| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 05/31/2006 | EP1362634B1 Process for producing emulsion and apparatus therefor |
| 05/30/2006 | US7052622 Method for measuring etch rates during a release process |
| 05/26/2006 | WO2006036601A3 Process control monitors for the fabrication interferometric modulators |
| 05/25/2006 | US20060110893 Glass-type planar substrate, use thereof, and method for the production thereof |
| 05/25/2006 | US20060110845 Method of manufacturing micro-structure element by utilizing molding glass |
| 05/25/2006 | US20060108327 Method of manufacturing a microstructure |
| 05/24/2006 | EP1659094A1 Method of producing three-dimensional structure and fine three-dimensional structure |
| 05/24/2006 | EP1659093A2 Method of manufacturing a microstructure |
| 05/24/2006 | CN1775657A Method for preparing submicron metal/dielectric composite medium microball for nano shell structure |
| 05/24/2006 | CN1775655A Method for rapid manufacturing three-dimensional complex micro structure |
| 05/24/2006 | CN1775654A Method for increasing coding stability of quantum point coding microball |
| 05/18/2006 | US20060101912 Micromechanical device with thinned cantilever structure and related methods |
| 05/17/2006 | EP1657070A1 A stamp for soft lithography, in particular micro contact printing and a method of preparing the same |
| 05/17/2006 | EP1656242A2 Capillary imprinting technique |
| 05/17/2006 | CN2780733Y Induction heating sealing linkage device |
| 05/17/2006 | CN1772501A A stamp for soft lithography, in particular micro contact printing and a method of preparing the same |
| 05/17/2006 | CN1256271C Bulb micromanipulator based on inertia-friction principle |
| 05/11/2006 | WO2006048306A1 Structured copolymer supports for use in mass spectrometry |
| 05/11/2006 | DE102005052509A1 Druckplatte und Verfahren zum Herstellen derselben Printing plate and method for manufacturing the same |
| 05/11/2006 | DE102004053458A1 Strukturierte polymere Träger für die Massenspektrometrie und Verfahren zu deren Herstellung Structured polymeric carrier for mass spectrometry and processes for their preparation |
| 05/09/2006 | US7040338 Microfabricated elastomeric valve and pump systems |
| 05/04/2006 | WO2005121892A3 Apparatus, system and method to vary dimensions of a substrate during nano-scale manufacturing |
| 05/04/2006 | US20060091106 Printing plate and method for fabricating the same |
| 05/04/2006 | US20060091051 Micro fluid device and process for producing the same |
| 05/04/2006 | DE102004022386B4 Molding apparatus for micro-components has molding chamber in which particles are sintered by laser, external acousto-optical modulator below laser controlling beam so that it operates in pulsed or continuous wave mode |
| 05/04/2006 | DE102004011035B4 Verfahren zur Prüfung der Dichtigkeit von Scheibenbondverbindungen und Anordnung zur Durchführung des Verfahrens Method for testing the tightness of bonding connections and disc arrangement for performing the method |
| 05/02/2006 | US7036389 System for determining characteristics of substrates employing fluid geometries |
| 04/27/2006 | WO2006043443A1 Process for producing microsphere with use of metal substrate having through-hole |
| 04/26/2006 | CN1764898A Analysis and monitoring of stresses in embedded lines and vias integrated on substrates |
| 04/26/2006 | CN1764596A Method for fabricating three-dimensional microstructure by fib-cvd and drawing system for three-dimensional microstructure |
| 04/26/2006 | CN1763675A System and method for sensor replication for ensemble averaging in micro-electromechanical systems (MEMS) |
| 04/26/2006 | CN1762788A Hermetically sealed microdevice with getter shield |
| 04/25/2006 | US7033519 Focusing femtosecond laser pulses into the dielectric to create a highly tapered modified zone with modified etch properties; dielectric material is then selectively etched into the modified zone |
| 04/20/2006 | US20060082463 System and method for sensor replication for ensemble averaging in micro-electromechanical systems (MEMS) |
| 04/20/2006 | DE102005045081A1 Suszeptor Susceptor |
| 04/13/2006 | US20060079585 Process and apparatus for producing emulsion and microcapsules |
| 04/13/2006 | US20060079584 Process and apparatus for producing emulsion and microcapsules |
| 04/13/2006 | US20060079583 Ejection drops; oil in water emulsion; ink jet printers |
| 04/13/2006 | US20060078736 Three-dimensional periodic structure, three-dimensional periodic porous structure, and method for producing these |
| 04/13/2006 | US20060077755 Process and apparatus for producing emulsion and microcapsules |
| 04/13/2006 | US20060077381 Process control monitors for interferometric modulators |
| 04/13/2006 | US20060076718 Method for manufacturing microstructures having hollow microelements using fluidic jets during a molding operation |
| 04/12/2006 | CN1759314A Micro fluid device and process for producing the same |
| 04/12/2006 | CN1250445C Microcomputer electric component chips level packaging apparatus |
| 04/11/2006 | US7026821 Testing MEM device array |
| 04/11/2006 | US7025436 Method of detecting a blockage within an inkjet nozzle |
| 04/06/2006 | WO2006036601A2 Process control monitors for the fabrication interferometric modulators |
