| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/16/2003 | US20030012963 At least one of the antireflective layers comprises at least one mixed oxide layer of zinc and another element selected from the group comprising the elements of groups 2a, 3a, 5a, 4b, 5b, 6b of the periodic table. |
| 01/16/2003 | US20030012886 Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation |
| 01/16/2003 | US20030011299 Organic EL display device and method for fabricating the same |
| 01/16/2003 | US20030011143 Metallic gasket for vacuum device and method of producing thereof |
| 01/16/2003 | US20030011022 Semiconductor device and a process for manufacturing a oxide film |
| 01/16/2003 | US20030010765 Hot plate |
| 01/16/2003 | US20030010645 Barrier enhancement process for copper interconnects |
| 01/16/2003 | US20030010632 Method for manufacturing a semiconductor device and a plating apparatus and a sputtering apparatus therefor |
| 01/16/2003 | US20030010624 System and method for forming base coat and thin film layers by sequential sputter depositing |
| 01/16/2003 | US20030010623 Method and apparatus for forming deposition film, and method for treating substrate |
| 01/16/2003 | US20030010450 Input/output valve switching apparatus of semiconductor manufacturing system |
| 01/16/2003 | US20030010288 Film formation apparatus and film formation method |
| 01/16/2003 | DE20217404U1 Gas barrier coating for a plastic substrate, e.g. a container, comprises a thickness which follows a specified relationship |
| 01/16/2003 | DE10157186C1 Vacuum deposition device comprises a roller frame fixed on a point in a coiling chamber, a process roller frame fixed on points in a process chamber, and a roller frame for winding on a point in a further coiling chamber |
| 01/16/2003 | CA2450498A1 Masking article for use in vehicle manufacturing |
| 01/15/2003 | EP1276160A2 Alignment device which facilitates deposition of organic material through a deposition mask |
| 01/15/2003 | EP1275751A1 Process and apparatus for producing an optically active coating system |
| 01/15/2003 | EP1275750A2 Vapor deposition apparatus |
| 01/15/2003 | EP1275168A2 Method and apparatus for integrated-battery devices |
| 01/15/2003 | EP1275135A1 Methods and apparatus for thermally processing wafers |
| 01/15/2003 | EP1274874A2 Methods of bonding a target to a backing plate |
| 01/15/2003 | EP1274660A1 Method for applying an antireflection coating to inorganic optically transparent substrates |
| 01/15/2003 | EP1198613B1 Device for rotating a substrate to be coated with ceramic and metallic substances in a process chamber |
| 01/15/2003 | EP0879704B1 Thermal printing head, process for producing thermal printing head, recorder, sinter, and target |
| 01/15/2003 | CN1391259A Process for growing P-type ZnO crystal film by real-time doping nitrogen |
| 01/15/2003 | CN1391242A Metal membrane and manufacture thereof, laminated ceramic electronic elements and manufacture thereof |
| 01/15/2003 | CN1390978A Equipment for in-line exchange of substrate in vacuum chamber |
| 01/15/2003 | CN1390977A Process for preparing compound film at ordinary temp |
| 01/15/2003 | CN1390679A Tools coated with cemented carbides |
| 01/15/2003 | CN1390667A Amorphous carbon coated tools and manufacture thereof |
| 01/14/2003 | US6507698 Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film |
| 01/14/2003 | US6506999 Laminate system, a process for the production thereof and use thereof |
| 01/14/2003 | US6506676 Method of manufacturing semiconductor devices with titanium aluminum nitride work function |
| 01/14/2003 | US6506508 Magnetic recording medium, method of production and magnetic storage apparatus |
| 01/14/2003 | US6506461 Vacuum coating a thin layer of solvent-free monomer; curing |
| 01/14/2003 | US6506312 Vapor deposition chamber components and methods of making the same |
| 01/14/2003 | US6506292 Film forming apparatus |
| 01/14/2003 | US6506291 Substrate support with multilevel heat transfer mechanism |
| 01/14/2003 | US6506290 Sputtering apparatus with magnetron device |
| 01/14/2003 | US6506289 Planar optical devices and methods for their manufacture |
| 01/14/2003 | US6506288 Optical film material especially TiO2 or Ta2O5 optical waveguide layer and method for producing such |
| 01/14/2003 | US6506287 Overlap design of one-turn coil |
| 01/14/2003 | US6505415 Vacuum processing apparatus |
| 01/14/2003 | CA2303792C Method for regulating a coating process |
| 01/09/2003 | WO2003003434A1 Method of producing semiconductor thin film and method of producing solar cell |
| 01/09/2003 | WO2003003431A1 Relaxed sige films by surfactant mediation |
| 01/09/2003 | WO2003003417A2 High throughput hybrid deposition system and method using the same |
| 01/09/2003 | WO2003003411A2 Selfhealing flexible photonic composites for light sources |
| 01/09/2003 | WO2003002859A1 Internal combustion engine |
| 01/09/2003 | WO2003002782A1 Method of making a nickel-coated copper substrate and thin film composite containing the same |
