| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
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| 12/09/1997 | US5695565 Wear resistance; lubricity |
| 11/27/1997 | WO1997044692A2 Fabrication of small-scale coils and bands as photomasks on optical fibers for generation of in-fiber gratings, electromagnets as micro-nmr coils, microtransformers, and intra-vascular stents |
| 11/20/1997 | WO1997043026A1 Apparatus and method for manipulating particles in a liquid medium by ultrasonic waves |
| 11/18/1997 | CA2109240C Wafer holding apparatus for holding a wafer |
| 10/14/1997 | US5677248 Method of etching semiconductor wafers |
| 10/14/1997 | US5676906 Method of forming fine ceramics structure |
| 10/08/1997 | EP0800081A1 Method of performing fine working |
| 09/10/1997 | EP0794562A2 Micromachining method and micromachined structure |
| 09/02/1997 | US5663016 All-polymeric phase shift masks |
| 08/14/1997 | DE19703271A1 Materials testing apparatus for measuring tensile strength of very thin layers |
| 07/15/1997 | US5648127 Method of applying, sculpting, and texturing a coating on a substrate and for forming a heteroepitaxial coating on a surface of a substrate |
| 07/01/1997 | US5643641 Surface treatment of polymer substrates, carbon, vaporization and reaction to modify surface structure |
| 06/12/1997 | DE19545370C1 Assembly and joining method for dielectric micro-components |
| 06/03/1997 | US5635243 Forming a coating on a substrate by radiating to immobilize, diffuse, vaporize and react constiuent elements or alter its physical structure (carbide to diamond on steel); cutting tool inserts |
| 05/07/1997 | EP0772045A1 All-silicon monolithic motion sensor with integrated conditioning circuit |
| 05/06/1997 | US5626779 Micromachine transducer with cantilevered movable portion |
| 04/23/1997 | EP0769814A1 Method for separating devices on a common substrate, in particular electronic device elements |
| 04/15/1997 | US5620931 Methods for fabricating monolithic device containing circuitry and suspended microstructure |
| 04/15/1997 | US5620754 Method of treating and coating substrates |
| 02/20/1997 | DE19543893C1 Aligning second structure opposite micromechanical first structure in substrate |
| 02/05/1997 | EP0757372A1 Field emission display fabrication method |
| 01/30/1997 | WO1997003472A1 A method for producing motion and force by controlling the twin structure orientation of a material and its uses |
| 01/29/1997 | CN1141602A Using laser for fabricating coatings substrate |
| 01/08/1997 | EP0752018A1 Surface treatment techniques |
| 12/31/1996 | US5588597 Nozzle plate for a liquid jet print head |
| 10/30/1996 | EP0739250A1 Using lasers to fabricate coatings on substrates |
| 10/23/1996 | EP0637386B1 Method for fabricating microstructures |
| 10/17/1996 | WO1996032650A1 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes |
| 10/15/1996 | US5565084 Forming hole for tube, etchant solution, electrode, current source in silicon substrate |
| 09/10/1996 | US5554415 Vaporization with lasers; coating |
| 09/06/1996 | WO1996026781A1 Method of controlling crystallization of organic compounds and solid-state component for controlling crystallization in said method |
| 07/30/1996 | US5540095 Monolithic accelerometer |
| 06/18/1996 | US5527744 Wafer method for breaking a semiconductor |
| 04/25/1996 | DE19535666A1 Removal of plastics moulds after mfr. of finely-divided prods. from ceramic suspensions |
| 04/17/1996 | CN1120733A The use of a saw frame with tape as a substrate carrier for wafer level backend processing |
| 04/02/1996 | US5504026 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes |
| 03/26/1996 | US5501784 Process for producing microstructure metallic elements |
| 02/13/1996 | US5491427 Probe and electrical part/circuit inspecting apparatus as well as electrical part/circuit inspecting method |
| 01/18/1996 | DE4436298C1 Pressure sensor chip structure |
| 12/06/1995 | CN1112879A Nozzle plate for a liquid jet print head and method for its production |
| 11/23/1995 | WO1995031584A1 Surface treatment techniques |
| 11/21/1995 | US5468324 Spin-on and peel polymer film method of data recording duplication and micro-structure fabrication |
| 11/14/1995 | US5465604 Method for adjusting sensitivity of a sensor |
| 10/10/1995 | US5457072 Process for dicing a semiconductor wafer having a plated heat sink using a temporary substrate |
| 10/10/1995 | US5456798 Methods and apparatus for processing curved surface |
| 10/05/1995 | DE19511596A1 Semiconductor wafer etching method |
| 10/04/1995 | EP0543901B1 Monolithic accelerometer |
