| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 10/27/2004 | EP1200264A4 Calibrating a micro electro-mechanical device |
| 10/27/2004 | CN1541406A Detachable substrate with controlled mechanical hold and method for prodn. thereof |
| 10/26/2004 | US6808953 Gap tuning for surface micromachined structures in an epitaxial reactor |
| 10/26/2004 | US6808929 Device and method for physiochemical measurements |
| 10/21/2004 | US20040207681 Method of removing a blockage in a micro electronmechanical device |
| 10/21/2004 | US20040207680 Under actuation detection in a micro electromechanical device |
| 10/21/2004 | US20040207679 Over actuation detection in a micro electromechanical device |
| 10/21/2004 | US20040207678 Testing for correct operation of micro electromechanical device |
| 10/21/2004 | US20040207677 Fault detection in a micro mechanical device |
| 10/21/2004 | US20040206391 Microfluidic device and manufacture thereof |
| 10/19/2004 | US6805809 Decal transfer microfabrication |
| 10/14/2004 | US20040200368 Mold structures, and method of transfer of fine structures |
| 10/12/2004 | US6802587 Micro electro-mechanical device having an integrated movement sensor |
| 10/07/2004 | WO2004086471A1 Uv nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization |
| 10/07/2004 | US20040195638 Micromechanical component as well as a method for producing a micromechanical component |
| 10/06/2004 | EP1464078A1 Method and device for anisotropic etching of high aspect ratio |
| 09/30/2004 | US20040192041 UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization |
| 09/30/2004 | US20040191924 Reformatted through-hole arrays |
| 09/23/2004 | WO2004081559A1 Micro fluid device and process for producing the same |
| 09/21/2004 | US6793974 Selecting a material for use as the expansive element |
| 09/21/2004 | US6793753 Method of making a microfabricated elastomeric valve |
| 09/16/2004 | US20040180517 Method for structuring a flat substrate consisting of a glass-type material |
| 09/16/2004 | US20040180179 Method for making three-dimensional structures having nanometric and micrometric dimensions |
| 09/16/2004 | US20040179972 Systems and methods for detecting manufacturing defects in microfluidic devices |
| 09/10/2004 | WO2004076343A1 Method for fabricating three-dimensional microstructure by fib-cvd and drawing system for three-dimensional microstructure |
| 09/10/2004 | WO2004076339A2 Method for manufacturing microstructures having multiple microelements with through-holes |
| 09/10/2004 | WO2004076049A2 Method and apparatus for fabricating nanoscale structures |
| 09/10/2004 | CA2517988A1 Method for manufacturing microstructures having multiple microelements with through-holes |
| 09/08/2004 | EP1453654A1 A device for processing a three dimensional structure into a substrate |
| 09/02/2004 | US20040171055 Method for detecting the presence of a single target nucleic acid in a sample |
| 09/01/2004 | EP1452481A2 Fabrication of advanced silicon-based MEMS devices |
| 08/26/2004 | WO2004011132A3 Closing blade for deformable valve in a microfluidic device, and method |
| 08/26/2004 | US20040164454 Method for manufacturing microstructures having multiple microelements with through-holes |
| 08/18/2004 | EP1447127A1 Process and apparatus for producing emulsion and microcapsules |
| 08/18/2004 | EP1446844A2 Curved electro-active actuators |
| 08/18/2004 | EP1350029A4 Valves and pumps for microfluidic systems and method for making microfluidic systems |
| 08/17/2004 | US6776864 Plastic lab-on-a-chip system fabricated by coupling a plastic substrate having a metal pattern with another plastic substrate in a reversible or irreversible way. |
| 08/12/2004 | WO2004068554A2 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates |
| 08/12/2004 | WO2004068198A1 Manufacturing micro-structured elements |
| 08/12/2004 | US20040157426 Fabrication of advanced silicon-based MEMS devices |
| 08/11/2004 | EP1445340A2 Method for producing monocrystalline metallic wire |
| 08/11/2004 | EP1444779A2 Method for gap adjustment of two mechanical elements of a substantially planar micro-mechanical structure and corresponding electromechanical resonator |
| 08/11/2004 | CN1519118A Micro electro-mechanical device having integrated movement sensor |
| 08/05/2004 | WO2004050242A3 Devices and methods for programmable microscale manipulation of fluids |
| 08/05/2004 | WO2004044651B1 A chucking system and method for modulating shapes of substrates |
| 08/04/2004 | EP1443344A1 Manufacturing micro-structured elements |
| 08/03/2004 | US6770337 Thermal transfer element is configured and arranged for transfer of at least a portion of microstructured layer to receptor while preserving microstructured features of that portion |
| 08/03/2004 | US6769444 First assembly is presintered and adhered thereto by heat treatment to form a one-piece microstructure defining at least one recess between the first and second substrates. |
| 07/28/2004 | EP1440308A1 A microfluidic device and manufacture thereof |
