Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
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03/10/2005 | US20050051412 Ceramic channel plate for a fluid-based switch, and method for making same |
03/09/2005 | CN1590278A Die carrier |
03/03/2005 | WO2005020294A2 “control of etch and deposition processes” |
03/03/2005 | US20050048688 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
03/03/2005 | US20050046758 Method of transcribing biomolecular patterns, method of manufacturing chip boards, and method of manufacturing biochips |
03/03/2005 | US20050046661 Method of detecting a fault in a micro-electromechanical device |
03/03/2005 | US20050046660 Micro-electromechanical fluid ejection device having an integrated movement sensor |
03/03/2005 | US20050046659 Method of detecting a fault condition in a micro-electromechanical device |
03/03/2005 | US20050045974 Die carrier |
03/03/2005 | DE10125397B4 Verfahren zum Bohren von Mikrolöchern mit einem Laserstrahl A method of drilling microvia holes using a laser beam |
03/02/2005 | EP1510500A2 Die carrier for a MEMS with a fluid chamber |
03/02/2005 | EP1510251A1 Process and apparatus for producing microcapsules |
03/02/2005 | CN1586653A Piezoelectric driven array micro spray and its processing method |
03/02/2005 | CN1191175C Thermal transfer element. product composed of it and their producing method |
03/01/2005 | US6861365 Method and system for forming a semiconductor device |
03/01/2005 | US6860419 Apparatus and method for controlling movement of a device after packaging |
02/24/2005 | US20050042792 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
02/24/2005 | US20050042777 Control of etch and deposition processes |
02/24/2005 | US20050040562 Nanoparticle-filled stereolithographic resins |
02/24/2005 | US20050039618 Stamp having an antisticking layer and a method of forming of repairing such a stamp |
02/24/2005 | US20050039530 Micromechanical sensor having a self-test function and optimization method |
02/23/2005 | EP1508834A2 Nanoparticle-filled stereolithographic resins |
02/23/2005 | EP1508161A2 Methods of positions and/or orienting nanostructures |
02/23/2005 | CN1585103A Locak bonding and sealing method |
02/23/2005 | CN1583544A Detecting method for micromachinery structure, micro electromechanical assembly and microdetecting structure |
02/17/2005 | WO2003085700A3 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices |
02/17/2005 | DE10331806A1 Production of large-surface, micro-structured elements, e.g. X-ray detectors, involves depositing vertical crystals, filling the spaces with another substance, removing crystals and filling the cavities with a third substance |
02/16/2005 | EP1242223B1 Method for molding materials on a planar substrate |
02/16/2005 | CN1580949A Method for preparing nano colour coupler colloid |
02/16/2005 | CN1189770C Sleeve for optical connector double-pipe and manufacturing method thereof and optical conuctor combination device |
02/15/2005 | US6855898 Ceramic channel plate for a switch |
02/10/2005 | WO2005012161A1 Method of producing three-dimensional structure and fine three-dimensional structure |
02/10/2005 | US20050030551 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates |
02/10/2005 | US20050028618 System for determining characteristics of substrates employing fluid geometries |
02/09/2005 | CN1576841A Transcribing method for biomolecule shape, method for producing chip substrate and method for producing biochip |
02/08/2005 | US6852454 Multi-tiered lithographic template and method of formation and use |
02/08/2005 | US6851174 Integrally cast magazine for microcomponents |
02/03/2005 | US20050026312 Method for producing and testing a corrosion-resistant channel in a silicon device |
01/27/2005 | US20050020005 Manufacturing method of a micro structure |
01/27/2005 | US20050018171 Noninvasive method for characterizing and identifying embedded micropatterns |
01/27/2005 | DE20320446U1 Aufspannvorrichtung zum Modulieren von Formen und Substraten Clamping device for modulating shapes and substrates |
01/26/2005 | CN1571180A Multilayer film piezoelectric element for fine positioning micro-actuator and method for making same |
01/26/2005 | CN1569610A Method and device for processing complex three dimensional microstructure on the surface of silicon |
01/25/2005 | US6847907 Defect detection and repair of micro-electro-mechanical systems (MEMS) devices |
01/20/2005 | US20050014374 Gap tuning for surface micromachined structures in an epitaxial reactor |
01/13/2005 | WO2005002773A1 Method of connecting module layers suitable for the production of microstructure components and a microstructure component |
01/13/2005 | WO2004076339A3 Method for manufacturing microstructures having multiple microelements with through-holes |
01/13/2005 | WO2004051744A3 Mems control chip integration |
01/13/2005 | US20050008821 Powder coating; electrodeposition of polymer in mold |
01/13/2005 | US20050006224 Mechanical or electromechanical systems, real time feedback control operating on a time scale commensurate with the formation of nanoscale solid state features |
01/13/2005 | CA2495788A1 Method of connecting module layers suitable for the production of microstructure components and a microstructure component |
