Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
03/2005
03/10/2005US20050051412 Ceramic channel plate for a fluid-based switch, and method for making same
03/09/2005CN1590278A Die carrier
03/03/2005WO2005020294A2 “control of etch and deposition processes”
03/03/2005US20050048688 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
03/03/2005US20050046758 Method of transcribing biomolecular patterns, method of manufacturing chip boards, and method of manufacturing biochips
03/03/2005US20050046661 Method of detecting a fault in a micro-electromechanical device
03/03/2005US20050046660 Micro-electromechanical fluid ejection device having an integrated movement sensor
03/03/2005US20050046659 Method of detecting a fault condition in a micro-electromechanical device
03/03/2005US20050045974 Die carrier
03/03/2005DE10125397B4 Verfahren zum Bohren von Mikrolöchern mit einem Laserstrahl A method of drilling microvia holes using a laser beam
03/02/2005EP1510500A2 Die carrier for a MEMS with a fluid chamber
03/02/2005EP1510251A1 Process and apparatus for producing microcapsules
03/02/2005CN1586653A Piezoelectric driven array micro spray and its processing method
03/02/2005CN1191175C Thermal transfer element. product composed of it and their producing method
03/01/2005US6861365 Method and system for forming a semiconductor device
03/01/2005US6860419 Apparatus and method for controlling movement of a device after packaging
02/2005
02/24/2005US20050042792 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
02/24/2005US20050042777 Control of etch and deposition processes
02/24/2005US20050040562 Nanoparticle-filled stereolithographic resins
02/24/2005US20050039618 Stamp having an antisticking layer and a method of forming of repairing such a stamp
02/24/2005US20050039530 Micromechanical sensor having a self-test function and optimization method
02/23/2005EP1508834A2 Nanoparticle-filled stereolithographic resins
02/23/2005EP1508161A2 Methods of positions and/or orienting nanostructures
02/23/2005CN1585103A Locak bonding and sealing method
02/23/2005CN1583544A Detecting method for micromachinery structure, micro electromechanical assembly and microdetecting structure
02/17/2005WO2003085700A3 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices
02/17/2005DE10331806A1 Production of large-surface, micro-structured elements, e.g. X-ray detectors, involves depositing vertical crystals, filling the spaces with another substance, removing crystals and filling the cavities with a third substance
02/16/2005EP1242223B1 Method for molding materials on a planar substrate
02/16/2005CN1580949A Method for preparing nano colour coupler colloid
02/16/2005CN1189770C Sleeve for optical connector double-pipe and manufacturing method thereof and optical conuctor combination device
02/15/2005US6855898 Ceramic channel plate for a switch
02/10/2005WO2005012161A1 Method of producing three-dimensional structure and fine three-dimensional structure
02/10/2005US20050030551 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates
02/10/2005US20050028618 System for determining characteristics of substrates employing fluid geometries
02/09/2005CN1576841A Transcribing method for biomolecule shape, method for producing chip substrate and method for producing biochip
02/08/2005US6852454 Multi-tiered lithographic template and method of formation and use
02/08/2005US6851174 Integrally cast magazine for microcomponents
02/03/2005US20050026312 Method for producing and testing a corrosion-resistant channel in a silicon device
01/2005
01/27/2005US20050020005 Manufacturing method of a micro structure
01/27/2005US20050018171 Noninvasive method for characterizing and identifying embedded micropatterns
01/27/2005DE20320446U1 Aufspannvorrichtung zum Modulieren von Formen und Substraten Clamping device for modulating shapes and substrates
01/26/2005CN1571180A Multilayer film piezoelectric element for fine positioning micro-actuator and method for making same
01/26/2005CN1569610A Method and device for processing complex three dimensional microstructure on the surface of silicon
01/25/2005US6847907 Defect detection and repair of micro-electro-mechanical systems (MEMS) devices
01/20/2005US20050014374 Gap tuning for surface micromachined structures in an epitaxial reactor
01/13/2005WO2005002773A1 Method of connecting module layers suitable for the production of microstructure components and a microstructure component
01/13/2005WO2004076339A3 Method for manufacturing microstructures having multiple microelements with through-holes
01/13/2005WO2004051744A3 Mems control chip integration
01/13/2005US20050008821 Powder coating; electrodeposition of polymer in mold
01/13/2005US20050006224 Mechanical or electromechanical systems, real time feedback control operating on a time scale commensurate with the formation of nanoscale solid state features
01/13/2005CA2495788A1 Method of connecting module layers suitable for the production of microstructure components and a microstructure component
01/12/2005CN1564280A Prepn. process for magnetic core solenoidal microinduction element of micro-electromechanical system
