| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 09/14/2006 | DE102005054404A1 Mikro/Nano-Prägevorrichtung Micro / nano-embossing device |
| 09/13/2006 | EP1700161A2 Methods and devices for fabricating three-dimensional nanoscale structures |
| 09/13/2006 | CN1833352A Actuator element and production method therefor |
| 09/13/2006 | CN1831645A Apparatus for forming fine pattern on substrate |
| 09/13/2006 | CN1274582C Method and device for processing complex three dimensional microstructure on the surface of silicon |
| 09/07/2006 | US20060198959 Method of producing a three-dimensional structure and fine three-dimensional structure |
| 09/07/2006 | US20060198917 Microimprint/nanoimprint device |
| 09/07/2006 | US20060196415 Apparatus for forming fine pattern on substrate |
| 09/07/2006 | US20060196377 Imprint lithography |
| 09/07/2006 | DE102005009660A1 Producing internal combustion engine surfaces with submicron structuring by laser ablation to reduce friction and/or deposits |
| 08/31/2006 | WO2006090682A1 Machining method of microstructure and machining system of microstructure |
| 08/31/2006 | WO2006090620A1 Ultra-fine nozzle and production method therefor |
| 08/31/2006 | US20060193938 Imprinting apparatus |
| 08/31/2006 | US20060192320 Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same |
| 08/31/2006 | DE19750167B4 Verfahren zur Herstellung integrierter Schaltkreise A process for the production of integrated circuits |
| 08/31/2006 | DE102006008464A1 Imprinting apparatus useful for imprinting pattern from template to subject body, comprises mount, body, support, template, and regulator |
| 08/30/2006 | EP1696053A1 Nano-array electrode manufacturing method and photoelectric converter using same |
| 08/30/2006 | CN1272427C Appts. for treating sample in microamount |
| 08/24/2006 | WO2006073829A3 Bonding method for reducing stress in multilayered wafer |
| 08/23/2006 | EP1693950A1 Actuator element and production method therefor |
| 08/23/2006 | CN1270897C Micro electro-mechanical device having integrated movement sensor |
| 08/22/2006 | US7095309 oxidation resistance; titanium silicide, carbide |
| 08/22/2006 | US7093921 Micro-electromechanical actuating mechanism with built-in test circuit |
| 08/22/2006 | US7093920 Method of detecting over-actuation of MEM device |
| 08/17/2006 | US20060180952 Imprint lithography |
| 08/10/2006 | WO2006082867A1 Hybrid contacting/detaching system |
| 08/10/2006 | WO2006036383A3 System and method of testing humidity in a sealed mems device |
| 08/10/2006 | WO2005109095A3 Method for imprint lithography at constant temperature |
| 08/10/2006 | US20060176487 Process control monitors for interferometric modulators |
| 08/10/2006 | DE102005010087B3 Stapelstruktur-Schneideverfahren und Stapelstruktur Stack structure-cutting method and stack structure |
| 08/10/2006 | DE102004055040B4 Verfahren zum Schneiden eines Laminats mit einem Laser und Laminat A method of cutting a laminate with a laser and laminate |
| 08/09/2006 | EP1687237A1 Method to test the hermeticity of a sealed cavity micromechanical device and the device to be so tested |
| 08/08/2006 | US7086145 Magazine, assembly device for microcomponents |
| 08/03/2006 | US20060172553 Method of retaining a substrate to a wafer chuck |
| 08/03/2006 | US20060172541 Method of fabricating micro-needle array |
| 08/02/2006 | EP1244939B1 Device and method in connection with the production of structures |
| 08/02/2006 | CN1811520A Electro-optical measurement of hysteresis in interferometric modulators |
| 07/27/2006 | WO2006077390A1 Improved method and apparatus for monitoring a microstructure etching process |
| 07/27/2006 | US20060166403 Fabrication of advanced silicon-based MEMS devices |
| 07/27/2006 | DE112004001663T5 Erzeugung von Nanopartikeln und Mikropartikeln Production of nanoparticles and microparticles |
| 07/27/2006 | DE102005002006A1 Device for producing three-dimensional structures of materials in the micro- or nano-meter region in micro-electronics production comprises a vacuum chamber containing a media chamber, a reaction chamber and a coupling unit |
| 07/27/2006 | DE10144467B4 Elektronisches Sensorbauteil und Verfahren zu seiner Herstellung Electronic sensor component and method for its preparation |
| 07/26/2006 | EP1682854A1 Modulation method for signal crosstalk mitigation in electrostatically driven devices |
| 07/20/2006 | DE102004063311A1 Gyroscopic table system for isolation of mechanical oscillations in micro and nano-manufacturing has cuboid shaped housing, which interrupts the transmission of destructive oscillations |
| 07/13/2006 | WO2006073829A2 Bonding method for reducing stress in multilayered wafer |
| 07/13/2006 | WO2006056389A9 Method for controlling/regulating a physical quantity of a dynamic system |
| 07/13/2006 | US20060154443 Bonding system having stress control |
| 07/12/2006 | EP1678755A1 Method for the catastrophic transfer of a thin layer after co-implantation |
| 07/12/2006 | EP1678754A1 Method for self- supported transfer of a fine layer by pulsation after implantation or co-implantation |
| 07/11/2006 | US7075209 Compliant bistable micromechanism |
| 07/06/2006 | US20060144814 Imprint lithography |