| 07/28/2004 | CN1515410A Failure detection in miniature mechanoelectrical device by utilizing signal current pulse |
| 07/27/2004 | US6768181 Micro-machined electromechanical sensors (MEMS) devices |
| 07/27/2004 | US6767758 Micro-machined device structures having on and off-axis orientations |
| 07/27/2004 | US6767194 Valves and pumps for microfluidic systems and method for making microfluidic systems |
| 07/21/2004 | EP1438255A2 Micromechanical sensor having a self-test function and optimization method |
| 07/21/2004 | EP1438182A1 Optical tools manipulated by optical traps |
| 07/21/2004 | CN2626974Y Structure realizing gas tight packaging of micro-electro-mechanical system device |
| 07/21/2004 | CN2626973Y Supporter controlling glass or organic rubber caving during linkage procedure |
| 07/15/2004 | WO2004047148A3 Method for producing and testing a corrosion-resistant channel in a silicon device |
| 07/15/2004 | WO2004015741A3 Notch-free etching of high aspect soi structures using alternating deposition and etching and pulsed plasma |
| 07/08/2004 | US20040132301 Indirect fluid pressure imprinting |
| 07/08/2004 | US20040129684 Method of laser processing and head for ejecting droplet |
| 07/08/2004 | US20040129351 Method and system for fabricating three-diemensional microstructure |
| 07/07/2004 | EP1435336A2 Gap tuning for surface micromachined structures in an epitaxial reactor |
| 07/07/2004 | CN1511433A Method for drilling microholes using laser beam |
| 07/07/2004 | CN1510742A Negative thermal dilation system device and conductive elastomer in mlcroelectronics seal connection |
| 07/06/2004 | US6759670 Method for dynamic manipulation of a position of a module in an optical system |
| 07/01/2004 | WO2004055594A2 Method and system for determining characteristics of substrates employing fluid geometries |
| 07/01/2004 | WO2004038275B1 Microfabrication tool pedestal and method of use |
| 07/01/2004 | US20040124483 Adjust accuracy of gap width; multilayer, substrates, dielectric; etching holes; cleaning residues |
| 06/30/2004 | CN1509415A Improved apparatus, system and method for applying optical gradient forces |
| 06/29/2004 | US6756232 Method and apparatus for producing compact microarrays |
| 06/24/2004 | US20040119492 Method and apparatus for testing movement-sensitive substrates |
| 06/22/2004 | US6753528 System for MEMS inspection and characterization |
| 06/17/2004 | WO2004051744A2 Mems control chip integration |
| 06/17/2004 | WO2004050242A2 Devices and methods for programmable microscale manipulation of fluids |
| 06/17/2004 | WO2004021084A3 Decal transfer microfabrication |
| 06/17/2004 | US20040113148 Structure and method for measuring the etching speed |
| 06/17/2004 | US20040112728 Ceramic channel plate for a switch |
| 06/17/2004 | US20040112153 Method and system for determining characteristics of substrates employing fluid geometries |
| 06/15/2004 | US6750152 Method and apparatus for electrically testing and characterizing formation of microelectric features |
| 06/10/2004 | WO2004010452A3 Flexible mold and method of manufacturing microstructure using same |
| 06/10/2004 | US20040110322 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging |
| 06/08/2004 | US6747775 Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same |
| 06/03/2004 | WO2004047148A2 Method for producing and testing a corrosion-resistant channel in a silicon device |
| 06/02/2004 | CN1500636A Laser process method and liquid nozzle |
| 06/01/2004 | US6744174 Frequency sensitivity analysis and optimum design for MEMS resonator |
| 06/01/2004 | US6744173 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
| 05/27/2004 | WO2004044967A1 Method for manufacturing transfer mask substrate, transfer mask substrate, and transfer mask |
| 05/27/2004 | WO2004044651A1 A chucking system and method for modulating shapes of substrates |
| 05/27/2004 | US20040100677 Spatial light modulators with light blocking/absorbing areas |
| 05/26/2004 | EP1422194A1 Process to fabricate a Tool Insert for Injection Moulding a microstructured Piece |
| 05/26/2004 | EP1214271A4 Movement sensor in a micro electro-mechanical device |
| 05/26/2004 | CN1151367C Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
| 05/20/2004 | US20040096992 Method for producing and testing a corrosion-resistant channel in a silicon device |
| 05/20/2004 | US20040096367 Method and apparatus for producing compact microarrays |
| 05/19/2004 | DE10251658A1 Verfahren zum Verbinden von zur Herstellung von Mikrostrukturbauteilen geeigneten, mikrostrukturierten Bauteillagen sowie Mikrostrukturbauteil A method of joining for the production of microstructured components suitable micro-structured component layers, as well as micro-structural component |
| 05/19/2004 | CN1150635C Method for producing motion and force by controlling the twin structure orientation of material and its actuator |
| 05/13/2004 | US20040092118 Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method |
| 05/12/2004 | CN1495853A Method and system for mfg. semiconductor device |
| 05/11/2004 | US6735008 MEMS mirror and method of fabrication |