| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
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| 04/09/2008 | CN101158695A Devices and methods for programmable microscale manipulation of fluids |
| 04/09/2008 | CN101158568A Insulation layer thickness electrology test structure in micro electro-me-chanical systems device structure |
| 04/09/2008 | CN101158447A Devices and methods for programmable microscale manipulation of fluids |
| 04/09/2008 | CN101157436A Apparatus for precisely controlling wire distribution distance |
| 04/09/2008 | CN100380034C Devices and methods for programmable microscale manipulation of fluids |
| 04/03/2008 | WO2008038781A1 Probe card and inspection device of minute structure |
| 04/03/2008 | US20080081392 Method for the Compensation of Deviations Occurring as a Result of Manufacture in the Manufacture of Micromechanical Elements and Their Use |
| 04/03/2008 | US20080079142 Wafer-level MEMS package and manufacturing method thereof |
| 04/02/2008 | CN101154035A Fine mold and method for regenerating fine mold |
| 04/02/2008 | CN101152955A Method of making microstructure device, and microstructure device made by the same |
| 03/27/2008 | WO2008034233A1 Integrated mems packaging |
| 03/27/2008 | US20080075924 Method of making microstructure device, and microstructure device made by the same |
| 03/27/2008 | US20080074461 Nozzle Arrangement With A Movement Sensor For An Inkjet Printer |
| 03/27/2008 | US20080073997 Method of designing rotary thermal actuator and rotary thermal actuator |
| 03/27/2008 | US20080073511 Structured Copolymer Supports for Use in Mass Spectrometry |
| 03/27/2008 | CA2663392A1 Integrated mems packaging |
| 03/26/2008 | EP1903392A2 Fine mold and method for regenerating fine mold |
| 03/26/2008 | EP1902782A2 A support unit for a microfluidic system |
| 03/26/2008 | EP1902781A2 A support unit for a microfluidic system |
| 03/26/2008 | EP1902780A2 A support unit for a microfluidic system |
| 03/26/2008 | EP1902779A2 A support unit for a microfluidic system |
| 03/26/2008 | CN101150055A Making method for large-area 3C-SiC thin film of MEMS part |
| 03/26/2008 | CN101149559A Method for preparing ball-shaped bump biological microelectrode array |
| 03/26/2008 | CN101148243A Method for making three-dimension electric casting micro structure |
| 03/25/2008 | US7348788 Probing card and inspection apparatus for microstructure |
| 03/25/2008 | US7347683 Mold and molding apparatus using the same |
| 03/20/2008 | US20080067652 Integrated mems packaging |
| 03/19/2008 | CN101144701A Insulation layer and semiconductor conducting layer aligning error electrical testing structure in micro-electro-mechanical system |
| 03/19/2008 | CN101143706A Distributed micromotor system phase shifter chip scale micro-packing component |
| 03/19/2008 | CN101143705A Method for preparing micrometer and submicron probe arrays |
| 03/19/2008 | CN101143704A Different conductive layers alignment error electricity testing structure in micromotor system apparatus process |
| 03/19/2008 | CN101143703A Metal layer and insulation layer graphic alignment error electricity testing structure in micromotor system apparatus process |
| 03/19/2008 | CN101143700A Method for processing micro-machinery hot flow type sensor |
| 03/18/2008 | US7344990 Method of manufacturing micro-structure element by utilizing molding glass |
| 03/13/2008 | WO2008030284A2 Soft mems |
| 03/13/2008 | US20080061459 Process for Producing Microsphere with Use of Metal Substrate having Through-Hole |
| 03/13/2008 | CA2653557A1 Soft mems |
| 03/12/2008 | EP1897122A2 Substrate contact for a capped mems and method of making the substrate contact at the wafer level |
| 03/12/2008 | CN101142137A Micromechanical component and method for fabricating a micromechanical component |
| 03/12/2008 | CN101139080A Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use |
| 03/12/2008 | CN101139079A Plastic packaging method of microcomputer sensing and measuring element and structure thereof |
| 03/12/2008 | CN101138799A Novel micro nanometer electric spark and tunneling current composite processing device |
| 03/11/2008 | US7343080 System and method of testing humidity in a sealed MEMS device |
| 03/11/2008 | US7341211 Device for the production of capillary jets and micro-and nanometric particles |
| 03/06/2008 | WO2008005208A3 Printing form precursor and process for preparing a stamp from the precursor |
| 03/06/2008 | US20080058499 Three-dimensional periodic structure, three-dimensional periodic porous structure, and method for producing these |
| 03/06/2008 | US20080055703 In situ application of anti-stiction materials to micro devices |
| 03/05/2008 | EP1893527A1 Method of fabricating high yield wafer level packages integrating mmic and mems components |
| 03/05/2008 | CN101136037A Macros model establishing method of micro-electromechanical system |
| 03/05/2008 | CN100372667C Stamper, imprinting method, and method of manufacturing an information recording medium |
| 02/28/2008 | WO2007120537A3 Patterning a plurality of fields on a substrate |
