| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 09/26/2007 | CN100339947C Elementary cell automation machine coupling method for thin film boundary and deposition rate calculation |
| 09/20/2007 | WO2007105158A2 Method for manufacturing a microelectronic package |
| 09/20/2007 | WO2007029132A3 A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device |
| 09/20/2007 | US20070216234 Methods for producing piezoelectric actuator, ink-jet head, and ink-jet printer using aerosol deposition method, piezoelectric actuator, ink-jet head, and ink-jet printer |
| 09/20/2007 | US20070214888 Acceleration sensor with protrusions facing stoppers |
| 09/19/2007 | EP1833754A2 Bonding method for reducing stress in multilayered wafer |
| 09/19/2007 | CN101037184A Acceleration sensor with protrusions facing stoppers |
| 09/19/2007 | CN101036910A Method for producing compound thin film of phosphoric acid radicle silane-carbon nanotubes on the surface of single crystal silicon wafers |
| 09/19/2007 | CN100337905C Manufacturing system for microstructure |
| 09/18/2007 | US7270475 Thermoelastic device comprising an expansive element formed from a preselected material |
| 09/13/2007 | WO2007072099A3 Method of forming a sealed channel of a microfluidic reactor and a microfluidic reactor comprising such channel |
| 09/13/2007 | US20070210431 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 09/12/2007 | EP1832551A1 Method of producing nanowires in ambient conditions and nanowires thus produced |
| 09/11/2007 | US7268167 Process for producing emulsion and microcapsules and apparatus therefor |
| 09/11/2007 | US7267731 close to the designed shape using a focused charged-particle beam by reducing the effects of etching and deposition which vary according to various conditions when a processing work is performed |
| 09/07/2007 | WO2007100457A2 Electrical conditioning of mems device and insulating layer thereof |
| 09/07/2007 | WO2007021396A8 Microelectromechanical devices and fabrication methods |
| 09/06/2007 | US20070207263 vapor deposition; concavo-convex patterning, etching |
| 09/05/2007 | EP1829953A1 Slide material, process for producing the same and apparatus utilizing the slide material |
| 09/05/2007 | EP1829104A1 Thermally controlled fluidic self-assembly |
| 09/05/2007 | EP1828047A1 Injection-molded package for mems inertial sensor |
| 09/04/2007 | US7264179 Method and apparatus for MEMS device nebulizer lubrication system |
| 08/30/2007 | WO2007077397A3 Production of multilayer microcomponents by the sacrificial thick layer method |
| 08/30/2007 | WO2007044035A8 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
| 08/30/2007 | US20070202421 Process For Preparing A Polymeric Relief Structure |
| 08/30/2007 | US20070202258 Micro-pattern forming apparatus, micro-pattern structure, and method of manufacturing the same |
| 08/29/2007 | EP1825218A1 Method for controlling/regulating a physical quantity of a dynamic system |
| 08/29/2007 | CN101027712A Measurement of the dynamic characteristics of interferometric modulators |
| 08/29/2007 | CN101027707A Methods for visually inspecting interferometric modulators for defects |
| 08/29/2007 | CN101027597A Process control monitors for interferometric modulators |
| 08/29/2007 | CN101027589A Systems and methods for measuring color and contrast in specular reflective devices |
| 08/29/2007 | CN100333992C Method of manufacturing microstructure and manufacturing system for the same |
| 08/28/2007 | US7262837 Noninvasive method for characterizing and identifying embedded micropatterns |
| 08/28/2007 | CA2558517A1 Micro-pattern forming apparatus, micro-pattern structure, and method of manufacturing the same |
| 08/23/2007 | WO2007093497A1 Method for producing a test structure in order to test flexibility of a membrane of a micromechanical component and corresponding examination structure |
| 08/23/2007 | US20070198114 Three-dimensional device simulation program product and three-dimensional device simulation system |
| 08/23/2007 | US20070196944 Electrical conditioning of MEMS device and insulating layer thereof |
| 08/23/2007 | US20070196943 Tightness test for disk bond connections and test structure for carrying out said method |
| 08/23/2007 | US20070196923 Detecting leaks in micro-optoelectromechanical devices (MOEMS) or microelectromechanical (MEMS) devices; indicator may be copper, which changes optical properties upon oxidation |
| 08/22/2007 | CN101022255A Two-dimensional rotary remote operating method for micro structural components |
| 08/21/2007 | US7259865 Process control monitors for interferometric modulators |
| 08/21/2007 | US7259372 Processing method using probe of scanning probe microscope |
| 08/21/2007 | US7259080 Glass-type planar substrate, use thereof, and method for the production thereof |
| 08/21/2007 | US7259008 Apparatus for use in the separation of chemotactic cells |
| 08/16/2007 | US20070191761 Method of molding for microneedle arrays |
| 08/16/2007 | DE102006006890A1 Verfahren zur Herstellung einer Prüfstruktur zur Prüfung der Durchbiegung einer Membran eines mikromechanischen Bauelements und entsprechende Prüfstruktur A method for producing a test structure for testing the deflection of a membrane of a micromechanical component and corresponding test structure |
| 08/16/2007 | DE102005053722B4 Deckelwafer, in der Mikrosystemtechnik einsetzbares Bauelement mit einem solchen Wafer sowie Lötverfahren zum Verbinden entsprechender Bauelement-Teile Cap wafer, which can be used in microsystems technology device with such a wafer and soldering for connecting corresponding component parts |
| 08/09/2007 | WO2007050704A3 Microstructure synthesis by flow lithography and polymerization |
