Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
08/2002
08/14/2002EP1230340A1 Methods and apparatus for the electronic, homogeneous assembly and fabrication of devices
08/14/2002CN1364115A Movement sensor in a micro electro-mechanical device
08/14/2002CN1363509A Vacuum packing method for elements used in microelectromechanical system
08/08/2002US20020108096 Microfluidic design automation method and system
08/07/2002EP1228998A2 Micromechanical device and process for the manufacture of a micromechanical device
08/07/2002CN1362903A Laser ablation of doped fluoro carbon materials and applications thereof
07/2002
07/25/2002WO2001001025A9 Microfabricated elastomeric valve and pump systems
07/23/2002US6424165 Electrostatic apparatus for measurement of microfracture strength
07/17/2002EP1222053A1 Laser ablation of doped fluorocarbon materials and applications thereof
07/17/2002EP1222031A1 Method and device for moving and placing liquid drops in a controlled manner
07/17/2002CN1087668C Method and apparatus for production of amorphous alloy article formed by metal mold casting under pressure
07/11/2002WO2002053290A2 Valves and pumps for microfluidic systems and method for making microfluidic systems
07/11/2002WO2000079257A9 Molecular and atomic scale evaluation of biopolymers
07/11/2002CA2431237A1 Valves and pumps for microfluidic systems and method for making microfluidic systems
07/03/2002EP1218790A2 Microelectromechanical device with moving element
06/2002
06/27/2002US20020082172 Accurate etching of an strontium titanate single crystal substrate by forming a patterned silica protective film and etching with phosphoric acid; superconducting quantum interfers; magnetic/electric field sensors; microscope probes
06/25/2002US6408878 Microfabricated elastomeric valve and pump systems
06/20/2002US20020075554 MEMS mirror and method of fabrication
06/20/2002US20020074529 Method for dynamic manipulation of a position of a module in an optical system
06/19/2002EP1214271A1 Movement sensor in a micro electro-mechanical device
06/13/2002WO2002046356A1 Apparatus for treating sample in microamount
06/13/2002WO2002046355A1 Well unit for detecting cell chemotaxis and separating chemotactic cells
06/13/2002CA2400738A1 Well unit for detecting cell chemotaxis and separating chemotactic cells
06/06/2002WO2002044079A1 Method and apparatus for manufacturing ultra fine three-dimensional structure
06/06/2002WO2002000343A3 A microfluidic design automation method and system
06/06/2002US20020068370 Method of trimming micro-machined electromechanical sensors (MEMS) devices
05/2002
05/30/2002WO2001036320A3 Micromachine package
05/30/2002US20020064337 MEMS mirrors with precision clamping mechanism
05/29/2002EP1209502A2 Method for the dynamic adjustment of the position of an element in an optical system
05/23/2002DE10056782A1 Method for dynamic manipulation and/or adjustment in the position of a subassembly in an optical system in a sub-mm range, uses actuators with motion detectors and interconnected sensors to move the subassembly
05/22/2002EP1207048A1 A process and an apparatus for the formation of patterns in films using temperature gradients
05/22/2002EP1206352A1 Fault detection in a micro electro-mechanical device
05/21/2002US6391559 Method of sampling, amplifying and quantifying segment of nucleic acid, polymerase chain reaction assembly having nanoliter-sized sample chambers, and method of filling assembly
05/21/2002US6391217 Methods and apparatus for forming submicron patterns on films
05/16/2002WO2002038386A1 A process and an apparatus for the formation of patterns in films using temperature gradients
05/16/2002WO2001034765A9 Methods and apparatus for the electronic, homogeneous assembly and fabrication of devices
05/16/2002CA2428118A1 A process and an apparatus for the formation of patterns in films using temperature gradients
05/14/2002US6388789 Multi-axis magnetically actuated device
05/14/2002US6387851 Strontium titanate
05/02/2002EP1200264A1 Calibrating a micro electro-mechanical device
04/2002
04/25/2002WO2002032806A1 Thermoelastic actuator design
04/18/2002WO2001096962A3 Multiphoton absorption method using patterned light
04/18/2002US20020045287 Production of diaphragms
04/16/2002US6372542 Method of component manufacture
04/11/2002WO2002029912A1 Solid state embossing of polymer devices
04/11/2002WO2002028766A2 Method of trimming micro-machined electromechanical sensors (mems) devices
04/11/2002US20020041421 Microactuator for optical switching and method for fabricating the same
04/10/2002EP1194693A2 Microfabricated elastomeric valve and pump systems
04/03/2002EP1192453A1 Molecular and atomic scale evaluation of biopolymers
