| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 02/07/2002 | US20020014390 Wafer carrying system and carrying method thereof |
| 02/07/2002 | US20020014311 Substrate processing apparatus and method |
| 02/07/2002 | US20020014289 Physical vapor deposition targets |
| 02/07/2002 | US20020014282 Surface modified stainless steel |
| 02/07/2002 | DE10034895A1 Recognizing flashovers in pulsed plasmas in vacuum comprises measuring ignition voltage of plasma discharge, and comparing measured value with value of ignition voltage for normal plasma discharge |
| 02/07/2002 | DE10034056A1 Layer structure on substrate surface comprises metallic passivating layer, textured intermediate layer, and textured covering layer |
| 02/07/2002 | DE10017120C1 Surface exposure device for supporting annular object in material or energy particle stream uses fixing hoop for suspension of object attached to rotatable bolt |
| 02/06/2002 | EP1178520A2 Substrate heating system for heating simultaneously both sides of a wafer |
| 02/06/2002 | EP1178134A1 Process and apparatus for the continuous plasma treatment of metallic substrates |
| 02/06/2002 | EP1178133A2 Method of extending life of a recyclable process kit |
| 02/06/2002 | EP1178130A2 Oxide film, laminate and methods for their production |
| 02/06/2002 | EP1178129A1 Polycrystalline thin film and method for preparation thereof, and superconducting oxide and method for preparation thereof |
| 02/06/2002 | EP1178128A1 Method of forming chromium coated copper for printed circuit boards |
| 02/06/2002 | EP1177375A1 Thin film coatings for fuel injector components |
| 02/06/2002 | EP1177330A2 Thermal barrier coating |
| 02/06/2002 | EP1177327A2 Electron beam physical vapor deposition apparatus |
| 02/06/2002 | EP0796354B1 Sputtering apparatus having an on board service module |
| 02/06/2002 | CN2475740Y Auto-rotary heating device for preparing large-area film |
| 02/06/2002 | CN2475739Y Device for sedimentation preparation of film |
| 02/06/2002 | CN1334570A Base plate with transparent electric conductive film and method for mfg. same and touch screen using said base plate |
| 02/06/2002 | CN1078850C Thermal printing head, process for producing thermal printing head, recorder, sinter, and target |
| 02/05/2002 | USRE37537 Method and apparatus for altering material |
| 02/05/2002 | US6344419 Pulsed-mode RF bias for sidewall coverage improvement |
| 02/05/2002 | US6344411 OHMIC contact plug having an improved crack free tin barrier metal in a contact hole and method of forming the same |
| 02/05/2002 | US6344281 Aluminum metallization method and product |
| 02/05/2002 | US6344276 Non-dissolvable amorphous Ti-Ca-P coating for implant application |
| 02/05/2002 | US6344265 Coated cutting insert |
| 02/05/2002 | US6344117 Backing plate for sputtering |
| 02/05/2002 | US6344114 Magnetron sputtering cathode with magnet disposed between two yoke plates |
| 02/05/2002 | CA2234351C Vacuum treatment system for depositing thin coatings |
| 02/05/2002 | CA2193709C Method and apparatus for ion beam transport |
| 02/05/2002 | CA2191115C Method and apparatus for capturing and removing contaminant particles from an interior region of an ion implanter |
| 01/31/2002 | WO2002009167A2 High dielectric constant metal silicates formed by controlled metal-surface reactions |
| 01/31/2002 | WO2002008484A2 Vacuum module for applying coatings |
| 01/31/2002 | WO2002008483A1 Method of inhibiting production of projections in metal deposited-film |
| 01/31/2002 | WO2002007919A1 Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| 01/31/2002 | WO2001055472A3 Method and apparatus for in-situ deposition of epitaxial thin film of high-temperature superconductors and other complex oxides under high-pressure |
| 01/31/2002 | WO2000008691A9 Zinc oxide films containing p-type dopant and process for preparing same |
| 01/31/2002 | US20020012818 Coated body with nanocrystalline CVD coating for enhanced edge toughness and reduced friction |
| 01/31/2002 | US20020012746 High throughput high-yield vacuum deposition system for thin film based dense wavelength division multiplexers |
| 01/31/2002 | US20020012604 Forming an silver-palladium alloy thin film using a sputtering target material, wherein the silver-palladium alloy thin film comprises palladium in an amount ranging from 0.5 to 4.9 atomic % |
| 01/31/2002 | US20020012599 Molding a powder comprising indium, tin and oxygen, sintering the molded article in oxygen gas containing atmosphere, and maintaining the molded article at a temperature range from 1500 to 1650 degree C. for 1 hour or more for sintering |
| 01/31/2002 | US20020012206 Thin film conductor layer, magnetoresistive element using the same and method of producing thin film conductor layer |
| 01/31/2002 | US20020011770 Thin film type field emission display and method of fabricating the same |
| 01/31/2002 | US20020011620 Capacitor having a TaON dielectric film in a semiconductor device and a method for manufacturing the same |