| 07/06/2006 | US20060144275 Imprint lithography |
| 07/06/2006 | US20060144274 Imprint lithography |
| 07/05/2006 | CN1796956A Dimesize dynamic piezoresistance, pressure sensor, and manufacturing method |
| 07/05/2006 | CN1796266A Equipment for machining structure in micro/nano level |
| 07/04/2006 | US7070700 Method of laser processing and head for ejecting droplet |
| 06/29/2006 | WO2006069137A1 Thermally controlled fluidic self-assembly |
| 06/29/2006 | WO2006068907A1 Injection-molded package for mems inertial sensor |
| 06/29/2006 | WO2006067306A2 Method and computer device for determining the reliability of a microsystem |
| 06/29/2006 | WO2006067239A1 Method of producing nanowires in ambient conditions and nanowires thus produced |
| 06/29/2006 | US20060139407 Method of manufacturing an inkjet head through the anodic bonding of silicon members |
| 06/29/2006 | US20060137554 Stamp for soft lithography, in particular micro contact printing and a method of preparing the same |
| 06/29/2006 | DE19525081B4 Verfahren und Vorrichtung zum Testen der Funktion von Mikrostrukturelementen Method and device for testing the function of microstructure elements |
| 06/28/2006 | EP1567796A4 Devices and methods for programmable microscale manipulation of fluids |
| 06/28/2006 | CN1794423A Method of manufacturing an inkjet head through the anodic bonding of silicon members |
| 06/28/2006 | CN1793923A Preparation method of water soluble CdTe/CdS nuclear/shell type quantum point |
| 06/28/2006 | CN1261346C Running fix platform for macro/micro dual driven miniature type robot |
| 06/27/2006 | US7067397 Method of fabricating high yield wafer level packages integrating MMIC and MEMS components |
| 06/27/2006 | US7065857 Method of manufacturing electronic device |
| 06/22/2006 | US20060134825 Injection-molded package for MEMS inertial sensor |
| 06/22/2006 | US20060134799 Fluid on surface of support increases viscosity when heated, having first micro-components suspended therein each adapted to engage binding sites; for flat panel displays |
| 06/22/2006 | US20060130904 Fluid ejection device with inner and outer arms |
| 06/22/2006 | DE102004059122A1 Electrostatic holder, e.g. for a semiconductor wafer at an integrated circuit, has a conductive and elastic layer at the electrodes to compensate for movement shifts through thermal expansion |
| 06/21/2006 | EP1672393A1 Microlens array sheet and method for manufacturing the same |
| 06/21/2006 | EP1671924A2 Micromechanical device and method of manufacturing a micromechanical device |
| 06/21/2006 | EP1671923A2 Micromechanical device and method of manufacturing a micromechanical device |
| 06/21/2006 | CN1790064A Method of manufacturing fine structure body with organic and inorganic composite materials and nano impression technique and the fine structure body |
| 06/21/2006 | CN1789110A Wafer bonding of micro-electro mechanical systems to active circuitry |
| 06/21/2006 | CN1789109A Integration of micro-electro mechanical systems and active circuitry |
| 06/21/2006 | CN1789007A Printing plate and method for fabricating the same |
| 06/21/2006 | CN1260749C Prepn. process for magnetic core solenoidal microinduction element of micro-electromechanical system |
| 06/21/2006 | CN1260615C Device and method in connection with production of structures |
| 06/21/2006 | CN1260116C Computer vision based test apparatus and method for micro electro-mechanical systems |
| 06/15/2006 | WO2005120791A3 Method for making tools for micro replication |
| 06/15/2006 | US20060128058 Wafer bonding of micro-electro mechanical systems to active circuitry |
| 06/15/2006 | US20060126185 Microlens array sheet and method for manufacturing the same |
| 06/15/2006 | US20060125084 Integration of micro-electro mechanical systems and active circuitry |
| 06/14/2006 | CN1259231C Vacuum packing method for elements used in microelectromechanical system |
| 06/13/2006 | US7062418 Computer aided design method and system for developing a microfluidic system |
| 06/13/2006 | US7060224 Methods for the electronic, homogeneous assembly and fabrication of devices |
| 06/08/2006 | WO2006059391A1 Slide material, process for producing the same and apparatus utilizing the slide material |
| 06/07/2006 | EP1663493A1 Microstructure devices and their production |
| 06/06/2006 | US7057135 Method of precise laser nanomachining with UV ultrafast laser pulses |
| 06/06/2006 | US7056764 Electronic sensor device and method for producing the electronic sensor device |
| 06/01/2006 | WO2006056389A1 Method for controlling/regulating a physical quantity of a dynamic system |
| 06/01/2006 | US20060115920 Semiconductor device having MEMS |
| 06/01/2006 | US20060113701 Manufacturing micro-structured elements |
| 06/01/2006 | US20060113286 Stack structure cutting method and stack structure |
| 06/01/2006 | DE102004056699A1 Verfahren zur Steuerung/Regelung einer physikalischen Größe eines dynamischen Systems, insbesondere eines mikromechanischen Sensors Method for controlling / regulating a physical quantity of a dynamic system, in particular a micromechanical sensor |
| 06/01/2006 | CA2599603A1 Method for controlling/regulating a physical variable of a dynamic system, in particular a micromechanical sensor |