Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 99 - Subject matter not provided for in other groups of this subclass
Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
03/2003
03/25/2003US6537846 Substrate bonding using a selenidation reaction
03/20/2003US20030054588 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
03/20/2003US20030052702 Electronic sensor device and method for producing the electronic sensor device
03/20/2003US20030051339 Method for assembling cassette-loaded microcomponents
03/19/2003EP1292863A2 Multiphoton absorption method using patterned light
03/18/2003US6535663 Microelectromechanical device with moving element
03/18/2003US6534425 Mask design and method for controlled profile fabrication
03/18/2003US6532805 For superfine materials and ultra thin film materials used for semiconductor devices; atomic force microscope
03/12/2003EP1206352A4 Fault detection in a micro electro-mechanical device
03/11/2003US6531080 Method for producing and magazining micro-components
03/06/2003WO2003018299A1 Optical tools manipulated by optical traps
03/06/2003US20030044106 Mems element having perpendicular portion formed from substrate
03/06/2003CA2457916A1 Optical tools manipulated by optical traps
02/2003
02/27/2003WO2002093202A3 Improved apparatus, system and method for applying optical gradient forces
02/26/2003EP1285879A2 Method of aligning structures on opposite sides of a wafer
02/25/2003US6524517 Polymerization of hydrogel solution; solidification
02/20/2003WO2003014667A1 Method and device for trimming sensors with oscillating structures
02/20/2003WO2002053290A3 Valves and pumps for microfluidic systems and method for making microfluidic systems
02/19/2003CN1398296A Well unit for detecting cell chemotaxis and separating chemotactic cells
02/19/2003CN1398295A Appts. for treating sample in microamount
02/18/2003US6521324 Thermal transfer of microstructured layers
02/13/2003US20030032299 Method of aligning structures on opposite sides of a wafer
02/11/2003US6516671 Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
02/06/2003WO2003010878A2 Mems element having perpendicular portion formed from substrate
02/06/2003US20030028360 Efficient method of extracting the pull-in parameters of an electrostatically activated mems device for the purpose of designing the device
02/06/2003US20030024632 Process for forming metal micro-patterns on plastic substrate
01/2003
01/30/2003WO2003009317A2 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
01/30/2003US20030019833 Microfabricated elastomeric valve and pump systems
01/29/2003CN1394276A Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
01/28/2003US6511463 Methods of fabricating microneedle arrays using sacrificial molds
01/23/2003WO2002089982A3 Methods for screening substances in a microwell array
01/23/2003US20030017679 Substrate bonding using a selenidation reaction
01/16/2003WO2003005124A1 A stamp having an antisticking layer and a method of forming of repairing such a stamp
01/16/2003WO2002028766A3 Method of trimming micro-machined electromechanical sensors (mems) devices
01/16/2003US20030010762 Laser processing apparatus and laser processing method
01/16/2003US20030010131 Grain growth of electrical interconnection for microelectromechanical systems (mems)
01/08/2003EP1273094A2 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods
01/02/2003US20030003571 Well unit for detecting cell chemotaxis and separating chemotactic cells
01/02/2003US20030003570 Microsample treatment apparatus
01/02/2003US20030001221 Micromechanical component as well as a method for producing a micromechanical component
01/02/2003EP1268122A1 Magazine, assembly device for microcomponents and method for assembling microcomponents
01/02/2003EP1268121A1 Method for assembling cassette-loaded microcomponents
12/2002
12/26/2002US20020196521 Methods of making mechanisms in which relative locations of elements are maintained during manufacturing
12/26/2002US20020196440 Structure for aligning chips in stacked arrangement
12/19/2002US20020190607 Frequency sensitivity analysis and optimum design for MEMS resonator
12/19/2002US20020190037 Method for drilling micro-holes with a laser beam
12/19/2002US20020189357 Method and apparatus for determining dynamic response of microstructure by using pulsed broad bandwidth ultrasonic transducer as BAW hammer
12/19/2002DE10125397A1 Verfahren zum Bohren von Mikrolöchern mit einem Laserstrahl A method of drilling microvia holes using a laser beam
12/18/2002EP1265701A2 Method and apparatus for producing compact microarrays
12/18/2002CN1385360A SDH pointer treatment method and circuit
12/12/2002US20020185478 Method and apparatus for micro-machining of articles that include polymeric materials
12/11/2002EP1264215A1 Device for transferring a pattern to an object
12/05/2002WO2002096795A1 Device for light modulation by reflection and method for the production thereof
