| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 06/27/2002 | US20020079217 Methods of treating physical vapor deposition targets |
| 06/27/2002 | US20020079050 Manufacturing metallic strip for packaging having a coating made up of a metallic layer and a polymer film, and the strip obtained |
| 06/27/2002 | US20020079025 Formed by depositing in sequence on substrate through radio frequency sputtering a stoichiometric amount of each alloy material and annealing to form film through solid state diffusion; knives, scalpels, razor blades |
| 06/27/2002 | US20020078895 Plasma treatment apparatus |
| 06/27/2002 | US20020078892 Substrate processing device and through-chamber |
| 06/27/2002 | US20020078881 Sputtering a group III metal in a nitrogen or ammonia environment and depositing it on a growth surface |
| 06/27/2002 | US20020078550 Manufacturing method of magnetoresistive element and film forming apparatus |
| 06/27/2002 | DE10154562A1 Zierbeschichtung für Kraftfahrzeugaussenleuchtenanwendungen Decorative coating for automotive applications Outdoor Lights |
| 06/27/2002 | DE10063790A1 Sputtering target used in the production of reflection layers in erasable and rewritable optical or magneto-optical data storage media is made from an aluminum-titanium alloy containing dopants of boron, magnesium and/or manganese |
| 06/27/2002 | DE10061436A1 Deforming tool used for hot deforming metallic workpieces consists of a base body made from a metallic base alloy with a wear resistant anti-adhesion coating formed as a gradient layer made from titanium and titanium-aluminum nitrides |
| 06/27/2002 | CA2431017A1 Injector and method for prolonged introduction of reagents into plasma |
| 06/26/2002 | EP1217682A2 Method of forming thin film of inorganic solid electrolyte |
| 06/26/2002 | EP1217092A2 Synthetic resin moldings |
| 06/26/2002 | EP1217091A2 Packages and packaging aids |
| 06/26/2002 | EP1217090A1 Vapor deposition repair of superalloy articles |
| 06/26/2002 | EP1217089A2 Enhanced surface preparation process for application of ceramic coatings |
| 06/26/2002 | EP1216772A2 Method for producing a tubular sputtering target |
| 06/26/2002 | EP1216605A1 Method and apparatus for producing bulk quantities of nano-sized materials by electrothermal gun synthesis |
| 06/26/2002 | EP1125000A4 Sputter target/backing plate assembly and method of making same |
| 06/26/2002 | CN2496878Y Ion source apparatus for preparation of superhard film in industrial production |
| 06/26/2002 | CN1355328A Dual-wavelength laser method for helping deposition of function membrane |
| 06/25/2002 | US6411775 Ceramic flash TV evaporator |
| 06/25/2002 | US6410889 Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system |
| 06/25/2002 | US6410331 Combinatorial screening of inorganic and organometallic materials |
| 06/25/2002 | US6410162 Zinc oxide films containing P-type dopant and process for preparing same |
| 06/25/2002 | US6410131 With base coat layer of poly(ester-ether-urethane) copolymer and silane coupling agent having a mercapto group |
| 06/25/2002 | US6410125 Wear-resistant, mechanically highly stressed and low-friction boundary coating construction for titanium or the alloys thereof and a method for producing the same |
| 06/25/2002 | US6409965 Sputtering target and its manufacturing method |
| 06/25/2002 | US6409897 Rotatable sputter target |
| 06/25/2002 | US6409896 Method and apparatus for semiconductor wafer process monitoring |
| 06/25/2002 | US6409890 Method and apparatus for forming a uniform layer on a workpiece during sputtering |
| 06/25/2002 | US6408860 Cooling a panel within the chamber onto which deposits are formed; introducing water vapor causing ice to form on said cooled panel; removing said panel from said chamber while covered with ice; and cleaning |
| 06/25/2002 | US6408610 Method of adjusting gas turbine component cooling air flow |
| 06/25/2002 | CA2220605C Ion source block filament with labyrinth conductive path |
| 06/25/2002 | CA2181076C Method and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatuses |
| 06/20/2002 | WO2002049119A2 Thin film flexible solar cell |
| 06/20/2002 | WO2002049098A1 Processing method and processing apparatus |
| 06/20/2002 | WO2002048425A2 Method and system for icosaborane implantation |
| 06/20/2002 | WO2002048424A1 Ion beam sputtering apparatus |
| 06/20/2002 | WO2002048423A2 Method for coating substrates and mask holder |
| 06/20/2002 | WO2002047865A1 Friction fit target assembly for high power sputtering operation |
| 06/20/2002 | WO2002031216A3 Apparatus for continuous sputter-deposition |
| 06/20/2002 | WO2002027057A3 Sputtering target and method of making same |
| 06/20/2002 | WO2002024983A3 Integrated phase separator for ultra high vacuum system |
| 06/20/2002 | WO2002016484A3 Multilayer polymeric/inorganic oxide structure for enhanced gas or vapor barrier |
| 06/20/2002 | WO2002011732A8 Novel bicyclic and tricyclic pyrrolidine derivatives as gnrh antagonists |
| 06/20/2002 | WO2002006555A9 Sputtering target |
| 06/20/2002 | WO2002005324A3 Differentially-pumped material processing system |
| 06/20/2002 | WO2002004695A3 Thin film processing system |
| 06/20/2002 | WO2002004692A3 Two-stage sputter deposition method |
| 06/20/2002 | WO2001061071A3 Condensation coating method |
| 06/20/2002 | WO2001045141A8 Method and apparatus for smoothing thin conductive films by gas cluster ion beam |
