Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 99 - Subject matter not provided for in other groups of this subclass
Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
10/2005
10/06/2005WO2005092561A2 Method of controlling hole shape during ultrafast laser machining by manipulating beam polarization
10/06/2005WO2005092559A1 Method and precise laser nanomachining with uv ultrafast laser pulses
10/06/2005US20050221577 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope
10/06/2005US20050219306 Method of detecting a blockage within an inkjet nozzle
10/05/2005EP1582924A2 Processing apparatus
10/05/2005EP1582923A2 Processing apparatus
10/05/2005CN1678956A Device for transferring a pattern to an object
09/2005
09/29/2005WO2005089348A2 Packaging for micro electro-mechanical systems and methods of fabricating thereof
09/29/2005US20050214976 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
09/29/2005US20050214661 Structure formed with template having nanoscale features
09/29/2005US20050212182 Flexible mold and method of manufacturing microstructure using same
09/29/2005US20050212178 Capacitive measurement method and system for nanoimprint process monitoring
09/29/2005US20050212156 Processing apparatus
09/29/2005US20050211922 Minute three dimensional structure producing apparatus and method
09/28/2005EP1580596A2 Structure formed with template having nanoscale features
09/28/2005CN1675750A Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method
09/28/2005CN1220621C Post-package technology for microelectromechinical system
09/27/2005US6948245 Gear and method of making the same
09/22/2005WO2005087305A1 Methods and moulds for use in fabricating side-ported microneedles
09/22/2005US20050208171 Mold and molding apparatus using the same
09/22/2005US20050205540 Laser beam processing machine
09/22/2005US20050205538 Method of controlling hole shape during ultrafast laser machining by manipulating beam polarization
09/22/2005DE102004011035A1 Verfahren zur Prüfung der Dichtigkeit von Scheibenbondverbindungen und Anordnung zur Durchführung des Verfahrens Method for testing the tightness of bonding connections and disc arrangement for performing the method
09/21/2005CN1672240A Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma
09/20/2005US6944941 Method for assembling cassette-loaded microcomponents
09/15/2005WO2005085791A1 Tightness test for disk bond connections and test structure for carrying out said method
09/15/2005WO2005084872A1 Ultrafast laser direct writing method for modifying existing microstructures on a submicron scale
09/15/2005WO2005084581A1 Medical three-dimensional structure, process for producing the same and production apparatus
09/15/2005US20050200043 Transfer printing method for injection molding process
09/15/2005US20050199584 Decal transfer microfabrication
09/14/2005CN1668435A Flexible mold and method of manufacturing microstructure using same
09/14/2005CN1666952A Dynamic testing loading unit for MEMS disc or device
09/13/2005US6943117 UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization
09/09/2005WO2005082596A1 Method of molding for microneedle arrays
09/09/2005WO2005081968A2 Implant having mems flow module with movable, flow-controlling baffle
09/09/2005CA2556492A1 Implant having mems flow module with movable, flow-controlling baffle
09/08/2005US20050197613 Implant having MEMS flow module with movable, flow-controlling baffle
09/08/2005US20050194365 Method of precise laser nanomachining with UV ultrafast laser pulses
09/08/2005DE10009386B4 Magazin, Montagevorrichtung für Mikrobauteile und Verfahren zum Montieren von Mikrobauteilen Magazine mounting device for micro-components and method of mounting microcomponents
09/07/2005EP1570249A2 Method and system for determining characteristics of substrates employing fluid geometries
09/07/2005CN1663907A Silicon fusion bonding method for MEMS bonding process
09/07/2005CN1218365C Absolute-dry-method deep-etching micro-mechanical processing method based on silicon-silicon linkage
09/06/2005US6940433 Modulation method for signal crosstalk mitigation in electrostatically driven devices
09/01/2005WO2005081071A1 Process for preparing a polymeric relief structure
09/01/2005WO2005079304A2 Method and system to measure characteristics of a film disposed on a substrate
09/01/2005US20050191790 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
09/01/2005US20050191789 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
09/01/2005US20050191771 Ultrafast laser direct writing method for modifying existing microstructures on a submicron scale
09/01/2005DE19757785B4 Verfahren zur Bestimmung optisch induzierter Kräfte A method for determining optically induced forces
09/01/2005CA2556684A1 Process for preparing a polymeric relief structure
08/2005
08/31/2005EP1567913A1 A chucking system and method for modulating shapes of substrates
08/31/2005EP1567796A2 Devices and methods for programmable microscale manipulation of fluids
