Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
06/2012
06/28/2012US20120164327 Film-forming method and film-forming apparatus for forming silicon oxide film on tungsten film or tungsten oxide film
06/28/2012US20120164326 Coating deposition apparatus and method therefor
06/28/2012US20120164313 Method of manufacturing optical waveguide
06/28/2012US20120161322 Electronic component manufacturing method including step of embedding metal film
06/28/2012US20120161192 Nitrogen-doped transparent graphene film and manufacturing method thereof
06/28/2012US20120160809 Plasma processing apparatus and substrate processing method
06/28/2012US20120160805 Substrate processing method and substrate processing apparatus
06/28/2012US20120160419 Substrate-supporting unit and substrate-processing apparatus comprising same
06/28/2012US20120160348 High-temperature jointed assemblies and wear-resistant coating systems therefor
06/28/2012US20120160173 Vapor Based Processing System with Purge Mode
06/28/2012US20120160172 Raw material supplying device and film forming apparatus
06/28/2012US20120160171 Injector for a vacuum evaporation source
06/28/2012US20120160170 Vapor phase growth apparatus
06/28/2012US20120160169 Film forming apparatus
06/28/2012US20120160168 Plasma generation device with electron cyclotron resonance
06/28/2012US20120160167 External Heating of Substrate Tubes in Plasma Chemical Vapor Deposition Processes
06/28/2012US20120160166 Reliant Thermal Barrier Coating System and Related Apparatus and Methods of Making the Same
06/28/2012US20120160165 Apparatus for manufacturing a thin film laminate
06/28/2012US20120160164 Vacuum processing apparatus and processing method using the same
06/28/2012US20120160095 Novel Nanoporous Supported Lyotropic Liquid Crystal Polymer Membranes and Methods of Preparing and Using Same
06/28/2012US20120160035 Corrosion-resistant coating for a vibratory flowmeter and method for forming the coating
06/28/2012DE102011056913A1 Dampfabscheidungsverfahren zur kontinuierlichen Abscheidung und Behandlung einer Dünnfilmschicht auf einem Substrat Vapor deposition method for continuous separation and treatment of a thin film layer on a substrate
06/28/2012DE102010063887A1 Verfahren zum Herstellen eines pyrolysetauglichen Bauteils eines Gargeräts sowie pyrolysetaugliches Bauteil für ein Gargerät A method of manufacturing a component of a cooking appliance and pyrolysetauglichen pyrolysetaugliches component for a cooking appliance
06/28/2012DE102010061487A1 Method for performing physical vapor deposition (PVD) and plasma-assisted chemical vapor deposition (PACVD) treatment on substrate in plasma chamber of sputtering apparatus, involves obtaining desired layer thickness on substrate
06/28/2012DE102010056157A1 Halterung für Bohrkopfbeschichtung Holder for boring head coating
06/28/2012DE102010055675A1 Haltevorrichtung für Substrate sowie Verfahren zur Beschichtung eines Substrates Holding device for substrates as well as methods for coating a substrate
06/28/2012DE102010055659A1 Verfahren zum Abscheiden dielektrischer Schichten im Vakuum sowie Verwendung des Verfahrens A method for depositing dielectric layers in vacuo and the use of the method
06/28/2012CA2821624A1 A microwave plasma reactor for manufacturing synthetic diamond material
06/28/2012CA2821617A1 Microwave plasma reactors and substrates for synthetic diamond manufacture
06/27/2012EP2469611A1 Movable jig for silicon-based thin film solar cell
06/27/2012EP2469610A1 Clamping unit for depositing thin film solar cell and signal feed-in method
06/27/2012EP2468922A1 Deposition box for silicon-based thin film solar cell
06/27/2012EP2468921A1 Protective coating of metal
06/27/2012EP2468313A1 Ceramic coated orthopaedic implants
06/27/2012EP2467662A1 Planar heating unit for a substrate treatment device and substrate treatment device
06/27/2012EP2467511A1 Aluminium oxide coated body and method for the production thereof
06/27/2012CN1965103B Ultra hydrophilic Ti-O-C based nano film and preparation method thereof
06/27/2012CN102522447A Microcrystalline silicon-germanium thin-film solar cell with absorption layer in band-gap gradient structure
06/27/2012CN102517633A Scaffold for graphene growing, and method thereof
06/27/2012CN102517632A Method for preparing epitaxial Gd2-xLaxO gate dielectric film by MOCVD (Metal Organic Chemical Vapor Deposition)
06/27/2012CN102517631A Method of manufacturing substrates having improved carrier lifetimes
06/27/2012CN102517566A Method for selectively depositing atom layer to film by spray head device
06/27/2012CN102517565A Vertical deposition furnace tube
06/27/2012CN102517564A Gas purging system and method in LPCVD technique cavity
06/27/2012CN102517563A Method for growing non-polar m-plane zinc oxide (ZnO) on silicon substrate
06/27/2012CN102517562A Device for manufacturing thin-film battery in way of vertical gradient condensation
