C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2001
11/13/2001	US6315873 Method of forming a fluoride film
11/13/2001	US6315872 Coil for sputter deposition
11/13/2001	US6315840 Sliding member
11/13/2001	US6315820 Method of manufacturing thin metal alloy foils
11/13/2001	US6314764 Method of manufacturing a 1-inch diameter glass substrate for a magnetic disk
11/13/2001	US6314763 Method of manufacturing a 2-5 inch diameter glass substrate for a magnetic disk
11/13/2001	US6314658 Vacuum processing apparatus and operating method therefor
11/11/2001	CA2308015A1 Method for manufacturing carbon nanotubes as functional elements of mems devices
11/08/2001	WO2001084612A1 Interface control for film deposition by gas-cluster ion-beam processing
11/08/2001	WO2001083847A2 Method of making dielectric films
11/08/2001	WO2001083845A2 Magnetic sensor having diamond-like carbon thin film
11/08/2001	WO2001083843A1 Substrate processing system
11/08/2001	WO2001083623A2 Method of making reactive multilayer foil and resulting product
11/08/2001	WO2001083392A1 Glass coated with heat reflecting colored film and method for manufacturing the same
11/08/2001	WO2001083333A1 Throughput enhancement for single wafer reactor
11/08/2001	WO2001083238A1 System and method for adjusting the properties of a device by gcib processing
11/08/2001	WO2001083205A2 Reactive multilayer structures for ease of processing and enhanced ductility
11/08/2001	WO2001083182A1 Freestanding reactive multilayer foils
11/08/2001	WO2001048261A9 Hydrogenating a layer of an antireflection coating
11/08/2001	WO2000063458A8 Method and simulator for simulating the development of residual stress in iapvd films
11/08/2001	US20010039449 Thin-film shape memory alloy device and method
11/08/2001	US20010038953 Multilayer
11/08/2001	US20010038894 Gas barrier film
11/08/2001	US20010038456 Method for the production of multi-layer systems
11/08/2001	US20010038029 Method of making reactive multilayer foil and resulting product
11/08/2001	US20010037994 Method of etching an object, method of repairing pattern, nitride pattern and semiconductor device
11/08/2001	US20010037939 Impurity introducing apparatus and method
11/08/2001	US20010037938 High density, pure, uniform mixture with silicon grains
11/08/2001	US20010037771 Apparatus And Method For Aligning A Wafer
11/08/2001	US20010037585 Vacuum processing apparatus and operating method therefor
11/08/2001	EP1144709A3 Method and simulator for simulating the development of residual stress in iapvd films
11/08/2001	DE10112524A1 Zweistufiges Grobverfahren und gesteuerte Aufdampfraten zum Herstellen von Laserablationsmasken Two-stage coarse method and controlled deposition rates for the manufacture of Laserablationsmasken
11/08/2001	CA2407358A1 Throughput enhancement for single wafer reactor
11/08/2001	CA2407190A1 Freestanding reactive multilayer foils
11/07/2001	EP1152291A2 Photomask blank and photomask
11/07/2001	EP1152264A2 Method for applying abrasion-resistant coating to ophthalmic lenses and lens blanks
11/07/2001	EP1151803A2 Apparatus and method for vapor depositing lubricant coating on a web
11/07/2001	EP1151465A1 High-density plasma source for ionized metal deposition
11/07/2001	EP1151147A1 Plasma deposition method and apparatus with magnetic bucket and concentric plasma and material source
11/07/2001	EP1150928A1 Glazing panel
11/07/2001	EP1150792A1 Method for producing a cutting tool and a cutting tool
11/07/2001	EP0888418B1 Diffusion coated furnace tubes for the production of ethylene
11/07/2001	CN1321201A Aluminium-titanium alloy with high specular reflectivity, reflecting coatings comprising same and mirrors and parts comprising said coating
11/07/2001	CN1320767A Nm-class Ti-base ceramic covered piston ring and its method
11/07/2001	CN1320718A Vapor deposition and refining method of organic compound
11/07/2001	CN1320578A Antiaging material of ceramic carburetter
11/07/2001	CN1074582C Apparatus for coating substrates in vacuum
11/07/2001	CN1074575C Method for preparing double-sided superconductive film by close range radiation heating
11/06/2001	US6313583 Plasma processing apparatus and method
11/06/2001	US6313463 Flexible high performance microbolometer detector material fabricated via controlled ion beam sputter deposition process
11/06/2001	US6313033 Ionized metal plasma Ta, TaNx, W, and WNx liners for gate electrode applications
11/06/2001	US6313027 Method for low thermal budget metal filling and planarization of contacts vias and trenches
11/06/2001	US6312864 Covering patterned film with a coating film of a heat decomposable resin composition capable of hardening or drying at a temperature lower than the decomposition temperature
