| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 09/19/2002 | US20020132388 Tantalum sputtering target and method of manufacture |
| 09/19/2002 | US20020132142 Magnetic transparent conducting oxide film and method of making |
| 09/19/2002 | US20020132141 Wear resistance, tensile strength |
| 09/19/2002 | US20020132108 Resin moldings |
| 09/19/2002 | US20020132063 Heating for evaporating the film materials corresponding to the respective film layers electron guns, respectively and preliminary heating for preliminarily heating film materials corresponding to respective film layers |
| 09/19/2002 | US20020132047 Used for producing a light-emitting element including a film |
| 09/19/2002 | US20020131656 Rotary fluid bearing coatings and coining and processes for manufacturing the same |
| 09/19/2002 | US20020131202 High moment iron nitride based magnetic head layers resistant to hard axis annealing |
| 09/19/2002 | US20020131182 System and method for controlling deposition thickness using a mask with a shadow that varies with respect to a target |
| 09/19/2002 | US20020130991 Liquid crystal device, color filter substrate, method for manufacturing liquid crystal device, and method for manufacturing color filter substrate |
| 09/19/2002 | US20020130758 Method for thin film NTC thermistor |
| 09/19/2002 | US20020130041 Method of regenerating a phase-change sputtering target for optical storage media |
| 09/19/2002 | US20020130040 System and method for performing sputter deposition using a devergent ion beam source and a rotating substrate |
| 09/19/2002 | US20020130033 Coating a surface of liquid crystalline polymer with palladium by sputtering or ionization plating |
| 09/19/2002 | US20020130031 Directing ionization toward a surface on negatively biased target using divergent ionization current source; rotating substrate positioned proximate to target wherein central axis is normal to surface of target and parallel to deposition |
| 09/19/2002 | US20020129770 Vacuum deposition system |
| 09/19/2002 | DE10210839A1 Harte Mehrlagenbeschichtung, mit einer harten Mehrlagenbeschichtung beschichtetes Werkzeug, welches diese harte Mehrlagenbeschichtung aufweist und Verfahren zum Ausbilden der harten Mehrlagenbeschichtung Multilayer hard coating, coated with a hard multilayer coating tool having this hard multilayer coating and method of forming the hard multilayer coating |
| 09/19/2002 | CA2440942A1 Process catalysed by fluoroalkylsulfonated compounds, preferably bis-triflimide compounds |
| 09/19/2002 | CA2440937A1 Metal bistriflimide compounds, their synthesis and their uses |
| 09/19/2002 | CA2434713A1 Protective cage for coating of medical devices |
| 09/18/2002 | EP1241524A2 Photomask blank, Photomask and method of manufacture |
| 09/18/2002 | EP1171301A4 Flexible laminate for flexible circuit |
| 09/18/2002 | EP0968317B1 Method of forming internal passages within articles and articles formed by same |
| 09/18/2002 | EP0871794B1 Sputtering targets and method for the preparation thereof |
| 09/18/2002 | EP0826131B1 Unibody crucible |
| 09/18/2002 | EP0726967B1 A method for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation of the electrode |
| 09/18/2002 | CN1370334A Fuel cell membrane electrode assemblies with improved power outputs and poison resistance |
| 09/18/2002 | CN1369900A Thin film former and forming method thereof |
| 09/18/2002 | CN1369573A Sediment appts. and sediment method |
| 09/18/2002 | CN1369572A Electrically conducting transparent oxide film |
| 09/17/2002 | US6453264 Surface flaw detection using spatial raman-based imaging |
| 09/17/2002 | US6452196 Power supply hardening for ion beam systems |
| 09/17/2002 | US6451682 Method of forming interconnect film |
| 09/17/2002 | US6451450 Method of depositing a protective layer over a biaxially textured alloy substrate and composition therefrom |
| 09/17/2002 | US6451434 Zinc oxide film containing aluminum, silver, and third layer is oxides,nitrides, carbides and double compounds thereof;windows |
| 09/17/2002 | US6451391 Laser ablation using a target material with almost or the same composition as that of desired thin film, without requiring o2 gas and substrate heating, transparent electrodes, ferro-electric films in nonvolatile random access memory |
| 09/17/2002 | US6451389 From ion beam and hydrocarbon gas; uniform and particle free; automatically cycles between modes to effect automatic removal of carbon-based buildups |
| 09/17/2002 | US6451222 Pressing ceramic powders to desired shapes and density; crystal strucrures |
| 09/17/2002 | US6451185 Diffusion bonded sputtering target assembly with precipitation hardened backing plate and method of making same |
| 09/17/2002 | US6451184 Thin film forming apparatus and process for forming thin film using same |
| 09/17/2002 | US6451181 Method of forming a semiconductor device barrier layer |
| 09/17/2002 | US6451180 Method of making a PVD Al2O3 coated cutting tool |
| 09/17/2002 | US6451179 Coating aluminum multilayers by applying radio frequency power to coils for ionization of targets before metallization; semiconductors; robotics |
| 09/17/2002 | US6451178 Interference layer system |
| 09/17/2002 | US6451177 Vault shaped target and magnetron operable in two sputtering modes |
| 09/17/2002 | US6451176 Electrostatic particle trap for ion beam sputter deposition |
| 09/17/2002 | US6451135 High-purity copper sputtering targets and thin films |
| 09/17/2002 | US6450116 Apparatus for exposing a substrate to plasma radicals |
| 09/12/2002 | WO2002071705A1 A multi communication platform |
| 09/12/2002 | WO2002071414A1 Substrate with deposited transparent condcutive film and method for fabricating color filter |
| 09/12/2002 | WO2002070778A1 Apparatus and method for web cooling in a vacuum coating chamber |