| 08/24/1995 | WO1995020253A3 Using lasers to fabricate coatings on substrates |
| 07/27/1995 | WO1995020253A2 Using lasers to fabricate coatings on substrates |
| 07/27/1995 | CA2181440A1 Using lasers to fabricate coatings on substrates |
| 06/27/1995 | US5426942 Method and apparatus for driving microbodies |
| 06/21/1995 | EP0658917A2 Fine-processing apparatus using low-energy neutral particle beam |
| 06/20/1995 | US5426076 Dielectric deposition and cleaning process for improved gap filling and device planarization |
| 05/31/1995 | EP0655781A2 Integrated circuit processing |
| 05/23/1995 | US5417408 Wafer holding apparatus for holding a wafer |
| 05/23/1995 | US5417111 Monolithic chip containing integrated circuitry and suspended microstructure |
| 03/21/1995 | US5399415 Isolated tungsten microelectromechanical structures |
| 03/08/1995 | EP0641657A1 Fluid print head nozzle plate and method of its manufacture |
| 02/28/1995 | US5393706 Integrated partial sawing process |
| 02/22/1995 | EP0639777A1 Inspecting electrical components using a probe |
| 02/16/1995 | DE4345219A1 Device for connecting and holding a chip structure |
| 02/16/1995 | DE4327104A1 Device for connecting and holding a chip structure |
| 02/14/1995 | US5389182 Use of a saw frame with tape as a substrate carrier for wafer level backend processing |
| 02/08/1995 | EP0637386A1 Method for fabricating microstructures. |
| 02/03/1995 | CA2129212A1 Use of a saw frame with tape as a substrate carrier for wafer level backend processing |
| 11/29/1994 | US5368898 Treating surfaces with magnetism and solvent, fixing particles on surface |
| 11/15/1994 | US5364742 Micro-miniature structures and method of fabrication thereof |
| 10/19/1994 | EP0620092A1 Bodies having microstructure and process for the production thereof |
| 09/13/1994 | US5345824 Monolithic accelerometer |
| 09/06/1994 | US5344539 Electrochemical fine processing apparatus |
| 09/06/1994 | US5344526 Method for etching diamond |
| 08/17/1994 | EP0610657A2 Integrated partial sawing process |
| 08/02/1994 | US5334342 Etching substrate to form cavities, nucleating and growing polycrystalline diamond film on surface to fill cavities, then bonding optical material to film and removing it from substrate to expose patterns |
| 07/05/1994 | US5326726 Forming chips and transistors with oxide layers, passivation, etching polysilicon for multilayer element |
| 06/21/1994 | US5322538 Method of processing photosensitive glass with sections of differing exposure energies and article |
| 05/24/1994 | US5314572 Integrated circuits, bridge supported by four corner posts |
| 05/10/1994 | US5311604 Method of manufacturing devices for optical fiber networks, and devices manufactured thereby |
| 05/04/1994 | EP0595071A1 Wafer holding apparatus for holding a wafer |
| 04/20/1994 | CN1085667A Micro-miniature structures and method of fabrication thereof |
| 04/13/1994 | EP0592094A2 Micro-miniature structure fabrication |
| 02/22/1994 | US5288382 Optical fine processing apparatus |
| 10/28/1993 | WO1993021536A1 Method for fabricating microstructures |
| 10/06/1993 | EP0563782A2 Optical fine processing apparatus |
| 10/06/1993 | EP0563616A2 Electrochemical fine processing apparatus |
| 09/15/1993 | EP0560043A2 Manufacturing method of devices for lightguide networks and elements produced using this method |
| 09/07/1993 | US5242711 Microstructure |
| 08/10/1993 | US5234571 Stepped mold inserts, a process for the manufacture of stepped mold inserts, and stepped microstructural bodies with the mold inserts |
| 06/23/1993 | EP0547371A1 Process for producing stepped moulds, stepped moulds and stepped body having a microstructure moulded therewith |
| 06/09/1993 | EP0545234A1 Micro-mechanical method of structuring a polymer alignment layer |
| 06/02/1993 | EP0543901A1 Monolithic accelerometer. |
| 03/31/1993 | EP0394305B1 Device for measuring acceleration |
| 08/05/1992 | EP0497227A2 Method and apparatus for fabrication of micro-structures using non-planar, exposure beam lithography |
| 04/21/1992 | US5106455 Method and apparatus for fabrication of micro-structures using non-planar, exposure beam lithography |
| 03/05/1992 | WO1992003740A1 Monolithic accelerometer |
| 12/03/1991 | US5070317 Miniature inductor for integrated circuits and devices |
| 11/19/1991 | US5065628 Instrument for measuring accelerations and process of making the same |
| 06/18/1991 | US5025346 Laterally driven resonant microstructures |
| 07/13/1989 | WO1989005459A3 Device for measuring acceleration |
| 06/15/1989 | WO1989005459A2 Device for measuring acceleration |