| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
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| 08/19/2009 | EP1080492B1 Device and method for determining the lateral undercut of a structured surface layer |
| 08/19/2009 | CN101509934A Micro-acceleration and micro-angular rate monolithic integration sensor |
| 08/19/2009 | CN101509933A Method for manufacturing micro-acceleration and micro-angular rate integration sensor |
| 08/19/2009 | CN101509888A Method for making silicone base integrable miniature glucose sensor |
| 08/19/2009 | CN101509788A Capacitance silicon micromechanical rainfall sensor |
| 08/13/2009 | WO2009097660A1 Patch production |
| 08/13/2009 | US20090204350 Methods for measurement and characterization of interferometric modulators |
| 08/13/2009 | US20090204349 Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display |
| 08/13/2009 | CA2749347A1 Patch production |
| 08/12/2009 | EP2087981A1 Master and microreactor |
| 08/12/2009 | EP1252028B1 Method of fabricating a micro machined structure |
| 08/12/2009 | CN101504426A Comb condenser type dual-spindle accelerometer |
| 08/12/2009 | CN100525733C Multicenter film membrane electrode packaging method and device |
| 08/11/2009 | US7573111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/11/2009 | US7572405 Method for manufacturing microstructures having hollow microelements using fluidic jets during a molding operation |
| 08/11/2009 | US7572053 Tightness test for MEMS or for small encapsulated components |
| 08/11/2009 | US7571529 Method for forming an electronic device in multi-layer structure |
| 08/06/2009 | WO2009067046A3 Method for producing polymer coating on particle surfaces |
| 08/06/2009 | US20090197061 Production of a material multilayer microcomponents by the sacrificial thick layer method sacrificielle |
| 08/06/2009 | US20090194309 Microcomponent Provided with a Cavity Delimited by a Cap with Enhanced Mechanical Resistance |
| 08/05/2009 | CN101498580A Oscillation type silicon micro-gyroscope |
| 08/05/2009 | CN101497423A Micro-electronmechanical system and its manufacturing method |
| 08/04/2009 | US7570865 System and method of testing humidity in a sealed MEMS device |
| 07/30/2009 | US20090191661 Placing a mems part on an application platform using a guide mask |
| 07/30/2009 | US20090189317 Method of forming resist pattern by nanoimprint lithography |
| 07/29/2009 | EP2082990A2 Aerogel-bases mold for MEMS fabrication and formation thereof |
| 07/29/2009 | EP1567913B1 A chucking system and method for modulating shapes of substrates |
| 07/29/2009 | CN100520792C Macros model establishing method of micro-electromechanical system |
| 07/28/2009 | US7567373 System and method for micro-electromechanical operation of an interferometric modulator |
| 07/28/2009 | US7566581 Systems and methods for creating MEMS gyros |
| 07/23/2009 | US20090185700 Vibration transducer and manufacturing method therefor |
| 07/23/2009 | US20090184088 Aerogel-Bases Mold for MEMS Fabrication and Formation Thereof |
| 07/22/2009 | EP2080734A1 Method for manufacturing air cavities in microstructures |
| 07/22/2009 | CN100515923C Oriented arrange carbon nanotube composite material, high speed preparation method and preparation apparatus |
| 07/22/2009 | CN100515794C Printing plate and method for fabricating the same |
| 07/21/2009 | US7564338 Micromechanical device having integrated heating |
| 07/16/2009 | US20090181200 Microfluidic Structures for Biomedical Applications |
| 07/16/2009 | US20090180185 Minute Structure and its Manufacturing Method |
| 07/16/2009 | US20090179005 Nanotube Processing Employing Solid-Condensed-Gas-Layers |
| 07/16/2009 | US20090178999 Process for producing air gaps in microstructures |
| 07/15/2009 | CN101481084A Micro-inertial sensor with variable pitch capacitor and method for producing the same |
| 07/15/2009 | CN101481083A Miniaturized fluxgate sensor of micro-electro-mechanism system |
| 07/15/2009 | CN100514562C Making method for large-area 3C-SiC thin film of MEMS part |
| 07/15/2009 | CN100513299C Wafer level vacuum encapsulation of microelectron mechanical system and upside-down mounting soldering method thereof |
| 07/09/2009 | WO2009083148A2 Stamping tool for the creation of a microstructure |
| 07/09/2009 | WO2009083147A2 Method for producing a microstructure |
| 07/09/2009 | WO2009083146A2 Method for producing a microstructure |
| 07/09/2009 | US20090174148 Method for Sealing an Opening |
| 07/09/2009 | US20090174115 Imprint lithography |
| 07/09/2009 | US20090173931 Methods of Making, Positioning and Orienting Nanostructures, Nanostructure Arrays and Nanostructure Devices |
| 07/08/2009 | CN101479662A Printing form precursor and process for preparing a stamp from the precursor |
| 07/08/2009 | CN101479031A Monoparticulate-film etching mask and process for producing the same, process for producing fine structure with the monoparticulate-film etching mask, and fine structure obtained by the production pro |
| 07/08/2009 | CN101475139A MEMS horizontal resonant vibration type magnetometer |
| 07/08/2009 | CN101475138A Detection piezoresistance and method for ultrathin silicon micromechanical cantilever beam under torsion mode |
