| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/20/2002 | WO2002040735A1 Method for producing an evaporation source |
| 05/16/2002 | WO2002039480A2 Ion beam deposition targets having a replaceable insert |
| 05/16/2002 | WO2001082368A3 Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
| 05/16/2002 | US20020058455 Method of removing surface protrusions from thin films |
| 05/16/2002 | US20020058409 Elimination of overhang in liner/barrier/seed layers using post-deposition sputter etch |
| 05/16/2002 | US20020058163 Graded composition diffusion barriers for chip wiring applications |
| 05/16/2002 | US20020058161 Perpendicular magnetic recording medium and magnetic storage apparatus using the same |
| 05/16/2002 | US20020058115 Process for forming silicon oxide coating on plastic material |
| 05/16/2002 | US20020056814 Method and device for irradiating an ion beam, and related method and device thereof |
| 05/16/2002 | US20020056342 Apparatus and method for generating indium ion beam |
| 05/16/2002 | DE10132201A1 Verfahren zum Herstellen eines Kunststoffschlauches, insbesondere eines Brauseschlauches A method of manufacturing a plastic hose, particularly a shower hose |
| 05/15/2002 | EP1205774A2 Composition for vapor deposition, method for forming antireflection film using it, and optical element |
| 05/15/2002 | EP1205575A1 Method for producing ceramic and apparatus for producing the same, semiconductor device, and piezoelectric device |
| 05/15/2002 | EP1204622A1 Silicon nitride components with protective coating |
| 05/15/2002 | EP1204507A1 Arc-free electron gun |
| 05/15/2002 | EP1092109B1 Vacuum tight coupling for tube sections |
| 05/15/2002 | EP0944744B1 METHOD OF MANUFACTURING FERRITIC STAINLESS FeCrAl-STEEL STRIPS |
| 05/15/2002 | CN1349566A Apparatus for simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor |
| 05/15/2002 | CN1349565A Method and getter devices for use in deposition of thin layers |
| 05/15/2002 | CN1349003A Crystal seat design for sputtering and cleaning chamber and related metalization process |
| 05/14/2002 | US6388327 Capping layer for improved silicide formation in narrow semiconductor structures |
| 05/14/2002 | US6387817 Plasma confinement shield |
| 05/14/2002 | US6387805 Copper alloy seed layer for copper metallization |
| 05/14/2002 | US6387712 Process for preparing ferroelectric thin films |
| 05/14/2002 | US6387576 Black matrix and preparing method thereof, and a display device employing the black matrix |
| 05/14/2002 | US6387573 Phase shift mask using CrAION as phase shifter material and manufacturing method thereof |
| 05/14/2002 | US6387550 Film comprising ferromagnetic layers formed on substance through nonmagnetic layer; magnetization of one layer is pinned by adjacent coercive force increasing layer, other has free magnetization to change magnetic resistance at low field |
| 05/14/2002 | US6387543 Protecting layer |
| 05/14/2002 | US6387536 Aluminum alloy thin film for semiconductor device electrode with excellent corrosion resistance, hillock resistance, void resistance and low electrical resistivity, comprising as alloy components yttrium and hafnium in specified amounts |
| 05/14/2002 | US6387526 Thermal barrier layer and process for producing the same |
| 05/14/2002 | US6387443 Composite coatings |
| 05/14/2002 | US6387231 Moving heaters disposed in a susceptor device in a masked sputtering chamber |
| 05/14/2002 | US6386139 Wafer load/unload apparatus for E-Gun evaporation process |
| 05/10/2002 | WO2002037905A2 Mechanism for prevention of neutron radiation in ion implanter beamline |
| 05/10/2002 | WO2002037543A2 Method and apparatus for cleaning a deposition chamber |
| 05/10/2002 | WO2002037528A2 Magnetron with a rotating center magnet for a vault shaped sputtering target |
| 05/10/2002 | WO2002036848A1 Tantalum or tungsten target-copper alloy backing plate assembly and production method therefor |
| 05/10/2002 | WO2002036847A2 Sputtering target |
| 05/10/2002 | WO2002036846A2 Sputtering target assemblies |
| 05/10/2002 | WO2002014568A3 Chromium-containing cemented carbide body having a surface zone of binder enrichment |
| 05/10/2002 | WO2001053558A3 Electron beam evaporation of transparent indium tin oxide |
| 05/10/2002 | WO2001045141A3 Method and apparatus for smoothing thin conductive films by gas cluster ion beam |
| 05/09/2002 | US20020055004 For use in turbine blade and a turbine vane |
| 05/09/2002 | US20020055003 Zinc oxide films containing p-type dopant and process for preparing same |
| 05/09/2002 | US20020054973 Optical data storage disk |
| 05/09/2002 | US20020054963 Evaporating non- conductive components from the surface of evaporation boat; melting conductive components of evaporation boat simultaneously |
| 05/09/2002 | US20020054958 Method for producing thin films |
| 05/09/2002 | US20020053557 Method and apparatus for producing bulk quantities of nano-sized materials by electrothermal gun synthesis |
| 05/09/2002 | US20020053513 Apparatus for improved power coupling through a workpiece in a semiconductor waffer processing system |
| 05/09/2002 | US20020053512 Ion beam deposition targets having an interlocking interface and a replaceable insert |
