Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/2001
07/26/2001WO2001053561A1 Sputter chamber and vacuum transport chamber and vacuum treatment installations with chambers of this type
07/26/2001WO2001053560A1 Method of diffusion bonding targets to backing plates
07/26/2001WO2001053559A1 Thin-film shape memory alloy device and method
07/26/2001WO2001053558A2 Electron beam evaporation of transparent indium tin oxide
07/26/2001WO2001053557A1 Sputtering assembly and target therefor
07/26/2001WO2001007249A3 Protective organic layer for vacuum technology processed products
07/26/2001US20010009713 Radiation cured island coating system
07/26/2001US20010009225 Method and device for pvd coating
07/26/2001US20010009224 Planar-type magnetron sputtering apparatus
07/26/2001US20010009222 Sputtering method for forming an aluminum or aluminum alloy fine wiring pattern
07/26/2001US20010009221 Film-forming apparatus and film-forming method
07/26/2001US20010009220 Forming plasma in space facing substrate surface; imposing pulse voltage of lower frequency than the oscillation frequency of plasma ions on substrate causing thin film to be produced on substrate
07/26/2001US20010009076 Substrate changing-over mechanism in a vaccum tank, comprising
07/26/2001US20010009075 Vacuum processing apparatus and operating method therefor
07/26/2001US20010009074 Vacuum processing apparatus and operating method therefor
07/26/2001US20010009073 Vacuum processing apparatus and operating method therfor
07/26/2001CA2372300A1 Electron beam evaporation of transparent indium tin oxide
07/25/2001EP1119026A2 Wafer holder for semiconductor manufacturing apparatus
07/25/2001EP1119017A2 Vault shaped target and high-field magnetron
07/25/2001EP1118690A2 Refractory metal silicide target
07/25/2001EP1118689A1 Method of surface modification for metal product
07/25/2001EP1118688A1 Coated body with nanocrystalline CVD coating for enhanced edge toughness and reduced friction
07/25/2001EP1118095A1 Vacuum treatment chamber and method for treating surfaces
07/25/2001EP1117853A1 Electron beam physical vapor deposition apparatus
07/25/2001EP1117852A1 Method and device for coating substrates in a vacuum
07/25/2001EP1117851A1 Method for producing an electrochromic layer
07/25/2001EP1117850A1 Sputter deposition apparatus
07/25/2001EP0920435A4 Platinum source compositions for chemical vapor deposition of platinum
07/25/2001EP0905274A4 Method and device for applying porous coatings and cathode film of an electrolytic condenser
07/25/2001EP0850140B1 Method of applying a coating selectively to parts of a transparent plate
07/25/2001EP0801793B1 Sputtered thermally cycled texture layers formed of high melting point materials
07/25/2001CN1305538A Composition material comprising substrate and barrier layer on substrate
07/25/2001CN1305023A Plasma surface-alloying process for titanium alloy
07/25/2001CN1305022A Process for preparing metallic organic matches film
07/24/2001USRE37294 Ion beam process for deposition of highly abrasion-resistant coatings
07/24/2001US6266193 Anti-reflective composite
07/24/2001US6265353 Device and method for producing a multilayered material
07/24/2001US6265324 Method of manufacturing semiconductor device and mask for forming thin film pattern
07/24/2001US6265087 Zinc plating; automobiles; chemical conversion coating to phosphophyllite
07/24/2001US6265033 Method for optically coupled vapor deposition
07/24/2001US6265019 Segment variations
07/24/2001US6264813 Designed for metallization of various substrates such as manufacture of integrated circuits
07/24/2001US6264812 Method and apparatus for generating a plasma
07/24/2001US6264805 Method of fabricating transparent contacts for organic devices
07/24/2001US6264804 System and method for handling and masking a substrate in a sputter deposition system
07/24/2001US6264803 Apparatus and method for sputtering
07/24/2001US6264751 Mechanism for performing water repellency processing on both sides simultaneously
07/24/2001US6264750 Method and system for forming SbSI thin films
07/24/2001US6263588 Vacuum processing apparatus and operating method therefor
07/24/2001US6263575 Plain bearing and method for the production thereof
07/24/2001US6263555 Method and apparatus for handling laser bar
