| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
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| 05/06/2009 | CN101426163A Vibration sensor and method for manufacturing the same |
| 05/06/2009 | CN101423187A Electrochemical corrosion insulation protection method of universal CMOS MEMS device |
| 05/06/2009 | CN100485350C Method and system for determining characteristics of substrates employing fluid geometries |
| 04/30/2009 | WO2009053714A1 Adhesive microstructures |
| 04/30/2009 | WO2009052962A1 Imaging optical system and projection exposure installation |
| 04/30/2009 | WO2009052925A1 Imaging optical system, projection exposure installation for micro-lithography comprising an imaging optical system of this type, and method for producing a microstructured component with a projection exposure installation of this type |
| 04/30/2009 | WO2008135817A3 Timepiece component and method for making same |
| 04/30/2009 | WO2006130513A3 Microfluidic devices with integrated tubular structures |
| 04/30/2009 | US20090108483 Alignment method, imprint method, alignment apparatus, and position measurement method |
| 04/30/2009 | DE102007051669A1 Abbildende Optik, Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik sowie Verfahren zur Herstellung eines mikrostrukturierten Bauteils mit einer derartigen Projektionsbelichtungsanlage The imaging optics, projection exposure system for microlithography with such an imaging optical system and method for producing a micro-structured component with such a projection exposure apparatus |
| 04/30/2009 | DE102007051145A1 Device for machining surface of substrate for manufacturing microstructure on surface, has carrier moving relative to substrate which is formed for arranging tool on carrier |
| 04/29/2009 | EP1622750A4 Method, system, holder and assembly for transferring templates during imprint lithography processes |
| 04/29/2009 | CN100483829C Stack silicon-base miniature fuel celles and manufacturing method |
| 04/28/2009 | US7526741 Microfluidic design automation method and system |
| 04/28/2009 | US7524704 Method for encapsulating a component, especially an electric or electronic component, by means of an improved solder seam |
| 04/28/2009 | US7523701 Imprint lithography method and apparatus |
| 04/22/2009 | EP2050712A2 Sealed wafer packaging of microelectromechanical systems |
| 04/22/2009 | CN100480617C Insulation layer and semiconductor conducting layer aligning error electrical testing structure in micro-electro-mechanical system |
| 04/22/2009 | CN100480429C Method for etching substances containing silicon and method for forming a micromechanical structure |
| 04/22/2009 | CN100479931C Method for producing compound thin film of phosphoric acid radicle silane-carbon nanotubes on the surface of single crystal silicon wafers |
| 04/21/2009 | US7520161 Tightness test for disk bond connections and test structure for carrying out said method |
| 04/16/2009 | WO2009046954A2 Method and arrangement for the production of nano-imprint stamps and micromechanically tunable filter/detector array |
| 04/16/2009 | US20090098029 Method of forming a sealed channel of a microfluidic reactor and a microfluidic reactor comprising such channel |
| 04/16/2009 | US20090096088 Sealed wafer packaging of microelectromechanical systems |
| 04/16/2009 | US20090095711 Microfabrication apparatus and device manufacturing method |
| 04/16/2009 | US20090095095 Microstructure inspecting apparatus, microstructure inspecting method and substrate holding apparatus |
| 04/15/2009 | EP2047882A1 Method for producing microneedle |
| 04/15/2009 | EP2046676A2 Production of microfluidic polymeric devices by photo-assisted and/ or thermally assisted printing |
| 04/15/2009 | CN101407060A Microgripper based on MEMS technology and control system |
| 04/15/2009 | CN100478040C Microneedles and microneedle fabrication |
| 04/15/2009 | CA2640827A1 Sealed wafer packaging of microelectromechanical systems |
| 04/14/2009 | US7516639 Method of making a structure having an optimized three-dimensional shape |
| 04/09/2009 | US20090092791 Mold, mold production process, processing apparatus, and processing method |
| 04/08/2009 | CN101402444A Mould condition excitation both-end fine beam and mould condition shape electrode width determining method thereof |
| 04/08/2009 | CN101402443A Mould condition excitation cantilever arm fine beam and mould condition shape electrode width determining method thereof |
| 04/02/2009 | WO2009041551A1 Mask blank, and method for production of imprint mold |
| 04/02/2009 | US20090085974 Printing nozzle arrangement having movement sensor |
| 04/02/2009 | US20090085235 Method and apparatus for making a microstructured or nanostructured article |
| 04/02/2009 | US20090084754 Method and system for manufacturing microstructure |
| 04/01/2009 | EP1606834A4 Uv nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization |
| 04/01/2009 | CN101401204A Method for manufacturing a microelectronic package |
| 04/01/2009 | CN101398614A Method for making three-dimensional needlepoint electrode array based on parylene |
| 04/01/2009 | CN100474557C Method for the catastrophic transfer of a thin layer after co-implantation |
| 04/01/2009 | CN100474556C Catastrophic transfer of thin film after co-implantation |
| 04/01/2009 | CN100473537C A stamp for soft lithography, in particular micro contact printing and a method of preparing the same |
| 03/31/2009 | US7511247 Method of controlling hole shape during ultrafast laser machining by manipulating beam polarization |
| 03/31/2009 | US7509733 Method for producing means of connecting and/or soldering a component |
| 03/26/2009 | WO2009039378A2 Microfluidic structures with circular cross-section |
