| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 04/18/2002 | US20020044770 Material for aging-resistant ceramic vaporizers |
| 04/18/2002 | US20020043929 Organic electroluminescence device with an improved heat radiation structure |
| 04/18/2002 | US20020043666 Oxidizing silicon substrate; depositing metal or alloy; annealing to form silicate |
| 04/18/2002 | US20020043457 Sputtering apparatus |
| 04/18/2002 | US20020043456 Bimorphic, compositionally-graded, sputter-deposited, thin film shape memory device |
| 04/18/2002 | US20020043336 Process and device for reducing the ignition voltage of plasmas operated using pulses of pulsed power |
| 04/18/2002 | DE10039208A1 Verfahren zur Herstellung eines Werkzeugs, das zur Schaffung optisch wirksamer Oberflächenstrukturen im sub-mum Bereich einsetzbar ist, sowie ein diesbezügliches Werkzeug A method for producing a tool which can be used to create optically active surface structures in the sub-mum range, and a related tool |
| 04/18/2002 | CA2425757A1 Epitaxial oxide films via nitride conversion |
| 04/17/2002 | EP1197580A1 Sputtering apparatus for coating at least one substrate and process for the regulation of the apparatus |
| 04/17/2002 | EP1197579A2 Method for uniform optical coating |
| 04/17/2002 | EP1197578A2 Sputtering apparatus for coating at least one substrate and process for controlling the apparatus |
| 04/17/2002 | EP1197577A2 Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating |
| 04/17/2002 | EP1197576A1 Method for forming thin-film layer for device and organic electroluminescence device |
| 04/17/2002 | EP1197575A2 Process for making a metallized plastic hose, in particular a shower hose |
| 04/17/2002 | EP1197574A1 Turbine blade coating tool |
| 04/17/2002 | EP1197124A1 Method and apparatus for forming polycrystalline particles |
| 04/17/2002 | EP1196938A2 Apparatus and method for exposing a substrate to plasma radicals |
| 04/17/2002 | EP0881918B1 Medical implant based on tetracarbon |
| 04/17/2002 | EP0739219B1 Catheter having a long-lasting antimicrobial surface treatment |
| 04/17/2002 | EP0735152B1 Molybdenum-tungsten material for wiring, molybdenum-tungsten target for wiring, process for producing the same, and molybdenum-tungsten wiring thin film |
| 04/17/2002 | CN1082936C Material array and its prep. |
| 04/17/2002 | CN1082888C laminate and method for preparing same |
| 04/16/2002 | US6374194 System and method of diagnosing particle formation |
| 04/16/2002 | US6372646 Optical article, exposure apparatus or optical system using it, and process for producing it |
| 04/16/2002 | US6372369 Hard film, sliding member covered with hard film, and manufacturing method thereof |
| 04/16/2002 | US6372362 Method for forming composite vapor-deposited films with varied compositions formed in the initial and final stages of deposition, composite vapor-deposition material for the film and method for manufacture thereof |
| 04/16/2002 | US6372306 Providing a pulsed laser deposition system; placing target containing fluoride of group 1a metal and group 2a metal into deposition system; placing substrate; causing pulses of laser energy to ablate target and deposit onto substrate |
| 04/16/2002 | US6372303 Method and device for vacuum-coating a substrate |
| 04/16/2002 | US6372114 Method of forming a semiconductor device |
| 04/16/2002 | US6372104 Cobalt base alloy sputtering target with high magnetic field penetration |
| 04/16/2002 | US6372103 Ultrashort pulse laser deposition of thin films |
| 04/16/2002 | US6372098 High target utilization magnet array and associated methods |
| 04/16/2002 | US6371045 Physical vapor deposition device for forming a metallic layer on a semiconductor wafer |
| 04/16/2002 | US6370955 High-temperature balance |
| 04/11/2002 | WO2002029449A2 Magnetic transparent conducting oxide film and method of making |
| 04/11/2002 | WO2002029131A1 Method for automatic organisation of microstructures or nanostructures and related device obtained |
| 04/11/2002 | WO2002029130A1 Diffusion-joined target assembly of high-purity cobalt target and copper alloy backing plate and production method therefor |
| 04/11/2002 | WO2002029125A1 High purity zirconium or hafnium, sputtering target comprising the high purity zirconium or hafnium and thin film formed using the target, and method for producing high purity zirconium or hafnium and method for producing powder of high purity zirconium or hafnium |
| 04/11/2002 | WO2002028522A1 Combinatorial systems and methods for coating with organic materials |
| 04/11/2002 | WO2002005969A3 Apparatus and method for synthesizing films and coatings by focused particle beam deposition |
| 04/11/2002 | WO2001091922A3 Process for production of ultrathin protective overcoats |
| 04/11/2002 | WO2001037310A3 Method and apparatus for ionized physical vapor deposition |
| 04/11/2002 | US20020042204 Plasma processing apparatus with reduced parasitic capacity and loss in RF power |
| 04/11/2002 | US20020042203 Method of forming a fine pattern |
| 04/11/2002 | US20020041980 Magnetic recording medium |
| 04/11/2002 | US20020041158 Interlocking cylindrical magnetron cathodes and targets |
| 04/11/2002 | US20020041047 Process for making angstrom scale and high aspect functional platelets |
| 04/11/2002 | US20020040846 Apparatus for sputter-coating glass and corresponding method |