12/05/2002US20020183996 Computer aided design method and system for developing a microfluidic system
12/03/2002US6490073 Microactuator for optical switching and method for fabricating the same
11/2002
11/28/2002WO2002096167A1 Method for drilling microholes using a laser beam
11/27/2002EP1260807A1 Consumable for laser capture microdissection
11/21/2002WO2002093202A2 Improved apparatus, system and method for applying optical gradient forces
11/21/2002WO2001071409A3 Apparatus and method for two-dimensional steered-beam nxm optical switch using single-axis mirror arrays and relay optics
11/21/2002US20020172639 Applying carbon nanotubes to low-viscosity dispersion medium to obtain a high-viscosity dispersing liquid which includes carbon nanotubes; forming a network of carbon nanotubes having electrical and/or magnetic connections by removing
11/21/2002US20020171901 Multi-axis magnetically actuated device
11/21/2002US20020170879 Methods and apparatus for forming submicron patterns on films
11/21/2002US20020170695 Metal mold manufacturing method, metal mold, optical element, and optical element manufacturing method
11/21/2002CA2447472A1 Improved apparatus, system and method for applying optical gradient forces
11/14/2002WO2002089982A2 Methods for screening substances in a microwell array
11/14/2002WO2002075794A3 A method for making a micromechanical device by using a sacrificial substrate
11/14/2002US20020168278 Valves and pumps for microfluidic systems and method for making microfluidic systems
11/14/2002CA2665706A1 Methods for screening substances in a microwell array
11/13/2002CN1379436A Substrate linkage using selenylation reaction
11/12/2002US6480319 Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays
11/07/2002WO2002088804A1 Silicon micromachined optical device
11/07/2002US20020164820 Miniaturized apparatus for use in analyzing sample associated with fertility, immunology, cytology, gas analysis and drug screening
10/2002
10/31/2002DE10119523A1 Substrate such as wafer for manufacture of electronic or micro-mechanical chips, has multiplexer for selecting components of process-monitoring circuitry
10/30/2002EP1252028A2 Temporary bridge for micro machined structures
10/30/2002EP1251974A2 Methods and apparatus for forming submicron patterns on films
10/29/2002US6472235 Apparatus and method for preparing backside-ground wafers for testing
10/24/2002WO2002084722A2 Detachable substrate with controlled mechanical hold and method for production thereof
10/17/2002DE10118529C1 Verfahren zur Strukturierung eines aus glasartigem Material bestehenden Flächensubstrats Method for structuring a planar substrate consisting of glassy material
10/15/2002US6465225 Method and device for manipulating particles in microsystems
10/09/2002EP1246730A1 Thermal transfer of microstructured layers
10/02/2002EP1246238A2 Method of fabricating a bonded substrate
10/02/2002EP1244939A1 Device and method in connection with the production of structures
10/02/2002EP1244900A1 Grain growth of electrical interconnection for microelectromechanical systems (mems)
10/01/2002US6458513 Forming cavities, masking and etching silicon substrate to form three dimensional structure
09/2002
09/26/2002WO2002075794A2 A method for making a micromechanical device by using a sacrificial substrate
09/26/2002US20020135864 Silicon micromachined optical device
09/26/2002US20020135855 Apparatus and method for 2-dimensional steered-beam nxm optical switch using single-axis mirror arrays
09/25/2002EP1242223A1 Microreaction systems and molding methods
09/25/2002CN1371338A Movement sensor in micro electro mechanical device
09/19/2002WO2002073684A1 Method for structuring a flat substrate consisting of a glass-type material
09/19/2002US20020132389 Method for making a micromechanical device by using a sacrificial substrate
09/17/2002US6450696 Optical connector ferrules and method for production thereof
09/11/2002CN1369039A Microfabricated elastomeric valve and pump systems
09/06/2002WO2002068104A1 Process for producing emulsion and microcapsules and apparatus therefor
09/06/2002WO2002038386B1 A process and an apparatus for the formation of patterns in films using temperature gradients
09/05/2002US20020122918 Multiple wavelength photolithography for preparing multilayer microstructures
09/05/2002US20020121908 Method and device for inspecting a microactuator
08/2002
08/22/2002DE10104868A1 Mikromechanisches Bauelement sowie ein Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component as well as a process for producing a micromechanical component
08/20/2002US6437902 Optical beam steering switching system
08/20/2002US6436187 High quality colloidal crystals; settling particles of such as silica, polystyrene or polymethyl methacrylate in an ordered manner
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