01/12/2005 | CN1564280A Prepn. process for magnetic core solenoidal microinduction element of micro-electromechanical system |
01/12/2005 | CN1564276A Mini magnetic core solenoidal microinduction element and its prepn. method |
01/12/2005 | CN1562729A Running fix platform for macro/micro dual driven miniature type robot |
01/12/2005 | CN1562728A Corm micromanipulator based on inertia-friction principle |
01/06/2005 | WO2005000732A1 Pulsed ion beam control of solid state features |
01/06/2005 | US20050002025 Channel structure and process for production thereof |
01/05/2005 | EP1244900B1 Grain growth of electrical interconnection for microelectromechanical systems (mems) |
01/05/2005 | DE10325334A1 Forming sublithographic regions on or in substrate, involves forming first sublithographic structure by anodic oxidation of metal coating, and using as mask when forming second sublithographic structure |
12/29/2004 | WO2004114017A1 A nano impression lithographic process which involves the use of a die having a region able to generate heat |
12/29/2004 | WO2004017368A3 Sidewall smoothing in high aspect ratio/deep etching using a discreet gas switching method |
12/29/2004 | WO2003085701A3 Methods of positions and/or orienting nanostructures |
12/29/2004 | EP1490195A1 Method and apparatus for laser micro-machining of polymeric articles using a mode-locked laser |
12/23/2004 | WO2004110717A2 Method for manufacturing perforated microstructures by using fluidic jets |
12/23/2004 | WO2004055594A3 Method and system for determining characteristics of substrates employing fluid geometries |
12/23/2004 | US20040260418 Customized microfluidic device design, ordering, and manufacturing |
12/23/2004 | US20040259357 Surface treatment method, semiconductor device, method of fabricating semiconductor device, and treatment apparatus |
12/23/2004 | CA2761196A1 Method for manufacturing microstructures having hollow microelements using fluidic jets during a molding operation |
12/22/2004 | CN1556027A Three dimensional micro structure mould pressing etching method compatible with integrated circuit technology |
12/15/2004 | EP1486455A1 Micro fluid system support unit and manufacturing method thereof |
12/15/2004 | CN1554567A Magnetic hetero nano fiber self assembling super crystal lattice structure material and its preparing method |
12/09/2004 | US20040247237 Use of applied force to improve mems switch performance |
12/07/2004 | US6829753 Microfluidic design automation method and system |
12/07/2004 | US6828897 Methods and compositions for optimizing interfacial properties of magnetoresistive sensors |
12/07/2004 | US6828164 Method for measuring the etching speed |
12/02/2004 | WO2004103666A2 Method, system, holder and assembly for transferring templates during imprint lithography processes |
12/02/2004 | US20040241592 Irradiating light onto a member having a modulation profile smaller than the wavelength of irradiated light and forming a distribution of optical near-field corresponding to surface of said member; introducing material gas to be used for a photochemical reaction; causing photochemical reaction |
11/25/2004 | WO2004102637A1 Micro-machined device structures having on and off-axis orientations |
11/25/2004 | US20040231796 Structure and method for measuring the etching speed |
11/24/2004 | EP1480263A1 Method of treating surface, semiconductor device, process for producing semiconductor device, and apparatus for treatment |
11/24/2004 | EP1479446A1 Device for the production of capillary jets and micro- and nanometric particles |
11/24/2004 | CN1549767A Optical tools manipulated by optical traps |
11/23/2004 | US6823124 Laser-guided manipulation of non-atomic particles |
11/18/2004 | US20040228734 Valves and pumps for microfluidic systems and method for making microfluidic systems |
11/18/2004 | DE10317889A1 Mikromechanisches Bauteil und Verfahren zu seiner Herstellung Micromechanical element and process for its preparation |
11/17/2004 | CN2656396Y Low light electronic mechanical system air fight packaging clamping device |
11/17/2004 | CN1546364A Computer vision based test apparatus and method for micro electro-mechanical systems |
11/16/2004 | US6819822 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
11/16/2004 | US6819820 Use of applied force to improve MEMS switch performance |
11/11/2004 | WO2004076049A3 Method and apparatus for fabricating nanoscale structures |
11/11/2004 | US20040223883 System for determining characteristics of substrates employing fluid geometries |
11/11/2004 | US20040222500 Detachable substrate with controlled mechanical hold and method for production thereof |
11/04/2004 | US20040218334 Selective update of micro-electromechanical device |
11/03/2004 | CN1542885A Selective update of micro-electromechanical device |
11/03/2004 | CN1174237C Method of producing detector belonging to gas sensor, and detector produced in accordance with the method |
11/02/2004 | US6813412 Mems element having perpendicular portion formed from substrate |
11/02/2004 | US6811242 Fault detection in a micro mechanical device |
10/28/2004 | WO2004092050A1 Method for producing a micromachined layered device |
10/28/2004 | WO2004092049A1 Micromechanical component and method for its production |
10/28/2004 | WO2004008248A3 A method of forming a mold and molding a micro-device |