Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 99 - Subject matter not provided for in other groups of this subclass
Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
07/2005
07/20/2005CN1211706C Device for transferring a pattern on an object
07/14/2005WO2005063612A1 Fine metal structure, process for producing the same, fine metal mold and device
07/14/2005DE102004053789A1 Disk alignment method e.g. for compact disk, involves applying indirect fluid pressure to backside of stamper, for pressing embossable material of compact disk
07/13/2005CN1639054A Micro fluid system support unit and manufacturing method thereof
07/12/2005US6917099 Die carrier with fluid chamber
07/07/2005WO2005061762A1 Nano-array electrode manufacturing method and photoelectric converter using same
07/07/2005WO2005061373A1 Analysis of molecules by translocation through a coated aperture
07/07/2005US20050146084 Method for molding microstructures and nanostructures
06/2005
06/30/2005US20050139940 Methods for depositing, releasing and packaging microelectromechanical devices on wafer substrates
06/30/2005DE10392431T5 Herstellungsverfahren für Mikrokomponenten Manufacturing process for micro-components
06/29/2005EP1546804A1 Device for transferring a pattern to an object
06/28/2005US6911348 Device and method for determining the lateral undercut of a structured surface layer
06/28/2005US6910755 Micro-electromechanical fluid ejection device having an integrated movement sensor
06/23/2005WO2005057772A1 Actuator element and production method therefor
06/23/2005WO2005057283A1 Manufacturing a replication tool, sub-master or replica
06/22/2005EP1543541A2 Notch-free etching of high aspect soi structures using alternating deposition and etching and pulsed plasma
06/21/2005US6908791 MEMS device wafer-level package
06/16/2005WO2005054119A2 Methods and devices for fabricating three-dimensional nanoscale structures
06/16/2005WO2005054118A1 Fine product manufacturing method
06/16/2005WO2005035437A3 High-precision feedback control for ion sculpting of solid state features
06/16/2005US20050126905 Mechanical or electromechanical systems, real time feedback control operating on a time scale commensurate with the formation of nanoscale solid state features
06/15/2005EP1542074A1 Manufacturing a replication tool, sub-master or replica
06/15/2005EP1539638A2 Decal transfer microfabrication
06/15/2005EP1539351A2 Closing blade for deformable valve in a microfluidic device, and method
06/14/2005US6906847 Spatial light modulators with light blocking/absorbing areas
06/14/2005US6905626 Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma
06/09/2005WO2005052512A1 Modulation method for signal crosstalk mitigation in electrostatically driven devices
06/09/2005US20050122367 Testing of a micro-electromechanical device for under actuation
06/09/2005CA2543558A1 Modulation method for signal crosstalk mitigation in electrostatically driven devices
06/02/2005WO2005049482A1 Method for controlling the hermeticity of a closed cavity of a micrometric component, and micrometric component for the implementation thereof
06/02/2005WO2005020294A3 “control of etch and deposition processes”
06/02/2005US20050116370 Imprinting machine and imprinting method
06/02/2005US20050116070 Device for the production of capillary jets and micro-and nanometric particles
06/02/2005CA2546810A1 Method for controlling the hermeticity of a closed cavity of a micrometric component, and micrometric component for the implementation thereof
06/01/2005EP1536227A2 Quantitative biopolymer detecting system using monolithic piezoelectric cantilever by resonant frequency shift, method for fabricating the same system and method for detecting biopolymer quantitatively using the same system
06/01/2005EP1535315A1 Glass-type planar substrate, use thereof, and method for the production thereof
06/01/2005CN1623240A Curved electro-active actuators
05/2005
05/31/2005US6900072 Method for making a micromechanical device by using a sacrificial substrate
05/31/2005US6899838 Method of forming a mold and molding a micro-device
05/26/2005US20050112882 Microfabricated elastomeric valve and pump systems
05/26/2005US20050112621 Quantitative biopolymer detecting system using monolithic piezoelectric cantilever by resonant frequency shift, method for fabricating the same system and method for detecting biopolymer quantitatively using the same system
05/26/2005US20050110180 Process for producing a tool insert for injection molding a microstructured part
05/26/2005US20050109396 Devices and methods for programmable microscale manipulation of fluids
05/25/2005EP1533270A1 Method to test the hermeticity of a sealed cavity micromechanical device and the device to be so tested
05/25/2005DE10333119B3 Nichtinvasives Verfahren zur Charakterisierung und Identifizierung eingebetteter Mikrostrukturen A noninvasive method for the characterization and identification of embedded microstructures