06/27/2012CN102517561A Cyclic chemical vapor deposition of metal-silicon containing films
06/27/2012CN102517551A Preparation method for three-dimensional photonic crystal
06/27/2012CN102191487B Suede-structured ZnO film with flexible substrate by gradient temperature growth technology and its application
06/27/2012CN102181845B Chemical vapor deposition furnace
06/27/2012CN101901756B MOCVD growing method of polar c surface GaN film based on c surface Al2O3 substrate
06/27/2012CN101886255B Dielectric barrier deposition using nitrogen containing precursor
06/27/2012CN101669074B Method for manufacturing roller member for electrophotography
06/27/2012CN101562133B Film formation method and apparatus for forming silicon-containing insulating film doped with metal
06/27/2012CN101473062B Methods to improve the in-film defectivity of PECVD amorphous carbon films
06/27/2012CN101353813B Free-standing (Al, Ga, In)N and parting method for forming same
06/27/2012CN101243544B Semiconductor substrate process using a low temperature-deposited carbon-containing hard mask
06/26/2012US8206775 Method for repairing pattern defect on electronic circuit and apparatus therefor
06/26/2012US8206597 Protected alloy surfaces in microchannel apparatus and catalysts, alumina supported catalysts, catalyst intermediates, and methods of forming catalysts and microchannel apparatus
06/26/2012US8206552 RF power delivery system in a semiconductor apparatus
06/26/2012US8206551 Processing thin wafers
06/26/2012US8206507 Evaporation method, evaporation device and method of fabricating light emitting device
06/26/2012US8206506 Showerhead electrode
06/26/2012US8206075 Methods and apparatus for sealing a chamber
06/26/2012US8205572 Vacuum treatment installation for the production of a disk-shaped workpiece based on a dielectric substrate
06/26/2012CA2501070C High velocity method for deposing diamond films from a gaseous phase in shf discharge plasma and a plasma reactor for carrying out said method
06/21/2012WO2012082902A1 Pressure based liquid feed system for suspension plasma spray coatings
06/21/2012WO2012082323A1 Sectional wafer carrier
06/21/2012WO2012082225A1 Gas injection system for chemical vapor deposition using sequenced valves
06/21/2012WO2012081643A1 Carbon-containing silicon oxide film, sealing film and use of same
06/21/2012WO2012081555A1 Gas barrier laminate and method for producing gas barrier laminate
06/21/2012WO2012081171A1 Plasma cvd apparatus
06/21/2012WO2012079769A1 Coated cubic boron nitride tool for machining applications
06/21/2012WO2012079658A1 Low-friction sliding ring having an economical diamond coating
06/21/2012WO2012079485A1 Substrate bearing apparatus and substrate processing device using same
06/21/2012WO2012079472A1 Semiconductor device
06/21/2012WO2012079467A1 Cavity component and metal-organic chemical vapor deposition device with same
06/21/2012WO2012057770A3 Reactor clean
06/21/2012WO2012050442A9 Apparatus and method for atomic layer deposition on a surface
06/21/2012US20120156819 Gallium nitride-based led fabrication with pvd-formed aluminum nitride buffer layer
06/21/2012US20120156777 Cell carrier, associated methods for making cell carrier and culturing cells using the same
06/21/2012US20120156517 Biocidal compositino for wood, method for wood treatment, and wood produced thereby
06/21/2012US20120156498 High-Throughput Combinatorial Dip-Coating Apparatus and Methodologies
06/21/2012US20120156458 Diffusion barrier structure, transparent conductive structure and method for making the same
06/21/2012US20120156424 Graphene-silicon carbide-graphene nanosheets
06/21/2012US20120156407 Housing and method for manufacturing same
06/21/2012US20120156396 Cvd reactor
06/21/2012US20120156395 Process for applying amorphous metal
06/21/2012US20120156393 Deposition of Hydrogenated Thin Film
06/21/2012US20120156392 Oriented carbon nanotube manufacturing method
06/21/2012US20120156374 Sectional wafer carrier
06/21/2012US20120156373 Preparation of cerium-containing precursors and deposition of cerium-containing films
06/21/2012US20120156372 Nozzle-based, Vapor-phase, Plume Delivery Structure for Use in Production of Thin-film Deposition Layer
06/21/2012US20120156366 Strip Process for Superalloys
06/21/2012US20120156365 Deposition apparatus and manufacturing apparatus
06/21/2012US20120156363 Gas Injection System for Chemical Vapor Deposition Using Sequenced Valves
06/21/2012US20120154983 Method of Fabrication of Carbon Nanofibers on Nickel Foam
06/21/2012US20120153821 Luminescent element, preparation method thereof and luminescence method
06/21/2012US20120153527 Process for manufacturing a stand-alone thin film
06/21/2012US20120153442 Silicon nitride film and process for production thereof, computer-readable storage medium, and plasma cvd device