| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 02/21/2002 | US20020020922 Ohmic contact plug having an improved crack free TiN barrier metal in a contact hole and method of forming the same |
| 02/21/2002 | US20020020496 Substrate treatment apparatus |
| 02/21/2002 | US20020020356 Vacuum arc evaporation source and film formation apparatus using the same |
| 02/21/2002 | US20020020298 Supported metal membrane, a process for its preparation and use |
| 02/21/2002 | DE10038168A1 Handling and processing machine for use in semiconductor industry comprises two storage modules containing magazines whose height can be adjusted and which are mounted on turntables, allowing disk-shaped components to be transferred |
| 02/21/2002 | DE10037566A1 Substratheizung zum gleichzeitig beidseitigen Beheizen eines Wafers Substrate heater to heat a wafer simultaneously on both sides |
| 02/20/2002 | EP1180795A2 Method for making a first electrode and a second electrode, electronic component and electronic memory element |
| 02/20/2002 | EP1180392A1 Supported metal membrane, method for the production and the use thereof |
| 02/20/2002 | EP1180262A1 Method for producing a hybrid disk, and hybrid disk |
| 02/20/2002 | EP1017874B1 Colorless diamond-like carbon coatings |
| 02/20/2002 | CN1336965A Magnet device with high target utilization ratio used for sputtering target with conical butt |
| 02/20/2002 | CN1336781A Method for depositing aluminium-lithium alloy cathode onto organic light emitting element |
| 02/20/2002 | CN1336654A Metal alloy used for reflection or semi-reflection layer of optical memory media |
| 02/20/2002 | CN1336566A Liquid crystal device, color-filtering substrate, and method for mfg. liquid crystal device, method for mfg. color-filtering substrate |
| 02/20/2002 | CN1336411A Method for prepn. of organic luminous device made of pre-doped material |
| 02/19/2002 | US6348276 Magnetic recording media with a surface-oxidized nial sub-seedlayer |
| 02/19/2002 | US6348238 Thin film fabrication method and thin film fabrication apparatus |
| 02/19/2002 | US6348139 Tantalum-comprising articles |
| 02/19/2002 | US6348113 High purity tantalum, products containing the same, and methods of making the same |
| 02/19/2002 | US6348099 Methods and apparatus for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions |
| 02/19/2002 | US6347919 Wafer processing chamber having separable upper and lower halves |
| 02/19/2002 | US6347918 Inflatable slit/gate valve |
| 02/19/2002 | CA2051266C Metal-film laminate resistant to delamination |
| 02/14/2002 | WO2002013275A1 Electronic component and method for producing an electronic component |
| 02/14/2002 | WO2002012932A2 Methods for manufacturing planar optical devices |
| 02/14/2002 | WO2002012591A1 Method and device for plasma treatment of moving metal substrates |
| 02/14/2002 | WO2002012586A1 METHOD FOR PRODUCING A TOOL WHICH CAN BE USED TO CREATE SURFACE STRUCTURES IN THE SUB-νM RANGE |
| 02/14/2002 | WO2002012584A2 Sputtertarget |
| 02/14/2002 | WO2002012577A1 Method for reducing the oxygen and oxide content in cobalt to procuce cobalt sputtering targets |
| 02/14/2002 | WO2002011732A1 Novel bicyclic and tricyclic pyrrolidine derivatives as gnrh antagonists |
| 02/14/2002 | WO2001079581A8 Method for forming thin-film layer for device and organic electroluminescence device |
| 02/14/2002 | WO2001061068A3 Tumble coater |
| 02/14/2002 | WO2001058818A3 Method for transporting glass panels through a coating installation and device for transporting said glass panels |
| 02/14/2002 | WO2001040539A3 Method and system relating to flux distribution and film deposition |
| 02/14/2002 | US20020018912 Transistors, liquid crystal display, electrooptics |
| 02/14/2002 | US20020018891 Multilayer film laminates |
| 02/14/2002 | US20020018881 Substrate for use in display element, method of manufacturing the same, and apparatus for manufacturing the same |
| 02/14/2002 | US20020017910 Substrate processing device and method |
| 02/14/2002 | US20020017694 Electrostatic attraction mechanism, surface processing method and surface processing device |
| 02/14/2002 | US20020017458 Oxygen scavenger capable of reducing metal components; aging resistance of a magnetic, thin film |
| 02/14/2002 | US20020017455 Surface smoothing the femoral heads and/or the surfaces of the acetabular cups to reduce frictional wear at the interface of the bearing surfaces |
| 02/14/2002 | US20020017453 Titanium or titanium nitride films at larger distances which allows easy accumulation on the bottom surface of a concave and shorter distances which allows easy accumulation on the side surface of the concave |
| 02/14/2002 | US20020017452 Method for applying an antireflection coating to inorganic optically transparent substrates |
| 02/14/2002 | US20020017377 Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus |
| 02/14/2002 | US20020017341 Iron/hafnium/nitrogen with or without carbon possess a high saturation magnetic flux density and an excellent soft magnetic property at a high frequencies; hyperfine crystaline grain structure without requiring an additional heating |
| 02/14/2002 | US20020017247 Depositing a first layer of metal, irradiating, analyzing an x-ray spectrum of x-rays leaving said irradiated area of said first layer of metal to determine a thickness; alarm if thickness of layer exceeds a preselected value |
| 02/14/2002 | US20020017245 Apparatus for and method of vacuum vapor deposition and organic electroluminescent device |
