| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 12/12/2001 | CN2464483Y Rolling rotary disc type apparatus for sputtering and coating nanometer meter compound film on ultramicro powder surface |
| 12/12/2001 | CN1326218A Method for electroplating dielectric articles |
| 12/11/2001 | US6330261 Reliable, modular, production quality narrow-band high rep rate ArF excimer laser |
| 12/11/2001 | US6329650 Space charge neutralization of an ion beam |
| 12/11/2001 | US6329275 Target formed by sputtering and a second element of carbon, oxygen, nitrogen and hydrogen |
| 12/11/2001 | US6329044 Forming an oxide film on heated glass substrate as a target of mixed oxide of indium and tin doped with nitrogen |
| 12/11/2001 | US6328865 Method for forming a thin film of a composite metal compound and apparatus for carrying out the method |
| 12/11/2001 | US6328864 Vacuum processing apparatus |
| 12/11/2001 | US6328858 For semiconductor processing apparatus |
| 12/11/2001 | US6328857 Method for forming coating on substrate and sputtering apparatus used for the method |
| 12/11/2001 | US6328856 Method and apparatus for multilayer film deposition utilizing rotating multiple magnetron cathode device |
| 12/11/2001 | US6328806 Device for treating a band-shaped substrate with a gas |
| 12/11/2001 | US6328560 Pressure processing apparatus for semiconductors |
| 12/08/2001 | CA2614962A1 Coating system for high temperature stainless steels |
| 12/06/2001 | WO2001092595A1 Unbalanced plasma generating apparatus having cylindrical symmetry |
| 12/06/2001 | WO2001092594A2 Fiber-metal-matrix composite for physical vapor deposition target backing plates |
| 12/06/2001 | WO2001091922A2 Process for production of ultrathin protective overcoats |
| 12/06/2001 | WO2001091823A1 System comprising a carrier substrate and a ti/p or. ai/p coating |
| 12/06/2001 | WO2001068790A3 Low-friction protective layers that reduce wear and tear and a method for depositing same |
| 12/06/2001 | WO2001033615A3 Method and apparatus for supercritical processing of multiple workpieces |
| 12/06/2001 | US20010049014 Multilayer film laminates |
| 12/06/2001 | US20010049011 Metal machining tool; plasma vapor deposition of alumina |
| 12/06/2001 | US20010048978 Methods for making polyurethanes as thin films |
| 12/06/2001 | US20010048020 Welding process for ti material and cu material, and a backing plate for a sputtering target |
| 12/06/2001 | US20010048019 Diffusion bonded sputtering target assembly with precipitation hardened backing plate and method of making same |
| 12/06/2001 | US20010047936 Target fabrication method for cylindrical cathodes |
| 12/06/2001 | US20010047935 Backing plate for sputtering |
| 12/06/2001 | US20010047933 Direct current power supply to improve yield at sputter deposition of a material layer onto a substrate, improve electrical integrity of magnetron sputtering apparatus and of said power supply |
| 12/06/2001 | US20010047932 Depositing barrier, wetting layer, vapor depositing conformal metal layer over surface, filling apertures with metals; void-free |
| 12/06/2001 | US20010047931 Pretreatment process for a surface texturing process |
| 12/06/2001 | US20010047838 Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions |
| 12/06/2001 | US20010047763 Masking fixture and method |
| 12/06/2001 | DE10025305A1 Folienlaminate aus beidseitig metallisierten Polymerfolien sowie deren Verwendung als Hochbarrierefolie in Vakuumisolierpaneelen Foil laminates made of double metallized polymer films and their use as high-barrier film in vacuum insulation panels |
| 12/05/2001 | EP1160870A2 Oriented rhombohedral composition of PbZr1-xTix03 thin films for low voltage operation ferroelectric ram |
| 12/05/2001 | EP1160782A2 Multilayered magnetooptical recording medium and manufacturing method |
| 12/05/2001 | EP1160351A2 Electron beam evaporation source |
| 12/05/2001 | EP1160350A1 Cr-containing titanium nitride film |
| 12/05/2001 | EP1160215A1 Simplified gold vacuum vapor deposition |
| 12/05/2001 | EP1080244B1 Anti-adherent coating and method for the production thereof |
| 12/05/2001 | EP0964833B1 Bendable mirrors and method of manufacture |
| 12/05/2001 | EP0811236B1 Apparatus and method for filtering macroparticles from a plasma beam |
| 12/05/2001 | EP0650465B1 Conversion of fullerenes to diamond |
| 12/05/2001 | CN2463400Y Automatic tenslator for high-vacuum winding coating film magnetic powder clutch |
| 12/05/2001 | CN1325327A Method for producing adhesive surface coatings |
| 12/05/2001 | CN1325131A Ion-beam injector with function of removing dirts at home position |
| 12/04/2001 | US6327087 Optical-thin-film material, process for its production, and optical device making use of the optical-thin-film material |
| 12/04/2001 | US6326631 Ion implantation device arranged to select neutral ions from the ion beam |
| 12/04/2001 | US6326216 Process for producing semiconductor integrated circuit device |
| 12/04/2001 | US6326093 Cemented carbide insert and method of making same |
