| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 06/13/2001 | EP1106709A2 Pulsed-mode RF bias for side-wall coverage improvement |
| 06/13/2001 | EP1106708A2 Two step AIN-PVD for improved film properties |
| 06/13/2001 | EP1105908A1 Ion beam generation apparatus |
| 06/13/2001 | EP1105547A1 Dual collimator physical-vapor deposition apparatus |
| 06/13/2001 | EP1105328A1 Device for introducing and/or eliminating containers |
| 06/13/2001 | EP1105245A1 Bonding of dissimilar metals |
| 06/13/2001 | EP1036212B1 Device for vacuum coating slide bearings |
| 06/13/2001 | EP0880607B1 Oxidation protective coating for refractory metals |
| 06/13/2001 | EP0824604A4 Apparatus for reducing arcing during sputtering |
| 06/13/2001 | DE19956811A1 Keramischer Flash-TV-Verdampfer Ceramic flash TV evaporator |
| 06/13/2001 | CN2434311Y Magnetic controlled spurting foam nickel winding film coater |
| 06/13/2001 | CN2434310Y Probe support structure of crystal oscillator |
| 06/13/2001 | CN1298962A Process for preparing La-Ca-Mn-O film with sequencial surface structure |
| 06/13/2001 | CN1067118C Magnetic controlled tube sputtering apparatus |
| 06/13/2001 | CN1067117C Evaporator for substrate coating apparatus |
| 06/12/2001 | US6246586 Method and apparatus for manufacturing a thin film, thin-film laminate, and electronic parts |
| 06/12/2001 | US6245668 Sputtered tungsten diffusion barrier for improved interconnect robustness |
| 06/12/2001 | US6245451 Ferroelectric material, method of manufacturing the same, semiconductor memory, and method of manufacturing the same |
| 06/12/2001 | US6245446 Hard metallic material |
| 06/12/2001 | US6245435 Decorative corrosion and abrasion resistant coating |
| 06/12/2001 | US6245394 Film growth method and film growth apparatus capable of forming magnesium oxide film with increased film growth speed |
| 06/12/2001 | US6245280 Method and apparatus for forming polycrystalline particles |
| 06/12/2001 | US6245249 Micro-structure and manufacturing method and apparatus |
| 06/12/2001 | US6245203 BaxSr1-xTiO3-y target materials for sputtering |
| 06/12/2001 | US6244212 Electron beam evaporation assembly for high uniform thin film |
| 06/12/2001 | US6244210 Strength coil for ionized copper plasma deposition |
| 06/07/2001 | WO2001041183A1 Dose monitor for plasma doping system |
| 06/07/2001 | WO2001041177A2 Production of a microwave device by applying a coating of yttrium-iron-garnet to the surface of the device to suppress secondary electron emission |
| 06/07/2001 | WO2001040542A1 Method for producing composite layers using a plasma jet source |
| 06/07/2001 | WO2001040539A2 Method and system relating to flux distribution and film deposition |
| 06/07/2001 | WO2001040538A1 Method and system relating to thickness control of film vapor deposition |
| 06/07/2001 | WO2001040536A1 Polycrystalline thin film and method for preparation thereof, and superconducting oxide and method for preparation thereof |
| 06/07/2001 | WO2001040535A2 System and method relating to vapor deposition |
| 06/07/2001 | WO2001040534A2 Device and method for coating objects at a high temperature |
| 06/07/2001 | WO2001002620A8 Loading system for pvd coating of cutting inserts |
| 06/07/2001 | US20010003016 Placing the replica in a vacuum chamber, depressurizing, depositing overcoat of aluminum and an overcoat of a dielectric material; layers are deposited at thicknesses to increase normal reflectivity of reflective faces |
| 06/07/2001 | US20010002744 Combination of piston ring for use in internal combustion engine |
| 06/07/2001 | US20010002584 Susceptor adapted to secure work piece thereon, radio frequency source overlying susceptor provides inductive discharge to form plasma from gas within chamber, magnetic source provides focused magnetic field lines toward susceptor |
| 06/07/2001 | US20010002583 Useful for producing different patterns by shaping the pattern carrier in th form of endless pattern band and guiding the pattern carrier in revolving fashion by means of several deflection rollers |
| 06/07/2001 | US20010002517 Vacuum processing apparatus and operating method therefor |
| 06/07/2001 | US20010002510 Cavity-filling method for reducing surface topography and roughness |
| 06/07/2001 | DE19958473A1 Verfahren zur Herstellung von Kompositschichten mit einer Plasmastrahlquelle A process for the production of composite layers with a plasma beam source |
| 06/07/2001 | DE19955428A1 Electron beam vaporizer, used for vaporizing aluminum, comprises high temperature container made of electrically-conducting ceramic for receiving vaporized material inserted into liquid-cooled crucible |
| 06/07/2001 | DE10056541A1 Verfahren zum Reinigen von Quarzsubstraten unter Verwendung von leitenden Lösungen A method for purifying quartz substrates using conductive solutions |
| 06/06/2001 | EP0863889B1 Process for hydrogenating dihydrofuranes to tetrahydrofuranes |
| 06/06/2001 | EP0814853B1 Novel biocompatible prosthetic material, prostheses or prosthetic systems consisting of said material, and method for preparing same by dual calcium and phosphorus ion implantation |
| 06/06/2001 | CN2433262Y Multi-targat magnetic-control sputtering coiling film coating machine |
| 06/06/2001 | CN1298368A Process for producing metal oxide, target comprising the metal oxide for forming thin metal oxide film, process for producing the same, and process for producing thin metal oxide film |
| 06/06/2001 | CN1298207A Semiconductor device and its producing method |
| 06/06/2001 | CN1298036A Ceramic flash evaporimeter for television |
| 06/06/2001 | CN1066783C Process for producing antibiotic material containing antibiotic metal |
| 06/06/2001 | CN1066782C Process for producing cathode sputtering target and the similar targets |
