| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 01/03/2008 | WO2007079072A3 Microreactor glass diaphragm sensors |
| 01/03/2008 | US20080003433 Hollow device and manufacturing method thereof |
| 01/03/2008 | US20080003352 Process control monitors for interferometric modulators |
| 01/03/2008 | US20080002930 Beam switch structures and methods |
| 01/03/2008 | US20080002206 Process control monitors for interferometric modulators |
| 01/03/2008 | US20080000373 Printing form precursor and process for preparing a stamp from the precursor |
| 01/02/2008 | EP1656242A4 Capillary imprinting technique |
| 01/02/2008 | CN101096265A Hollow device and manufacturing method thereof |
| 01/02/2008 | CN101096009A Support unit for micro fluid system, and method of manufacturing support unit for micro fluid system |
| 01/02/2008 | CN101096008A Support unit for micro fluid system, and method of manufacturing support unit for micro fluid system |
| 01/02/2008 | CN101096007A Support unit for micro fluid system, and method of manufacturing support unit for micro fluid system |
| 01/01/2008 | US7315106 Actuator element and production method therefor |
| 12/27/2007 | WO2007147956A2 Method and device for monitoring a heat treatment of a microtechnological substrate |
| 12/27/2007 | WO2007100457A3 Electrical conditioning of mems device and insulating layer thereof |
| 12/27/2007 | US20070296532 MEMS device |
| 12/26/2007 | CN101094804A Packaging for micro electro-mechanical systems and methods of fabricating thereof |
| 12/26/2007 | CN101092233A Mems device |
| 12/21/2007 | WO2007144826A2 Pharmaceutical tablets with diffractive microstructure and compression tools for producing such tablets |
| 12/21/2007 | WO2007046841A3 Ceramic components, coated structures and methods for making same |
| 12/21/2007 | WO2007001856A3 Substrate contact for a capped mems and method of making the substrate contact at the wafer level |
| 12/20/2007 | DE102006004644B4 Werkzeug und Verfahren zum Erzeugen einer Schicht mit mikrostrukturierter Außenfläche auf einer Substratoberfläche Tool and method for forming a layer having a microstructured outer surface on a substrate surface |
| 12/19/2007 | EP1866654A1 Method and device for tempering a substrate |
| 12/19/2007 | EP1866236A1 Micromechanical component and method for fabricating a micromechanical component |
| 12/19/2007 | CN101088912A Ultrasonic bonding structure for guiding energy, Guiding flow and locating precisely of polymer microstructure |
| 12/19/2007 | CN100356566C Semiconductor device with micro electromechanical system |
| 12/18/2007 | US7309620 Use of sacrificial layers in the manufacture of high performance systems on tailored substrates |
| 12/13/2007 | WO2007142088A1 Method of forming resist pattern by nanoimprint lithography |
| 12/13/2007 | WO2007105158A3 Method for manufacturing a microelectronic package |
| 12/13/2007 | US20070287215 Method for fabricating semiconductor device |
| 12/13/2007 | US20070286294 Method For Controlling/Regulating A Physical Quantity Of A Dynamic System, In Particular A Micromechanical Sensor |
| 12/13/2007 | US20070284249 Microchannel cleaning method |
| 12/12/2007 | CN101085674A Microchannel cleaning method |
| 12/12/2007 | CN100355045C Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 12/11/2007 | US7307775 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 12/06/2007 | WO2007138305A1 Methods and systems for creating a material with nanomaterials |
| 12/06/2007 | WO2007112833B1 Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrate |
| 12/06/2007 | WO2007044035A3 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
| 12/06/2007 | US20070281445 Method for Self-Supported Transfer of a Fine Layer by Pulsation after Implantation or Co-Implantation |
| 12/06/2007 | US20070279876 Device for passivating at least one component by a housing and method for manufacturing a device |
| 12/06/2007 | US20070278177 Processing method using atomic force microscope microfabrication device |
| 12/05/2007 | CN100353188C Improved apparatus, system and method for applying optical gradient forces |
| 11/29/2007 | WO2007135128A1 Micro component provided with a cavity bounded by a cap with improved mechanical strength |
| 11/29/2007 | US20070275230 Methods and systems for creating a material with nanomaterials |
| 11/29/2007 | US20070273013 Packaging for Micro Electro-Mechanical Systems and Methods of Fabricating Thereof |
| 11/28/2007 | CN100351995C Method for producing and testing a corrosion-resistant channel in a silicon device |
| 11/22/2007 | DE19511596B4 Verfahren zum Ätzen von Halbleiterwafern A method of etching semiconductor wafers |
| 11/22/2007 | DE102006022808A1 Component e.g. semiconductor component, separating method, involves superimposing protection unit on main side of component, and separating component from another main side that is opposite to former main side |
| 11/21/2007 | EP1856566A1 Microreplicated article with defect-reducing surface |
| 11/21/2007 | CN100350565C Surface treatment method, semiconductor device, method of fabricating semiconductor device, and treatment apparatus |
