Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 99 - Subject matter not provided for in other groups of this subclass
Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
11/2003
11/06/2003WO2003038920A3 Curved electro-active actuators
11/06/2003WO2003010878A3 Mems element having perpendicular portion formed from substrate
11/06/2003WO2002084722A3 Detachable substrate with controlled mechanical hold and method for production thereof
11/05/2003CN1453204A Establishment of great signal equivalent circuit macro mold for microelectronic machine system and device
11/05/2003CN1453203A Establishment of system-level design library for microelectronic machine system modules
11/04/2003US6642067 Method of trimming micro-machined electromechanical sensors (MEMS) devices
10/2003
10/30/2003US20030203158 Stereolithographic fabrication of monolithic housing structures for machines
10/28/2003US6639713 Silicon micromachined optical device
10/23/2003WO2003086959A2 Transfer method for the production of microstructured substrates
10/23/2003US20030197214 Monolithic integrated crystal-structure-processed mechanical, and combined mechanicaland electrical devices, and methods and systems for making
10/23/2003US20030196489 Method of trimming micro-machined electromechanical sensors (MEMS) devices
10/22/2003CN1449990A Post-package technology for microelectromechinical system
10/16/2003WO2003085701A2 Methods of positions and/or orienting nanostructures
10/16/2003WO2003085700A2 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices
10/16/2003WO2003084708A1 Method and apparatus for laser micro-machining of polymeric articles using a mode-locked laser
10/16/2003US20030192587 Microfluidic device and manufacture thereof
10/09/2003WO2003083932A1 A method for measuring etch rtes during a release process
10/09/2003WO2003031317A3 Micromechanical sensor having a self-test function and optimization method
10/08/2003EP1350029A2 Valves and pumps for microfluidic systems and method for making microfluidic systems
10/07/2003US6629745 Fault detection in a micro electro-mechanical device
10/02/2003US20030186522 Methods of positioning and/or orienting nanostructures
09/2003
09/30/2003US6627067 Rapid, reliable and inexpensive characterization of such as nucleic acids; increased temperature, bias voltage operating range and chemical environment accommodation; reduced noise levels; durable
09/25/2003WO2003009317A3 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
09/25/2003WO2002025349A3 Multi-axis magnetically actuated device
09/25/2003US20030178635 Perpendicular torsion micro-electromechanical switch
09/18/2003US20030173411 Method of heating superposed components and heating apparatus therefor
09/17/2003EP1222031B1 Method and device for moving and placing liquid drops in a controlled manner
09/11/2003US20030170053 Device for transferring a pattern to an object
09/03/2003EP1340810A1 Apparatus for treating sample in microamount
09/03/2003EP1340809A1 Well unit for detecting cell chemotaxis and separating chemotactic cells
09/03/2003EP1339550A1 A process and an apparatus for the formation of patterns in films using temperature gradients
09/03/2003EP1246730B1 Thermal transfer of microstructured layers
09/02/2003US6612029 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
08/2003
08/28/2003WO2003070623A1 Micro fluid system support unit and manufacturing method thereof
08/28/2003US20030161970 Method and apparatus for manufacturing ultra fine three-dimensional structure
08/28/2003US20030159608 Device and method in connection with the production of structures
08/27/2003CN2569339Y Induction coupling plasma deep layer etching machine
08/27/2003CN2568620Y Single layer multi-freedom gas static pressure nano positioning platform
08/26/2003US6610960 Method for drilling micro-holes with a laser beam
08/21/2003WO2003035915A8 Method for producing monocrystalline metallic wire
08/21/2003WO2001074707A3 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods
08/21/2003US20030157783 Use of sacrificial layers in the manufacture of high performance systems on tailored substrates
08/21/2003US20030157751 Using a design that provides a cavity in the lower pole piece inside which is located at least two coils, one on the top of the other; increased writing speed
08/20/2003CN1437714A Device for transferring a pattern to an object
08/14/2003WO2003066231A1 Device for the production of capillary jets and micro- and nanometric particles
08/07/2003WO2003065434A1 Method of treating surface, semiconductor device, process for producing semiconductor device, and apparatus for treatment
08/07/2003WO2003064316A1 Integrated structure on a mobile piece, in particular an integrated optical structure
08/07/2003US20030148065 Miniature reaction chamber template structure for fabrication of nanoscale molecular systems and devices
08/07/2003US20030146095 Methods for the electronic, Homogeneous assembly and fabrication of devices
