| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 11/11/2009 | CN201344938Y Bilateral micro-inertia sensor |
| 11/11/2009 | CN201344937Y Micro-inertia sensor |
| 11/11/2009 | CN201344802Y Oscillating micro-silicon gyroscope |
| 11/11/2009 | CN100559549C Electronic component and its mfg. method |
| 11/10/2009 | US7615179 Use of novel micro- and nano-imprinting techniques for making supported three-dimensional micro- and nano-structures for pixel segregation in OLED-based displays; enables assembly of polymers without a glass transition temperature and eliminates heating required to assemble thermoplastic polymers |
| 11/10/2009 | CA2414733C Testing a micro electro-mechanical device |
| 11/05/2009 | WO2009134502A2 Methods for measurement and characterization of interferometric modulators |
| 11/05/2009 | WO2009134501A2 Methods for measurement and characterization of interferometric modulators |
| 11/05/2009 | US20090274873 Monoparticulate-film etching mask and process for producing the same, process for producing fine structure with the monoparticulate-film etching mask, and fine structure obtained by the production process |
| 11/05/2009 | US20090274870 method of fabricating a membrane having a tapered pore |
| 11/05/2009 | US20090274586 Micro fluid system support and manufacturing method thereof |
| 11/05/2009 | US20090274585 Micro fluid system support and manufacturing method thereof |
| 11/05/2009 | US20090274584 Micro fluid system support and manufacturing method thereof |
| 11/05/2009 | US20090274583 Micro fluid system support and manufacturing method thereof |
| 11/05/2009 | US20090274582 Micro fluid system support and manufacturing method thereof |
| 11/05/2009 | US20090274581 Micro fluid system support and manufacturing method thereof |
| 11/03/2009 | US7612932 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 10/29/2009 | US20090269245 Micro fluid system support and manufacturing method thereof |
| 10/29/2009 | US20090266170 Pressure sensor, manufacturing method thereof, and electronic component provided therewith |
| 10/28/2009 | EP2112489A2 Pressure sensor, manufacturing method thereof, and electronic component provided therewith |
| 10/28/2009 | CN101567223A Pneumatic semi-suspension two-freedom co-baseplane motion workbench with high speed and large stroke |
| 10/28/2009 | CN101567018A Temperature parameterized reduced-order modeling method for micro-electromechanical system |
| 10/28/2009 | CN101566510A Pressure sensor, manufacturing method thereof, and electronic component provided therewith |
| 10/28/2009 | CN101566502A Thermo-optical infrared detector and preparation method thereof |
| 10/27/2009 | US7607826 Thermoelastic device with preselected resistivity, inertness and deposition characteristics |
| 10/22/2009 | WO2009039378A3 Microfluidic structures with circular cross-section |
| 10/22/2009 | US20090263991 Negative Thermal Expansion System (NTES) Device for TCE Compensation in Elastomer Compsites and Conductive Elastomer Interconnects in Microelectronic Packaging |
| 10/21/2009 | CN101559914A Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof |
| 10/20/2009 | US7605466 Sealed wafer packaging of microelectromechanical systems |
| 10/20/2009 | CA2414741C Movement sensor in a micro electro-mechanical device |
| 10/15/2009 | US20090258797 Systems for filling a sample array by droplet dragging |
| 10/14/2009 | CN101556290A Gas gyroscope for measuring the angular speed in any direction |
| 10/14/2009 | CN101554990A Inter-time scale simulation method of micro electromechanical system (MEMS) |
| 10/14/2009 | CN101554989A Angle parameterization macro modeling method of micro electromechanical system (MEMS) |
| 10/13/2009 | US7601537 Detecting leaks in micro-optoelectromechanical devices (MOEMS) or microelectromechanical (MEMS) devices; indicator may be copper, which changes optical properties upon oxidation |
| 10/13/2009 | US7601270 Microfabricated elastomeric valve and pump systems |
| 10/08/2009 | US20090250130 Production of microfluidic polymeric devices by photo-assisted and/or thermally assisted printing |
| 10/08/2009 | DE102008016266A1 Transfer sample producing method for transfer mechanism i.e. photolithographic mask, involves optimizing transfer sample such that deviation of structure i.e. integrated circuit, is reduced by reference structure |
| 10/08/2009 | DE102008015916A1 Verfahren und Vorrichtung zum Testen und Kalibrieren von elektronischen Halbleiterbauelementen, die Schall in elektrische Signale umwandeln Method and device for testing and calibration of electronic semiconductor devices that convert sound into electrical signals |
| 10/07/2009 | EP2107040A1 A method of fabricating a membrane having a tapered pore |
| 10/07/2009 | CN101551835A Angle parametrized macro modelling method of micro-electro-mechanism system |
| 10/07/2009 | CN101551284A Pressure sensor based on Si-Si direct bonding and manufacturing method thereof |
| 10/07/2009 | CN101549850A Array lift-off technique based on micro-electro-mechanical system |
| 10/07/2009 | CN101549849A Method for fast releasing sacrificial layer in film shifting process |
| 10/07/2009 | CN101549848A Method for fabricating large angle turning micro mirror driver |
| 10/07/2009 | CN100547347C Method for measuring curvature of micron/nanometer cantilever based on microinterference and finite difference |
