| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
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| 02/09/2006 | DE102004034544A1 Method of analyzing a buried layer in a wafer with a semiconductor component such as a DRAM chip uses electromagnetic radiation to penetrate the wafer |
| 02/09/2006 | CA2575314A1 System and method for micro-electromechanical operating of an interferometric modulator |
| 02/08/2006 | EP1622826A1 Micromechanical component and method for its production |
| 02/08/2006 | EP1622750A2 Method, system, holder and assembly for transferring templates during imprint lithography processes |
| 02/08/2006 | CN1731564A Method for etching hole with different aspect ratio |
| 02/07/2006 | US6995040 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 02/07/2006 | US6995034 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 02/02/2006 | WO2006011576A1 Inclination adjusting device and pattern forming device with inclination adjusting function |
| 02/02/2006 | US20060024920 Method for positioning dicing line of wafer |
| 02/02/2006 | US20060024880 System and method for micro-electromechanical operation of an interferometric modulator |
| 02/02/2006 | DE102004033424A1 Verfahren zur Modifikation einer Mikrostruktur eines Gegenstandes A process for the modification of a microstructure of an object |
| 02/01/2006 | EP1620356A1 Method for producing a micromachined layered device |
| 02/01/2006 | EP1620222A1 Method of connecting module layers suitable for the production of microstructure components and a microstructure component |
| 01/31/2006 | US6991906 positioning focus in a microelectrode arrangement in which an electrical field is formed with field gradient which forms a three-dimensional electrical capture area, varying amplitude, then exerting optically induced force |
| 01/31/2006 | US6990870 System for determining characteristics of substrates employing fluid geometries |
| 01/26/2006 | WO2006008412A1 Tightness test for mems or for small encapsulated components |
| 01/26/2006 | US20060018004 Photoreaction apparatus |
| 01/26/2006 | US20060017781 Micro-electromechanical actuating mechanism with built-in test circuit |
| 01/25/2006 | EP1618600A1 Micro-machined device structures having on and off-axis orientations |
| 01/25/2006 | CN1725108A Photoreaction apparatus |
| 01/19/2006 | WO2006005515A1 Method for the modification of a microstructure of an object |
| 01/19/2006 | DE102004055040A1 Verfahren zum Schneiden eines Laminats mit einem Laser und Laminat A method of cutting a laminate with a laser and laminate |
| 01/18/2006 | CN1721160A Stamper, imprinting method, and method of manufacturing an information recording medium |
| 01/12/2006 | US20060006580 acts as barrier to prevent differently colored resins from blending |
| 01/11/2006 | CN1718533A Micro computer electric disk class device electromagnetic driving loader |
| 01/11/2006 | CN1236046C Well unit for detecting cell chemotaxis and separating chemotactic cells |
| 01/05/2006 | WO2005092561A3 Method of controlling hole shape during ultrafast laser machining by manipulating beam polarization |
| 01/05/2006 | US20060004289 High sensitivity capacitive micromachined ultrasound transducer |
| 01/05/2006 | US20060001194 System for varying dimensions of a substrate during nanoscale manufacturing |
| 01/04/2006 | CN1714754A High sensitivity capacitive micromachined ultrasound transducer |
| 01/04/2006 | CN1234592C Establishing method of microelectronic machine system device great signal equivalent circuit nacro model |
| 12/29/2005 | WO2005123324A1 Method of producing a micro- or nano-mechanical part, comprising a femto-laser-assisted ablation step |
| 12/29/2005 | US20050285308 Stamper, imprinting method, and method of manufacturing an information recording medium |
| 12/28/2005 | EP1214271B1 Movement sensor in a micro electro-mechanical device |
| 12/22/2005 | WO2005121892A2 Apparatus, system and method to vary dimensions of a substrate during nano-scale manufacturing |
| 12/22/2005 | WO2005120791A2 Method for making tools for micro replication |
| 12/22/2005 | US20050279170 Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure |
| 12/21/2005 | EP1606834A1 Uv nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization |
| 12/21/2005 | CN1711623A Method for producing and testing a corrosion-resistant channel in a silicon device |
| 12/21/2005 | CN1711149A Method of connecting module layers suitable for the production of microstructure components and a microstructure component |
| 12/15/2005 | WO2005119360A1 Modified metal mold for use in imprinting processes |
| 12/15/2005 | US20050275492 Mems fluid ejection device configured for detecting a fault condition |
| 12/15/2005 | US20050274693 Device and method for lithography |
| 12/14/2005 | EP1605258A2 Device and method for sonic inspection of micro structures |
| 12/08/2005 | US20050270516 System for magnification and distortion correction during nano-scale manufacturing |
| 12/08/2005 | US20050269745 Method of varying dimensions of a substrate during nano-scale manufacturing |
| 12/08/2005 | US20050269742 Method for making tools for micro replication |
