Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/2000
12/12/2000US6160262 Method and apparatus for deflecting charged particles
12/12/2000US6160244 Susceptors
12/12/2000US6159872 F ion implantation into oxide films to form low-K intermetal dielectric
12/12/2000US6159853 Method for using ultrasound for assisting forming conductive layers on semiconductor devices
12/12/2000US6159832 Precision laser metallization
12/12/2000US6159625 Target of intermetallic compound with B2-ordered lattice structure, production method thereof and magnetic recording medium having B2-structured underlayer
12/12/2000US6159610 Buffer layers on metal surfaces having biaxial texture as superconductor substrates
12/12/2000US6159607 Heat treatable, durable, ir-reflecting sputter-coated glasses and method of making same
12/12/2000US6159560 Placing electrical structure component in inert gas; connecting ground electrode of electric circuit to telectrical structure; attaching active electrode of electric circuit to metal anode; causing portion of anode to be deposited
12/12/2000US6159558 Depositing carbon layer having graphitic or amorphous strucutre of predetermined thickness onto substrate; treating carbon layer by means of an radio-frequency discharge in helium atmosphere
12/12/2000US6159533 Vapor deposition of thermally vaporized noble metal catalyst material onto gas permeable electrode
12/12/2000US6159350 Magnetron sputtering apparatus and mask
12/12/2000US6159300 Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
12/12/2000US6159290 Apparatus for, and method of, providing controlled depositions on substrates
12/12/2000US6159011 Process for producing a titanium-ceramic adhesive composite system
12/12/2000CA2164067C Article having a protective coating simulating brass
12/07/2000WO2000074123A1 Transparent window of process chamber of process apparatus, and method of manufacture thereof
12/07/2000WO2000073532A1 Process for producing a hard-material-coated component
12/07/2000WO2000073531A2 Copper sputtering target assembly and method of making same
12/07/2000WO2000031315A9 Apparatus and method for pulsed laser deposition of materials on wires and pipes
12/07/2000WO2000008226A3 Vapor deposition system
12/07/2000DE19925330A1 Sputter target, used for thin film cathodic sputter deposition, is produced or regenerated by passing an IR source over target material to effect melting on a cast plate or worn target region
12/07/2000DE19922557A1 Verfahren zum Abscheiden einer Zweischicht-Diffusionsbarriere A method for depositing a two-layer diffusion barrier
12/06/2000EP1058489A2 Method and apparatus for generating a plasma
12/06/2000EP1058292A2 Tapered shadow clamp ring and method to provide improved edge exclusion
12/06/2000EP1058174A2 Semiconductor processing techniques
12/06/2000CN1276025A Tool having protective layer system
12/06/2000CN1276024A Tool with protective layer system
12/06/2000CN1275880A Copper foil for printed-circuit board
12/06/2000CN1275790A Surface treatment method and equipment
12/06/2000CN1275777A Method for preparing oriented high-temp. superconducting film layer on non-texture basis
12/06/2000CN1275776A Method for raising critical current density of laser method prepared high-temp. superconducting strip material
12/06/2000CN1275638A Application of electrolytic cell in preparation of oxygen
12/06/2000CN1275634A Vacuum chamber for plain substrate
12/05/2000USH1924 A magnetron assisted laser vapor deposition system for producing metal carbide and diamond-like carbon composite films
12/05/2000US6157867 Method and system for on-line monitoring plasma chamber condition by comparing intensity of certain wavelength
12/05/2000US6157778 Multi-temperature control system and fluid temperature control device applicable to the same system
12/05/2000US6156740 Synergistic fungicidal composition comprising a compound analogous to strobilurin
12/05/2000US6156707 Method of manufacturing superconducting microwave component substrate
12/05/2000US6156651 Metallization method for porous dielectrics
12/05/2000US6156623 Stress control of thin films by mechanical deformation of wafer substrate
12/05/2000US6156405 Magnetic recording medium and method of fabricating the same
12/05/2000US6156376 Epitaxially depositing a buffer layer consisting of y2o3 and/or re2o3
12/05/2000US6156172 Facing target type sputtering apparatus
12/05/2000US6156171 Sputtering magnetron
12/05/2000US6156164 Virtual shutter method and apparatus for preventing damage to gallium arsenide substrates during processing
12/05/2000US6156154 Apparatus for etching discs and pallets prior to sputter deposition
12/05/2000US6156115 Multilayer interference pigment with transparent central layer
12/05/2000US6155436 Arc inhibiting wafer holder assembly
12/05/2000US6155200 ECR plasma generator and an ECR system using the generator
11/2000
11/30/2000WO2000072224A1 Material delivery system for miniature structure fabrication
11/30/2000WO2000072222A1 Apparatus for fabrication of miniature structures
11/30/2000WO2000071777A1 Electrochemical device