| 02/28/2008 | US20080048305 Negative Thermal Expansion System (NTES) Device for TCE Compensation in Elastomer Composites and Conductive Elastomer Interconnects in Microelectronic Packaging |
| 02/27/2008 | EP1891668A1 Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor |
| 02/21/2008 | US20080041259 Pyrotechnic Microsystem and Method for Fabricating a Microsystem |
| 02/20/2008 | CN101128910A Improved method and apparatus for monitoring a microstructure etching process |
| 02/19/2008 | US7332197 Methods of fabricating microneedle arrays using sacrificial molds, and microneedle arrays fabricated thereby |
| 02/14/2008 | US20080038861 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 02/13/2008 | EP1887408A2 Manufacturing method for variable shape mirror |
| 02/13/2008 | EP1885644A2 Microfluidic devices with integrated tubular structures |
| 02/13/2008 | CN101122677A Manufacturing method for variable shape mirror |
| 02/13/2008 | CN101121501A Method for separating chip containing micro-electromechanical system in wafer |
| 02/13/2008 | CN100369194C Method of manufacturing an inkjet head through the anodic bonding of silicon members |
| 02/12/2008 | US7328977 Inkjet printhead with micro-electromechanical fluid ejection devices having integrated movement sensors |
| 02/12/2008 | US7328638 Cutting tool using interrupted cut fast tool servo |
| 02/07/2008 | US20080030700 Device and method for lithography |
| 02/07/2008 | US20080029931 Imprint device and imprint method |
| 02/06/2008 | EP1588197B1 Manufacturing micro-structured elements |
| 02/06/2008 | EP1565932B1 Method for producing and testing a corrosion-resistant channel in a silicon device |
| 02/06/2008 | CN101118826A Method for manufacturing carbon nano-tube field transmitting rotating electron source |
| 02/06/2008 | CN101117207A In situ application of anti-stiction materials to micro devices |
| 02/06/2008 | CN100366349C Method for preparing phospho silane-rare earth nanometer membrane on single crystal silicon sheet surface |
| 02/05/2008 | US7326445 Method and apparatus for manufacturing ultra fine three-dimensional structure |
| 02/05/2008 | US7325901 Ink jet nozzle arrangement incorporating mechanically coupled bend actuator arms |
| 01/31/2008 | WO2008014028A2 Tethered airway implants and methods of using the same |
| 01/31/2008 | WO2008013282A1 Method for producing microneedle |
| 01/31/2008 | US20080023880 Process of production of patterned structure |
| 01/31/2008 | CA2649561A1 Tethered airway implants and methods of using the same |
| 01/30/2008 | CN101112789A Process of production of patterned structure |
| 01/29/2008 | US7323657 Precision machining method using a near-field scanning optical microscope |
| 01/29/2008 | US7322100 Method for producing a micromachined layered device |
| 01/24/2008 | WO2008009803A2 Production of microfluidic polymeric devices by photo-assisted and/ or thermally assisted printing |
| 01/24/2008 | US20080018024 Method and apparatus for imprinting energy ray-setting resin, and discs and semiconductor devices with imprinted resin layer |
| 01/23/2008 | EP1438182A4 Optical tools manipulated by optical traps |
| 01/23/2008 | CN101111362A Method and apparatus for producing three-dimensional structure |
| 01/23/2008 | CN101110278A Method for preparing fusion pallet based on micro-fluid |
| 01/23/2008 | CN101108723A Method for manufacturing silicon chip of ultramicro tension pressure sensor |
| 01/23/2008 | CN101108722A Wafer level vacuum encapsulation of microelectron mechanical system and upside-down mounting soldering method thereof |
| 01/17/2008 | US20080013145 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/17/2008 | US20080013144 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/10/2008 | WO2008005208A2 Printing form precursor and process for preparing a stamp from the precursor |
| 01/10/2008 | WO2008004597A1 Method for manufacturing microneedle |
| 01/10/2008 | US20080009091 Wafer Level Capped Sensor |
| 01/10/2008 | US20080006888 Nanomachined mechanical components using nanoplates, methods of fabricating the same and methods of manufacturing nanomachines |
| 01/10/2008 | DE102006031227A1 Substrate holder for handling substrate material, has valves automatically opened when connecting substrate holder to corroding station and/or to critical-pointy-dryer and closed when separating substrate holder from corroding station |
| 01/09/2008 | EP1876139A2 Bi-axially driven MEMS Device |
| 01/09/2008 | CN101101441A Large area periodic array three-dimensional microstructure preparation method |
| 01/09/2008 | CN100360269C Method of connecting module layers suitable for the production of microstructure components and a microstructure component |
| 01/08/2008 | US7316965 Substrate contact for a capped MEMS and method of making the substrate contact at the wafer level |
| 01/08/2008 | US7316072 XY stage module, storage system employing the same and method for fabricating the XY stage module |
| 01/03/2008 | WO2008001670A1 Monoparticulate-film etching mask and process for producing the same, process for producing fine structure with the monoparticulate-film etching mask, and fine structure obtained by the production process |