| 01/31/2002 | US20020011509 Friction stir welding using a superabrasive tool |
| 01/31/2002 | US20020011406 Mask for sputtering |
| 01/31/2002 | US20020011282 Anhysteretic magnetic permeability of 15,000 or higher at 0.35 Oe and yield stress of 24 kgf/mm2 or more. |
| 01/31/2002 | US20020011205 Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device |
| 01/31/2002 | US20020011203 Multi wafer introduction/single wafer conveyor mode processing system and method of processing wafers using the same |
| 01/31/2002 | DE10130129A1 Zerstäubungsvorrichtung Sputtering |
| 01/30/2002 | EP1176647A2 Method of depositing aluminium-lithium alloy cathode in organic light emitting devices |
| 01/30/2002 | EP1176625A2 Sputtering apparatus |
| 01/30/2002 | EP1175949A1 Coated cemented carbide |
| 01/30/2002 | EP1116225A4 Hard disk vapor lube |
| 01/30/2002 | CN1333838A High purity tantalum and products containing the same like sputter targets |
| 01/30/2002 | CN1333575A Method for preparing negative pole of lithium secondary cell |
| 01/30/2002 | CN1333574A Alkali metal film element and making method thereof |
| 01/30/2002 | CN1333386A Device and method for treating dry surface |
| 01/30/2002 | CN1333385A Equipment and method for vacuum evaporation plating and organic fluorescent device |
| 01/30/2002 | CN1333167A Transferring composite aluminium lined paper productive technology for cigarette package |
| 01/30/2002 | CN1078770C Process for forming electrodes of electronic components and apparatus for use in process |
| 01/29/2002 | US6343183 Wafer support system |
| 01/29/2002 | US6342313 Oxide films and process for preparing same |
| 01/29/2002 | US6342307 Microstructure, interfaces between metal and polymer such as polyamide |
| 01/29/2002 | US6342291 Coated grooving or parting insert and method of making same |
| 01/29/2002 | US6342278 Heat resistance |
| 01/29/2002 | US6342265 Apparatus and method for in-situ thickness and stoichiometry measurement of thin films |
| 01/29/2002 | US6342139 Sputtering system |
| 01/29/2002 | US6342134 Method for producing piezoelectric films with rotating magnetron sputtering system |
| 01/29/2002 | US6342133 Integrated circuits; hollow cathode magnetron |
| 01/29/2002 | US6342132 Sputtering from magnetron cathode, times, heating gases and cooling |
| 01/29/2002 | US6342131 Method of depositing a multilayer thin film by means of magnetron sputtering which controls the magnetic field |
| 01/29/2002 | US6342114 Nickel/vanadium sputtering target with ultra-low alpha emission |
| 01/29/2002 | US6342103 Multiple pocket electron beam source |
| 01/29/2002 | CA2164054C Article having a coating simulating brass |
| 01/24/2002 | WO2002006747A1 Heat exchange foam |
| 01/24/2002 | WO2002006558A1 Vapour deposition |
| 01/24/2002 | WO2002006556A1 Gcib size diagnostics and workpiece processing |
| 01/24/2002 | WO2002006555A2 Sputtering target |
| 01/24/2002 | WO2002006554A1 Deposition of carbon and carbon-based materials |
| 01/24/2002 | WO2002006045A1 Biaxially oriented polypropylene metallized film for packaging |
| 01/24/2002 | WO2002006043A1 Biaxially oriented polypropylene metallized film for packaging |
| 01/24/2002 | WO2002005969A2 Apparatus and method for synthesizing films and coatings by focused particle beam deposition |
| 01/24/2002 | WO2001083847A3 Method of making dielectric films |
| 01/24/2002 | WO2001082663A3 Removing inherent stress via high temperature annealing |
| 01/24/2002 | US20020009892 Plasma preclean with argon, helium, and hydrogen gases |
| 01/24/2002 | US20020009883 Method and apparatus for forming interconnect |
| 01/24/2002 | US20020009861 Oxidation, heating, annealing |
| 01/24/2002 | US20020009653 Phase shifter film and process for the same |
| 01/24/2002 | US20020009621 Durable sputtered metal oxide coating |
| 01/24/2002 | US20020009619 Magnetic Recording Medium and Sputtering Target |
| 01/24/2002 | US20020009545 Method for vaporization of liquid organic feedstock and method for growth of insulation film |
| 01/24/2002 | US20020009538 Filling an organic electroluminescence(EL) material into an evaporation cell, and heating in an inert gas atmosphere to form a layer of the organic EL material; vapor deposition; for computer, video cameras, a goggle-type displays |
| 01/24/2002 | US20020008914 High reflection mirror |
| 01/24/2002 | US20020008891 Substrate fixture for high-yield production of thin film based dense wavelength division multiplexers |
| 01/24/2002 | US20020008817 Protective film for protecting a dielectric layer of a plasma display panel from discharge, method of forming the same, plasma display panel and method of manufacturing the same |
| 01/24/2002 | US20020008443 Thin film, method for manufacturing thin film, and electronic component |
| 01/24/2002 | US20020008099 Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system |
| 01/24/2002 | US20020008022 Cross flow metalizing of compact disc |