| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 11/11/2008 | US7449358 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 11/11/2008 | US7448865 Transcript apparatus |
| 11/11/2008 | US7448862 Transcript apparatus |
| 11/06/2008 | US20080271490 Channel structure and process for production thereof |
| 11/05/2008 | EP1986949A1 Stamping methods and devices |
| 11/05/2008 | EP1759245B1 Modified metal mold for use in imprinting processes |
| 11/05/2008 | CN101298315A Preparation of nano-tube contilever beam array |
| 11/05/2008 | CN101297989A Batch preparation of hollow micro-needle based on molding |
| 11/04/2008 | US7444880 Method and apparatus for measuring the mechanical response of micro-electro-mechanical systems |
| 10/30/2008 | WO2008130847A1 Extensions of self-assembled structures to increased dimensions via a 'bootstrap' self-templating method |
| 10/30/2008 | US20080270061 System and method for sensor replication for ensemble averaging in micro-electromechanical system (mems) |
| 10/30/2008 | DE10317889B4 Mikromechanisches Bauteil und Verfahren zu seiner Herstellung Micromechanical element and process for its preparation |
| 10/29/2008 | CN101293628A Process for manufacturing three-dimensional miniature mold |
| 10/29/2008 | CN100429800C Solid embossing of polymer devices |
| 10/28/2008 | US7442336 Capillary imprinting technique |
| 10/28/2008 | US7442028 Molding apparatus and molding method |
| 10/23/2008 | WO2008125094A2 Method for forming a nanostructure and/or microstructure on a surface, and apparatus for carrying out said method |
| 10/22/2008 | CN101291873A Process for manufacturing micromechanical devices containing a getter material and devices so manufactured |
| 10/22/2008 | CN100427378C Microstructure manufacture and microsystem integration |
| 10/21/2008 | CA2414734C Fault detection in a micro electro-mechanical device |
| 10/16/2008 | US20080254626 Processing apparatus |
| 10/15/2008 | EP1979080A2 Microreactor glass diaphragm sensors |
| 10/14/2008 | US7436076 Micromechanical component having an anodically bonded cap and a manufacturing method |
| 10/14/2008 | US7435485 Magnetic material, and a MEMS device using the magnetic material |
| 10/14/2008 | US7435353 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
| 10/09/2008 | WO2008076391A3 Dry adhesives and methods for making dry adhesives |
| 10/09/2008 | WO2008076390A3 Dry adhesives and methods for making dry adhesives |
| 10/09/2008 | US20080248600 Method and device for wafer backside alignment overlay accuracy |
| 10/09/2008 | US20080247572 Micro-Electro-Mechanical System (Mems) Capacitor Microphone and Method of Manufacturing Thereof |
| 10/08/2008 | CN101279710A Method for judging wafer backside alignment overlay accuracy and wafer thereof |
| 10/02/2008 | WO2008117173A1 Method for producing self-supporting membranes |
| 10/01/2008 | CN101274742A Anti-current-rush bulk silicon etching corollary equipment |
| 09/25/2008 | WO2008114852A2 Mold, mold production process, processing apparatus, and processing method |
| 09/25/2008 | US20080233331 Method and device for producing a nanopatterned disc |
| 09/24/2008 | EP1972996A1 Method and device for generating a nanostructured disc |
| 09/24/2008 | EP1971548A2 Method of forming a sealed channel of a microfluidic reactor and a microfluidic reactor comprising such channel |
| 09/18/2008 | WO2008111533A1 Patterned insulating fine particle film, electronic component using the patterned insulating fine particle film, micromachine, optical component, and process for producing patterned insulating fine particle film |
| 09/18/2008 | US20080227234 Method of manufacturing a semiconductor device |
| 09/18/2008 | US20080226813 Layout micro-electro mechanical system device; alternating pre-determined thickness deposit polyimide polymer and silver conductor to create interwoven matrix; material printer in drops, no use of photomask |
| 09/17/2008 | EP1970347A1 Process to manufacture micro- or nanometric particles |
| 09/17/2008 | EP1970345A2 Method and system for a composite polymer for printed MEMS |
| 09/17/2008 | EP1968885A2 Production of multilayer microcomponents by the sacrificial thick layer method |
| 09/17/2008 | CN101268012A Fine structure body and method for manufacturing same |
| 09/16/2008 | US7426416 System and method for sensor replication for ensemble averaging in micro-electromechanical systems (MEMS) |
| 09/12/2008 | WO2008106928A2 Method for the production of membranes that can be electrically and/or magnetically activated, and magnetic actuator having such a membrane |
| 09/11/2008 | DE102007051977A1 Verfahren zur Herstellung von elektrisch und/oder magnetisch ansteuerbaren Membranen sowie magnetischer Aktor mit einer derartigen Membran A process for the production of electrically and / or magnetically controllable membranes and magnetic actuator with such a membrane |
| 09/10/2008 | EP1966078A1 Method for sealing an opening |
| 09/10/2008 | CN101263429A Film-forming composition, method for pattern formation, and three-dimensional mold |
| 09/10/2008 | CN101263077A A method of manufacturing a mems capacitor microphone, a stack of foils comprising such a mems capacitor microphone, an electronic device comprising such a mems capacitor microphone and use of the ele |
| 09/10/2008 | CN100417512C A device for processing a three dimensional structure into a substrate |
