| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/10/2002 | US20020003665 Atomic layer controlled optical filter design for next generation dense wavelength division multiplexer |
| 01/10/2002 | US20020003664 Optical filter construction by atomic layer control for next generation dense wavelength division multiplexer |
| 01/10/2002 | US20020003208 Space charge neutralization of an ion beam |
| 01/10/2002 | US20020003086 Differentially-pumped material processing system |
| 01/10/2002 | US20020003010 Ni-plated target diffusion bonded to a backing plate and method of making same |
| 01/10/2002 | US20020003009 Annealing an ingot of an alloy at specified high temperature, adjusting ingot to given thickness to width aspect ratio, rolling at given temperature to produce a rolled plate; use to sputter magnetic cobalt alloys for storage disks |
| 01/10/2002 | US20020002945 Method and device for coating a substrate |
| 01/10/2002 | DE10130942A1 Magnetic plate production comprises depositing a first carbon layer containing predominantly SP3-carbon on the plate, and depositing a second carbon layer containing less SP3-carbon |
| 01/10/2002 | DE10031002A1 Production of thin oxide or nitride layers used as tunnel barrier material for magnetoresistive sensors comprises using a plasma beam to convert the substrate into the corresponding oxide or nitride and adjusting the reaction speed |
| 01/10/2002 | DE10029523A1 Verfahren und Vorrichtung zum Reinigen eines PVD- oder CVD-Reaktors sowie von Abgasleitungen desselben The same process and apparatus for cleaning a PVD or CVD reactor and exhaust gas lines |
| 01/10/2002 | DE10025321A1 Folienlaminate als Hochbarrierefolien und deren Verwendung in Vakuumisolierpaneelen Foil laminates as high barrier films and their use in vacuum insulation panels |
| 01/09/2002 | EP1170776A2 Vacuum arc evaporation source and film formation apparatus using the same |
| 01/09/2002 | EP1170775A1 Method and apparatus for ion implantation |
| 01/09/2002 | EP1170774A1 Method and apparatus for ion implantation |
| 01/09/2002 | EP1170771A1 Cathode ray tube and method for manufacturing thereof |
| 01/09/2002 | EP1170398A1 Cutting tool and its fabrication method |
| 01/09/2002 | EP1170396A2 Method and apparatus for forming an optical multilayer filter |
| 01/09/2002 | EP1170273A1 Alkynic compounds, their use as monomers in vacuum deposition polymerisation, thin films formed from these polymers and their use in electroluminescent devices |
| 01/09/2002 | EP1169493A1 Method for providing machining tools with a protective coating and associated tool set |
| 01/09/2002 | EP1169489A1 Method and getter devices for use in deposition of thin layers |
| 01/09/2002 | CN1330798A Reduced diffusion of mobile specie from metal oxide ceramic |
| 01/09/2002 | CN1330615A Method and apparatus for producing silver based low emissivity coatings without use of metal primer layers and articles produced thereby |
| 01/09/2002 | CN1077705C Multilayered magnetic structure and its producing method |
| 01/08/2002 | US6337518 Integrated circuit interconnect structure comprising substrate with electroconductive layer, layer of non-fluorinated diamond-like carbon, graded layer, layer of amorphous fluorinated carbon, electroconductive layer, metal connector |
| 01/08/2002 | US6337272 Depositing cobalt on silicon semiconductor substrate by sputtering while heating |
| 01/08/2002 | US6337151 Semiconductors |
| 01/08/2002 | US6337146 Storage, lightweight |
| 01/08/2002 | US6337105 Method and apparatus for forming thin functional film |
| 01/08/2002 | US6337005 Depositing device employing a depositing zone and reaction zone |
| 01/08/2002 | US6337004 High adhesion performance roll sputtered strike layer |
| 01/08/2002 | US6337003 Vacuum apparatus and driving mechanism therefor |
| 01/08/2002 | US6337001 Generating plasma in gap, flowing gas transverse to sectional plane, sputtering off material from opposite surfaces, transporting by gas flowing towards workpiece. |
| 01/08/2002 | US6336999 Transition zone between the two lines ensures selective couplings and efficiency |
| 01/08/2002 | US6336713 High efficiency printhead containing a novel nitride-based resistor system |
| 01/08/2002 | CA2132951C Improved high transmittance, low emissivity coatings for substrates |
| 01/08/2002 | CA2081871C Abrasion-resistant overcoat for coated substrates |
| 01/03/2002 | WO2002001115A1 Plastic pipe with a barrier lager |
| 01/03/2002 | WO2002000962A1 System and method for in-situ cleaning of process monitor of semi-conductor wafer fabricator |
| 01/03/2002 | WO2002000961A1 Method for producing a multi-functional, multi-ply layer on a transparent plastic substrate and a multi-functional multi-ply layer produced according to said method |
| 01/03/2002 | WO2002000960A1 Magnetron sputtering device |
| 01/03/2002 | WO2002000959A1 Cathodes for cathodic deposition of getter alloys and a process for the manufacture thereof |
| 01/03/2002 | WO2002000958A1 Decorative article having white film and production method therefor |
| 01/03/2002 | WO2002000564A1 Soil-resistant coating for glass surfaces |
| 01/03/2002 | WO2002000358A1 Layer deposition on superconductor particles by sputtering or evaporation |
| 01/03/2002 | WO2001044536A3 Sputtering targets and method of making same |
| 01/03/2002 | WO2001044131A3 Haze-resistant transparent film stacks |
| 01/03/2002 | US20020001977 Forming a nanowire under thermal conditions and under non-catalytic conditions; catalysts for selective dehydrogenation of ethanol to acetaldehyde such as copper on silica |