07/2003
07/31/2003WO2003061948A1 Method for molding microstructures and nanostructures
07/30/2003EP1331084A1 Process for shaping micro and nano structures
07/30/2003EP1330411A1 Thermoelastic actuator design
07/30/2003CN1433379A Gear and method of making the same
07/30/2003CN1433358A Thermal transfer of microstructured layers
07/24/2003WO2003060986A2 Method of forming a removable support with a sacrificial layers and of transferring devices
07/24/2003WO2003060975A1 Method and device for anisotropic etching of high aspect ratio
07/24/2003US20030138555 Thermal transfer of microstructured layers
07/22/2003US6595232 Placing mixture of organic binder and precursor between mold and substrate, heating under vacuum to thermoform mixture onto substrate in shape of mold, presintering, assembling with second substrate, heating to form one-piece recessed structure
07/22/2003US6595058 Method and apparatus for determining dynamic response of microstructure by using pulsed broad bandwidth ultrasonic transducer as BAW hammer
07/22/2003US6594894 Inducing electromigration forces within electrically conductive segment to cause aluminum material to flow through micro-sized die aperture, producing elongated extruded member coupled to micro-sized electrically conductive segment
07/10/2003US20030130804 Systems and methods for analyzing viscoelastic properties of combinatorial libraries of materials
07/10/2003US20030129782 Method and apparatus for MEMS device nebulizer lubrication system
07/03/2003US20030124848 Method for measuring etch rates during a release process
07/03/2003US20030123125 Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
07/02/2003EP1323196A1 Solid state embossing of polymer devices
07/02/2003EP1322545A2 Method of trimming micro-machined electromechanical sensors (mems) devices
07/01/2003US6586947 Method and device for inspecting a microactuator
06/2003
06/24/2003US6582890 Multiple wavelength photolithography for preparing multilayer microstructures
06/24/2003US6582178 Mini-modual manufacturing environmental
06/19/2003US20030111759 Methods of fabricating microneedle arrays using sacrificial molds, and microneedle arrays fabricated thereby
06/17/2003US6580076 Micro-manipulation method
06/12/2003US20030107612 Micro mechanical device fault detection
06/11/2003CN1423303A Protective circuit of automation for semiconductor factory
06/03/2003US6573154 High aspect ratio trench isolation process for surface micromachined sensors and actuators
05/2003
05/30/2003WO2003043801A1 A device for processing a three dimensional structure into a substrate
05/27/2003US6569382 Electroosmotic movement and attachment of microscale and nanoscale devices
05/22/2003WO2003043189A2 Method for gap adjustment of two mechanical elements of a substantially planar micro-mechanical structure and corresponding electromechanical resonator
05/21/2003EP1230340A4 Methods and apparatus for the electronic, homogeneous assembly and fabrication of devices
05/20/2003US6567715 Method and system for automated on-chip material and structural certification of MEMS devices
05/15/2003US20030088966 Magazine, assembly device for microcomponents and method for assembling microcomponents
05/13/2003US6562278 Methods of fabricating housing structures and micromachines incorporating such structures
05/08/2003WO2003038920A2 Curved electro-active actuators
05/06/2003US6558882 Laser working method
05/01/2003WO2003035915A1 Method for producing monocrystalline metallic wire
05/01/2003US20030080478 Method of fabricating micro device and method of manufacturing mold for molding the same
04/2003
04/29/2003US6555856 Semiconductor device with means for verifying a hermetic seal therefor
04/29/2003US6555441 Method of aligning structures on opposite sides of a wafer
04/24/2003US20030075790 Structure for aligning chips in stacked arrangement
04/23/2003EP1304556A2 Consumable for laser capture microdissection
04/22/2003US6551851 Production of diaphragms over a cavity by grinding to reduce wafer thickness
04/17/2003WO2003031317A2 Micromechanical sensor having a self-test function and optimization method
04/10/2003WO2003029803A1 A microfluidic device and manufacture thereof
04/10/2003US20030066956 Optical tools manipulated by optical traps
04/09/2003CN1409832A Device and method in connection with production of structures
04/08/2003US6544863 Method of fabricating semiconductor wafers having multiple height subsurface layers
04/03/2003US20030062089 Microfluidic device and manufacture thereof
04/01/2003US6542829 Characterization of microelectromechanical structures
04/01/2003US6541386 Method for producing a structure with narrow pores
04/01/2003US6540319 Movement sensor in a micro electro-mechanical device
03/2003
03/26/2003CN2541433Y Appts. for controlling regular movement of microplasmid in soliquoid
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