Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
---|
06/28/2012 | US20120164327 Film-forming method and film-forming apparatus for forming silicon oxide film on tungsten film or tungsten oxide film |
06/28/2012 | US20120164326 Coating deposition apparatus and method therefor |
06/28/2012 | US20120164313 Method of manufacturing optical waveguide |
06/28/2012 | US20120161322 Electronic component manufacturing method including step of embedding metal film |
06/28/2012 | US20120161192 Nitrogen-doped transparent graphene film and manufacturing method thereof |
06/28/2012 | US20120160809 Plasma processing apparatus and substrate processing method |
06/28/2012 | US20120160805 Substrate processing method and substrate processing apparatus |
06/28/2012 | US20120160419 Substrate-supporting unit and substrate-processing apparatus comprising same |
06/28/2012 | US20120160348 High-temperature jointed assemblies and wear-resistant coating systems therefor |
06/28/2012 | US20120160173 Vapor Based Processing System with Purge Mode |
06/28/2012 | US20120160172 Raw material supplying device and film forming apparatus |
06/28/2012 | US20120160171 Injector for a vacuum evaporation source |
06/28/2012 | US20120160170 Vapor phase growth apparatus |
06/28/2012 | US20120160169 Film forming apparatus |
06/28/2012 | US20120160168 Plasma generation device with electron cyclotron resonance |
06/28/2012 | US20120160167 External Heating of Substrate Tubes in Plasma Chemical Vapor Deposition Processes |
06/28/2012 | US20120160166 Reliant Thermal Barrier Coating System and Related Apparatus and Methods of Making the Same |
06/28/2012 | US20120160165 Apparatus for manufacturing a thin film laminate |
06/28/2012 | US20120160164 Vacuum processing apparatus and processing method using the same |
06/28/2012 | US20120160095 Novel Nanoporous Supported Lyotropic Liquid Crystal Polymer Membranes and Methods of Preparing and Using Same |
06/28/2012 | US20120160035 Corrosion-resistant coating for a vibratory flowmeter and method for forming the coating |
06/28/2012 | DE102011056913A1 Dampfabscheidungsverfahren zur kontinuierlichen Abscheidung und Behandlung einer Dünnfilmschicht auf einem Substrat Vapor deposition method for continuous separation and treatment of a thin film layer on a substrate |
06/28/2012 | DE102010063887A1 Verfahren zum Herstellen eines pyrolysetauglichen Bauteils eines Gargeräts sowie pyrolysetaugliches Bauteil für ein Gargerät A method of manufacturing a component of a cooking appliance and pyrolysetauglichen pyrolysetaugliches component for a cooking appliance |
06/28/2012 | DE102010061487A1 Method for performing physical vapor deposition (PVD) and plasma-assisted chemical vapor deposition (PACVD) treatment on substrate in plasma chamber of sputtering apparatus, involves obtaining desired layer thickness on substrate |
06/28/2012 | DE102010056157A1 Halterung für Bohrkopfbeschichtung Holder for boring head coating |
06/28/2012 | DE102010055675A1 Haltevorrichtung für Substrate sowie Verfahren zur Beschichtung eines Substrates Holding device for substrates as well as methods for coating a substrate |
06/28/2012 | DE102010055659A1 Verfahren zum Abscheiden dielektrischer Schichten im Vakuum sowie Verwendung des Verfahrens A method for depositing dielectric layers in vacuo and the use of the method |
06/28/2012 | CA2821624A1 A microwave plasma reactor for manufacturing synthetic diamond material |
06/28/2012 | CA2821617A1 Microwave plasma reactors and substrates for synthetic diamond manufacture |
06/27/2012 | EP2469611A1 Movable jig for silicon-based thin film solar cell |
06/27/2012 | EP2469610A1 Clamping unit for depositing thin film solar cell and signal feed-in method |
06/27/2012 | EP2468922A1 Deposition box for silicon-based thin film solar cell |
06/27/2012 | EP2468921A1 Protective coating of metal |
06/27/2012 | EP2468313A1 Ceramic coated orthopaedic implants |
06/27/2012 | EP2467662A1 Planar heating unit for a substrate treatment device and substrate treatment device |
06/27/2012 | EP2467511A1 Aluminium oxide coated body and method for the production thereof |
06/27/2012 | CN1965103B Ultra hydrophilic Ti-O-C based nano film and preparation method thereof |
06/27/2012 | CN102522447A Microcrystalline silicon-germanium thin-film solar cell with absorption layer in band-gap gradient structure |
06/27/2012 | CN102517633A Scaffold for graphene growing, and method thereof |
06/27/2012 | CN102517632A Method for preparing epitaxial Gd2-xLaxO gate dielectric film by MOCVD (Metal Organic Chemical Vapor Deposition) |
06/27/2012 | CN102517631A Method of manufacturing substrates having improved carrier lifetimes |
06/27/2012 | CN102517566A Method for selectively depositing atom layer to film by spray head device |
06/27/2012 | CN102517565A Vertical deposition furnace tube |
06/27/2012 | CN102517564A Gas purging system and method in LPCVD technique cavity |
06/27/2012 | CN102517563A Method for growing non-polar m-plane zinc oxide (ZnO) on silicon substrate |
06/27/2012 | CN102517562A Device for manufacturing thin-film battery in way of vertical gradient condensation |