| 01/03/2002 | US20020001929 Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
| 01/03/2002 | US20020001890 Method for forming semiconductor device having epitaxial channel layer using laser treatment |
| 01/03/2002 | US20020001876 Forming a conductive layer, having conductive lines with gaps, over a semiconductor substrate, depositing afluorosilcated glass layer, by high density plasma chemical vapor depositon over patterned conductive layer, filling gap |
| 01/03/2002 | US20020001747 Solid state electronics |
| 01/03/2002 | US20020001746 Low-temperature fabrication of thin-film energy-storage devices |
| 01/03/2002 | US20020001736 High density; multilayer; nonmagnetic backing; cobalt containing magnetic layer |
| 01/03/2002 | US20020001680 Process for production of ultrathin protective overcoats |
| 01/03/2002 | US20020001672 Vacuum deposition over aluminum diffraction grid |
| 01/03/2002 | US20020001668 Method and apparatus for forming an optical multilayer filter |
| 01/03/2002 | US20020000587 Method for forming capacitor of nonvolatile semiconductor memory device and the capacitor |
| 01/03/2002 | US20020000556 Hexagonal boron nitride film with low dielectric constant, layer dielectric film and method of production thereof, and plasma CVD apparatus |
| 01/03/2002 | US20020000374 Sputtering apparatus |
| 01/03/2002 | US20020000370 Ion processing of a substrate |
| 01/03/2002 | US20020000368 Vacuum treatment chamber and method for treating surfaces |
| 01/03/2002 | US20020000367 Sputtering; radio frequency electric fields; magnetic recording media; semiconductors |
| 01/03/2002 | US20020000272 Sputtering target made by process including casting having target surface with homogenous composition at any location, absence of pores, voids, inclusions, precipitates, and other defects; particle sizes; uniformity; texture |
| 01/03/2002 | US20020000247 Pressure control valve having enhanced durability |
| 01/03/2002 | US20020000197 Vacuum processing apparatus and multi-chamber vacuum processing apparatus |
| 01/03/2002 | US20020000194 Dual degas/cool loadlock cluster tool |
| 01/03/2002 | US20020000034 Continuous processing of thin-film batteries and like devices |
| 01/03/2002 | DE19935181C2 Verfahren zum Schutz eines vakuumtechnisch bearbeiteten Substrates und Verwendung des Verfahrens A method of protecting a vacuum-processed substrate and using the method |
| 01/02/2002 | EP1168465A1 Structure of piezoelectric element and liquid discharge recording head, and method of manufacture therefor |
| 01/02/2002 | EP1167575A2 Nickel aluminide coating and coating systems formed therewith |
| 01/02/2002 | EP1167566A1 Apparatus for and method of vacuum vapor deposition and organic electroluminescent device |
| 01/02/2002 | EP1167291A1 Hexagonal boron nitride film with low dielectric constant, layer dielectric film and method of production thereof, and plasma CVD apparatus |
| 01/02/2002 | EP1166324A2 Apparatus for improving plasma distribution and performance in an inductively coupled plasma |
| 01/02/2002 | EP1165856A1 Method of making a multilayer article by arc plasma deposition |
| 01/02/2002 | EP1165854A1 Method and device for coating a product |
| 01/02/2002 | EP1165853A1 Magnetron sputtering method and apparatus |
| 01/02/2002 | EP1165257A1 Release layer, method for producing the same and its use |
| 01/02/2002 | EP1165256A1 Methods for making polyurethanes as thin films |
| 01/02/2002 | EP1165253A1 Vacuum deposition and curing of oligomers and resins |
| 01/02/2002 | EP0963455B1 A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions |
| 01/02/2002 | EP0958195B1 Method for coating surfaces using an installation with sputter electrodes |
| 01/02/2002 | EP0954620A4 Vapor deposition components and corresponding methods |
| 01/02/2002 | EP0809718B1 Mechanically joined sputtering target and adapter therefor |
| 01/02/2002 | EP0702843B1 Device for high energy ion implantation of the low or medium current kind and method for its use |
| 01/02/2002 | CN1329678A Sputtering apparatus |
| 01/02/2002 | CN1329338A Method for controlling electrostatic lens and ion implantation device |
| 01/02/2002 | CN1329259A High mirror |
| 01/01/2002 | US6335268 Plasma immersion ion processor for fabricating semiconductor integrated circuits |
| 01/01/2002 | US6335207 Method for fabricating ferroelectric thin film |
| 01/01/2002 | US6335124 Phase shift mask and phase shift mask blank |
| 01/01/2002 | US6335078 Curable masking material for protecting a passage hole in a substrate |
| 01/01/2002 | US6335062 Reactive oxygen-assisted ion implantation into metals and products made therefrom |
| 01/01/2002 | US6335059 Method of robotic manipulation utilizing patterned granular motion |
| 01/01/2002 | US6335054 Air lock for introducing substrates to and/or removing them from a treatment chamber |
| 01/01/2002 | US6335053 Heating band to be coated; activating band surface; heat stabilizing band; depositing zinc layer on metallic band; secondary heat stabilizing; depositing one or more elements or compounds on zinc layer |
| 01/01/2002 | US6334938 Target and process for its production, and method for forming a film having a high refractive index |
| 01/01/2002 | US6334751 Air lock |
| 01/01/2002 | US6334405 Vacuum arc evaporation source and vacuum arc vapor deposition apparatus |
| 01/01/2002 | US6334249 Cavity-filling method for reducing surface topography and roughness |
| 01/01/2002 | CA2134290C Process for depositing a thin layer on the surface of a plastic material substrate |