| 06/06/2001 | CN1066781C Sliding member and its producing method |
| 06/06/2001 | CN1066780C Method & apparatus for melt evaporation plating film without metal belt |
| 06/06/2001 | CN1066778C Process for improving corrosion resistance of aluminium plated surface |
| 06/05/2001 | US6242804 Fabrication process of a semiconductor device having a nitride film |
| 06/05/2001 | US6242325 Method for optimising the etch rate of polycrystalline layer |
| 06/05/2001 | US6242100 Chrome coating having a top layer thereon |
| 06/05/2001 | US6242068 Recordable optical media with a silver-palladium reflective layer |
| 06/05/2001 | US6241858 Methods and apparatus for producing enhanced interference pigments |
| 06/05/2001 | US6241857 Placing target and substrate in chamber spaced fixed distance from and inclined relative to one another with planar surface of substrate oriented substantially perpendicularly to direction along which most particles are released from target |
| 06/05/2001 | US6241824 Apparatus for the coating of substrates in a vacuum chamber |
| 06/05/2001 | US6241477 In-situ getter in process cavity of processing chamber |
| 06/05/2001 | US6241431 Process for the protective coating of machining tools and tool sets |
| 05/31/2001 | WO2001039250A2 Conductive interconnection |
| 05/31/2001 | WO2001038599A1 Sputtering target, transparent conductive oxide, and method for preparing sputtering target |
| 05/31/2001 | WO2001038598A1 Titanium target for sputtering |
| 05/31/2001 | WO2001038597A2 Method for regulating sputtering processes |
| 05/31/2001 | WO2000068461A3 Thermal barrier coating |
| 05/31/2001 | US20010002278 Heating the substrate to a deposition temperature by a cureent flow through heater filaments, discontinuing current flow to the heater filament, initiating deopositon of material layer subsequent to discontinuing current flow |
| 05/31/2001 | US20010002002 Deposition apparatus |
| 05/31/2001 | US20010002000 Appylying at room temperature a wear resistance ceramic coating of transition metal nitrides to a substrate without deforming the substrate; implantable medical devices, kitchen utensils, gears, diffusion barriers for medical devices |
| 05/31/2001 | US20010001951 Particulary of all types of storage disks for reactive and nonreactive processes; a carrousel-type conveyor for rotating about an axis and a transport element to be moved out and back radially and controlled at given positions; apertures |
| 05/31/2001 | US20010001948 High-speed, continuous coating of an electronic conductor alternatively deposting an element of a determined thickness in a zone, and in a reaction zone implanting an ionized plasma into the deposit over the entire thickness |
| 05/31/2001 | US20010001945 Producing composite films at low temperature and great efficiency by spraying a solution of each material from each of the spray nozzles into a high-vacuum vessel to deposit followed by heating |
| 05/31/2001 | US20010001902 Vacuum processing apparatus and operating method therefor |
| 05/31/2001 | US20010001901 Vacuum processing apparatus and operating method therefor |
| 05/31/2001 | US20010001897 Method of forming hollow channels within a component |
| 05/31/2001 | DE10055636A1 Transparent conducting film having a specified thickness used in production of electrodes for controlling liquid crystals in display elements for computers comprises indium-tin oxide containing nitrogen and formed on substrate |
| 05/31/2001 | DE10051687A1 Slide mechanism for sewing machine, has coating layer composed of carbide and carbon, formed between slide face of needle bar and slide face of bushing |
| 05/30/2001 | EP1103631A2 Apparatus and method for depositing material on a substrate |
| 05/30/2001 | EP1103630A1 Electrode assembly |
| 05/30/2001 | EP1103629A1 Ceramic evaporator |
| 05/30/2001 | EP1103625A1 Magnetic alloy and magnetic recording medium and method for preparation thereof, and target for forming magnetic film and magnetic recording device |
| 05/30/2001 | EP1103076A1 Zinc oxide films containing p-type dopant and process for preparing same |
| 05/30/2001 | EP1103063A2 Dose monitor for plasma-immersion ion implantation doping system |
| 05/30/2001 | CN1297575A Means for controlling target erosion and sputtering in magnetron |
| 05/30/2001 | CN1297474A Clear or translucent aqueous fabric softener compositions contg. high electrolyte content and optional phase stabilizer |
| 05/29/2001 | US6239541 RFQ accelerator and ion implanter to guide beam through electrode-defined passage using radio frequency electric fields |
| 05/29/2001 | US6238803 Titanium nitride barrier layers |
| 05/29/2001 | US6238786 Polished article surface coated with a magnetron atomized gloss coating of a metal, alloy, or metal compound on a corrosion inhibiting base coat and overcoated with a wear resistant protective clear coat; vehicle wheels |
| 05/29/2001 | US6238776 Radiation cured island coating system |
| 05/29/2001 | US6238730 Gas introduction pipe and magnetic recording medium production method using the pipe |
| 05/29/2001 | US6238686 Anti-microbial coating for medical devices |
| 05/29/2001 | US6238537 Ion assisted deposition source |
| 05/29/2001 | US6238533 Integrated PVD system for aluminum hole filling using ionized metal adhesion layer |
| 05/29/2001 | US6238532 Radio-frequency coil for use in an ionized physical vapor deposition apparatus |
| 05/29/2001 | US6238531 Method and apparatus to improve the properties of ion beam deposited films in an ion beam sputtering system |
| 05/29/2001 | US6238528 Sputtering; forming semiconductors |
| 05/29/2001 | US6238527 Thin film forming apparatus and method of forming thin film of compound by using the same |