04/03/2002EP1192103A1 Control of solid state dimensional features
04/03/2002EP0964821B1 Method for producing and magazining micro components, magazine and assembly method for micro components
03/2002
03/28/2002WO2002025349A2 Multi-axis magnetically actuated device
03/27/2002CN1341867A Sleeve for optical connector double-pipe and manufacturing method thereof
03/21/2002WO2001070388A3 Method and apparatus for producing compact microarrays
03/19/2002US6358769 Process for manufacturing mechanical, electromechanical and opto-electromechanical microstructures having suspended regions subject to mechanical stresses during assembly
03/14/2002WO2001073934A3 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods
03/14/2002WO2001040869A3 Mask design and method for controlled profile fabrication
03/14/2002WO2001024228A3 Temporary bridge for micro machined structures
03/14/2002US20020030566 Microelecto-mechanical system actuator device and reconfigurable circuits utilizing same
02/2002
02/14/2002US20020017013 Mini-modual manufacturing environmental
01/2002
01/31/2002WO2001047003A3 Methods and apparatus for forming submicron patterns on films
01/30/2002CN1333554A Alignment method and apparatus for array type optical probe scanning IC photoetching system
01/30/2002CN1333553A Array type optical probe scanning IC photoetching method
01/24/2002WO2002007300A1 Compliant apparatus and method
01/22/2002US6341259 Microsystems integrated testing and characterization system and method
01/17/2002US20020005976 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
01/17/2002US20020005391 Methods and apparatus for forming submicron patterns on films
01/16/2002EP0946977B1 Multiple local oxidation for surface micromachining
01/16/2002EP0821987B1 Method of controlling crystallisation of organic compounds and use of solid-state component in said method
01/09/2002CN1330034A Manufacture of membrane
01/03/2002WO2002000343A2 A microfluidic design automation method and system
01/03/2002US20020001546 Loading disparate sample containers of an integral structure, such that the concentration of a specified substance in each container is characterized by a gradient with respect to the position of the container within the structure
01/02/2002EP1167280A2 Production of diaphragms
01/02/2002EP1165433A1 Method and apparatus for amplifying electrical test signals from a micromechanical device
01/02/2002CN1077300C Micro-miniature structures and method of fabrication thereof
12/2001
12/27/2001US20010054778 Microfabricated elastomeric valve and pump systems
12/26/2001CN1328695A Workpiece vibration damper
12/23/2001CA2351285A1 Production of diaphragms
12/20/2001WO2001096962A2 Multiphoton absorption method using patterned light
12/11/2001US6330102 Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
12/06/2001US20010048784 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
12/05/2001EP1160192A1 Micromanipulation method
11/2001
11/27/2001US6322194 Calibrating a micro electro-mechanical device
11/22/2001US20010043386 Optical beam steering switching system
11/20/2001US6318177 Micromechanical component and method for producing the micromechanical component
11/13/2001US6317211 Optical metrology tool and method of using same
11/01/2001US20010034938 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
10/2001
10/25/2001US20010033796 Microfabricated elastomeric valve and pump sysems
10/23/2001US6307299 Method of correcting a resonance frequency of a small rotary actuator
10/18/2001US20010029983 Microfabricated elastomeric valve and pump systems
10/18/2001DE10016017A1 Verfahren zur Montage von magazinierten Mikrobauteilen Method for mounting of microcomponents collated
10/18/2001DE10015102A1 Method of positioning and removing small objects, esp. micro-technical components, requires vibrating the gripping device at a specified amplitude and frequency, in order to loosen the object from the gripper
10/11/2001WO2001074707A2 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods
10/11/2001US20010028508 Minute particle optical manipulation method and apparatus
10/09/2001CA2219766C Crystallization control method for organic compound and crystallization control solid-state component employed therefor
10/04/2001WO2001073934A2 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods
10/04/2001WO2001072467A1 Method for assembling cassette-loaded microcomponents
10/04/2001EP1137923A1 Designs for non-contact laser capture microdissection
09/2001
09/27/2001WO2001071409A2 Apparatus and method for two-dimensional steered-beam nxm optical switch using single-axis mirror arrays and relay optics
09/27/2001WO2001070388A2 Method and apparatus for producing compact microarrays
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