| 01/09/2003 | WO2003002629A1 Prduction method for copolymer film, copolymer film produced by the forming method, and semiconductor device using copolymer film |
| 01/09/2003 | WO2002069037A3 Attenuated embedded phase shift photomask blanks |
| 01/09/2003 | US20030009233 Method and system for improving the effectiveness of artificial joints by the application of gas cluster ion beam technology |
| 01/09/2003 | US20030008181 Oxide coated cutting tool |
| 01/09/2003 | US20030008170 Protective ceramic coating comprising metal/alloy layers; for use in turbine engines |
| 01/09/2003 | US20030008168 Soft metal and method of manufacturing the soft metal, and decorative part and method of manufacturing the decorative part |
| 01/09/2003 | US20030008146 Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation |
| 01/09/2003 | US20030008122 Optical component |
| 01/09/2003 | US20030008071 Method of handling organic material in making an organic light-emitting device |
| 01/09/2003 | US20030008068 Process for making high aspect ratio reflective metal flakes |
| 01/09/2003 | US20030007786 Method for melting and evaporating a solid in a vapor deposition coating system |
| 01/09/2003 | US20030007763 Planar waveguide amplifier |
| 01/09/2003 | US20030006684 Catalyst used to form carbon fiber, method of making the same and electron emitting device, electron source, image forming apparatus, secondary battery and body for storing hydrogen |
| 01/09/2003 | US20030006019 Electrically controlled plasma uniformity in a high density plasma source |
| 01/09/2003 | US20030005878 ZnO/sapphire substrate and method for manufacturing the same |
| 01/09/2003 | US20030005578 Method of and apparatus for manufacturing lithium secondary cell |
| 01/08/2003 | EP1274136A2 Method of handling organic material in making an organic light-emitting device |
| 01/08/2003 | EP1274130A2 Organic el display device and method for fabricating the same |
| 01/08/2003 | EP1273680A2 Reflective coatings to reduce radiation heat transfer |
| 01/08/2003 | EP1273679A1 Metallic component with outer function layer and method of production |
| 01/08/2003 | EP1273676A2 Process for producing gas- and liquid-impermeable layers on a substrate |
| 01/08/2003 | EP1273358A2 Release layer, method for producing it and its use |
| 01/08/2003 | EP1273058A2 Thin-film battery having ultra-thin electrolyte and associated method |
| 01/08/2003 | EP1273054A2 Battery-operated wireless-communication apparatus and method |
| 01/08/2003 | EP1273028A2 Method and apparatus for magnetron sputtering |
| 01/08/2003 | EP1272683A1 Dlc layer system and method for producing said layer system |
| 01/08/2003 | CN1389703A High-temperature superconductive element based on nano material and its prepn. |
| 01/08/2003 | CN1389592A Method for heating lining |
| 01/08/2003 | CN1389590A Pulsed laser deposition method and apparatus for preparing smooth film material |
| 01/08/2003 | CN1389589A Deposition process of low-stress superthick nitride and silicide film |
| 01/08/2003 | CN1098522C Multilayer film material system |
| 01/08/2003 | CN1098155C Composite barrier film and process for producing the same |
| 01/07/2003 | US6504294 Method and apparatus for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source |
| 01/07/2003 | US6504228 Semiconductor device and method for manufacturing the same |
| 01/07/2003 | US6504169 Method for reading a radiation image that has been stored in a photostimulable screen |
| 01/07/2003 | US6503669 Photomask blank, photomask and method of manufacture |
| 01/07/2003 | US6503664 Thin film materials for the preparation of attenuating phase shift masks |
| 01/07/2003 | US6503636 Transparent substrate provided with a stack of layers reflecting thermal radiation |
| 01/07/2003 | US6503617 Multilayer film laminates |
| 01/07/2003 | US6503592 Sputtering target, method of producing the target, optical recording medium fabricated by using the sputtering target, and method of fabricating the optical recording medium |
| 01/07/2003 | US6503578 Method for preparing ZnSe thin films by ion-assisted continuous wave CO2 laser deposition |
| 01/07/2003 | US6503573 Bomb annealing of thin films |
| 01/07/2003 | US6503380 Physical vapor target constructions |
| 01/07/2003 | US6503379 Mobile plating system and method |
| 01/07/2003 | US6503374 Simultaneously sputtering strontium, bismuth, tantalum and niobium mixed oxide and bismuth oxide targets at different radio frequency powers to form semiconductor dielectric film |
| 01/07/2003 | US6503373 Method of applying a coating by physical vapor deposition |
| 01/07/2003 | US6503347 Surface alloyed high temperature alloys |
| 01/07/2003 | US6503321 To form a damage layer at an implantation depth below a top surface of said crystal structure, and chemically etching the damage layer to detach a single crystal film from the crystal structure; optoelectronic devices |
| 01/07/2003 | US6502991 Rotary fluid bearing coatings and coining and processes for manufacturing the same |
| 01/03/2003 | WO2003001598A1 Method of making full color display panels |