| 06/20/2002 | WO2001041183A9 Dose monitor for plasma doping system |
| 06/20/2002 | US20020076943 Method for evenly coating semiconductor laser end faces and frame used in the method |
| 06/20/2002 | US20020076940 Manufacture of composite oxide film and magnetic tunneling junction element having thin composite oxide film |
| 06/20/2002 | US20020076875 Structure of piezoelectric element and liquid discharge recording head, and method of manufacture therefor |
| 06/20/2002 | US20020076847 Method of attaching layer material and forming layer in predetermined pattern on substrate using mask |
| 06/20/2002 | US20020076573 Vapor deposition repair of superalloy articles |
| 06/20/2002 | US20020075722 Thin-film magnetic element capable of effectively orienting magnetization direction of magnetic layer and manufacturing method thereof |
| 06/20/2002 | US20020075686 Polyester resin composition and light-reflecting molded article thereof |
| 06/20/2002 | US20020075625 High temperature electrostatic chuck |
| 06/20/2002 | US20020074623 Protective film for FPD, vapor deposited material for protective film and its production method, FPD, and manufacturing device for FPD protective film |
| 06/20/2002 | US20020074521 Method and system for icosaborane implantation |
| 06/20/2002 | US20020074519 Electron beam treatment device |
| 06/20/2002 | US20020074509 Contaminant collector trap for ion implanter |
| 06/20/2002 | US20020074317 NanoEDM: an apparatus for machining and building atomic sized structures |
| 06/20/2002 | US20020074226 Film forming apparatus |
| 06/20/2002 | US20020074225 Sputtering device |
| 06/20/2002 | US20020073925 Apparatus and method for exposing a substrate to plasma radicals |
| 06/20/2002 | DE10064143A1 Reflexionsminderungsbeschichtung für Ultraviolettlicht bei großen Einfallswinkeln Antireflection coating for ultraviolet light at large angles of incidence |
| 06/20/2002 | DE10058822A1 Process for treating a carrier film made from a plastic or polymer comprises applying a functional layer as conducting path on the film so that material parts enter recesses of the functional layer to anchor the layer in the foil |
| 06/20/2002 | DE10058767A1 Production of a predetermined gas pressure in a first chamber used in a cathode sputtering device comprises simultaneously introducing a gas into the first chamber and into a second transport chamber |
| 06/20/2002 | DE10038800A1 Production of combined direct manufacture of highly active electrodes used for fuel cells and electrolysis cells comprises using carbon carrier |
| 06/19/2002 | EP1215706A2 Electron beam treatment device |
| 06/19/2002 | EP1215512A2 Anti-reflection coating for ultraviolet light at large angles of incidence |
| 06/19/2002 | EP1215307A2 Unibody crucible |
| 06/19/2002 | EP1215303A1 Method of treating a coated base material |
| 06/19/2002 | EP1215302A1 Sputtering device and film forming method |
| 06/19/2002 | EP1215301A1 Method for treating the bond coating of a component |
| 06/19/2002 | EP1214718A1 Extreme ultraviolet soft x-ray projection lithographic method system and lithography elements |
| 06/19/2002 | EP1214460A1 In-situ formation of multiphase electron beam physical vapor deposited barrier coatings for turbine components |
| 06/19/2002 | EP1214170A1 Apparatuses and methods for applying an indelible and contrasting pattern onto a carrier |
| 06/19/2002 | EP0815283B1 Deposition of diffusion blocking layers within a low pressure plasma chamber |
| 06/19/2002 | CN1354370A Composition for vapour-phase deposition, method for forming anti-reflecting film using the same and its optical element |
| 06/19/2002 | CN1354275A Electric arc evaporimeter, method for driving electric arc evaporimeter and ion electro plating equipment |
| 06/19/2002 | CN1354042A Titanium dioxide photocatalysis air-cleaning film and its preparation method |
| 06/18/2002 | US6408254 Procedure and device for calibrating the gas pressure in a process vacuum chamber (receiver) |
| 06/18/2002 | US6408220 Semiconductor processing techniques |
| 06/18/2002 | US6407499 Method of removing surface protrusions from thin films |
| 06/18/2002 | US6407012 Method of producing silicon oxide film, method of manufacturing semiconductor device, semiconductor device, display and infrared irradiating device |
| 06/18/2002 | US6406776 Surface functionalized diamond crystals and methods for producing same |
| 06/18/2002 | US6406745 Methods for coating particles and particles produced thereby |
| 06/18/2002 | US6406601 Method and apparatus for coating electromagnetic wave shielding films |
| 06/18/2002 | US6406600 CoPt-base sputtering target, method of making same, magnetic recording film and Co-Pt-base magnetic recording medium |
| 06/18/2002 | US6406599 Magnetron with a rotating center magnet for a vault shaped sputtering target |
| 06/18/2002 | US6406598 System and method for transporting and sputter coating a substrate in a sputter deposition system |
| 06/18/2002 | US6406245 Processing system and device manufacturing method using the same |
| 06/18/2002 | US6406209 Upper lid alignment apparatus for hatchback reaction cabin |
| 06/18/2002 | US6405484 Sealing system in which there is relative sliding motion between a gate and a port |
| 06/13/2002 | WO2002047175A2 Zno substrate for solar cells and manufacturing process |