| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/30/2002 | WO2002043104A2 Hybrid scanning system and methods for ion implantation |
| 05/30/2002 | WO2002043103A2 Extraction and deceleration of low energy beam with low beam divergence |
| 05/30/2002 | WO2002043099A1 Masked vapour deposition in light bulbs |
| 05/30/2002 | WO2002042527A1 Diamond substrate having piezoelectric thin film, and method for manufacturing it |
| 05/30/2002 | WO2002042518A1 Target comprising thickness profiling for an rf magnetron |
| 05/30/2002 | WO2002042517A1 Composite element and method for preparation thereof |
| 05/30/2002 | WO2002042516A2 Sputter deposition of lithium phosphorous oxynitride material |
| 05/30/2002 | WO2002042515A1 Method of making coated cemented carbide cutting tools |
| 05/30/2002 | WO2002042514A1 Method for treating carrier films by means of heavy ion irradiation |
| 05/30/2002 | WO2002042513A2 Hollow cathode target and methods of making same |
| 05/30/2002 | WO2002002848A3 Method and apparatus for processing metals, and the metals so produced |
| 05/30/2002 | WO2001094660A3 Sputtering target |
| 05/30/2002 | WO2001090437A3 Configurable vacuum system and method |
| 05/30/2002 | WO2001073957A3 Battery-operated wireless-communication apparatus and method |
| 05/30/2002 | US20020065309 For therapy of sex-hormone related conditions, as contraceptives |
| 05/30/2002 | US20020064952 Staged aluminum deposition process for filling vias |
| 05/30/2002 | US20020064949 Produced by reactive sintering and vacuum hot pressing powders and products such as sputtering targets |
| 05/30/2002 | US20020064662 Infrared reflecting layer contacting and sandwiched between a first layer and a second layer comprising NiCrOx, that is oxidation graded so that portions close to said reflecting layer are less oxidized that those farther away |
| 05/30/2002 | US20020064605 Method of coating a substrate and vane for vane-type compressor |
| 05/30/2002 | US20020064595 Robotic transferring device. |
| 05/30/2002 | US20020064594 Cleaning mechanism which, before the magnetic film is formed, cleans either one or both of the film-forming face and reverse face of the substrate. |
| 05/30/2002 | US20020063830 Stability of ion beam generated alignment layers by surface modification |
| 05/30/2002 | US20020063337 Barrier layer for copper metallization in integrated circuit fabrication |
| 05/30/2002 | US20020063114 Device for cleaning an article |
| 05/30/2002 | US20020063084 Apparatus and method for reducing contamination in a wafer transfer chamber |
| 05/30/2002 | US20020063056 Methods of forming metal articles |
| 05/30/2002 | US20020063055 Method to stabilize a carbon alignment layer for liquid crystal displays |
| 05/30/2002 | US20020063054 Low temperature cathodic magnetron sputtering |
| 05/30/2002 | US20020063053 Method of producing a thin-film system |
| 05/30/2002 | US20020062791 Table |
| 05/30/2002 | US20020062785 Mask for fabricating display panel |
| 05/29/2002 | EP1209522A2 Mask for fabricating display panel |
| 05/29/2002 | EP1209321A2 Thermally-stabilized thermal barrier coating and process therefor |
| 05/29/2002 | EP1209251A2 Temperature control system for wafer |
| 05/29/2002 | EP1209248A2 Oxidation resistant structure based on a titanium alloy substrate |
| 05/29/2002 | EP1208067A1 Transparent conductor and means for making same |
| 05/29/2002 | EP1207916A1 Medical devices with metal/polymer composites |
| 05/29/2002 | EP0996972B1 Method for targeted production on n-type conductive areas in diamond layers by ion implantation |
| 05/29/2002 | EP0988406B1 Method for making a non-sticking diamond like nanocomposite |
| 05/29/2002 | EP0871793B1 A process for manufacturing ito alloy articles |
| 05/29/2002 | DE10144646A1 Phasenverschiebungsmaskenrohling, Photomaskenrohling, und Vorrichtung und Verfahren zum Herstellen von Rohlingen Phase shift mask blank, photomask blank, and apparatus and methods for the manufacture of blanks |
| 05/29/2002 | DE10056686A1 Vaporizer cell used in a molecular beam epitaxial process comprises a crucible having a heater and an opening, and a covering unit formed by a plate-like screen |
| 05/29/2002 | CN1351273A Manufacture of resin spectacle lens with mark verified by mouth mist |
| 05/29/2002 | CN1351193A Apparatus and method for forming protective film on plasma display |
| 05/28/2002 | USRE37718 Prosthetics |
| 05/28/2002 | US6396966 Glass structures for nanodelivery and nanosensing |
| 05/28/2002 | US6396094 Oriented rhombohedral composition of PbZr1-xTixO3 thin films for low voltage operation ferroelectric RAM |
| 05/28/2002 | US6395448 Pressurization, heating |
| 05/28/2002 | US6395381 Zirconia sintered body; mixture containing stabilizer; heat resistance, shockproof |
| 05/28/2002 | US6395379 Workpiece with wear-protective coating |