| 05/09/2002 | US20020053322 Vacuum system with separable work piece support |
| 05/09/2002 | US20020053318 Slicing of single-crystal films using ion implantation |
| 05/08/2002 | EP1203398A1 Substrate and workpiece support for receiving a substrate |
| 05/08/2002 | EP1203394A1 METHOD FOR PREPARING A CsX PHOTOSTIMULABLE PHOSPHOR AND PHOSPHORS THEREFROM |
| 05/08/2002 | EP1203105A1 Loading system for pvd coating of cutting inserts |
| 05/08/2002 | EP1202702A1 Work piece and method for producing and utilizing said work piece |
| 05/08/2002 | EP1114200B1 Method for vacuum deposit on a curved substrate |
| 05/08/2002 | EP1099002B1 Composition for production of a protective gradient coating on a metal substrate by electron beam evaporation and condensation under vacuum |
| 05/08/2002 | EP0746436B1 Sputtering target with ultra-fine, oriented grains and method of making same |
| 05/08/2002 | DE10051508A1 Verfahren und Einrichtung zur Reduzierung Zündspannung von Leistungspulsen gepulst betriebener Plasmen Method and apparatus for reducing ignition voltage of power pulses pulsed plasmas operated |
| 05/08/2002 | DE10048210A1 Evacuating device comprises a high vacuum pump for evacuating a second chamber, and a one-stage fore-vacuum pump for evacuating a first chamber and for producing a fore-vacuum for the high vacuum pump |
| 05/08/2002 | CN1348509A Vacuum vapor desposition system wih plasma reinforcement including evaporating a solid material, generating electric arc discharge |
| 05/08/2002 | CN1348361A Method for preparing coated drug particles and pharmaceutical formulations thereof |
| 05/08/2002 | CN1348019A Manganese oxide layer forming method and vane for vane compressor |
| 05/08/2002 | CN1348018A Direct double-ion beam diamond-like film depositing process |
| 05/08/2002 | CN1347785A Cutter wiht surface coating buron nitride compacting body |
| 05/08/2002 | CN1347784A Surface coating boron nitride sintered compacting body cutter |
| 05/08/2002 | CN1084307C Glass forming mold and its producing method, and application in cathode ray tube |
| 05/07/2002 | US6384367 Electron beam vaporizer for vacuum coating systems |
| 05/07/2002 | US6383989 Multilayer; substrate, mixed oxide, dielectrics and electroconductivity layers |
| 05/07/2002 | US6383915 Depositing titanium and titanium nitride using high density plasma, then depositing aluminum over the surface with a <111> rockwell curve fwhm angle of one degree or less; reduced pitting |
| 05/07/2002 | US6383624 PVD Al2O3 coated cutting tool |
| 05/07/2002 | US6383574 Ion implantation method for fabricating magnetoresistive (MR) sensor element |
| 05/07/2002 | US6383573 Surface treatment with activated gas comprising noble gas and nitrogen and/or hydrogen; excitation by ultraviolet radiation or plasma discharge; semiconductors, printed circuits |
| 05/07/2002 | US6383566 Reduction of tungsten- or molybdenum halide or organometallic compound; vapor deposition; glazings, mirrors, emissive screens |
| 05/07/2002 | US6383565 Vapor deposition coating apparatus |
| 05/07/2002 | US6383346 Method for forming thin films |
| 05/07/2002 | US6383345 Method of forming indium tin oxide thin film using magnetron negative ion sputter source |
| 05/07/2002 | US6383050 Process for forming non-evaporative getter and method of producing image forming apparatus |
| 05/07/2002 | US6382920 Article with thermal barrier coating and method of producing a thermal barrier coating |
| 05/07/2002 | US6382895 Substrate processing apparatus |
| 05/07/2002 | US6382855 Key sheet and method for manufacturing the same |
| 05/07/2002 | US6382677 Security element and method for producing same |
| 05/07/2002 | CA2200093C Coated articles |
| 05/07/2002 | CA2094252C Rotating magnetron incorporating a removable cathode |
| 05/02/2002 | WO2002035556A1 Manufacturing device for substrate with transparent conductive film |
| 05/02/2002 | WO2002035221A1 Method for chlorine plasma modification of silver electrodes |
| 05/02/2002 | WO2002034961A1 Vacuum metalization process for chroming substrates |
| 05/02/2002 | WO2002034381A1 Systems and methods for fabrication of coating libraries |
| 05/02/2002 | WO2001042522A3 Sputtering target and methods of making same |
| 05/02/2002 | US20020052094 Serial wafer handling mechanism |
| 05/02/2002 | US20020051887 Coated grooving or parting insert and method of making same |
| 05/02/2002 | US20020051886 Coated cutting insert |
| 05/02/2002 | US20020051885 Tool with tool body and protective layer system |
| 05/02/2002 | US20020051859 Not required to be put into cartridge; for DVD (digital video display) |
| 05/02/2002 | US20020051852 For metal machining; coating is composed of layers of refractroy compounds and nanocrystalline aluminum spinel deposited by physical vapor deposition |
| 05/02/2002 | US20020051613 Coating for optical fibers and method therefor |
| 05/02/2002 | US20020050644 Electrode structure and method for fabricating the same |
| 05/02/2002 | US20020050453 Vapor deposition coating apparatus |
| 05/02/2002 | US20020050160 Apparatus and method for in-situ thickness and stoichiometry measurement of thin films |