Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
03/2010
03/17/2010CN101675392A Timepiece component and method for making same
03/17/2010CN100594595C Method and chip for integrating micro electromechanical system device and integrated circuit
03/16/2010US7678319 Mold and molding apparatus using the same
03/11/2010DE112008000478T5 Verfahren zum Herstellen selbsttragender Membranen A method for producing a self-supporting membranes
03/10/2010EP2160755A2 Method for producing filmlike semiconductor materials and/or electronic elements by primary forming and/or coating
03/10/2010CN101666974A Mold, imprint apparatus, and process for producing structure
03/09/2010US7674104 Mold and molding apparatus using the same
03/04/2010US20100054092 Method of manufacturing multi-level, silicon, micromechanical parts and parts thereby obtained
03/04/2010US20100054089 Timepiece component and method for making same
03/04/2010US20100051916 Method for forming an electronic device in multi-layer structure
03/02/2010US7672750 Method and apparatus for monitoring a microstructure etching process
03/02/2010US7671428 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
03/02/2010US7670128 Apparatus for forming fine pattern on substrate
03/02/2010US7669977 Nozzle device with expansive chamber-defining layer
02/2010
02/24/2010CN100592444C Beam switch structures and methods
02/24/2010CN100591388C Method of preparing micro needle array syringe
02/18/2010US20100040985 Fine mold and method for regenerating fine mold
02/18/2010US20100039695 Methods for measurement and characterization of interferometric modulators
02/18/2010US20100039409 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same
02/17/2010CN100590063C Ultrasonic bonding structure for guiding energy, guiding flow and locating precisely of polymer microstructure
02/17/2010CN100590062C Method for making three-dimension electric casting micro structure
02/16/2010US7661795 Inkjet nozzle device with static and movable nozzle portions
02/11/2010US20100032857 Ceramic components, coated structures and methods for making same
02/11/2010US20100032085 Method for producing self-supporting membranes
02/10/2010EP1340809B1 Well unit for detecting cell chemotaxis and separating chemotactic cells
02/09/2010US7658877 Manufacturing micro-structured elements
02/04/2010WO2009006120A8 Microelectromechanical device with optical function separated from mechanical and electrical function
02/04/2010US20100024525 Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of the same
02/04/2010US20100024523 System and method of testing humidity in a sealed mems device
02/03/2010CN101641281A Mold, mold production process, processing apparatus, and processing method
02/03/2010CN100586838C Distributed micromotor system phase shifter chip scale micro-packing component
02/02/2010US7656023 Electronic parts packaging structure and method of manufacturing the same
02/02/2010US7655492 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
01/2010
01/28/2010US20100022046 Method for fabricating semiconductor device
01/28/2010US20100021647 Dry adhesives and methods for making dry adhesives
01/28/2010US20100020843 Thermal Bend Actuator Material Selection
01/27/2010EP2146925A1 Extensions of self-assembled structures to increased dimensions via a "bootstrap" self-templating method
01/27/2010CN100585491C Large area periodic array three-dimensional microstructure preparation method
01/27/2010CN100584636C Nano printing mold, manufacturing method thereof, nano printing apparatus and method
01/26/2010US7651944 Methods of positioning and/or orienting nanostructures
01/26/2010US7651197 Method of manufacturing an inkjet head through the anodic bonding of silicon members
01/21/2010WO2009083148A3 Stamping tool for the creation of a microstructure
01/21/2010US20100015733 Method and device for monitoring a heat treatment of a microtechnological substrate
01/21/2010DE102007059279B3 Vorrichtung zum Testen der mechanisch-elektrischen Eigenschaften von mikroelektromechanischen Sensoren (MEMS) An apparatus for testing the mechanical-electrical properties of micro-electro-mechanical sensors (MEMS)
01/20/2010EP2145857A1 Method of manufacturing a micromechanical part
01/20/2010EP2145856A1 Method of manufacturing a micromechanical part
01/20/2010EP2145237A2 Timepiece component and method for making same
01/14/2010US20100009270 Method for optimizing the layout of at least one transfer device for production of a direct or indirect structure
01/14/2010US20100009025 Mold for pattern transfer
01/13/2010CN100579894C Metal layer and insulation layer alignment error electricity testing structure in micro-electromechanical device process
01/13/2010CN100579599C Preparation of micro-needle array injection syringe
01/12/2010US7645686 Method of bonding chips on a strained substrate and method of placing under strain a semiconductor reading circuit
01/07/2010US20100001434 Stamping Methods and Devices
12/2009
12/31/2009US20090322365 Integrated mems metrology device using complementary measuring combs
12/31/2009DE102008016266B4 Verfahren zum Optimieren des Layouts wenigstens einer Transfereinrichtung zum Herstellen direkter und indirekter Strukturen A method for optimizing the layout of at least one transfer means for establishing direct and indirect structures