| 07/08/2009 | CN101475137A Double-layer suspension beam microstructure thin film heat meter |
| 07/07/2009 | US7557044 Nanomachined mechanical components using nanoplates, methods of fabricating the same and methods of manufacturing nanomachines |
| 07/07/2009 | US7556979 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging |
| 07/02/2009 | WO2009081586A1 Imprinting device and imprinting method |
| 07/02/2009 | DE102007062089A1 Verfahren zum Erzeugen einer Mikrostruktur A method of producing a microstructure |
| 06/30/2009 | US7552741 Fluid controlling method, microfluidic device and process for fabricating the same |
| 06/25/2009 | WO2009078190A1 Pattern forming method and pattern formed body |
| 06/25/2009 | DE102007062123A1 Werkzeugform zum Erzeugen einer Mikrostruktur Tool mold for producing a microstructure |
| 06/25/2009 | DE102007061980A1 Verfahren zum Erzeugen einer Mikrostruktur A method of producing a microstructure |
| 06/24/2009 | EP2073059A1 Imprint method, imprint apparatus, and process for producing chip |
| 06/18/2009 | US20090155546 Film-forming composition, method for pattern formation, and three-dimensional mold |
| 06/18/2009 | US20090152705 Micromechanical Component and Method for Fabricating a Micromechanical Component |
| 06/18/2009 | DE102007059717A1 Vorrichtung und Verfahren zur Herstellung von Mikrobauteilen sowie Verwendung einer derartigen Vorrichtung Device and method for the production of micro-components and the use of such a device |
| 06/17/2009 | EP2070869A2 Device and method of manufacturing micro-components and use of such a device |
| 06/16/2009 | US7547568 Electrical conditioning of MEMS device and insulating layer thereof |
| 06/16/2009 | US7547556 Loading liquid sample into analylic matrix; insertion, withdrawal, dispersion using capillary syringe |
| 06/16/2009 | CA2387581C Method and device for moving and placing liquid drops in a controlled manner |
| 06/11/2009 | WO2009071596A1 Testing mechanical-electrical properties of microelectromechanical sensors (mems) |
| 06/10/2009 | DE10203198B4 Verfahren zur Materialbearbeitung mit Laserimpulsen großer spektraler Bandbreite und Vorrichtung zur Durchführung des Verfahrens Method for machining material with laser pulses large spectral bandwidth and device for carrying out the method |
| 06/10/2009 | CN101450788A Quartz wafer deep micropore processing equipment and method |
| 06/10/2009 | CN100498803C Reusable parameter module model building method for space continuous deformation MEMS |
| 06/10/2009 | CN100498539C Photoreaction apparatus |
| 06/10/2009 | CN100498209C Method and system to measure characteristics of a film disposed on a substrate |
| 06/09/2009 | US7545251 Micro-electromechanical actuator |
| 06/04/2009 | WO2009037030A3 Method for printing a nanostructure and/or microstructure, stamp and substrate |
| 06/04/2009 | US20090143749 Method of manufacturing microneedle |
| 06/04/2009 | US20090139342 Device with detection by suspended piezoresistive strain gauge comprising a strain amplifier cell |
| 06/03/2009 | EP2065713A1 Detection device with a hanging piezoresistive strain gauge comprising a strain amplification cell |
| 06/03/2009 | EP2064147A1 Integrated mems packaging |
| 05/28/2009 | WO2009067046A2 Method for producing polymer coating on particle surfaces |
| 05/28/2009 | US20090137079 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 05/27/2009 | CN101443189A Microstructured tool and method of making same using laser ablation |
| 05/22/2009 | WO2009063663A1 Adhesive tweezers, member for adhesive tweezers, method of holding particles, method of analyzing particles and analyzer |
| 05/22/2009 | WO2009062943A1 Silicon-metal composite micromechanical part and method for producing same |
| 05/21/2009 | US20090131887 Method of manufacturing microneedle |
| 05/21/2009 | US20090127973 Sonic fine-hole forming apparatus |
| 05/21/2009 | US20090127697 Housing with a Cavity for a Mechanically-Sensitive Electronic Component and Method for Production |
| 05/20/2009 | EP2060534A1 Composite silicon-metal micromechanical component and method for manufacturing same |
| 05/20/2009 | CN101434377A Method for preparing organic glass micro-fluidic chip by infrared ray auxiliary mass polymerization |
| 05/20/2009 | CN100489444C Insulation layer thickness electric test structure in micro electro-mechanical systems device structure |
| 05/13/2009 | CN101428754A Connection treatment method for carbon nano-tube and metal electrode |
| 05/13/2009 | CN101428753A Method for protecting easy-corrosion MEMS device in alkalescent corrosion liquid |
| 05/12/2009 | CA2322212C Apparatus and processes for laser deformation of dielectric particles |
| 05/07/2009 | WO2008125094A4 Method for forming a nanostructure and/or microstructure on a surface, and apparatus for carrying out said method |
| 05/07/2009 | US20090115286 Electrically conductive thin film formed from an ionic liquid and carbon nanotubes having a high aspect ratio, and actuator element comprising the thin film |
| 05/07/2009 | DE102007051671A1 Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik The imaging optics and projection exposure system for microlithography with such imaging optics |