| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
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| 02/17/2009 | US7491567 MEMS device packaging methods |
| 02/17/2009 | US7491288 Method of cutting laminate with laser and laminate |
| 02/12/2009 | US20090042487 Polishing apparatus, polishing method, substrate manufacturing method, and electronic apparatus manufacturing method |
| 02/12/2009 | US20090041949 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
| 02/12/2009 | US20090039908 Microstructure inspecting apparatus and microstructure inspecting method |
| 02/11/2009 | CN101362309A Polishing apparatus, substrate manufacturing method, and electronic apparatus manufacturing method |
| 02/10/2009 | US7490015 Method for controlling/regulating a physical quantity of a dynamic system, in particular a micromechanical sensor |
| 02/05/2009 | US20090035759 Method and device for detecting the presence of a single target nucleic acid in a sample |
| 02/05/2009 | US20090034124 Imprint mold structure, method for producing magnetic recording medium, and magnetic recording medium |
| 02/05/2009 | US20090034079 Fine grating and mold therefore |
| 02/05/2009 | US20090032998 Molding apparatus and molding method |
| 02/04/2009 | EP2019811A1 Micro component provided with a cavity bounded by a cap with improved mechanical strength |
| 02/04/2009 | CN101360680A Method of forming a sealed channel of a microfluidic reactor and a microfluidic reactor comprising such channel |
| 02/04/2009 | CN100458497C System and method of sensing actuation and release voltages of an interferometric modulator |
| 01/29/2009 | US20090029070 Method of producing nanowires in ambient conditions and nanowires thus produced |
| 01/29/2009 | US20090028910 Methods for Fabrication Isolated Micro-and Nano-Structures Using Soft or Imprint Lithography |
| 01/28/2009 | CN101355038A Method and chip for integrating micro electromechanical system device and integrated circuit |
| 01/27/2009 | US7482196 Method of manufacturing a semiconductor device having MEMS |
| 01/27/2009 | US7482193 Injection-molded package for MEMS inertial sensor |
| 01/22/2009 | WO2008106928A3 Method for the production of membranes that can be electrically and/or magnetically activated, and magnetic actuator having such a membrane |
| 01/22/2009 | US20090022884 System and method for micro-electromechanical operation of an interferometric modulator |
| 01/22/2009 | DE112006003585T5 Schneidwerkzeug unter Verwendung eines schnittunterbrechenden Fast-Tool-Servosystems Cutting tool using a cut-breaking fast tool servo system |
| 01/21/2009 | EP2016462A1 Device and method for obtaining a substrate structured on micrometric or nanometric scale |
| 01/21/2009 | CN100454391C Magnetic recording medium and manufacture method, magnetic recording and reproducing apparatus, stamper, and method of manufacturing stamper |
| 01/21/2009 | CN100454336C Subdivision method for polygon with inner hole in image treatment process |
| 01/21/2009 | CN100454141C Device for transferring a pattern to an object |
| 01/15/2009 | US20090017305 Manufacturing process for integrated microelectromechanical components |
| 01/15/2009 | US20090014916 Method and apparatus for producing three-dimensional structure |
| 01/15/2009 | US20090014128 Process and apparatus for fabricating precise microstructures and polymeric molds for making same |
| 01/14/2009 | CN101346210A Cutting tool using interrupted cut fast tool servo |
| 01/08/2009 | WO2009006120A1 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/08/2009 | WO2009006119A1 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/08/2009 | US20090011373 Method of manufacturing mechanical and micromechanical parts |
| 01/08/2009 | DE102007029576A1 Verfahren zur Herstellung von folienartigen Halbleiterwerkstoffen und/oder elektronischen Elementen durch Urformen und/oder Beschichtung A process for preparing film-like semi-conductor materials and / or electronic elements by primary shaping and / or coating |
| 01/07/2009 | EP2012166A2 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/07/2009 | EP2012165A2 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/07/2009 | EP2011763A1 Method of producing micromechanical parts with crystalline material |
| 01/07/2009 | EP2010966A2 Alignment method, imprint method, alignment apparatus, and position measurement method |
| 01/06/2009 | US7473088 Microimprint/nanoimprint device |
| 01/01/2009 | US20090004321 Molding apparatus and molding method |
| 01/01/2009 | US20090001553 Mems Package and Method for the Production Thereof |
| 12/31/2008 | WO2009000608A2 Method for producing filmlike semiconductor materials and/or electronic elements by primary forming and/or coating |
| 12/31/2008 | WO2008114852A3 Mold, mold production process, processing apparatus, and processing method |
| 12/31/2008 | WO2008009803A3 Production of microfluidic polymeric devices by photo-assisted and/ or thermally assisted printing |
| 12/31/2008 | EP1807699B1 Structured copolymer supports for use in spectrometry or spectroscopy |
| 12/31/2008 | CN101335194A Method for producing filmlike semiconductor materials and/or electronic elements by primary forming and/or coating |
| 12/30/2008 | US7470005 Nozzle arrangement with a movement sensor for an inkjet printer |