| 04/06/2006 | WO2006036383A2 System and method of testing humidity in a sealed mems device |
| 04/05/2006 | CN1755417A Method and system for detecting leak in electronic devices |
| 04/04/2006 | US7022516 Apparatus for use in the analysis and separation of chemotatic cells |
| 04/04/2006 | US7022244 Supplying fine drops; machining; atomizing liquids; heating with carrier gas; drying; distillation; aqueous solution of hydrogen fluoride for etching silica |
| 04/04/2006 | US7021747 Method of removing a blockage in a micro electronmechanical device |
| 03/30/2006 | US20060067645 System and method of testing humidity in a sealed MEMS device |
| 03/30/2006 | US20060066872 Process control monitors for interferometric modulators |
| 03/30/2006 | US20060066871 Process control monitors for interferometric modulators |
| 03/30/2006 | US20060066864 Process control monitors for interferometric modulators |
| 03/30/2006 | US20060065941 Encapsulation component for integrated micro electromechanical systems and fabrication process of the component |
| 03/30/2006 | US20060065622 Method and system for xenon fluoride etching with enhanced efficiency |
| 03/30/2006 | US20060065366 Portable etch chamber |
| 03/30/2006 | US20060065196 Susceptor |
| 03/29/2006 | EP1641027A2 Portable etch chamber |
| 03/29/2006 | EP1641026A2 Method and system for xenon fluoride etching with enhanced efficiency |
| 03/29/2006 | EP1640335A2 Packaging device for electromechanical integrated microsystems und its method of fabrication |
| 03/29/2006 | EP1640333A1 Hermetically sealed microdevice with getter shield |
| 03/29/2006 | EP1639411A1 A nano impression lithographic process which involves the use of a die having a region able to generate heat |
| 03/29/2006 | CN1248555C Method for drilling microholes using laser beam |
| 03/29/2006 | CN1247444C Three dimensional micro structure mould pressing etching method compatible with integrated circuit technology |
| 03/28/2006 | US7019835 Method and system to measure characteristics of a film disposed on a substrate |
| 03/28/2006 | CA2258457C Laser machining method and laser machining apparatus |
| 03/27/2006 | CA2515622A1 Method and system for xenon fluoride etching with enhanced efficiency |
| 03/27/2006 | CA2514350A1 Portable etch chamber |
| 03/23/2006 | WO2006030716A1 Microstructure inspecting apparatus and microstructure inspecting method |
| 03/23/2006 | US20060063462 Hermetically sealed microdevice with getter sheild |
| 03/23/2006 | US20060062924 Carbon nanotube structures, carbon nanotube devices using the same and method for manufacturing carbon nanotube structures |
| 03/23/2006 | US20060062701 Method of manufacturing microwave reaction device and microwave reaction device |
| 03/23/2006 | DE102005029841A1 Mikromechanische Vorrichtung mit integrierter Heizung Micromechanical device with integrated heating |
| 03/22/2006 | EP1636000A2 Method for manufacturing perforated microstructures by using fluidic jets |
| 03/22/2006 | CN1246215C Movement sensor in micro electro mechanical device including detecting controller arm |
| 03/21/2006 | US7015620 Method for supplying multiple voltages to a movable part of a MEMS device |
| 03/21/2006 | US7014786 Methods and apparatus for forming submicron patterns on films |
| 03/08/2006 | CN1745319A Manufacturing micro-structured elements |
| 03/08/2006 | CN1745264A Devices and methods for programmable microscale manipulation of fluids |
| 03/08/2006 | CN1743903A System and method of sensing actuation and release voltages of an interferometric modulator |
| 03/07/2006 | US7007709 Microfluidic device and manufacture thereof |
| 03/02/2006 | US20060046497 Manufacturing method |
| 03/02/2006 | US20060044343 Ink jet nozzle arrangement that incorporates in a movement sensor |
| 03/01/2006 | EP1252028A4 Temporary bridge for micro machined structures |
| 02/23/2006 | DE10331806B4 Verfahren zur Herstellung großflächiger mikrostrukturierter Funktionselemente A process for producing large-area microstructured functional elements |
| 02/23/2006 | DE102004049865A1 Vorrichtung und Verfahren zum Drucken, insbesondere zum Drucken von Mikrostrukturen Apparatus and method for printing, particularly for printing microstructures |
| 02/22/2006 | CN1739015A Method and system for determining characteristics of substrates employing fluid geometries |
| 02/16/2006 | US20060036416 Computer aided design method and system for developing a microfluidic system |
| 02/16/2006 | US20060034562 Beam switch structures and methods |
| 02/16/2006 | DE102005034881A1 Verfahren zum Positionieren einer Trennlinie eines Wafers A method for positioning a parting line of a wafer |
| 02/15/2006 | CN1733591A Beam switch structures and methods |
| 02/15/2006 | CN1241827C Making process of sealed cavity for micro electromechanical chip |
| 02/14/2006 | US6997537 Method of detecting a fault in a micro-electromechanical device |
| 02/14/2006 | US6997534 Detecting faults in a micro electro mechanical device utilising a single current pulse |
| 02/09/2006 | WO2006014929A1 System and method for micro-electromechanical operating of an interferometric modulator |
| 02/09/2006 | US20060027949 Device of microstructure imprint for pattern transfer and method of the same |
| 02/09/2006 | US20060027543 Precision machining method using a near-field scanning optical microscope |