| 12/08/2005 | US20050269023 Method of cutting laminate with laser and laminate |
| 12/07/2005 | EP1602626A2 Method and system for manufacturing laminated microstructures |
| 12/07/2005 | EP1602623A1 Minute flow path structure body and die |
| 12/07/2005 | CN1230376C Manufacture of membrane |
| 12/01/2005 | WO2005113422A1 Imprinting of supported and free-standing 3-d micro-or nano-structures |
| 12/01/2005 | US20050263700 Processing method using probe of scanning probe microscope |
| 12/01/2005 | US20050262929 Wafer level capped sensor |
| 11/30/2005 | EP1599413A2 Method and apparatus for fabricating nanoscale structures |
| 11/30/2005 | EP1599410A2 Method for manufacturing microstructures having multiple microelements with through-holes |
| 11/29/2005 | US6969635 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 11/29/2005 | US6969142 Method of detecting a fault condition in a micro-electromechanical device |
| 11/24/2005 | WO2005079304A3 Method and system to measure characteristics of a film disposed on a substrate |
| 11/24/2005 | US20050260793 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 11/24/2005 | US20050260792 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 11/24/2005 | US20050258571 Use of novel micro- and nano-imprinting techniques for making supported three-dimensional micro- and nano-structures for pixel segregation in OLED-based displays; enables assembly of polymers without a glass transition temperature and eliminates heating required to assemble thermoplastic polymers |
| 11/24/2005 | US20050258570 Imprinting of supported and free-standing 3-D micro- or nano-structures |
| 11/24/2005 | DE102004022386A1 Molding apparatus for micro-components has molding chamber in which particles are sintered by laser, external acousto-optical modulator below laser controlling beam so that it operates in pulsed or continuous wave mode |
| 11/23/2005 | EP1598312A1 Method for fabricating three-dimensional microstructure by fib-cvd and drawing system for three-dimensional microstructure |
| 11/23/2005 | CN1700410A Elementary cell automation machine coupling method for thin film boundary and deposition rate calculation |
| 11/23/2005 | CN1700100A Lithography member and method thereof |
| 11/23/2005 | CN1699633A Method for improving the bonding strength between nickel or nickel alloy cast layers in laminated micro devices |
| 11/17/2005 | WO2005109095A2 Method for imprint lithography at constant temperature |
| 11/17/2005 | WO2004068554A8 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates |
| 11/16/2005 | CN1696347A Controllable type etching equipment of microbe |
| 11/16/2005 | CN1696047A Method for testing residual stress distributed on surface of micro electromechanical system |
| 11/10/2005 | US20050249637 Micro fluid system support and manufacturing method thereof |
| 11/10/2005 | US20050247666 Method of forming a mold and molding a micro-device |
| 11/09/2005 | EP1594001A1 Device and method for imprint lithography |
| 11/09/2005 | CN1694842A Thermoelastic actuator design. |
| 11/08/2005 | US6962823 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices |
| 11/03/2005 | WO2005021156A3 Capillary imprinting technique |
| 11/02/2005 | CN1691970A Microneedles and microneedle fabrication |
| 10/27/2005 | WO2005100236A1 Method of packaging mems device in vacuum state and mems device vacuum-packaged using the same |
| 10/27/2005 | DE102005013256A1 Laserstrahl-Bearbeitungsmaschine Laser beam processing machine |
| 10/26/2005 | EP1588254A2 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates |
| 10/26/2005 | EP1588197A1 Manufacturing micro-structured elements |
| 10/20/2005 | US20050233498 MEMS device wafer-level package |
| 10/20/2005 | US20050233064 Method of manufacturing microstructure and manufacturing system for the same |
| 10/20/2005 | US20050231311 Method of detecting over-actuation of MEM device |
| 10/20/2005 | US20050231204 Testing MEM device array |
| 10/20/2005 | US20050230356 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices |
| 10/20/2005 | US20050230346 Processing apparatus |
| 10/20/2005 | US20050229737 Manufacturing system for microstructure |
| 10/19/2005 | CN1684902A Decal transfer microfabrication |
| 10/19/2005 | CN1683234A Method of packaging MEMS device in vacuum state and MEMS device vacuum-packaged using the same |
| 10/13/2005 | WO2005054119A3 Methods and devices for fabricating three-dimensional nanoscale structures |
| 10/13/2005 | US20050227401 Method of packaging MEMS device in vacuum state and MEMS device vacuum-packaged using the same |
| 10/13/2005 | US20050226742 Microfabricated elastomeric valve and pump systems |
| 10/13/2005 | US20050225600 Inkjet printhead with micro-electromechanical fluid ejection devices having integrated movement sensors |
| 10/13/2005 | US20050223810 Method and apparatus for measuring the mechanical response of micro-electro-mechanical systems |
| 10/12/2005 | EP1584447A2 Manufacturing system for microstructure by a lamination process |
| 10/12/2005 | CN1680188A Manufacturing system for microstructure |
| 10/12/2005 | CN1680187A Method of manufacturing microstructure and manufacturing system for the same |