07/24/2001CA2161282C Multilayer antireflective coating with a graded base layer
07/19/2001WO2001052337A1 Amorphous electrode compositions
07/19/2001WO2001052248A1 Magnetic recording medium, method of manufacture thereof, and magnetic recorder
07/19/2001WO2001051583A1 Photocatalytic coating and method for cleaning spacecraft surfaces
07/19/2001WO2001051296A1 Pumping system for reducing the effects of wafer outgasing on beam purity in an ion implanter
07/19/2001WO2000029636A9 High purity tantalum targets for sputtering
07/19/2001US20010008716 Magnetic recording medium, method of fabricating magnetic recording medium, and magnetic storage
07/19/2001US20010008710 Heating indium tin oxide
07/19/2001US20010008708 Ceramic heat barrier coating having low thermal conductivity, and process for the deposition of said coating
07/19/2001US20010008707 PVD process for manufacturing a colored coating insensitive to fingerprints on articles and articles having such a coating
07/19/2001US20010008706 Oxide film, laminate and methods for their production
07/19/2001US20010008698 Multilayer
07/19/2001US20010008209 Film forming apparatus
07/19/2001US20010008208 Sputtering apparatus capable of changing distance between substrate and deposition preventing plate used for film formation
07/19/2001US20010008207 Sputtering alumina
07/19/2001US20010008206 Sputtering
07/19/2001US20010008205 Two-step ain-pvd for improved film properties
07/19/2001US20010008174 High throughput multi-vacuum chamber system for processing wafers and method of processing wafers using the same
07/19/2001US20010008123 Integrated ion implant scrubber system
07/19/2001US20010008121 Apparatus and method for preparing organic el device
07/19/2001US20010008052 Vacuum processing apparatus and operating method therefor
07/19/2001US20010008051 Vacuum processing apparatus and operating method therefor
07/19/2001US20010008050 Vacuum processing apparatus and operating method therefor
07/19/2001DE10061743A1 Improving optical separation of needle-like phosphor layers formed on substrate comprises controlling vaporization so that phosphor layer is deposited on substrate in reduced thickness
07/19/2001DE10001620A1 Process used for coating a blade of a gas turbine comprises exciting the base material during coating in an ultrasound frequency range using a transmitting head connected to a vibrator
07/19/2001DE10001381A1 PVD-Verfahren zur Herstellung einer gefärbten, gegenüber Fingerabdrücken unempfindlichen Beschichtung auf Gegenständen sowie Gegenstände mit einer solchen Beschichtung PVD-method for manufacturing a dyed, to fingerprints insensitive coating on articles and articles with such a coating
07/19/2001CA2397061A1 Amorphous electrode compositions
07/18/2001EP1116802A1 Laser heater
07/18/2001EP1116801A1 Method of applying a coating by physical vapour deposition
07/18/2001EP1116800A1 Sputtering target
07/18/2001EP1116799A1 Method for making a coating by PVD
07/18/2001EP1116523A2 Masking fixture and method
07/18/2001EP1116225A1 Hard disk vapor lube
07/18/2001EP1115950A1 Doctor rod for a coating device
07/18/2001EP1115919A1 Effusion cell and method of use in molecular beam epitaxy
07/18/2001EP1115899A1 Low temperature sputter target bonding method and target assemblies produced thereby
07/18/2001EP1115898A1 Tantalum films and methods for their deposition
07/18/2001EP1115897A1 Method for improving the corrosion protection of permanent magnets containing rare earth metals
07/18/2001EP0867036B1 Method and device for pre-treatment of substrates
07/18/2001EP0731206B1 Product of vapor deposition and method of manufacturing same
07/18/2001CN1304458A Method of making PVD Al2O3 coated cutting tool
07/18/2001CN1304457A PVD coated cutting tool and method of its production
07/18/2001CN1304456A Magnetic alloy and magnetic recording medium and method for preparation thereof, and target for forming magnetic film and magnetic recording device
07/18/2001CN1304165A Method and equipment of ion implantation
07/18/2001CN1304130A Black array and its preparing method
07/18/2001CN1303953A Process and apparatus for forming ionizing film
07/18/2001CN1303952A Method for growing single-orientated lead zircotitanate film on silicon chip
07/18/2001CN1068639C Apparatus for deposition of film on substrate
07/18/2001CN1068638C Sliding member and method of mfg. same