| 08/09/2007 | US20070184432 Having a structure whereby, in the step of injecting a liquid sample into a microwell for holding a sample to be reacted, analyzed, detected, etc., overflow of the sample or the migration thereof into another well connected thereto can be prevented and position of sample in microwell can be adjusted |
| 08/09/2007 | DE102006004644A1 Layer fabricating tool for e.g. aircraft, has roller and die web arranged so that web arrives between roller and surface in rolling movement, during movement of roller, so that negative of microstructure on web faces substrate surface |
| 08/09/2007 | DE102006003718A1 Fertigungsprozess für integrierte mikroelektro-mechanische Bauelemente Manufacturing process for integrated micro-electro-mechanical components |
| 08/08/2007 | CN1330557C Method of packaging MEMS device in vacuum state and MEMS device vacuum-packaged using the same |
| 08/07/2007 | CA2438856C Process and apparatus for producing emulsion and microcapsules |
| 08/02/2007 | WO2007085405A1 Manufacturing process for integrated microelectromechanical components |
| 08/02/2007 | WO2007085044A1 Stamping methods and devices |
| 08/02/2007 | WO2007085043A1 Methods for low cost manufacturing of complex layered materials and devices |
| 08/02/2007 | US20070178043 Sliding material, manufacturing method therefor, and device employing sliding material |
| 08/02/2007 | US20070176959 Inkjet nozzle device with static and movable nozzle portions |
| 08/02/2007 | CA2639982A1 Stamping methods and devices |
| 08/02/2007 | CA2639978A1 Methods for low cost manufacturing of complex layered materials and devices |
| 08/01/2007 | CN101010632A Modified metal mold for use in imprinting processes |
| 07/26/2007 | WO2007083725A1 Imprint transfer die, imprint transfer method, imprinter, production method of imprint transfer die, and imprint transfer matter |
| 07/26/2007 | WO2007029134A3 A method of manufacturing a mems capacitor microphone, such a mems capacitor microphone, a stack of foils comprising such a mems capacitor microphone, an electronic device comprising such a mems capacitor microphone and use of the electronic device |
| 07/25/2007 | EP1810743A1 Process for producing microsphere with use of metal substrate having through-hole |
| 07/25/2007 | CN101006491A Measuring and modeling power consumption in displays |
| 07/25/2007 | CN101004414A Magnetic microspheres of macromolecule, and synthesizing preparation method in situ |
| 07/19/2007 | US20070166557 Modified metal mold for use in imprinting processes |
| 07/19/2007 | US20070164487 Method for imprint lithography at constant temperature |
| 07/19/2007 | US20070164458 Pattern forming method and its mold |
| 07/18/2007 | EP1808731A2 Imprinting apparatus, system and method |
| 07/18/2007 | EP1807699A1 Structured copolymer supports for use in mass spectrometry |
| 07/18/2007 | CN101000968A Stack silicon-base miniature fuel celles and manufacturing method |
| 07/18/2007 | CN101000800A XY stage module, storage system employing the same and method for fabricating the xy stage module |
| 07/18/2007 | CN101000463A System, method, and apparatus for membrane, pad, and stamper architecture |
| 07/18/2007 | CN100998901A Porous silicon painless injection mironeedle array and its preparation method |
| 07/12/2007 | WO2007079072A2 Microreactor glass diaphragm sensors |
| 07/12/2007 | WO2007077397A2 Production of multilayer microcomponents by the sacrificial thick layer method |
| 07/12/2007 | US20070158866 System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure |
| 07/12/2007 | US20070157479 XY stage module, storage system employing the same and method for fabricating the XY stage module |
| 07/11/2007 | CN1996383A Subdivision method for polygon with inner hole in image treatment process |
| 07/11/2007 | CN1994860A Silicon micromachine cantilever beam sensor driving structure, production method and uses under torsion mode |
| 07/11/2007 | CN1994859A Manufacture method of ripple structure film and mould possessing the structure |
| 07/11/2007 | CN1326225C Micro-mechanical chip testing card and producing method thereof |
| 07/11/2007 | CN1325368C Method for rapid manufacturing three-dimensional complex micro structure |
| 07/05/2007 | WO2007075898A1 Cutting tool using interrupted cut fast tool servo |
| 07/04/2007 | CN1993156A Method and mould for use in fabricating side-ported microneedle |
| 06/28/2007 | WO2007072099A2 Method of forming a sealed channel of a microfluidic reactor and a microfluidic reactor comprising such channel |
| 06/28/2007 | WO2007071523A1 Method for sealing an opening |
| 06/28/2007 | WO2007070957A1 Process and apparatus for generating particles |
| 06/28/2007 | WO2007021396A3 Microelectromechanical devices and fabrication methods |
| 06/28/2007 | US20070148653 Fine metal structure, process for producing the same, fine metal mold and device |
| 06/28/2007 | US20070145639 Imprint method, imprint apparatus, and process for producing chip |
| 06/28/2007 | US20070144315 Cutting tool using interrupted cut fast tool servo |
| 06/28/2007 | DE102006012864A1 Device for forming nanoscale biocompatible surface structures e.g. of catalysts, cooling or heat exchangers, etc. has device for producing line and/or grid and/or set structures |
| 06/27/2007 | EP1801578A1 Microstructure inspecting apparatus and microstructure inspecting method |
| 06/27/2007 | EP1711861A4 Structured materials and methods |
| 06/27/2007 | CN1986383A Single nano pore making process in single particle beam etched film |
| 06/21/2007 | WO2007069519A1 Microstructure and method for manufacturing same |
| 06/21/2007 | WO2005089348A3 Packaging for micro electro-mechanical systems and methods of fabricating thereof |
| 06/21/2007 | US20070143048 Test method of microsctructure body and micromachine |