| 12/04/2001 | US6326090 Ten different inorganic materials that cannot interdiffuse, area within regions is hydrophilic, outside regions is hydrophobic |
| 12/04/2001 | US6326056 Mobile cellular tumble coating method |
| 12/04/2001 | US6325902 Mask for sputtering |
| 12/04/2001 | US6325901 Method of producing a cathode-ray tube and apparatus therefor |
| 12/04/2001 | US6325856 Vacuum treatment equipment |
| 12/04/2001 | US6325385 Piston ring |
| 11/29/2001 | WO2001090441A2 Surface alloyed high temperature alloys |
| 11/29/2001 | WO2001090438A1 A process and apparatus for plasma activated deposition in a vacuum |
| 11/29/2001 | WO2001090437A2 Configurable vacuum system and method |
| 11/29/2001 | WO2001090436A2 Mobile plating system and method |
| 11/29/2001 | WO2001090434A2 Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| 11/29/2001 | US20010046978 And a metal phosphite such as fosetyl Al |
| 11/29/2001 | US20010046768 Methods and apparatus for thermally processing wafers |
| 11/29/2001 | US20010046767 Method and apparatus for manufacturing semiconductor device |
| 11/29/2001 | US20010046633 Method of making a light quantity correction filter and method of manufacturing a color cathode ray tube using the light quantity correction filter made by the method |
| 11/29/2001 | US20010046597 Materials handling; alternating layers exothermically react by self-propagating reduction/oxidation/formation reaction; ductility |
| 11/29/2001 | US20010046566 Apparatus and method for direct current plasma immersion ion implantation |
| 11/29/2001 | US20010045525 Shaped and low density focused ion beams |
| 11/29/2001 | US20010045353 Monolithic target having sculpter surface |
| 11/29/2001 | US20010045352 Controlling thickness |
| 11/29/2001 | DE10022159A1 Substrate holding arrangement for coating devices comprises a tempering device and a holder having an inner chamber system with a chamber region containing a fluid which vaporizes in a partial region and condenses in another region |
| 11/29/2001 | CA2507735A1 Configurable vacuum system and method |
| 11/29/2001 | CA2410352A1 Configurable vacuum system and method |
| 11/29/2001 | CA2410347A1 Mobile plating system and method |
| 11/28/2001 | EP1158506A1 Optical recording medium and sputtering target for fabricating the recording medium |
| 11/28/2001 | EP1157824A2 Laminated films as high barrier films and their use in vacuum insulation panels |
| 11/28/2001 | EP1157823A2 Laminated film comprising polymer foils which are metallised on both sides and their use as high barrier films in vacuum insulation panels |
| 11/28/2001 | EP1157598A1 Method and apparatus for deposition of diamond-like carbon coatings from a hall-current ion source |
| 11/28/2001 | CN2461937Y New structural evaporation coating film material |
| 11/28/2001 | CN1324412A Method for metallizing surface of a solid polymer substrate and the product obtd. |
| 11/28/2001 | CN1324093A Ion source operation method, and ion beam radiation device |
| 11/28/2001 | CN1075569C Method and apparatus for preparing crystalline films for solid-state lasers |
| 11/27/2001 | US6324127 Magneto-optical recording layer having double-layer structure and magneto-optical disk adopting the same |
| 11/27/2001 | US6323463 Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system |
| 11/27/2001 | US6323124 Resputtering to achieve better step coverage |
| 11/27/2001 | US6323055 Purifying k2taf7; reducing the purified ktaf7 to produce tantalum powder, refining the tantalum by reacting with iodine and finally electron beam melting the tantalum to form a high purity tantalum ingot. |
| 11/27/2001 | US6322875 Transparent decoration key top and its manufacturing method |
| 11/27/2001 | US6322679 Planar magnetron with moving magnet assembly |
| 11/27/2001 | US6322670 Flexible high performance microbolometer detector material fabricated via controlled ion beam sputter deposition process |
| 11/27/2001 | US6322588 Medical devices with metal/polymer composites |
| 11/27/2001 | US6321449 Method of forming hollow channels within a component |
| 11/27/2001 | CA2044053C Barrier film having high colorless transparency and method |
| 11/25/2001 | CA2357232A1 Surface alloyed high temperature alloys |
| 11/22/2001 | WO2001088969A2 Improved capacitor electrodes |
| 11/22/2001 | WO2001088960A2 Method of molecular-scale pattern imprinting at surfaces |
| 11/22/2001 | WO2001088569A1 Radiation detector and method of manufacture thereof |
| 11/22/2001 | WO2001087789A1 Method for imparting hydrophilicity to substrate |
| 11/22/2001 | WO2001087772A1 Method and apparatus for production of high purity silicon |
| 11/22/2001 | WO2001087371A2 Self-supporting laminated films, structural materials and medical devices |
| 11/22/2001 | US20010044178 Method of forming dielectric film with good crystallinity and low leak |
| 11/22/2001 | US20010044164 Capacitor containing amorphous and polycrystalline ferroelectric films and fabrication method therefor, and method for forming amorphous ferroelectric film |