| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 10/17/2001 | CN1317393A Pellet injectting appts. |
| 10/17/2001 | CN1073279C Method for fabricating semiconductor device |
| 10/16/2001 | US6303940 Charge injection transistor using high-k dielectric barrier layer |
| 10/16/2001 | US6303879 Laminated ceramic with multilayer electrodes and method of fabrication |
| 10/16/2001 | US6303483 Method of manufacturing semiconductor device |
| 10/16/2001 | US6303234 Process of using sodium silicate to create fire retardant products |
| 10/16/2001 | US6303008 Rotating film carrier and aperture for precision deposition of sputtered alloy films |
| 10/16/2001 | US6302977 Method of making a target |
| 10/16/2001 | US6302372 Gate valve |
| 10/16/2001 | US6302056 Device for coating substrates with a material vapor in negative pressure or vacuum |
| 10/16/2001 | US6301802 Vacuum processing apparatus and operating method therefor |
| 10/16/2001 | US6301801 Vacuum processing apparatus and operating method therefor |
| 10/11/2001 | WO2001076326A1 Optical monitoring and control system and method for plasma reactors |
| 10/11/2001 | WO2001075187A1 System for driving multiple magnetrons with multiple phase ac |
| 10/11/2001 | WO2001074585A1 Metallized polyimide film |
| 10/11/2001 | WO2001027349A3 Component covered with a layer and a method for producing a layer of this type |
| 10/11/2001 | US20010029096 Version with markings to show changes made |
| 10/11/2001 | US20010029053 Capacitor containing amorphous and polycrystalline ferroelectric films and fabrication method therefor, and method for forming amorphous ferroelectric film |
| 10/11/2001 | US20010029051 Carbonaceous protective layer, magnetic recording medium, production method thereof, and magnetic disk apparatus |
| 10/11/2001 | US20010028982 Fluorine doped molybdenum silicide film |
| 10/11/2001 | US20010028926 Method for the manufacture of coatings and an article |
| 10/11/2001 | US20010028034 Process for preparing a bolometer material and bolometer device |
| 10/11/2001 | US20010027750 Device for surface treatment and/or coating and/or producing construction elements, in particular, flat construction elements of glass, glass alloys or metal, by a continuous process |
| 10/11/2001 | DE10115287A1 Serielles Verfahren zur Herstellung von Schichten und damit hergestellter Reflektor Serial process for the production of layers produced therewith and reflector |
| 10/11/2001 | DE10112817A1 Ion extraction apparatus for ion implantation system has electrode manipulator with actuators for adjusting slit width and moving electrode |
| 10/11/2001 | DE10106447A1 Dünne ebene Palladium- und Palladium/Kupfermembranen Thin planar palladium and palladium / copper membranes |
| 10/11/2001 | DE10024899A1 Reibungsarme und verschleißmindernde Schutzschichten und Verfahren zu ihrer Abscheidung Low-friction and wear-reducing protective layers and methods for their deposition |
| 10/11/2001 | DE10017414A1 Sputtertarget auf der Basis eines Metalls oder einer Metalllegierung und Verfahren zu dessen Herstellung Sputtering target on the basis of a metal or a metal alloy and process for its preparation |
| 10/10/2001 | EP1143032A1 Apparatus and method for masking multiple turbine components |
| 10/10/2001 | EP1142844A2 Bendable mirrors and method of manufacture |
| 10/10/2001 | EP1142698A1 Laminated structure, and method of manufacture thereof |
| 10/10/2001 | EP1142027A1 Reduced diffusion of a mobile specie from a metal oxide ceramic |
| 10/10/2001 | EP1141997A2 Physical vapor deposition of semiconducting and insulating materials |
| 10/10/2001 | EP1141443A1 A method of metallizing the surface of a solid polymer substrate and the product obtained |
| 10/10/2001 | EP1140721A1 Methods and apparatus for producing silver based low emissivity coatings without the use of metal primer layers and articles produced thereby |
| 10/10/2001 | EP1140720A1 Protective layer for coated substrate |
| 10/10/2001 | CN2453017Y Equipment for quick prepn. of large area and even nanometer function film |
| 10/10/2001 | CN1317155A Zinc oxide films containing P-type dopant and process for preparing same |
| 10/10/2001 | CN1316544A Process for preparing gas-sensitive allochroic WO3 film by vacuum evaporation |
| 10/10/2001 | CN1316543A Linear film forming method and reflector formed by it |
| 10/10/2001 | CN1316542A Bicycle coated with TIN film |
| 10/10/2001 | CN1316309A Process for preparing nm material by dual-glow discharge of hollow cathodes |
| 10/10/2001 | CN1072734C Sputtering apparatus |
| 10/10/2001 | CN1072733C Magneto-optical alloy sputter targets |
| 10/09/2001 | US6301510 Method and apparatus to calibrate a semi-empirical process simulator |
| 10/09/2001 | US6300643 Dose monitor for plasma doping system |
| 10/09/2001 | US6300245 Inductively coupled plasma powder vaporization for fabricating integrated circuits |