06/27/2012 | CN102517561A Cyclic chemical vapor deposition of metal-silicon containing films |
06/27/2012 | CN102517551A Preparation method for three-dimensional photonic crystal |
06/27/2012 | CN102191487B Suede-structured ZnO film with flexible substrate by gradient temperature growth technology and its application |
06/27/2012 | CN102181845B Chemical vapor deposition furnace |
06/27/2012 | CN101901756B MOCVD growing method of polar c surface GaN film based on c surface Al2O3 substrate |
06/27/2012 | CN101886255B Dielectric barrier deposition using nitrogen containing precursor |
06/27/2012 | CN101669074B Method for manufacturing roller member for electrophotography |
06/27/2012 | CN101562133B Film formation method and apparatus for forming silicon-containing insulating film doped with metal |
06/27/2012 | CN101473062B Methods to improve the in-film defectivity of PECVD amorphous carbon films |
06/27/2012 | CN101353813B Free-standing (Al, Ga, In)N and parting method for forming same |
06/27/2012 | CN101243544B Semiconductor substrate process using a low temperature-deposited carbon-containing hard mask |
06/26/2012 | US8206775 Method for repairing pattern defect on electronic circuit and apparatus therefor |
06/26/2012 | US8206597 Protected alloy surfaces in microchannel apparatus and catalysts, alumina supported catalysts, catalyst intermediates, and methods of forming catalysts and microchannel apparatus |
06/26/2012 | US8206552 RF power delivery system in a semiconductor apparatus |
06/26/2012 | US8206551 Processing thin wafers |
06/26/2012 | US8206507 Evaporation method, evaporation device and method of fabricating light emitting device |
06/26/2012 | US8206506 Showerhead electrode |
06/26/2012 | US8206075 Methods and apparatus for sealing a chamber |
06/26/2012 | US8205572 Vacuum treatment installation for the production of a disk-shaped workpiece based on a dielectric substrate |
06/26/2012 | CA2501070C High velocity method for deposing diamond films from a gaseous phase in shf discharge plasma and a plasma reactor for carrying out said method |
06/21/2012 | WO2012082902A1 Pressure based liquid feed system for suspension plasma spray coatings |
06/21/2012 | WO2012082323A1 Sectional wafer carrier |
06/21/2012 | WO2012082225A1 Gas injection system for chemical vapor deposition using sequenced valves |
06/21/2012 | WO2012081643A1 Carbon-containing silicon oxide film, sealing film and use of same |
06/21/2012 | WO2012081555A1 Gas barrier laminate and method for producing gas barrier laminate |
06/21/2012 | WO2012081171A1 Plasma cvd apparatus |
06/21/2012 | WO2012079769A1 Coated cubic boron nitride tool for machining applications |
06/21/2012 | WO2012079658A1 Low-friction sliding ring having an economical diamond coating |
06/21/2012 | WO2012079485A1 Substrate bearing apparatus and substrate processing device using same |
06/21/2012 | WO2012079472A1 Semiconductor device |
06/21/2012 | WO2012079467A1 Cavity component and metal-organic chemical vapor deposition device with same |
06/21/2012 | WO2012057770A3 Reactor clean |
06/21/2012 | WO2012050442A9 Apparatus and method for atomic layer deposition on a surface |
06/21/2012 | US20120156819 Gallium nitride-based led fabrication with pvd-formed aluminum nitride buffer layer |
06/21/2012 | US20120156777 Cell carrier, associated methods for making cell carrier and culturing cells using the same |
06/21/2012 | US20120156517 Biocidal compositino for wood, method for wood treatment, and wood produced thereby |
06/21/2012 | US20120156498 High-Throughput Combinatorial Dip-Coating Apparatus and Methodologies |
06/21/2012 | US20120156458 Diffusion barrier structure, transparent conductive structure and method for making the same |
06/21/2012 | US20120156424 Graphene-silicon carbide-graphene nanosheets |
06/21/2012 | US20120156407 Housing and method for manufacturing same |
06/21/2012 | US20120156396 Cvd reactor |
06/21/2012 | US20120156395 Process for applying amorphous metal |
06/21/2012 | US20120156393 Deposition of Hydrogenated Thin Film |
06/21/2012 | US20120156392 Oriented carbon nanotube manufacturing method |
06/21/2012 | US20120156374 Sectional wafer carrier |
06/21/2012 | US20120156373 Preparation of cerium-containing precursors and deposition of cerium-containing films |
06/21/2012 | US20120156372 Nozzle-based, Vapor-phase, Plume Delivery Structure for Use in Production of Thin-film Deposition Layer |
06/21/2012 | US20120156366 Strip Process for Superalloys |
06/21/2012 | US20120156365 Deposition apparatus and manufacturing apparatus |
06/21/2012 | US20120156363 Gas Injection System for Chemical Vapor Deposition Using Sequenced Valves |
06/21/2012 | US20120154983 Method of Fabrication of Carbon Nanofibers on Nickel Foam |
06/21/2012 | US20120153821 Luminescent element, preparation method thereof and luminescence method |
06/21/2012 | US20120153527 Process for manufacturing a stand-alone thin film |
06/21/2012 | US20120153442 Silicon nitride film and process for production thereof, computer-readable storage medium, and plasma cvd device |