08/31/2005CN1662852A Multi-tiered lithographic template
08/25/2005WO2005078779A1 Imprinting apparatus with independently actuating separable modules
08/25/2005US20050186515 Lithographic patterning of a first layer, photografting a liquid crystal polymer to the substrate and then coupling a protein or peptide to the polymer; implantalbe microelectromechanical systems; increased flexibility and efficiency; supercritical solvents do not dissolve template
08/25/2005US20050186304 Molding apparatus and molding method
08/25/2005US20050185169 Method and system to measure characteristics of a film disposed on a substrate
08/25/2005DE10251658B4 Verfahren zum Verbinden von zur Herstellung von Mikrostrukturbauteilen geeigneten, mikrostrukturierten Bauteillagen sowie Mikrostrukturbauteil A method of joining for the production of microstructured components suitable micro-structured component layers, as well as micro-structural component
08/24/2005EP1565932A2 Method for producing and testing a corrosion-resistant channel in a silicon device
08/24/2005CN1659684A Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/24/2005CN1216386C Mini-magnetic core solenoidal microinduction element and its prepn. method
08/18/2005WO2005075835A1 Pyrotechnic microsystem and method for making same
08/18/2005US20050182594 Microdevice processing systems and methods
08/18/2005US20050181532 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/18/2005US20050180686 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/18/2005US20050179982 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/18/2005US20050178848 Method and apparatus for MEMS device nebulizer lubrication system
08/18/2005US20050178280 Imprinting apparatus with independently actuating separable modules
08/16/2005US6929345 Testing for correct operation of micro electromechanical device
08/11/2005WO2005072235A2 Structured materials and methods
08/11/2005US20050175905 Method for manufacturing transfer mask substrate, transfer mask substrate, and transfer mask
08/11/2005US20050173711 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/11/2005US20050172717 Micromechanical device with thinned cantilever structure and related methods
08/11/2005DE10392658T5 Verfahren zur Herstellung eines Transfermasken-Substrats, Transfermasken-Substrat und Transfermaske A method for producing a transfer mask substrate transfer mask substrate and transfer mask
08/11/2005DE102005002990A1 Fluid channel system for use in analysis of human blood serum comprises cartridge, into which support for biochip fits, cartridge being made up of two plates and fluid channels being formed by surface where they contact each other
08/10/2005EP1561724A1 Micromechanical device with thinned cantilever structure and related methods
08/10/2005EP1560786A1 Pulsed ion beam control of solid state features
08/10/2005CN1652302A Conductive bond for through-wafer interconnect
08/04/2005US20050170639 Forming a semiconductor device
08/04/2005US20050170614 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/04/2005US20050170557 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/04/2005US20050170547 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/04/2005US20050170546 Metod for making a micromechanical device by using a sacrificial substrate
08/04/2005US20050170540 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/03/2005CN1649088A Method and system for forming a semiconductor device
08/03/2005CN1648032A Vacuum package device for micro system
08/02/2005US6925390 Customized microfluidic device design, ordering, and manufacturing
08/02/2005US6924581 Split spring providing multiple electrical leads for MEMS devices
08/02/2005US6924444 Ceramic channel plate for a fluid-based switch, and method for making same
08/02/2005US6924235 Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method
07/2005
07/28/2005WO2005069082A1 Differential critical dimension and overlay metrology apparatus and measurement method
07/28/2005WO2004110717A3 Method for manufacturing perforated microstructures by using fluidic jets
07/27/2005CN1645059A Production of local vacuum sealing protective structure of silicon based sensor flexible piece
07/27/2005CN1644484A Clamp for disk vacuum pack
07/26/2005US6921680 Method and apparatus for MEMS device nebulizer lubrication system
07/26/2005US6921575 Applying carbon nanotubes to low-viscosity dispersion medium to obtain a high-viscosity dispersing liquid which includes carbon nanotubes; forming a network of carbon nanotubes having electrical and/or magnetic connections by removing
07/26/2005US6921145 Over actuation detection in a micro electromechanical device
07/21/2005WO2004068554A3 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates
07/21/2005US20050156482 Method for supplying multiple voltages to a movable part of a MEMS device
07/20/2005CN1643659A Surface treatment method, semiconductor device, method of fabricating semiconductor device, and treatment apparatus
1 ... 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36