| 10/09/2001 | US6300227 Enhanced plasma mode and system for plasma immersion ion implantation |
| 10/09/2001 | US6300212 Method of fabricating semiconductor device having memory capacitor including ferroelectric layer made of composite metal oxide |
| 10/09/2001 | US6300000 Fuel cell membrane electrode assemblies with improved power outputs and poison resistance |
| 10/09/2001 | US6299987 Golden decorative part |
| 10/09/2001 | US6299971 Ceramic coatings containing layered porosity |
| 10/09/2001 | US6299831 High performance Cu/Cr sputter targets for semiconductor application |
| 10/09/2001 | US6299746 Getter system for purifying the confinement volume in process chambers |
| 10/09/2001 | US6299740 Sputtering assembly and target therefor |
| 10/09/2001 | US6299739 Method of forming metal wiring film |
| 10/09/2001 | US6298685 Consecutive deposition system |
| 10/04/2001 | WO2001073957A2 Battery-operated wireless-communication apparatus and method |
| 10/04/2001 | WO2001073883A2 Low-temperature fabrication of thin-film energy-storage devices |
| 10/04/2001 | WO2001073870A2 Integrated capacitor-like battery and associated method |
| 10/04/2001 | WO2001073868A2 Device enclosures and devices with integrated battery |
| 10/04/2001 | WO2001073866A2 Method and apparatus for integrated-battery devices |
| 10/04/2001 | WO2001073865A2 Continuous processing of thin-film batteries and like devices |
| 10/04/2001 | WO2001073864A2 Thin-film battery having ultra-thin electrolyte and associated method |
| 10/04/2001 | WO2001073848A1 Production method for bonding wafer and bonding wafer produced by this method |
| 10/04/2001 | WO2001073822A2 Visibly marked parts and method for using same |
| 10/04/2001 | WO2001073161A1 Method for producing ceramic and apparatus for producing the same, semiconductor device, and piezoelectric device |
| 10/04/2001 | WO2001073157A2 Method and apparatus for reducing contamination in a loadlock |
| 10/04/2001 | WO2001073156A2 Method of forming aluminum targets |
| 10/04/2001 | WO2001073154A1 Ito sputtering target |
| 10/04/2001 | WO2001073153A1 Method of depositing metal films |
| 10/04/2001 | WO2001073152A1 Low friction coatings |
| 10/04/2001 | WO2001073151A1 Method for controlling reactive sputtering processes |
| 10/04/2001 | WO2001073146A2 Cemented carbide tool and method of making |
| 10/04/2001 | WO2001023642A3 Thermal barrier coatings for turbine components |
| 10/04/2001 | US20010027167 By applying RF power to a substrate holder and irradiating positive ions having a moderate energy while preventing damage to the strained lattice film to be stacked by oxygen negative ions; good crystalline property |
| 10/04/2001 | US20010027020 Semiconductor device, method of fabricating the same, and sputtering apparatus |
| 10/04/2001 | US20010027015 Ion-implanting method and ion-implanting apparatus |
| 10/04/2001 | US20010026840 Aluminum ion vapor deposition chamber in argon gas voltage |
| 10/04/2001 | US20010026836 Aluminium metallized films and protective films of plasma polymerized silicones; automobile lamp |
| 10/04/2001 | US20010026749 Multi-position load lock chamber |
| 10/04/2001 | US20010025783 Supplying heating or cooling backside inert gas to mounted biased support maintaining pressure thereby improving thickness uniformity and morphology of sputter depositing metal seed layer; semiconductors |
| 10/04/2001 | EP1139438A2 Method and apparatus for fabricating quantum dot structures |
| 10/04/2001 | EP1139386A2 Monitoring an effluent from a chamber |
| 10/04/2001 | EP1138653A1 Material for non-aging ceramic evaporators |
| 10/04/2001 | EP1138066A1 Plasma preclean with argon, helium, and hydrogen gases |
| 10/04/2001 | EP1137820A1 High purity tantalum and products containing the same like sputter targets |
| 10/04/2001 | EP1051768B1 Fuel cell with a proton conducting electrolyte |
| 10/04/2001 | DE10101541A1 Schnellverdampfergefäß Flash evaporator vessel |
| 10/04/2001 | CA2404294A1 Cemented carbide tool and method of making |
| 10/03/2001 | CN1316096A Feedthrough overlap coil |
| 10/03/2001 | CN1315591A Forming method of plating chrome on copper layer of printed circuit board |
| 10/03/2001 | CN1072334C Concave sliding element and production process therefor |
| 10/03/2001 | CN1072276C Process for producing wear-resisting layers of cubic boron nitride and its appication |
| 10/02/2001 | US6297595 Method and apparatus for generating a plasma |
| 10/02/2001 | US6297539 Zicronium or hafnium oxide doped with calcium, strontium, aluminum, lanthanum, yttrium, or scandium |
| 10/02/2001 | US6297147 Plasma treatment for ex-situ contact fill |
| 10/02/2001 | US6297138 Method of depositing a metal film onto MOS sensors |
| 10/02/2001 | US6297066 Coating process and apparatus |
| 10/02/2001 | US6296945 Turbines with metal alloy substrate and thermal barrier coating |