| 11/20/2007 | US7299151 Microdevice processing systems and methods |
| 11/20/2007 | US7298456 System for varying dimensions of a substrate during nanoscale manufacturing |
| 11/15/2007 | WO2007129355A1 Device and method for obtaining a substrate structured on micrometric or nanometric scale |
| 11/15/2007 | US20070262050 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
| 11/14/2007 | EP1855142A2 System and method for micro-electromechanical operating of an interferometric modulator |
| 11/14/2007 | EP1854617A1 Machining method of microstructure and machining system of microstructure |
| 11/14/2007 | CN101073034A Method for imprint lithography at constant temperature |
| 11/14/2007 | CN101071200A Electrical characterization of interferometric modulators |
| 11/14/2007 | CN101071199A Electrical characterization of interferometric modulators |
| 11/14/2007 | CN101071061A Electrical characterization of interferometric modulators |
| 11/13/2007 | US7294552 Electrical contact for a MEMS device and method of making |
| 11/13/2007 | US7294279 Method for releasing a micromechanical structure |
| 11/08/2007 | WO2007125756A1 Apparatus for inspecting fine structure and method for inspecting fine structure |
| 11/08/2007 | US20070257389 Imprint Mask and Method for Defining a Structure on a Substrate |
| 11/08/2007 | US20070256774 Method of manufacturing microstructure and manufacturing system for the same |
| 11/08/2007 | DE102006019962A1 Imprint-Maske und Verfahren zum Ausrichten der Imprint-Maske Imprint mask and method for aligning the imprint mask |
| 11/08/2007 | DE102005058121B4 Verfahren zum Herstellen keramischer Bauteile, insbesondere elektrisch isolierender Bauteile A method for producing ceramic components, in particular electrically insulating components |
| 11/01/2007 | WO2007124357A2 Integrated mems metrology device using complementary measuring combs |
| 11/01/2007 | WO2007123249A2 Alignment method, imprint method, alignment apparatus, and position measurement method |
| 11/01/2007 | US20070254396 Systems and methods for creating mems gyros |
| 10/31/2007 | EP1850090A2 Systems and methods for creating mems gyros |
| 10/31/2007 | CN101065641A Method for controlling/regulating a physical quantity of a dynamic system |
| 10/31/2007 | CN101063747A Process control monitors for interferometric modulators |
| 10/25/2007 | WO2007120537A2 Patterning a plurality of fields on a substrate |
| 10/25/2007 | WO2006134233A9 Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor |
| 10/25/2007 | US20070246052 Tethered Airway Implants and Methods of Using the Same |
| 10/24/2007 | EP1754108A4 Apparatus, system and method to vary dimensions of a substrate during nano-scale manufacturing |
| 10/24/2007 | CN101061058A Imprinting of supported and free-standing 3-D micro-or nano-structures |
| 10/24/2007 | CN101059550A Test contact system for testing integrated circuits with packages having an array of signal and power contacts |
| 10/24/2007 | CN101059380A Flexible capacitance type touch sensor production method |
| 10/23/2007 | US7286278 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 10/18/2007 | WO2007116469A1 Method of transferring pattern and apparatus for transferring pattern |
| 10/18/2007 | US20070243413 Thermoelastic Device With Preselected Resistivity, Inertness And Deposition Characteristics |
| 10/18/2007 | US20070243281 Method of Transcribing Fine Pattern and Fine Structure Pattern Transcription Apparatus |
| 10/17/2007 | EP1843972A2 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
| 10/11/2007 | WO2007112833A1 Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrate |
| 10/11/2007 | WO2007057814A3 Electronic device comprising a mems element |
| 10/11/2007 | US20070234782 Tightness Test for Mems or for Small Encapsulated Components |
| 10/10/2007 | EP1842222A1 Improved method and apparatus for monitoring a microstructure etching process |
| 10/10/2007 | CN101051328A Reusable parameter module model building method for space contineous deformation MEMS |
| 10/10/2007 | CN101051183A Pattern forming method and mold |
| 10/04/2007 | WO2007111215A1 Mold for pattern transfer |
| 10/04/2007 | US20070231981 Patterning a Plurality of Fields on a Substrate to Compensate for Differing Evaporation Times |
| 10/04/2007 | US20070231541 Microstructured tool and method of making same using laser ablation |
| 10/04/2007 | US20070228540 MEMS Device Wafer-Level Package |
| 10/03/2007 | CN101046374A Non-destructive measurement method of nanometer cantilever thickness based on force curve of atomic force microscope |
| 10/03/2007 | CN101046371A Method for measuring curvature of micron/nanometer cantilever based on microinterference and finite difference |
| 10/02/2007 | US7275424 Wafer level capped sensor |
| 09/26/2007 | EP1837180A1 Method for producing piezoelectric actuator, ink-jet head, and ink-jet printer using aerosol deposition method, piezoelectric actuator, ink-jet head, and ink-jet printer |
| 09/26/2007 | CN101043936A Process for producing microsphere with use of metal substrate having through-hole |
| 09/26/2007 | CN101041292A Methods for producing piezoelectric actuator, ink-jet head, and ink-jet printer |