Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
05/2004
05/11/2004US6734387 Mode-locked, quasi-cw, infrared laser system including a high reflector and output coupler defining an oscillator cavity; high repetition rate creates continuous cut or scribe
05/11/2004US6733104 Micro mechanical device fault detection
05/06/2004WO2004038275A1 Microfabrication tool pedestal and method of use
05/06/2004US20040084509 Method of connecting module layers suitable for the production of microstructure modules and a microstructure module
05/06/2004EP1415748A2 Method of connecting micro structured component layers suitable for making micro structered components and micro structured component
04/2004
04/29/2004WO2004009231B1 Method of manufacturing microwave reaction device and microwave reaction device
04/29/2004US20040079855 Microfabrication tool pedestal and method of use
04/28/2004CN2613471Y Three-dimension measurer for dynamic property of micro-electromechanical system
04/28/2004CN1492508A Semiconductor device with micro electromechanical system
04/28/2004CN1147750C Sleeve for optical-connector case and mfg. method therefor
04/22/2004WO2003060986A3 Method of forming a removable support with a sacrificial layers and of transferring devices
04/21/2004EP1410433A2 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
04/14/2004CN1489180A Absolute-dry-method deep-etching micro-mechanical processing method based on silocon-silicon linkage
04/08/2004WO2004030057A1 Glass-type planar substrate, use thereof, and method for the production thereof
04/08/2004US20040068019 Ejection drops; oil in water emulsion; ink jet printers
04/07/2004CN1486922A Making process of sealed cavity for micro electromechanical chip
04/06/2004US6716661 Process to fabricate an integrated micro-fluidic system on a single wafer
04/01/2004US20040063325 Semiconductor device having MEMS
04/01/2004US20040063250 Process and an apparatus for the formation of patterns in films using temperature gradients
04/01/2004US20040061414 Split spring for MEMS devices
04/01/2004US20040060898 Process for high yield fabrication of MEMS devices
04/01/2004DE10241390B3 Process for structuring a flat substrate made from glassy material for electrically contacting microelectronic or micromechanical components comprises preparing a semiconductor flat substrate, reducing its thickness, and further processing
03/2004
03/31/2004EP1402318A1 A stamp having an antisticking layer and a method of forming of repairing such a stamp
03/31/2004EP1339550B1 A process and an apparatus for the formation of patterns in films using temperature gradients
03/25/2004US20040059449 Selecting a material for use as the expansive element
03/25/2004US20040055995 Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma
03/25/2004DE10239109A1 Injection molding of pipette nozzle tip uses tool with core holding a thread-like body to form central hole
03/24/2004EP1400487A2 Semiconductor unit having MEMS
03/18/2004US20040049918 Gear and method of making the same
03/17/2004EP1398297A2 Electronic component with carbon nanotube interconnects and method of manufacturing the same
03/17/2004EP1398296A2 A method for making three-dimensional structures having nanometric and micrometric dimensions
03/16/2004US6708132 Microsystems integrated testing and characterization system and method
03/16/2004US6708082 System identification to improve control of a micro-electro-mechanical mirror
03/11/2004WO2004021084A2 Decal transfer microfabrication
03/11/2004WO2004021083A1 Device for transferring a pattern to an object
03/11/2004US20040048449 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
03/11/2004CA2495978A1 Decal transfer microfabrication
03/10/2004EP1395856A2 Improved apparatus, system and method for applying optical gradient forces
03/10/2004CN1480981A Electronic component and its mfg. method
03/10/2004CN1141733C Array type optical probe scanning IC photoetching method
03/09/2004US6701779 Perpendicular torsion micro-electromechanical switch
03/04/2004US20040042969 Supplying fine drops; machining; atomizing liquids; heating with carrier gas; drying; distillation; aqueous solution of hydrogen fluoride for etching silica
03/04/2004US20040041154 Nonconductor substrate enclosing carbon nanotubes; electrodes
03/04/2004US20040041010 Exothermic processing
03/04/2004US20040040653 Forming pattern on surface of silicone elastomer; oxidation; bonding to substrate
03/04/2004DE10339921A1 Production of liquid fine particles comprises atomizing a liquid to form atomized liquid particles, removing the micro-fine liquid particles, and contacting with a heated carrier gas to thermally dry the particles and form liquid droplets
03/03/2004EP1394100A2 Apparatus and method for controlling movement of a device after packaging
03/03/2004CN1140913C Workpiece vibration damper
02/2004
02/26/2004WO2004017368A2 Sidewall smoothing in high aspect ratio/deep etching using a discreet gas switching method