| 03/26/2009 | WO2009037921A1 Imprint lithography mold manufacturing method, and mold |
| 03/26/2009 | WO2009037032A1 Method for the lithographic production of nanostructures and/or microstructures, stamp and substrate |
| 03/26/2009 | WO2009037030A2 Method for printing a nanostructure and/or microstructure, stamp and substrate |
| 03/26/2009 | US20090080323 Device and Method for Obtaining a Substrate Structured on Micrometric or Nanometric Scale |
| 03/25/2009 | EP2040291A1 Method of gluing chips to a constraint substrate and method of placing a semi-conductor reading circuit under constraint |
| 03/25/2009 | EP2038705A2 Printing form precursor and process for preparing a stamp from the precursor |
| 03/25/2009 | EP2038205A1 Mems-based micro and nano grippers with two- axis force sensors |
| 03/25/2009 | CN101393390A Method for implementing PMMA three-dimensional fine process for mobile example platform |
| 03/25/2009 | CN101393321A Monolithic integration method of grating light modulator and active matrix driving circuit |
| 03/25/2009 | CN101392403A Method for preparing gold electrode pair |
| 03/25/2009 | CN100472722C Conductive bond for through-wafer interconnection |
| 03/24/2009 | US7507669 Gap tuning for surface micromachined structures in an epitaxial reactor |
| 03/24/2009 | US7506593 Microfabrication tool pedestal and method of use |
| 03/19/2009 | WO2009035125A1 Cantilever-type sensor, as well as a substance sensing system and a substance sensing method that use the sensor |
| 03/19/2009 | WO2008125094A3 Method for forming a nanostructure and/or microstructure on a surface, and apparatus for carrying out said method |
| 03/19/2009 | WO2008009803A4 Production of microfluidic polymeric devices by photo-assisted and/ or thermally assisted printing |
| 03/19/2009 | US20090075423 Method of bonding chips on a strained substrate and method of placing under strain a semiconductor reading circuit |
| 03/19/2009 | US20090073237 Nozzle device with expansive chamber-defining layer |
| 03/19/2009 | US20090073210 Nozzle Device With Movement Sensor |
| 03/19/2009 | US20090072630 Semiconductor device and method of controlling electrostatic actuator |
| 03/19/2009 | US20090072333 Sensor array having a substrate and a housing, and method for manufacturing a sensor array |
| 03/19/2009 | DE102007044505A1 Verfahren zum lithographischen Erzeugen von Nano- und/oder Mikrostrukturen, Stempel sowie Substrat Lithographic method for producing nano- and / or micro-structures, stamp and substrate |
| 03/19/2009 | DE102007044504A1 Verfahren zum Aufdrucken einer Nano- und/oder Mikrostruktur, Stempel sowie Substrat A method for printing a nano- and / or microstructure, stamp and substrate |
| 03/18/2009 | EP2036586A1 Method for manufacturing microneedle |
| 03/18/2009 | CN101389566A Electrical conditioning of mems device and insulating layer thereof |
| 03/18/2009 | CN101386401A Monitoring structure of infrared detector pixel stress and monitoring method |
| 03/12/2009 | US20090065366 Magnetic material, and a mems device using the magnetic material |
| 03/12/2009 | US20090064790 Microreactor Glass Diaphragm Sensors |
| 03/11/2009 | CN101381068A Support unit for microfluidic system and manufacturing method |
| 03/11/2009 | CN101380600A Support unit for microfluidic system and manufacturing method |
| 03/11/2009 | CN101380599A Support unit for microfluidic system and manufacturing method |
| 03/10/2009 | US7501241 Two-dimensionally arranging biomolecules on a board, forming thin film of nickel by sputtering or evaporation; electrotyping; peeling thin film and supporting layer; high speed replication of the pattern into a template and increasing strength; protein chips; drug development, diagnosis; immobilization |
| 03/10/2009 | US7500431 System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure |
| 03/05/2009 | US20090061152 Methods for fabricating isolated micro- and nano- structures using soft or imprint lithography |
| 03/04/2009 | EP2030231A2 Method and device for monitoring a heat treatment of a microtechnological substrate |
| 03/04/2009 | EP2029300A2 Soft mems |
| 03/03/2009 | US7497980 Microneedles and microneedle fabrication |
| 03/03/2009 | CA2400741C Apparatus for treating sample in microamount |
| 02/25/2009 | EP2026741A2 Pharmaceutical tablets with diffractive microstructure and compression tools for producing such tablets |
| 02/25/2009 | EP1486455B1 Support unit for microfluidic system and manufacturing method |
| 02/25/2009 | CN100464383C T-shaped beam parallel plate micromechanical variable capacitor and manufacturing process thereof |
| 02/25/2009 | CN100464335C Transfer method from three-dimensional solid to standard technical layout in microelectromechanical system |
| 02/24/2009 | US7495328 Micromechanical component |
| 02/24/2009 | US7494830 Method and device for wafer backside alignment overlay accuracy |
| 02/24/2009 | US7494555 Microfabricated elastomeric valve and pump systems |
| 02/24/2009 | CA2414732C Calibrating a micro electro-mechanical device |
| 02/19/2009 | WO2009000608A3 Method for producing filmlike semiconductor materials and/or electronic elements by primary forming and/or coating |
| 02/19/2009 | WO2008157592A4 Ultrasonic injection molding on a web |
| 02/19/2009 | US20090045534 System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure |
| 02/19/2009 | US20090045494 Method for manufacturing a microelectronic package |
| 02/19/2009 | DE10239109B4 Verfahren und Spritzgießwerkzeug zum Herstellen einer Pipettenspitze Method and injection mold for manufacturing a pipette tip |
| 02/18/2009 | EP2025470A1 Polishing apparatus, polishing method, substrate manufacturing method, and electronic apparatus manufacturing method |