01/12/2005CN1564276A Mini magnetic core solenoidal microinduction element and its prepn. method
01/12/2005CN1562729A Running fix platform for macro/micro dual driven miniature type robot
01/12/2005CN1562728A Corm micromanipulator based on inertia-friction principle
01/06/2005WO2005000732A1 Pulsed ion beam control of solid state features
01/06/2005US20050002025 Channel structure and process for production thereof
01/05/2005EP1244900B1 Grain growth of electrical interconnection for microelectromechanical systems (mems)
01/05/2005DE10325334A1 Forming sublithographic regions on or in substrate, involves forming first sublithographic structure by anodic oxidation of metal coating, and using as mask when forming second sublithographic structure
12/2004
12/29/2004WO2004114017A1 A nano impression lithographic process which involves the use of a die having a region able to generate heat
12/29/2004WO2004017368A3 Sidewall smoothing in high aspect ratio/deep etching using a discreet gas switching method
12/29/2004WO2003085701A3 Methods of positions and/or orienting nanostructures
12/29/2004EP1490195A1 Method and apparatus for laser micro-machining of polymeric articles using a mode-locked laser
12/23/2004WO2004110717A2 Method for manufacturing perforated microstructures by using fluidic jets
12/23/2004WO2004055594A3 Method and system for determining characteristics of substrates employing fluid geometries
12/23/2004US20040260418 Customized microfluidic device design, ordering, and manufacturing
12/23/2004US20040259357 Surface treatment method, semiconductor device, method of fabricating semiconductor device, and treatment apparatus
12/23/2004CA2761196A1 Method for manufacturing microstructures having hollow microelements using fluidic jets during a molding operation
12/22/2004CN1556027A Three dimensional micro structure mould pressing etching method compatible with integrated circuit technology
12/15/2004EP1486455A1 Micro fluid system support unit and manufacturing method thereof
12/15/2004CN1554567A Magnetic hetero nano fiber self assembling super crystal lattice structure material and its preparing method
12/09/2004US20040247237 Use of applied force to improve mems switch performance
12/07/2004US6829753 Microfluidic design automation method and system
12/07/2004US6828897 Methods and compositions for optimizing interfacial properties of magnetoresistive sensors
12/07/2004US6828164 Method for measuring the etching speed
12/02/2004WO2004103666A2 Method, system, holder and assembly for transferring templates during imprint lithography processes
12/02/2004US20040241592 Irradiating light onto a member having a modulation profile smaller than the wavelength of irradiated light and forming a distribution of optical near-field corresponding to surface of said member; introducing material gas to be used for a photochemical reaction; causing photochemical reaction
11/2004
11/25/2004WO2004102637A1 Micro-machined device structures having on and off-axis orientations
11/25/2004US20040231796 Structure and method for measuring the etching speed
11/24/2004EP1480263A1 Method of treating surface, semiconductor device, process for producing semiconductor device, and apparatus for treatment
11/24/2004EP1479446A1 Device for the production of capillary jets and micro- and nanometric particles
11/24/2004CN1549767A Optical tools manipulated by optical traps
11/23/2004US6823124 Laser-guided manipulation of non-atomic particles
11/18/2004US20040228734 Valves and pumps for microfluidic systems and method for making microfluidic systems
11/18/2004DE10317889A1 Mikromechanisches Bauteil und Verfahren zu seiner Herstellung Micromechanical element and process for its preparation
11/17/2004CN2656396Y Low light electronic mechanical system air fight packaging clamping device
11/17/2004CN1546364A Computer vision based test apparatus and method for micro electro-mechanical systems
11/16/2004US6819822 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
11/16/2004US6819820 Use of applied force to improve MEMS switch performance
11/11/2004WO2004076049A3 Method and apparatus for fabricating nanoscale structures
11/11/2004US20040223883 System for determining characteristics of substrates employing fluid geometries
11/11/2004US20040222500 Detachable substrate with controlled mechanical hold and method for production thereof
11/04/2004US20040218334 Selective update of micro-electromechanical device
11/03/2004CN1542885A Selective update of micro-electromechanical device
11/03/2004CN1174237C Method of producing detector belonging to gas sensor, and detector produced in accordance with the method
11/02/2004US6813412 Mems element having perpendicular portion formed from substrate
11/02/2004US6811242 Fault detection in a micro mechanical device
10/2004
10/28/2004WO2004092050A1 Method for producing a micromachined layered device
10/28/2004WO2004092049A1 Micromechanical component and method for its production
10/28/2004WO2004008248A3 A method of forming a mold and molding a micro-device
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