| 12/25/2008 | US20080317995 Cover Wafer or Component Cover, Wafer Part, or Component That Can Be Inserted Using Microsystems Technology, and Soldering Method for Connecting Corresponding Wafer or Component Parts |
| 12/24/2008 | WO2008157592A1 Ultrasonic injection molding on a web |
| 12/24/2008 | EP1200264B1 Calibrating a micro electro-mechanical device |
| 12/24/2008 | CN101327904A Micro structre and manufacture method thereof |
| 12/24/2008 | CN101327592A Four-arm type MEMS micro-gripper integrated with piezoresistive micro-force tester |
| 12/23/2008 | US7468830 In SITU application of anti-stiction materials to micro devices |
| 12/23/2008 | US7467842 Ink jet nozzle assembly with over-actuation detection |
| 12/17/2008 | EP2001667A2 Microstructured tool and method of making same using laser ablation |
| 12/17/2008 | EP1127375B1 Bumped contacts for metal-to-semiconductor connections, and methods for fabricating same |
| 12/16/2008 | US7466018 MEMS device wafer-level package |
| 12/16/2008 | US7465523 stress control layer that suppress stress and cancels a stress change of the thin film layer generated in production processes of a mask; producing photoresists with high position accuracy; lithography for producing a semiconductor |
| 12/16/2008 | US7465162 Transcript apparatus |
| 12/16/2008 | US7465011 Thermal bend actuator arrangement with a diagnostic sensor |
| 12/11/2008 | WO2007124357A3 Integrated mems metrology device using complementary measuring combs |
| 12/11/2008 | US20080302513 Method and Device for Tempering a Substrate |
| 12/11/2008 | US20080302185 Microstructure Inspecting Apparatus and Microstructure Inspecting Method |
| 12/10/2008 | EP1999779A1 Device and method for coating a micro- and/or nano-structured structural substrate and coated structural substrate |
| 12/10/2008 | CN101320398A Method for establishing micro-electromechanical variable cross-section clamped beam system-level macro model |
| 12/10/2008 | CN100442144C Differential critical dimension and overlay metrology device and measurement method |
| 12/09/2008 | US7462320 Method and device for demolding |
| 12/04/2008 | WO2008146542A1 Mold, method for production of the mold, and method for production of substrate having replicated fine pattern |
| 12/04/2008 | US20080299467 Mask mold, manufacturing method thereof, and method for forming large-sized micro pattern using mask mold |
| 12/03/2008 | EP1997141A2 Method for manufacturing a microelectronic package |
| 12/03/2008 | EP1996507A2 Method for fabricating a mems microphone |
| 12/03/2008 | CN100439235C Method for manufacturing silicon chip of ultramicro tension pressure sensor |
| 12/02/2008 | US7460704 Device for stabilizing a workpiece during processing |
| 12/02/2008 | US7459315 Miniaturized assembly and method of filling assembly |
| 11/27/2008 | WO2008142958A1 Imprinting method |
| 11/27/2008 | US20080293244 Methods of Positioning and/or Orienting Nanostructures |
| 11/27/2008 | US20080293216 Method of manufacturing an inkjet head through the anodic bonding of silicon members |
| 11/27/2008 | US20080293178 Process For Manufacturing Micromechanical Devices Containing a Getter Material and Devices So Manufactured |
| 11/27/2008 | US20080292888 Microfabrication |
| 11/27/2008 | US20080291519 Manufacturing method for variable shape mirror |
| 11/27/2008 | US20080289182 Method of fabricating structure having out-of-plane angular segment |
| 11/26/2008 | CN101312904A Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 11/26/2008 | CN101312903A Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 11/26/2008 | CN101311828A Viscous microstructure preparation method |
| 11/26/2008 | CN100437929C Method for etching hole with different aspect ratio |
| 11/26/2008 | CN100437158C Manufacturing micro-structured elements |
| 11/25/2008 | US7456112 Method of fabricating micro-needle array |
| 11/20/2008 | US20080286659 Extensions of Self-Assembled Structures to Increased Dimensions via a "Bootstrap" Self-Templating Method |
| 11/20/2008 | US20080283943 Electronic Device Comprising a Mems Element |
| 11/19/2008 | EP1991417A1 Methods for low cost manufacturing of complex layered materials and devices |
| 11/19/2008 | EP1246730B2 Thermal transfer of microstructured layers |
| 11/19/2008 | CN101309854A Electronic device comprising a MEMS element |
| 11/19/2008 | CN101308136A Open mould for manufacturing chip microfluid dynamic mixer mixing pool |
| 11/19/2008 | CN101308135A Convex concave mould for manufacturing chip microfluid dynamic mixer mixing pool |
| 11/19/2008 | CN100435278C Detachable substrate with controlled mechanical hold and method for prodn. thereof |
| 11/13/2008 | WO2008135817A2 Timepiece component and method for making same |
| 11/13/2008 | US20080280112 Method fo Manufacturing a Microsystem, Such a Microsystem, a Stack of Foils Comprising Such a Microsystem, an Electronic Device Comprising Such a Microsystem and Use of the Electronic Device |
| 11/12/2008 | CN101304942A A mems capacitor microphone, a method of manufacturing a mems capacitor microphone, a stack of foils, an electronic device and use of the electronic device |
| 11/12/2008 | CN100431827C Optical tools manipulated by optical traps |
| 11/11/2008 | US7450797 Beam switch structures and methods |