02/25/2004CN1477054A Microstructure manufacture and microsystem integration
02/25/2004CN1139845C Alignment method for array type optical probe scanning IC photoetching system
02/19/2004WO2004015741A2 Notch-free etching of high aspect soi structures using alternating deposition and etching and pulsed plasma
02/19/2004US20040032445 Micro electro-mechanical device having an integrated movement sensor
02/19/2004US20040032444 Detecting faults in a micro electro mechanical device utilising a single current pulse
02/18/2004EP1389405A1 Method for drilling microholes using a laser beam
02/18/2004EP0900398B1 Fabrication of small-scale coils and bands as photomasks on optical fibers for generation of in-fiber gratings, electromagnets as micro-nmr coils, microtransformers, and intra-vascular stents
02/18/2004CN1138634C Method for detecting and eliminating fault in micro electric device
02/11/2004CN1475036A Solid embossing of polymer devices
02/05/2004WO2004011132A2 Closing blade for deformable valve in a microfluidic device, and method
02/05/2004WO2003086959A3 Transfer method for the production of microstructured substrates
02/05/2004US20040020968 Compliant apparatus and method
02/05/2004CA2493670A1 Closing blade for deformable valve in a microfluidic device, and method
02/04/2004EP1385628A2 Methods for screening substances in a microwell array
02/03/2004US6686993 Probe card for testing optical micro electromechanical system devices at wafer level
01/2004
01/29/2004WO2004010452A2 Flexible mold and method of manufacturing microstructure using same
01/29/2004WO2004009231A1 Method of manufacturing microwave reaction device and microwave reaction device
01/29/2004US20040018720 Fabrication method for microstructures with high aspect ratios
01/29/2004US20040016995 MEMS control chip integration
01/29/2004CA2491415A1 Flexible mold and method of manufacturing microstructure using same
01/28/2004CN1136160C Glass/silicon binding device used for making micro mechanical parts and its application
01/22/2004WO2004008248A2 A method of forming a mold and molding a micro-device
01/21/2004EP1382977A1 Apparatus and method for determining the performance of micro machines or microelectromechanical devices
01/15/2004US20040007796 Method of forming a mold and molding a micro-device
01/13/2004US6678084 Methods of making mechanisms in which relative locations of elements are maintained during manufacturing
01/08/2004US20040005723 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices
01/07/2004EP1378004A2 Detachable substrate with controlled mechanical hold and method for production thereof
01/02/2004EP1376663A2 Method and system for forming a semiconductor device
01/01/2004US20040002216 Method and system for forming a semiconductor device
12/2003
12/31/2003CN1463911A Microcomputer electric component chips level packaging apparatus
12/30/2003US6671631 Systems and methods for analyzing viscoelastic properties of combinatorial libraries of materials
12/25/2003WO2003107094A1 Multi-tiered lithographic template
12/25/2003US20030235385 Focusing femtosecond laser pulses into the dielectric to create a highly tapered modified zone with modified etch properties; dielectric material is then selectively etched into the modified zone
12/24/2003WO2003107573A1 The method and circuit for processing sdh pointer
12/18/2003WO2003105198A1 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
12/18/2003US20030232252 Multi-tiered lithographic template and method of formation and use
12/17/2003EP1371092A1 Method for structuring a flat substrate consisting of a glass-type material
12/11/2003WO2003101889A1 Mthod of producing micro component
12/11/2003WO2003043189A3 Method for gap adjustment of two mechanical elements of a substantially planar micro-mechanical structure and corresponding electromechanical resonator
12/10/2003EP1369732A2 System identification to improve control of a micro-electro-mechanical mirror
12/09/2003US6660151 Microstructure elements and process for the production thereof
12/04/2003US20030225463 System identification to improve control of a micro-electro-mechanical mirror
12/03/2003EP1367405A1 Apparatus and method for determining the performance of micro machines or microelectromechanical devices
12/03/2003EP1366927A1 Thermal transfer of microstructured layers
11/2003
11/27/2003WO2003097520A1 Single wafer fabrication of integrated micro-fluidic system
11/25/2003CA2306030C Consumable for laser capture microdissection
11/20/2003US20030215972 Single wafer fabrication of integrated micro-fluidic system
11/20/2003US20030214057 Microstructure fabrication and microsystem integration
11/19/2003EP1362634A1 Process for producing emulsion and microcapsules and apparatus therefor
11/13/2003US20030211654 MEMS device wafer-level package
11/11/2003US6646525 Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
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