| 02/14/2002 | US20020017235 A hard film improved in high-temperature, oxidation resistance without impairing high sliding properties (wear and friction resistance); bearings/seals for rotary machines, e.g. steam/gas turbines; highly oriented crystal structure |
| 02/14/2002 | DE10039327A1 Elektronisches Bauelement und Herstellungsverfahren für elektronisches Bauelement Electronic device and manufacturing method of electronic component |
| 02/14/2002 | CA2423138A1 Method and device for plasma treatment of moving metal substrates |
| 02/13/2002 | EP1179837A2 Transistor structure comprising doped zirconia, or zirconia-like dielectic film |
| 02/13/2002 | EP1179611A2 Chamber for transport of substrates |
| 02/13/2002 | EP1179516A1 Method of coating both sides of a glass substrate and apparatus |
| 02/13/2002 | EP1179515A1 Soil-resistant coating for glass surfaces |
| 02/13/2002 | EP1178873A1 Superhard material article of manufacture |
| 02/13/2002 | EP1032721B1 Wear-resistant, mechanically highly stressed and low-friction boundary coating construction for titanium or the alloys thereof and a method for producing the same |
| 02/13/2002 | CN2476564Y Multifunction combined nanometer material generator |
| 02/13/2002 | CN2476563Y Evaporation magnetic control vacuum film coating machine |
| 02/13/2002 | CN1335895A Device for coating bottles and bodies for transporting bottles |
| 02/13/2002 | CN1335880A Method for forming films or layers |
| 02/13/2002 | CN1335805A Aerogel substrate and method for preparing the same |
| 02/13/2002 | CN1335640A Method for producing thermal plate and semi-conductor device |
| 02/13/2002 | CN1335636A Cathode-ray tube and its producing method |
| 02/12/2002 | US6347175 Solderable thin film |
| 02/12/2002 | US6346424 Process for producing high-epsilon dielectric layer or ferroelectric layer |
| 02/12/2002 | US6346339 Magnetic recording media with a nialox sub-seedlayer |
| 02/12/2002 | US6346301 Coating method for producing a heat-insulating layer on a substrate |
| 02/12/2002 | US6346294 Coating substrates with vapor and condensation, roughness |
| 02/12/2002 | US6346290 Organic polymer on substrate, delivering an initiator, polymerization and screening |
| 02/12/2002 | US6346177 Generating high density plasma containing ionized gas particles in reaction chamber, accelerating ionized gas particles toward device structure during cleaning phase, accelerating ionized gas toward target in deposition phase |
| 02/12/2002 | US6346176 Method of depositing thin films |
| 02/12/2002 | US6346175 Depositing layer of molybdenum on substrate in presence of inert gas to which is added nitrogen, depositing layer of pure molybdenum or alloy thereof on first layer causing symmetrical microstructural morphology in second layer, repeating |
| 02/12/2002 | US6346174 Placing substrate in evacuated chamber in atmosphere of argon, oxygen, and/or nitrogen and sputtering metal cathode target wherein concentration of reactive gas is low enough to deposit metal film |
| 02/12/2002 | US6345588 Use of variable RF generator to control coil voltage distribution |
| 02/12/2002 | CA2354952A1 A supported metal membrane, a process for its preparation and use |
| 02/12/2002 | CA2203904C In situ getter pump system and method |
| 02/12/2002 | CA2192876C Matchable, heat treatable, durable, ir-reflecting sputter-coated glasses and method of making same |
| 02/07/2002 | WO2002011195A1 Method for depositing a fluorine-doped silica film |
| 02/07/2002 | WO2002011187A2 Method and apparatus for depositing a tantalum-containing layer on a substrate |
| 02/07/2002 | WO2002011176A1 Magnetron sputtering |
| 02/07/2002 | WO2002010475A1 Ring-shaped high-density plasma source and method |
| 02/07/2002 | WO2002010471A1 Low temperature cathodic magnetron sputtering |
| 02/07/2002 | WO2002010084A1 Manufacturing process of christmas tree decorations and racks for their fixing during this process |
| 02/07/2002 | WO2001065895A3 Electrically controlled plasma uniformity in a high density plasma source |
| 02/07/2002 | WO2001065590A3 Esrf source for ion plating epitaxial deposition |
| 02/07/2002 | US20020016068 Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device |
| 02/07/2002 | US20020015865 Producing method of thin film magnetic tape and the thin film magnetic tape |
| 02/07/2002 | US20020015856 Bearing material |
| 02/07/2002 | US20020015855 System and method for depositing high dielectric constant materials and compatible conductive materials |
| 02/07/2002 | US20020015849 Tetracarbon |
| 02/07/2002 | US20020015803 Method for forming thin film with a gas cluster ion beam |
| 02/07/2002 | US20020015793 Method of manufacturing metallic film consisting of giant single crystal grains |
| 02/07/2002 | US20020015788 Coating ceramic on surface |
| 02/07/2002 | US20020015787 Vacuum deposition; medical equipment |
| 02/07/2002 | US20020015259 Method for manufacturing a structure with curved surfaces |
| 02/07/2002 | US20020014597 Appartus for surface modification of polymer, metal and ceramic materials using ion beam |
| 02/07/2002 | US20020014516 Friction stir welding of metal matrix composites, ferrous alloys, non-ferrous alloys, and superalloys using a superabrasive tool |
| 02/07/2002 | US20020014483 Batch type heat treatment system, method for controlling same, and heat treatment method |
| 02/07/2002 | US20020014406 Aluminum target material for sputtering and method for producing same |
| 02/07/2002 | US20020014402 For forming thin films on substrates |