| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/24/2002 | US20020008021 Using melt of silicon doped with aluminum; vacuum deposition of silicon nitride or oxide |
| 01/24/2002 | US20020008018 Process for forming optical composite film and optical articles producing from the same |
| 01/24/2002 | US20020008017 Self ionized sputtering using a high density plasma source |
| 01/24/2002 | US20020007880 Methods for controlling the texture of alloys utilizing equal channel angular extrusion |
| 01/24/2002 | US20020007796 Filtered cathodic arc deposition method and apparatus |
| 01/24/2002 | DE10032005A1 Waferhalterad mit einer Andrückvorrichtung in einer Waferbeschichtungsanlage Waferhalterad with a pressing device in a wafer coating plant |
| 01/24/2002 | DE10031280A1 Multifunktionale Mehrlagenschicht auf transparenten Kunststoffen und Verfahren zur ihrer Herstellung Multifunctional multilayer coating on transparent plastic materials and methods for their preparation |
| 01/23/2002 | EP1174936A2 Thin alkali metal film member and method of producing the same |
| 01/23/2002 | EP1174934A2 Method of producing negative electrode for lithium secondary cell |
| 01/23/2002 | EP1174918A2 Method of copper transport prevention by a sputtered gettering layer on backside of wafer |
| 01/23/2002 | EP1174902A2 Coaxial electromagnet in a magnetron sputtering reactor |
| 01/23/2002 | EP1174901A2 Integrated power oscillator RF source for plasma immersion ion implantation system |
| 01/23/2002 | EP1174868A2 Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
| 01/23/2002 | EP1174734A2 Optical element and eyeglass lens |
| 01/23/2002 | EP1174587A2 Method of adjusting component airflow |
| 01/23/2002 | EP1174528A2 Multilayer-coated cutting tool |
| 01/23/2002 | EP1174526A1 Continuous vapour deposition |
| 01/23/2002 | EP1174525A2 Thin film, method for manufacturing thin film, and electronic component |
| 01/23/2002 | EP1174397A2 Heat-treatable low-E coated articles and methods of making same |
| 01/23/2002 | EP1173629A1 Wear resistant coating |
| 01/23/2002 | EP0720418B1 Manufacturing method for ternary compound films |
| 01/23/2002 | CN2473219Y Organic evaporation coating device added with electric field |
| 01/23/2002 | CN1332672A Layered product and manufacture thereof |
| 01/23/2002 | CN1332373A Plasma probe diagnosing device based on glow discharge and surface treatment |
| 01/23/2002 | CN1332266A Vacuum arc evaporation source and film-forming device using it |
| 01/23/2002 | CN1078266C Plating method for gloss coating of parts and plated parts using the same method |
| 01/22/2002 | US6340621 Thin film capacitor and method of manufacture |
| 01/22/2002 | US6340529 Carrying a solar control coating stack |
| 01/22/2002 | US6340520 Giant magnetoresistive material film, method of producing the same magnetic head using the same |
| 01/22/2002 | US6340501 For producing write-once type optical recording medium such as compact disks, high density |
| 01/22/2002 | US6340417 Reactor and method for ionized metal deposition |
| 01/22/2002 | US6340415 Method and apparatus for enhancing a sputtering target's lifetime |
| 01/22/2002 | US6340393 Method for synthesizing n-type diamond having low resistance |
| 01/22/2002 | US6339997 Plasma processing apparatus |
| 01/22/2002 | US6339913 Method for improving the osteointegration of osseus fixing implants |
| 01/22/2002 | CA2236153C Coated article |
| 01/22/2002 | CA2236152C Article having a decorative and protective coating |
| 01/17/2002 | WO2002005338A1 Cleaning gas and etching gas |
| 01/17/2002 | WO2002005324A2 Differentially-pumped material processing system |
| 01/17/2002 | WO2002005299A1 Nanostructures |
| 01/17/2002 | WO2002005296A1 Ultraviolet-transparent conductive film and process for producing the same |
| 01/17/2002 | WO2002004699A1 Surface modified stainless steel |
| 01/17/2002 | WO2002004697A1 Apparatus for performing at least one process on a substrate |
| 01/17/2002 | WO2002004696A1 Improving effectiveness of artificial hip by gcib |
| 01/17/2002 | WO2002004695A2 Thin film processing system |
| 01/17/2002 | WO2002004692A2 Two-stage sputter deposition method |
| 01/17/2002 | WO2002004375A2 Heat treatable low-e coated articles and methods of making same |
| 01/17/2002 | US20020006713 Optical article, exposure apparatus or optical system using it, and process for producing it |
| 01/17/2002 | US20020006680 Hot plate and method of manufacturing semiconductor device |
| 01/17/2002 | US20020006512 Corrosion-resistant conductive member |
| 01/17/2002 | US20020006477 Exhaust processing method, plasma processing method and plasma processing apparatus |
| 01/17/2002 | US20020006467 Cold trapping surfaces to prevent migration of lubrication molecules that are not deposited onto storage discs during vapor deposition of lubricant from a vapor lubrication station to adjacent process or transport chambers |