12/30/2009WO2009083146A3 Method for producing a microstructure
12/30/2009EP2137097A2 Mold, mold production process, processing apparatus, and processing method
12/30/2009CN100575243C Large area reverse roller impression method for micro-structure of flexible base macroelectron manufacture
12/29/2009US7636999 Method of retaining a substrate to a wafer chuck
12/24/2009US20090315567 Electrical conditioning of mems device and insulating layer thereof
12/23/2009CN101607690A Method for electric-discharge machining hole by nano-wire or nano-tube and system therefor
12/22/2009US7635191 Manufacturing method for variable shape mirror
12/22/2009US7635177 Inkjet nozzle device with cantilevered actuating arm
12/22/2009US7635077 Method of flip chip mounting pressure sensor dies to substrates and pressure sensors formed thereby
12/17/2009WO2009150610A1 Polymer micro-actuators sensitive to one or more inputs
12/17/2009US20090308754 Fabrication of freestanding micro hollow tubes by template-free localized electrochemical deposition
12/17/2009DE102008025833A1 Verfahren und Vorrichtung zum stoffschlüssigen Fügen metallischer Anschlussstrukturen Method and apparatus for securely joining metallic connection structures
12/16/2009EP2133306A1 Polymer micro-actuators sensitive to one or more inputs
12/16/2009CN101603939A Electrochemical ultra-micro compound electrode and preparation method thereof
12/16/2009CN101602482A Method for three-dimensionally capturing and rotating micromechanical member by using ultrasonic radiation force
12/16/2009CN100570616C Method for establishing micro-electromechanical variable cross-section clamped beam system-level macro model
12/16/2009CN100569478C Stamper, stamping method and production method of information recording medium
12/10/2009US20090302507 Mold, process for its production, and process for producing base material having transferred micropattern
12/09/2009CN100567986C Preparation method of water soluble CdTe/CdS nuclear/shell type quantum point
12/08/2009US7629190 Method for making a micromechanical device by using a sacrificial substrate
12/03/2009WO2009143805A1 Method and device for cohesively joining metallic connection structures
12/03/2009WO2009118101A3 Method and device for testing and calibrating electronic semiconductor components which convert sound into electrical signals
12/03/2009US20090298215 Method of Enclosing a Micro-Electromechanical Element
12/03/2009US20090295041 Printing form precursor and process for preparing a stamp from the precursor
12/03/2009DE102008025354A1 System to produce microstructured functional surfaces on substrates with laser, by individually/combinedly arranging substrate surfaces and device to couple, guide, focus or form laser beam as ultrashort pulse laser under normal condition
12/02/2009CN101592627A Method for manufacturing and integrating multichannel high-sensitive biosensor
12/02/2009CN101592626A Quasi-one-dimensional metal oxide nano-material biosensor and method for manufacturing same
12/02/2009CN101592578A Silicon cantilever sensor, preparation method and application thereof
12/02/2009CN101591000A Method for preparing doped zinc oxide with four-foot shaped micron structure
12/02/2009CN100565796C Method and system for manufacturing semiconductor device
12/01/2009US7625719 Having a structure whereby, in the step of injecting a liquid sample into a microwell for holding a sample to be reacted, analyzed, detected, etc., overflow of the sample or the migration thereof into another well connected thereto can be prevented and position of sample in microwell can be adjusted
11/2009
11/26/2009DE102005056780B4 Markierte plasmapolymere Schicht und Erzeugnis mit markiertem Schichtsystem, deren Verwendung und Verfahren zu deren Herstellung Labeled plasma polymer layer and produce with labeled layer system, their use and processes for their preparation
11/25/2009CN101585509A Method of picking and translating a micro-mechanical component on a solid wall surface by ultrasonic radiation force
11/25/2009CN101585508A Preparation method of organic glass micro-fluidic chip based on photosensitive thixotrope film
11/25/2009CN101585507A Method for producing through-hole structure in PDMS micro-fluidic chip
11/24/2009US7623752 System and method of testing humidity in a sealed MEMS device
11/19/2009US20090286069 Coextrusion ink chemistry for improved feature definition
11/19/2009DE102007047598A1 Verfahren und Anordnung zur Herstellung von Nano-Imprintstempeln sowie mikromechanisch abstimmbares Filter/Detektor-Array Method and apparatus for manufacturing nano-Imprintstempeln and micromachined tunable filter / detector array
11/18/2009EP2119749A1 Coextrusion ink chemistry for improved feature definition
11/18/2009CN101581601A Detection method, micro-electromechanical component and micro-detection structure of micro-mechanical structure
11/18/2009CN101580658A Coextrusion ink chemistry for improved feature definition
11/18/2009CN101580244A Method for preparing mesoscopic material with controllable appearance
11/17/2009US7618831 Method of monitoring the manufacture of interferometric modulators
11/17/2009US7618250 Imprint lithography
11/17/2009US7617769 System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure
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