical components of a micromechanical system, in particular a watch and related micromechanical coated component |
| 06/07/2012 | US20120141783 Aluminum oxide coated body and method for the production thereof |
| 06/07/2012 | US20120141766 Biaxially oriented cavitated polylactic acid film |
| 06/07/2012 | US20120141700 Graphene structure and method of fabricating the same |
| 06/07/2012 | US20120141693 Ion sources, systems and methods |
| 06/07/2012 | US20120141677 Method of manufacturing thin film |
| 06/07/2012 | US20120141676 Ald coating system |
| 06/07/2012 | US20120141675 Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric films |
| 06/07/2012 | US20120141674 Evaporator and method for depositing organic material |
| 06/07/2012 | US20120141667 Methods for forming barrier/seed layers for copper interconnect structures |
| 06/07/2012 | US20120141666 Transparent carbon nanotube electrode using conductive dispersant and production method thereof |
| 06/07/2012 | US20120141658 Coating method for spacers of liquid crystal substrate and manufacturing method for liquid crystal substrate |
| 06/07/2012 | US20120141657 Apparatus and method for adjusting the track of a granule-coated sheet |
| 06/07/2012 | US20120139416 Clamping unit for depositing thin film solar cell and signal feed-in method |
| 06/07/2012 | US20120138952 High pressure chemical vapor deposition apparatuses, methods, and compositions produced therewith |
| 06/07/2012 | US20120138849 Composite material for storing heat energy at high temperatures |
| 06/07/2012 | US20120138526 Product for removing pollutants from a fluid, and method for producing same |
| 06/07/2012 | US20120138472 Method of forming a process chamber component having electroplated yttrium containing coating |
| 06/07/2012 | US20120138230 Systems and methods for moving web etch, cvd, and ion implant |
| 06/07/2012 | US20120137976 Hot zone device |
| 06/07/2012 | US20120137975 Gas flow guiding device for use in crystal-growing furnace |
| 06/07/2012 | US20120137974 Method and Apparatus For Application of Metallic Alloy Coatings |
| 06/07/2012 | US20120137973 Substrate processing apparatus and film forming system |
| 06/06/2012 | EP2461373A1 Transparent conductive substrate for solar cells, and solar cell |
| 06/06/2012 | EP2461372A1 Transparent conductive substrate for solar cell, and solar cell |
| 06/06/2012 | EP2460914A1 Group iii nitride crystal and production method thereof |
| 06/06/2012 | EP2460807A1 Metal-enolate precursors for depositing metal-containing films |
| 06/06/2012 | EP2460179A2 Light-up prevention in electrostatic chucks |
| 06/06/2012 | EP2459771A1 Coated cutting tool insert for turning of steels |
| 06/06/2012 | EP2459768A1 Apparatus and method for atomic layer deposition |
| 06/06/2012 | EP2459767A1 Cleaning of a process chamber |