| 05/28/2002 | US6395350 Mesoporous transition metal oxide thin films and methods of making and uses thereof |
| 05/28/2002 | US6395343 Superalloy with ceramic coating |
| 05/28/2002 | US6395157 Method and apparatus for sputter etch conditioning a ceramic body |
| 05/28/2002 | US6395156 Sputtering chamber with moving table producing orbital motion of target for improved uniformity |
| 05/28/2002 | US6395151 Vacuum ARC vapor deposition method and apparatus for applying identification symbols to substrates |
| 05/28/2002 | US6395149 Useful for making static dissipative composites; coating a core particle with a conductive metal oxide |
| 05/28/2002 | US6395148 Method for producing desired tantalum phase |
| 05/28/2002 | US6395147 In polypropylene films through the addition of ethylene in a mini-random ethylene-propylene copolymer in an amount of no more than about 1 weight percent; aluminum, packaging |
| 05/28/2002 | US6395146 Monolithic target having sculpter surface |
| 05/28/2002 | US6395100 Method of improving vacuum quality in semiconductor processing chambers |
| 05/28/2002 | US6395093 Self contained, independent, in-vacuum spinner motor |
| 05/28/2002 | US6394025 Vacuum film growth apparatus |
| 05/28/2002 | US6394023 Process kit parts and method for using same |
| 05/23/2002 | WO2002041363A2 System and methods for laser assisted deposition |
| 05/23/2002 | WO2002041206A1 Production management system, and host computer and recorded medium used in the system |
| 05/23/2002 | WO2002040737A1 Method and device for depositing thin films |
| 05/23/2002 | WO2002040736A1 Conical sputtering target |
| 05/23/2002 | WO2002040734A1 A surface coating of a carbide or a nitride |
| 05/23/2002 | WO2002040733A1 Sputtering target producing few particles, backing plate or sputtering apparatus and sputtering method producing few particles |
| 05/23/2002 | WO2002040422A1 Material for forming transparent electroconductive film and method for production thereof |
| 05/23/2002 | WO2002040418A2 Method of making coated articles and coated articles made thereby |
| 05/23/2002 | WO2002040417A2 Methods of obtaining photoactive coatings and/or anatase crystalline phase of titanium oxides and articles made thereby |
| 05/23/2002 | WO2001091922A8 Process for production of ultrathin protective overcoats |
| 05/23/2002 | WO2001041183A8 Dose monitor for plasma doping system |
| 05/23/2002 | US20020061397 Onion-like carbon film and its production |
| 05/23/2002 | US20020061248 High productivity semiconductor wafer processing system |
| 05/23/2002 | US20020061245 Processing system and device manufacturing method using the same |
| 05/23/2002 | US20020059973 Rubber-based composite material and rubber article using the same |
| 05/23/2002 | US20020059903 Deposition mask and method of preparing the same |
| 05/22/2002 | EP1207557A2 Method of attaching layer material and forming layer in predetermined pattern on substrate using mask |
| 05/22/2002 | CN1350599A Sputtering target and production method therefor |
| 05/22/2002 | CN1350322A Laser machining device irradiating semiconductor layer with laser beam |
| 05/22/2002 | CN1350284A System and method for controlling passive bipolar electric arc |
| 05/21/2002 | US6392824 Connecting a glass substrate to metal support |
| 05/21/2002 | US6392245 Scanning wheel for ion implantation process chamber |
| 05/21/2002 | US6392244 Ion beam deposition of diamond-like carbon overcoats by hydrocarbon source gas pulsing |
| 05/21/2002 | US6392188 Apparatus for production of nanosized particulate matter by vaporization of solid materials |
| 05/21/2002 | US6391828 Construction with high Tc superconductor material and process for producing the construction |
| 05/21/2002 | US6391797 Method of manufacturing semiconductor device by sputtering dielectric forming materials while selectively heating growing layer |
| 05/21/2002 | US6391776 Method of depositing a copper seed layer which promotes improved feature surface coverage |
| 05/21/2002 | US6391727 Method of manufacturing a semiconductor device utilizing a(Al2O3)X-(TiO2)1-X gate dielectric film |
| 05/21/2002 | US6391386 Surface treating process |
| 05/21/2002 | US6391377 Surface treating; controlling timing of process with freely programmable process controller unit |
| 05/21/2002 | US6391172 High purity cobalt sputter target and process of manufacturing the same |
| 05/21/2002 | US6391171 Flangeless feed through |
| 05/21/2002 | US6391164 Deposition of coatings and thin films using a vacuum arc with a non-consumable hot anode |
| 05/21/2002 | US6391163 Method of enhancing hardness of sputter deposited copper films |
| 05/21/2002 | US6391115 Underplatform coating tool |
| 05/21/2002 | US6391112 Heat-exchanging workholder for a vacuum unit |
| 05/21/2002 | CA2109962C Process for making superconducting t1-pb-sr-ca-cu oxide films and devices |