05/25/2005CN1620722A Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
05/25/2005CN1619417A Multilayer nano imprint lithography
05/19/2005WO2005044364A1 Microneedles and microneedle fabrication
05/19/2005US20050104756 Modulation method for signal crosstalk mitigation in electrostatically driven devices
05/19/2005US20050103749 Method and device for anisotropic etching of high aspect ratio
05/19/2005US20050103635 Forms the concave having the shape of the micro component to be produced in the base by using the physical external force, fills the metal into the concave and then removes the base; eliminates need for masking, lithography steps; micromachines; reduce installation, production costs
05/19/2005DE10346877A1 Injection molding apparatus for micro-injection molded parts made of liquid silicone rubber or thermoplastics, has nozzle with piston chamber arranged between screw cylinder and mold
05/17/2005US6893877 Methods for screening substances in a microwell array
05/12/2005WO2005043616A1 Method for the catastrophic transfer of a thin layer after co-implantation
05/12/2005WO2005043615A1 Method for self- supported transfer of a fine layer by pulsation after implantation or co-implantation
05/12/2005US20050100828 Mass production method for three-dimensional micro structure having high aspect ratio
05/11/2005CN1614761A Precisively positioning device for IC chip package
05/11/2005CN1614758A Precisively butting apparatus for photoelectric device package
05/10/2005US6890788 Manufacturing method of a micro structure
05/10/2005US6890052 Under actuation detection in a micro electromechanical device
05/04/2005EP1251974B1 Methods for forming submicron patterns on films
05/03/2005US6888979 MEMS mirrors with precision clamping mechanism
04/2005
04/28/2005WO2005023406A3 Production of nanoparticles and microparticles
04/27/2005EP1525079A2 Flexible mold and method of manufacturing microstructure using same
04/27/2005CN1610087A Micro-mechanical chip testing card and producing method thereof
04/27/2005CN1610056A Silicon chip / glass ring bonding apparatus
04/27/2005CN1609271A Nickel phosphorus chemical plating method and chemical plating solution thereof
04/21/2005WO2005035437A2 High-precision feedback control for ion sculpting of solid state features
04/20/2005CN1608002A A device for processing a three dimensional structure into a substrate
04/19/2005US6882461 Micro electro mechanical system display cell and method for fabricating thereof
04/14/2005US20050079105 Methods for filing a sample array by droplet dragging
04/14/2005US20050078141 Micro-electromechanical device with built-in fault detection
04/14/2005US20050077903 Testing regime for a micro-electromechanical device
04/13/2005EP1522106A2 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices
04/07/2005WO2005030476A1 Three-dimensional gels that have microscale features
04/07/2005US20050074919 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
04/07/2005US20050073218 Curved electro-active actuators
04/07/2005US20050071969 Solid state embossing of polymer devices
04/05/2005US6876048 Micromechanical component as well as a method for producing a micromechanical component
03/2005
03/31/2005US20050069687 Apparatus and method for making a tensile diaphragm with a compressive region
03/30/2005EP1518822A2 Complex microdevices and apparatus and methods for fabricating such devices
03/30/2005CN2688675Y Preparing apparatus for nanometer and micron composite material
03/29/2005US6872645 Methods of positioning and/or orienting nanostructures
03/29/2005US6872319 Process for high yield fabrication of MEMS devices
03/29/2005US6871558 Method for determining characteristics of substrate employing fluid geometries
03/29/2005CA2113019C Integrated partial sawing process
03/24/2005WO2005025748A1 Microstructure devices and their production
03/24/2005WO2004103666A3 Method, system, holder and assembly for transferring templates during imprint lithography processes
03/24/2005WO2001002289A9 Movement sensor in a micro electro-mechanical device
03/24/2005US20050065735 Microfluidic design automation method and system
03/24/2005US20050064650 Fabrication method for microstructures with high aspect ratios
03/24/2005US20050061773 Capillary imprinting technique
03/23/2005EP1410433B1 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
03/23/2005CN1598983A T-shaped beam parallel plate micromechanical variable capacitor and manufacturing process thereof
03/23/2005CN1194375C Protective circuit of automation for semiconductor factory
03/22/2005US6869818 Method for producing and testing a corrosion-resistant channel in a silicon device
03/17/2005WO2005023406A2 Production of nanoparticles and microparticles
03/17/2005US20050058856 For use as the expansive element in a thermoelastic design, micro-electomechanical system
03/16/2005CN1594067A Low-temperature integrated wafer level airtight package process for MESM
03/10/2005WO2005021156A2 Capillary imprinting technique
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