11/06/2001	US6312832 Low thermal conductivity heat barrier coating, a metal article having such a coating, and a process for depositing the coating
11/06/2001	US6312768 Method of deposition of thin films of amorphous and crystalline microstructures based on ultrafast pulsed laser deposition
11/06/2001	US6312766 Article comprising fluorinated diamond-like carbon and method for fabricating article
11/06/2001	US6312574 Target, magnetron source with said target and process for producing said target
11/06/2001	US6312569 Chemical vapor deposition apparatus and cleaning method thereof
11/06/2001	US6312568 Two-step AIN-PVD for improved film properties
11/06/2001	US6312567 Depositing platinum on an insulating oxide layer under an oxygen or ozone containing atmosphere, and annealing the oxygen containing platinum layer to convert the layer into a platinum layer that is substantially free of oxygen
11/02/2001	CA2343666A1 Method for applying abrasion-resistant coating to opthalmic lenses and lens blanks
11/01/2001	WO2001082663A2 Removing inherent stress via high temperature annealing
11/01/2001	WO2001082368A2 Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module
11/01/2001	WO2001082355A2 Method and apparatus for plasma cleaning of workpieces
11/01/2001	WO2001082347A1 Method of manufacturing group-iii nitride compound semiconductor device
11/01/2001	WO2001081660A1 Diamond synthesizing method and device
11/01/2001	WO2001081651A1 Method and system for pumping semiconductor equipment from transfer chambers
11/01/2001	WO2001081650A1 Sputter target, barrier film and electronic component
11/01/2001	WO2001081649A1 Barrier coating
11/01/2001	US20010036728 Method of manufacturing semiconductor device
11/01/2001	US20010036691 Manufacturing method for organic EL device
11/01/2001	US20010036560 Article having a decorative and protective coating
11/01/2001	US20010036508 Deposited-film forming apparatus
11/01/2001	US20010036507 Surface-treating holder having tubular structure and method using the same
11/01/2001	US20010036393 Three chamber load lock apparatus
11/01/2001	US20010036214 Method and apparatus for in-situ deposition of epitaxial thin film of high-temperature superconductors and other complex oxides under high-pressure
11/01/2001	US20010035581 Electronic devices with barium barrier film and process for making same
11/01/2001	US20010035348 Target array for an arc vapor deposition chamber including arc vapor deposition source and target plates thereof
11/01/2001	US20010035341 Flexible high performance microbolometer detector material fabricated via controlled ion beam sputter deposition process
11/01/2001	US20010035238 Physical vapor deposition target
11/01/2001	US20010035237 Copper, silver alloy
11/01/2001	US20010035236 Titanium, nickel alloy
11/01/2001	US20010035128 Scanned focus deposition system
11/01/2001	US20010035124 Substrate processing apparatus and semiconductor manufacturing method
10/2001
10/31/2001	EP1149416A1 Method of depositing a copper seed layer which promotes improved feature surface coverage
10/31/2001	EP0663456B1 Method of producing coated particles
10/31/2001	DE10019045A1 Verfahren zum Herstellen von Viellagensystemen A process for producing multilayer systems
10/31/2001	DE10015847A1 Apparatus for vaporizing black and white or colored picture tubes with aluminum comprises a clamping device made from an electrically insulating base body and two clamping blocks, and a ceramic flash-TV vaporizer
10/31/2001	CN1320172A Vapor source having linear aperture and coating process
10/31/2001	CN1320169A Aluminium alloy thin film and target material and method for forming thin film using the same
10/31/2001	CN1319866A Rareearth element doped nanometer particle/medium composite photoelectric film, its preparation and application
10/31/2001	CN1319681A Equipment for forming deposit
10/30/2001	US6310184 Immunoglobulin for the treatment and prevention of mammary and prostate gland cancers
10/30/2001	US6309895 Method for fabricating capacitor containing amorphous and polycrystalline ferroelectric films and method for forming amorphous ferroelectric film
10/30/2001	US6309760 Bearing material
10/30/2001	US6309738 Hard multilayer coated tool having increased toughness
10/30/2001	US6309595 Sputtering target, microelectronics
10/30/2001	US6309593 Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device
10/30/2001	US6309529 Method for producing sputtering target material
10/30/2001	US6309525 Sputtering apparatus capable of changing distance between substrate and deposition preventing plate used for film formation

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