| 10/06/2009 | US7597814 Structure formed with template having nanoscale features |
| 10/01/2009 | WO2009119440A1 Microchip and molding die |
| 10/01/2009 | WO2009118564A2 Method and article |
| 10/01/2009 | WO2009118101A2 Method and device for testing and calibrating electronic semiconductor components which convert sound into electrical signals |
| 10/01/2009 | US20090246310 Resin imprint stamper and method of manufacturing the same |
| 10/01/2009 | US20090243152 Imprinting method and stamper |
| 09/30/2009 | CN101544350A Microstructure used for supersonic bonding of micro-passages of polymer microflow-control chips |
| 09/23/2009 | CN100542947C Different conductive layers alignment error electricity testing structure in micromotor system processing |
| 09/17/2009 | WO2009113856A1 Integrated microneedle array and a method for manufacturing thereof |
| 09/17/2009 | US20090233058 Carbon nanotube structure and method for producing the same |
| 09/16/2009 | EP2100850A1 Microneedle array and a method for manufacturing microneedles |
| 09/16/2009 | CN101533219A Imprint method and mold |
| 09/16/2009 | CN101533075A MEMS horizontal resonant mode gauss meter |
| 09/16/2009 | CN100540641C Slide material, process for producing the same and device using the slide material |
| 09/16/2009 | CN100540455C Apparatus for precisely controlling wire distribution distance |
| 09/16/2009 | CN100540086C Method and mould for use in fabricating side-ported microneedle |
| 09/15/2009 | US7587977 Pyrotechnic microsystem and method for fabricating a microsystem |
| 09/11/2009 | WO2009083147A3 Method for producing a microstructure |
| 09/10/2009 | US20090224436 Imprint method and template for imprinting |
| 09/09/2009 | EP2099066A1 Method for modulating shapes of substrates |
| 09/09/2009 | CN100538800C Method, system and equipment for measurement of the dynamic characteristics of interferometric modulators, and method for manufacturing the system |
| 09/08/2009 | US7586668 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 09/03/2009 | WO2009107294A1 Roller type nano-imprint device, mold roll for the roller type nano-imprint device, fixed roll for the roller type nano-imprint device, and nano-imprint sheet manufacturing method |
| 09/03/2009 | US20090219113 Method for gap adjustment of two mechanical elements of a substantially planar micromechanical structure and corresponding electromechanical resonator |
| 09/03/2009 | US20090218312 Method and system for xenon fluoride etching with enhanced efficiency |
| 09/03/2009 | US20090217508 End Effector for Nano Manufacturing |
| 09/02/2009 | EP2096341A1 Devices and methods for programmable microscale manipulation of fluids |
| 09/02/2009 | CN101521208A Semiconductor substrate, semiconductor device and method of manufacturing the same |
| 09/02/2009 | CN101519200A Carbon nanotube structure and method for producing the same |
| 08/27/2009 | US20090213107 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 08/27/2009 | US20090212658 Micro--electromechanical actuator with spacer separated layers |
| 08/27/2009 | US20090212018 Apparatus and method for producing microcomponents and use of |
| 08/27/2009 | DE102005043596B4 Lasermikrobearbeitungsstation, Strahltransformationseinrichtung und Homogenisierer für eine Lasermikrobearbeitungsstation Laser micro machining station beam transformation device and homogenizer for laser micro-machining station |
| 08/27/2009 | DE102004059122B4 Elektrostatische Haltevorrichtung sowie zugehöriges Herstellungsverfahren An electrostatic chuck and associated production method |
| 08/26/2009 | EP2091861A1 Process for manufacturing multilevel micromechanical parts made of silicon and parts thus obtained |
| 08/26/2009 | CN101515026A Resonance micro electromechanical system magnetic field sensor and measuring method thereof |
| 08/26/2009 | CN100533270C Apparatus for forming fine pattern |
| 08/26/2009 | CN100532055C Capillary imprinting technique |
| 08/25/2009 | US7578954 Method for manufacturing microstructures having multiple microelements with through-holes |
| 08/20/2009 | WO2009102646A1 Methods for measurement and characterization of interferometric modulators |
| 08/20/2009 | WO2009102645A1 Methods for measurement and characterization of interferometric modulators |
| 08/20/2009 | WO2009102644A2 Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display |
| 08/20/2009 | WO2009102641A1 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 08/20/2009 | WO2009102639A1 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 08/20/2009 | WO2009102637A1 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 08/20/2009 | WO2009102622A2 Methods for measurement and characterization of interferometric modulators |
| 08/20/2009 | WO2009102621A2 Methods for measurement and characterization of interferometric modulators |
| 08/20/2009 | WO2009102620A2 Methods for measurement and characterization of interferometric modulators |
| 08/20/2009 | US20090207159 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 08/20/2009 | CA2715325A1 Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display |
| 08/20/2009 | CA2715283A1 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 08/20/2009 | CA2715280A1 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 08/20/2009 | CA2715274A1 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 08/19/2009 | EP1508161A4 Methods of positions and/or orienting nanostructures |