11/30/2000WO2000071776A1 Preparation of laser deposited oriented films and membranes
11/30/2000WO2000071775A1 Method of coating three dimensional objects with molecular sieves
11/30/2000WO2000071774A1 Vacuum treatment installation and method for producing workpieces
11/30/2000WO2000071447A1 Device for introducing and/or eliminating containers
11/30/2000WO2000071298A1 Superhard material article of manufacture
11/30/2000DE19924422A1 Verfahren zur Herstellung eines hartstoffbeschichteten Bauteils und beschichtetes, nachbehandeltes Bauteil Process for the preparation of a hard material coated component and coated, after-treated component
11/30/2000DE19924266A1 Target transport system, for replacing used cathodic sputtering targets, comprises an angle-piece which can pivot about a vertical axis for target transfer to outside a vessel
11/30/2000DE19924094A1 Vacuum arc evaporator, for coating substrates with electrical, electronic or optical metal or metal compound layers, has an insulated anode surrounded on all sides by evaporated cathode material
11/30/2000DE19921942A1 Powder coating process, especially magnetron sputter or cathodic arc deposition of a metallic, ceramic, vitreous or organic coating, comprises vibrating the powder in a dish-like receptacle before or during coating
11/30/2000DE10012506A1 Beschichtungsgerät für Linsen Coating machine for lenses
11/29/2000EP1056320A2 Copper foil for printed wiring board
11/29/2000EP1056125A2 Lead germanate ferroelectric structure with multi-layered electrode
11/29/2000EP1056114A2 Ion implantation apparatus
11/29/2000EP1056113A2 Ion implanter and a method of implanting ions
11/29/2000EP1056107A2 Key sheet and method for manufacturing the same
11/29/2000EP1055745A1 Method and apparatus for surface modification
11/29/2000EP1055744A2 Surface treating process, surface treating apparatus, vapor-depositing material, and rare earth metal-based permanent magnet with surface treated
11/29/2000EP1055743A1 Vapor deposition material
11/29/2000EP1055013A1 Cathode arc vapor deposition
11/29/2000CN2408126Y Film coating machine for precipitate diamond film
11/29/2000CN1275174A Drive mechanism for vacuum device and vacuum device
11/29/2000CN1058998C Integrated sputter target assembly and manufacture thereof
11/28/2000US6154437 Phase-change optical recording medium and its writing with high reliability after long period use and/or high environmental temperature storage
11/28/2000US6153901 Integrated circuit capacitor including anchored plug
11/28/2000US6153524 Cluster tool method using plasma immersion ion implantation
11/28/2000US6153327 Amorphous carbon comprising a dispersion containing a load of nobel metal electrocatalyst
11/28/2000US6153315 Sputtering target and method for manufacturing thereof
11/28/2000US6153313 Nickel aluminide coating and coating systems formed therewith
11/28/2000US6153271 Conducting electron beam evaporation of tin oxide doped indium oxide granules in vacuum while operating ion source providing oxygen adjacent substrate until coating of indium tin oxide is deposited on at least a portion of said substrate.
11/28/2000US6153268 Bombarding a target comprising a piezoelectric material; dislodged particles from the target are ionized and then electrostatically attracted to the surface of a substrate where they are neutralized and deposited in an ordered way
11/28/2000US6153262 Method for forming SbSI thin films
11/28/2000US6153259 Thin film, method and apparatus for forming the same, and electronic component incorporating the same
11/28/2000US6153068 Parallel plate sputtering device with RF powered auxiliary electrodes and applied external magnetic field
11/28/2000US6153067 Method for combined treatment of an object with an ion beam and a magnetron plasma with a combined magnetron-plasma and ion-beam source
11/28/2000US6153061 Sputtering boron and nitrogen
11/28/2000US6153060 Sputtering process
11/28/2000US6152977 Surface functionalized diamond crystals and methods for producing same
11/28/2000US6152074 Deposition of a thin film on a substrate using a multi-beam source
11/28/2000US6152070 Tandem process chamber
11/23/2000WO2000070664A1 Method for depositing a two-layer diffusion barrier
11/23/2000WO2000070606A1 Method for producing a hybrid disk, and hybrid disk
11/23/2000WO2000070122A1 Device for applying coatings of powdered materials
11/23/2000WO2000070106A1 Magnetic alloy and magnetic recording medium and method for preparation thereof, and target for forming magnetic film and magnetic recording device
11/23/2000WO2000069785A1 Method and agent for producing hydrophobic layers on fluoride layers
11/23/2000WO2000069784A1 Hard, scratch-resistant coatings for substrates
11/23/2000DE19923654A1 Vaporizer arranged in a glass bulb of a vacuum deposition device has an inlet for wire material to be vaporized, a central heating region, and an inlet for the wire material
11/23/2000DE19923077A1 Device for coating spectacles has a vacuum vessel containing a vaporizer connected to a high vacuum pump via an outlet, and a blind-like screen
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