| 01/17/2002 | US20020005880 Droplet deposition apparatus |
| 01/17/2002 | US20020005348 Sputtering method to generate ionized metal plasma using electron beams and magnetic field |
| 01/17/2002 | US20020005347 Dual-scan thin film processing system |
| 01/17/2002 | US20020005168 Dual wafer load lock |
| 01/17/2002 | US20020005167 Substrate processing apparatus |
| 01/17/2002 | US20020005165 Coating installation for disk-form workpieces |
| 01/17/2002 | DE10032399A1 Refiner und Verfahren zum Oberflächenbehandeln eines Werkzeuges eines derartigen Refiners Refiner and method for surface treating a tool of such refiner |
| 01/17/2002 | DE10031327A1 Cutter insert used for cutting tools consists of hard metal, cermet, ceramic or steel base body and a lubricant layer made of a metal sulfide |
| 01/17/2002 | DE10006336C2 Verfahren zum Abscheiden dünner Schichten A method for depositing thin layers |
| 01/16/2002 | EP1172843A2 Material handling system and methods for a multichamber plasma treatment system |
| 01/16/2002 | EP1172842A2 Coating station for disk-type workpieces |
| 01/16/2002 | EP1172838A2 Biased shield in a magnetron sputter reactor |
| 01/16/2002 | EP1172463A1 Corrosion-resistant conductive member |
| 01/16/2002 | EP1172456A1 Lock for vacuum chamber |
| 01/16/2002 | EP1172401A2 Thin copper film directly bonded polyimide film and method of manufacturing the same |
| 01/16/2002 | EP1172177A1 Dry surface treating apparatus and dry surface treating method using the same apparatus |
| 01/16/2002 | EP1171901A1 Multi-column fib for nanofabrication applications |
| 01/16/2002 | EP1171653A1 Slicing of single-crystal films using ion implantation |
| 01/16/2002 | EP1171645A1 Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor |
| 01/16/2002 | EP1171301A1 Flexible laminate for flexible circuit |
| 01/16/2002 | EP1171245A2 Coating medical devices using air suspension |
| 01/16/2002 | EP0981440B1 Multi-layer, drawn, heat-sealable, vacuum-plated polypropylene film |
| 01/16/2002 | EP0946780B1 Vacuum treatment equipment |
| 01/16/2002 | EP0663458B1 Deposition film, method of measuring shape of deposition film, method of controlling manufacturing processes, manufacturing method, shape measuring apparatus and apparatus for controlling manufacturing processes |
| 01/16/2002 | CN2471791Y Apparatus for depositioning high quality film low temperature plasma |
| 01/15/2002 | US6339297 Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus |
| 01/15/2002 | US6339281 Method for fabricating triode-structure carbon nanotube field emitter array |
| 01/15/2002 | US6339246 Tungsten silicide nitride as an electrode for tantalum pentoxide devices |
| 01/15/2002 | US6339187 Supporting a heat insulating thin film of silicon oxide layer and aluminum oxide layer with heat exchangers, providing thermoelectric infrared detector on the heat insulating thin film |
| 01/15/2002 | US6338879 Solid lubricant film for coated cutter with drill |
| 01/15/2002 | US6338781 Magnetron sputtering cathode with magnet disposed between two yoke plates |
| 01/15/2002 | US6338778 Vacuum coating system with a coating chamber and at least one source chamber |
| 01/15/2002 | US6338777 Method and apparatus for sputtering thin films |
| 01/15/2002 | US6338776 In regard to temperature and humidity/water content prior to precision operations so as to minimize any problems resulting from dimensional changes; integrated circuit substrate manufacturing and printed circuit board manufacturing; |
| 01/15/2002 | US6338775 Apparatus and method for uniformly depositing thin films over substrates |
| 01/15/2002 | US6338312 Integrated ion implant scrubber system |
| 01/15/2002 | CA2176520C Heat treatable, durable, ir-reflecting sputter-coated glasses and method of making same |
| 01/15/2002 | CA2023049C Workpiece coated with a solid solution layer, method for its production, use of the workpiece, and apparatus for carrying out the method |
| 01/13/2002 | CA2352034A1 Corrosion-resistant conductive member |
| 01/10/2002 | WO2002003402A1 Device for orienting the direction of magnetization of magnetic layers |
| 01/10/2002 | WO2002002848A2 Method and apparatus for processing metals, and the metals so produced |
| 01/10/2002 | WO2002002841A1 Wheel-type wafer holder comprising a pressing element |
| 01/10/2002 | WO2002002445A1 Dual degas/cool loadlock cluster tool |
| 01/10/2002 | WO2002002238A1 Refiner and method for treating the surface of a tool of a refiner of this type |
| 01/10/2002 | WO2001063000A3 Method and apparatus for depositing films |
| 01/10/2002 | US20020004266 Apparatus and method for forming thin film at low temperature and high deposition rate |
| 01/10/2002 | US20020004167 Device enclosures and devices with integrated battery |
| 01/10/2002 | US20020004149 Magnetic recording medium, magnetic recording medium manufacture method, and information regeneration apparatus |