| 09/09/2008 | US7422980 Methods of positioning and/or orienting nanostructures |
| 09/04/2008 | WO2008087048A3 Test device for micro-mechanical components |
| 09/04/2008 | US20080213766 Method and device for detecting the presence of a single target nucleic acid in samples |
| 09/04/2008 | US20080211875 Inkjet nozzle device with cantilevered actuating arm |
| 09/04/2008 | US20080210320 Microfabricated elastomeric valve and pump systems |
| 09/03/2008 | CN101256280A Method for releasing fabrication curved surface area on membrana |
| 09/03/2008 | CN101254574A Method for impacting micro-plasticity forming with strong laser and device thereof |
| 09/03/2008 | CN101254326A Preparation of micro-needle array injection syringe |
| 09/03/2008 | CN100415636C Method for fabricating three-dimensional microstructure by fib-cvd and drawing system for three-dimensional microstructure |
| 09/02/2008 | US7420654 Method of varying dimensions of a substrate during nano-scale manufacturing |
| 08/27/2008 | EP1192453A4 Molecular and atomic scale evaluation of biopolymers |
| 08/27/2008 | CN101253399A Sensor arrangement comprising a substrate and a housing and method for producing a sensor arrangement |
| 08/27/2008 | CN100413779C Equipment for machining structure in micro/nano level |
| 08/27/2008 | CN100413778C Micro-structure and its fabrication method |
| 08/26/2008 | US7417315 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging |
| 08/26/2008 | US7416961 Method for structuring a flat substrate consisting of a glass-type material |
| 08/21/2008 | US20080200028 Methods of positioning and/or orienting nanostructures |
| 08/20/2008 | EP1959472A2 Power overlay structure for MEMS devices and method for making power overlay structure for MEMS devices |
| 08/20/2008 | EP1957395A1 Process for manufacturing micromechanical devices containing a getter material and devices so manufactured |
| 08/20/2008 | EP1721120A4 Method and system to measure characteristics of a film disposed on a substrate |
| 08/20/2008 | EP1206352B1 Fault detection in a micro electro-mechanical device |
| 08/20/2008 | CN101244800A Power overlay structure and method for making the same |
| 08/20/2008 | CN100411969C Detecting method for micromachinery structure, micro electromechanical assembly and microdetecting structure |
| 08/14/2008 | US20080190748 Power overlay structure for mems devices and method for making power overlay structure for mems devices |
| 08/13/2008 | EP1567913A4 A chucking system and method for modulating shapes of substrates |
| 08/12/2008 | US7412358 Efficient method of extracting the pull-in parameters of an electrostatically activated MEMS device for the purpose of designing the device |
| 08/07/2008 | WO2008063686A3 Microstructured tool and method of making same using laser ablation |
| 08/07/2008 | US20080187719 Nano-imprinting mold, method of manufacture of nano-imprinting mold, and recording medium manufactured with nano-imprinting mold |
| 08/06/2008 | EP1951612A2 Electronic device comprising a mems element |
| 08/06/2008 | EP1951609A1 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 08/06/2008 | CN101234748A Method for constructing polymer ordered micro-configuration |
| 08/06/2008 | CN101234221A Method of preparing micro needle array syringe |
| 08/06/2008 | CN100409414C Gas switching device, gas supply source system, method for control gas flow and method for etching silicon |
| 08/06/2008 | CN100408336C Thermoelastic expanding element |
| 07/31/2008 | WO2007124357A9 Integrated mems metrology device using complementary measuring combs |
| 07/31/2008 | DE202008007122U1 Einrichtung zur Erzeugung von mikrostrukturierten Funktionsoberflächen auf Substraten mit wenigstens einem Laser Means for generating microstructured functional surfaces on substrates with at least one laser |
| 07/30/2008 | EP1948556A1 Hierarchical nanopatterns by nanoimprint lithography |
| 07/24/2008 | WO2008088097A1 Fabrication of freestanding micro hollow tubes by template-free localized electrochemical deposition |
| 07/24/2008 | WO2008087048A2 Test device for micro-mechanical components |
| 07/24/2008 | US20080176034 Process and apparatus for fabricating precise microstructures and polymeric molds for making same |
| 07/24/2008 | US20080174046 Capillary Imprinting Technique |
| 07/23/2008 | EP1946831A1 Modular microchip inspection apparatus |
| 07/23/2008 | EP1946186A2 Microstructure synthesis by flow lithography and polymerization |
| 07/23/2008 | EP1945563A1 Cover wafer or component cover, wafer part or component that can be inserted using microsystems technology, and soldering method for connecting corresponding wafer or component parts |
| 07/23/2008 | CN101224867A High depth-width-ratio structure etching method for isotropic materials based on microscopic laminar control |
| 07/23/2008 | CN100405542C Method and system for forming a semiconductor device |
| 07/22/2008 | US7403323 Process control monitors for interferometric modulators |
| 07/17/2008 | WO2007144826A3 Pharmaceutical tablets with diffractive microstructure and compression tools for producing such tablets |
| 07/17/2008 | US20080171382 Method and device for detecting the presence of a single target nucleic acid in a sample |
| 07/17/2008 | US20080171380 Nanovolume apparatus for use in fertility, immunology, cytology, gas analysis and pharmaceutical screening |