| 04/11/2002 | US20020040682 Multiple pocket electron beam source |
| 04/11/2002 | DE10048759A1 Verfahren und Vorrichtung zum Abscheiden insbesondere organischer Schichten im Wege der OVPD Method and apparatus for depositing in particular of organic layers by means of OVPD |
| 04/11/2002 | CA2424919A1 Magnetic transparent conducting oxide film and method of making |
| 04/11/2002 | CA2423905A1 Combinatorial systems and methods for coating with organic materials |
| 04/10/2002 | EP1195799A1 High pressure process for the formation of crystallized ceramic films at low temperatures |
| 04/10/2002 | EP1195795A2 Vacuum apparatus and method |
| 04/10/2002 | EP1195793A2 Passive bipolar arc control system and method |
| 04/10/2002 | EP1195792A2 Film forming apparatus |
| 04/10/2002 | EP1195756A2 Optical recording medium and optical recording method therefor |
| 04/10/2002 | EP1195452A1 A tool of a surface-coated boron nitride sintered compact |
| 04/10/2002 | EP1194947A1 Methods and apparatus for alignment of ion beam systems using beam current sensors |
| 04/10/2002 | EP1194610A1 Method and system for pumping semiconductor equipment from transfer chambers |
| 04/10/2002 | EP1194609A1 Method and means for drill production |
| 04/10/2002 | EP1194608A1 Sputtering method using virtual shutter |
| 04/10/2002 | EP1194607A2 Copper sputtering target assembly and method of making same |
| 04/10/2002 | EP1194385A1 Protective layers for sputter coated article |
| 04/10/2002 | CN1082659C Sensor for detecting optical fiber cavity coating removal, and its mfg. method |
| 04/10/2002 | CN1082492C Crystalline solid-solution powder with low electrical resistance, its preparing process and uses |
| 04/09/2002 | US6368880 Depositing barrier/wetting layer over surfaces of aperture, the barrier/wetting layer comprising tantalum, tantalum nitride, tungsten, tungsten nitride, and combinations thereof, depositing a conformal metal layer over the surface |
| 04/09/2002 | US6368729 Tungsten film, method of manufacturing the same, and thin-film heater |
| 04/09/2002 | US6368717 Multilayer |
| 04/09/2002 | US6368676 Vacuum deposition; synchronized radio frequency and pulsedcurrents |
| 04/09/2002 | US6368673 Process control; selective heating |
| 04/09/2002 | US6368658 Coating medical devices using air suspension |
| 04/09/2002 | US6368477 Adjustable energy quantum thin film plasma processing system |
| 04/09/2002 | US6368470 Three-layer structure with hydrogenated layer of indium, tin or zinc oxide; clear in transmission with wide anti-reflective bandwidth; nonyellow |
| 04/09/2002 | US6368469 Inductive coils serves as additional target in sputtering; improves uniformity of deposited metal; independent bias of coils allows for additional control over sputtering |
| 04/09/2002 | US6368425 Implanting ions below air bearing surface of recording head; improved tribology between air bearing surface of magnetic recording head and magnetic recording medium; improved wear and corrosion resistance |
| 04/09/2002 | US6368051 Multi-position load lock chamber |
| 04/09/2002 | US6367414 Linear aperture deposition apparatus and coating process |
| 04/09/2002 | US6367267 Integrated phase separator for ultra high vacuum system |
| 04/04/2002 | WO2002027065A1 Surface treatment for improved hardness and corrosion resistance |
| 04/04/2002 | WO2002027064A1 Method and device for depositing especially, organic layers by organic vapor phase deposition |
| 04/04/2002 | WO2002027058A1 Porous getter devices with reduced particle loss and method for their manufacture |
| 04/04/2002 | WO2002027057A2 Sputtering target and method of making same |
| 04/04/2002 | WO2001086697A3 Inductive plasma loop enhancing magnetron sputtering |
| 04/04/2002 | WO2001073157A3 Method and apparatus for reducing contamination in a loadlock |
| 04/04/2002 | WO2001068937A3 Methods of bonding a target to a backing plate |
| 04/04/2002 | US20020039810 Diffusion bonded to one another simultaneously with the development of grains of the second material in the second mass; solid state diffusion between the first mass and the second mass. |
| 04/04/2002 | US20020039690 Phase shift film is composed primarily of a metal and silicon and has a film stress of not more than 100 MPa. |
| 04/04/2002 | US20020039670 Multilayer-coated cutting tool |
| 04/04/2002 | US20020039634 Optical recording medium and optical recording method therefor |
| 04/04/2002 | US20020039000 Composite substrate preparing method,Composite substrate, and el device |
| 04/04/2002 | US20020038690 Electric arc spraying |
| 04/04/2002 | US20020038665 Substrate treatment process |
| 04/04/2002 | US20020038528 Inflatable slit/gate valve |
| 04/04/2002 | DE10044425A1 Verfahren zur Herstellung einer Leuchstoffschicht A process for preparing a phosphor layer |
| 04/04/2002 | CA2424030A1 Surface treatment for improved hardness and corrosion resistance |
| 04/03/2002 | EP1193729A2 Method and apparatus for magnetron sputtering |
| 04/03/2002 | EP1192291A1 Device for monitoring intended or unavoidable layer deposits and corresponding method |
| 04/03/2002 | EP1099009B1 Method for coating bodies made of light metal or light metal alloys by means of a plasma enhanced process |
| 04/03/2002 | EP1038044B1 Wear- and friction reducing layer, substrate with such a layer and method for producing such a layer |