| 09/12/2002 | WO2002070777A1 Cylindrical magnetron target and apparatus for affixing the target to a rotatable spindle assembly |
| 09/12/2002 | WO2002070776A1 Deposition process |
| 09/12/2002 | WO2002070765A1 Refractory metal plates with uniform texture and methods of making the same |
| 09/12/2002 | WO2002070593A1 Generation of viable cell active biomaterial patterns by laser transfer |
| 09/12/2002 | WO2002054454A3 Diamond coatings on reactor wall and method of manufacturing thereof |
| 09/12/2002 | WO2002046491A3 Silver oxide layer, and method of making same |
| 09/12/2002 | WO2002043466A3 Non-thermionic sputter material transport device, methods of use, and materials produced thereby |
| 09/12/2002 | WO2002040736B1 Conical sputtering target |
| 09/12/2002 | US20020127861 Novel sputter PM procedures with polish tool to effectively remove metal defects from target surface nodules (residue) |
| 09/12/2002 | US20020127852 Method of manufacturing semiconductor integrated circuit device and semiconductor manufacturing apparatus |
| 09/12/2002 | US20020127478 For fabrication of passive matrix display; active matrix display; flat panel display; photodiode array |
| 09/12/2002 | US20020127439 Placing substrate in evacuated chamber containing inert gas and reactive gas; sputtering a metal cathode target wherein concentration of reactive gas is sufficiently low that metal is sputtered in metallic mode to deposit a metal film |
| 09/12/2002 | US20020127438 Controlled stress optical coatings for membranes |
| 09/12/2002 | US20020127436 Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system |
| 09/12/2002 | US20020127434 Magnetic recording medium and production method thereof and magnetic recording device |
| 09/12/2002 | US20020127349 Sputtering targets and method for the preparation thereof |
| 09/12/2002 | US20020127337 Surface treating process, surface treating apparatus, vapor-depositing material, and rare earth metal - based permanent magnet with surface treated |
| 09/12/2002 | US20020126265 Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member , thin film forming apparatus and thin film forming method for producing metal film and metal oxide film |
| 09/12/2002 | US20020125824 Shadow mask, a method of forming the shadow mask, and a method of manufacturing a semiconductor device with using the shadow mask |
| 09/12/2002 | US20020125130 Cathode targets of silicon and transition metal |
| 09/12/2002 | US20020125129 Sputtering targets and method for the preparation thereof |
| 09/12/2002 | US20020125128 Tantalum sputtering target with fine grains and uniform texture and method of manufacture |
| 09/12/2002 | US20020125127 Magnetron sputtering system and photomask blank production method based on the same |
| 09/12/2002 | US20020125123 Titanium nitride film having a resistivity of less than about 75 mu Omega-cm; surface smoothness; made by controlling the gas phase deposition mixture, and controlling deposition rate |
| 09/12/2002 | US20020124964 Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same |
| 09/12/2002 | US20020124959 Plasma monitoring method and semiconductor production apparatus |
| 09/12/2002 | DE10134762C1 High performance vaporizer used for vaporizing workpieces in a vacuum deposition chamber consists of a cylindrical helix and a crucible with an integrated vaporization protective screen at its free end |
| 09/12/2002 | CA2438819A1 Refractory metal plates with uniform texture and methods of making the same |
| 09/11/2002 | EP1239306A2 Method for manufacturing an optical filter having laminate film |
| 09/11/2002 | EP1239056A1 Improvement of a method and apparatus for thin film deposition, especially in reactive conditions |
| 09/11/2002 | EP1238950A2 Heat treatable low-E coated articles and methods of making same |
| 09/11/2002 | EP1238122A2 Method and apparatus for forming carbonaceous film |
| 09/11/2002 | EP1238121A1 Surface preparation of a substrate for thin film metallization |
| 09/11/2002 | EP1238120A2 Device and method for coating objects at a high temperature |
| 09/11/2002 | EP1238119A2 Method and apparatus for smoothing thin conductive films by gas cluster ion beam |
| 09/11/2002 | CN2510503Y Index revolving operation table for ion filming room |
| 09/11/2002 | CN1368657A Functional film improved optical property and electrical property |
| 09/11/2002 | CN1368650A Functional film improved optical property and electrical property |
| 09/11/2002 | CN1368649A Functional film improved optical property and electrical property |
| 09/11/2002 | CN1090816C Treatment unit of gas heat-transfer plasma |
| 09/11/2002 | CN1090806C Method for in situ removal of sewage and ion beam implanter |
| 09/11/2002 | CN1090552C Abrasive material for precision surface treatment and manufacturing method thereof |
| 09/11/2002 | CN1090539C Procedure for depositing thin layer on surface of plastic matrix |
| 09/10/2002 | US6449525 Computer system to control multiple step ionized metal plasma deposition process for conformal step coverage |
| 09/10/2002 | US6448612 Pixel thin film transistor and a driver circuit for driving the pixel thin film transistor |
| 09/10/2002 | US6447963 Method of making a light quantity correction filter and method of manufacturing a color cathode ray tube using the light quantity correction filter made by the method |
| 09/10/2002 | US6447912 Coated cemented carbide cutting tool and method of coating it with diamond |
| 09/10/2002 | US6447854 Method of forming a thermal barrier coating system |
| 09/10/2002 | US6447849 By ion injection and to a printer head provided in a printer configured for ejecting ink droplets; recording medium for supporting a signal recording layer; electrically conductive thin metal film, pulsed voltage to implant ions in the surface |