Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 99 - Subject matter not provided for in other groups of this subclass
Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
07/2010
07/08/2010WO2009124857A3 Method for the production of ceramic structures containing silicon
07/07/2010EP2203785A1 Imaging optical system and projection exposure installation
07/07/2010CN201522985U Sensor for quantitatively testing force-electricity property and microstructure
07/07/2010CN101767820A Multi-facet spherical micro-nano-structure titanium dioxide and preparation method thereof
06/2010
06/30/2010EP2202197A2 Structure and method for testing MEMS devices
06/30/2010EP2200931A2 Microfluidic structures with circular cross-section
06/30/2010EP2200930A2 Method for printing a nanostructure and/or microstructure, stamp and substrate
06/30/2010CN101762356A Vacuum micro-electronics pressure sensor
06/30/2010CN101759144A Preparation method of tin-zinc composite oxide material with even size and micro-nano structure
06/30/2010CN101759139A Surface modification processing method and device of MEMS microcomponent
06/30/2010CN101759137A Method for manufacturing electrothermal driving photoresist micro gripper
06/29/2010US7745891 Encapsulation component for integrated micro electromechanical system comprising first and second covers
06/29/2010US7745307 Method of manufacturing an inkjet head through the anodic bonding of silicon members
06/24/2010US20100159197 Ultrasonic injection molding on a web
06/24/2010US20100156006 Method and apparatus for imprinting energy ray-setting resin, and discs and semiconductor devices with imprinted resin layer
06/23/2010CN101297989B Batch preparation of hollow micro-needle based on molding
06/17/2010DE102007016735B4 Testeinrichtung für mikromechanische Bauelemente Test device for micromechanical devices
06/16/2010CN101734613A SOI wafer-based MEMS structure manufacturing and dicing method
06/16/2010CN101733845A Nano zirconia ceramic material micro-cutting process and device
06/16/2010CN101327592B Four-arm type MEMS micro-gripper integrated with piezoresistive micro-force tester
06/16/2010CN101234748B Method for constructing polymer ordered micro-configuration
06/16/2010CN101041292B Methods for producing piezoelectric actuator, ink-jet head, and ink-jet printer
06/10/2010WO2009118564A3 Method of forming an ultra-thin sheet suspended on a support member
06/10/2010US20100143467 Pharmaceutical tablets with diffractive microstructure and compression tools for producing such tablets
06/10/2010US20100141710 Nozzle Device With Expansive Chamber-Defining Layer
06/10/2010US20100140841 Capillary Imprinting Technique
06/10/2010US20100139862 Imprint lithography
06/09/2010CN101723310A Light processing method for preparing conducting micro-nano structure by utilizing graphene oxide
06/03/2010US20100136281 Dry adhesives and methods for making dry adhesives
06/03/2010US20100134565 Inkjet Nozzle Device With Static And Movable Nozzle Chamber Portions
06/03/2010US20100132772 Method for manufacturing nano-array electrode and photoelectric conversion device using same
06/02/2010CN101718667A Density sensor chip based on micro electro mechanical system technology and preparation method thereof
06/02/2010CN101717068A Method for preparing polymeric micro-fluidic chip based on hydrogel male mold
06/02/2010CN101393321B Monolithic integration method of grating light modulator and active matrix driving circuit
06/01/2010US7726964 Molding apparatus and molding method
05/2010
05/26/2010EP2188665A1 Oscillating body apparatus and manufacturing method thereof, optical deflector and image forming apparatus
05/26/2010CN1668435B Flexible mold and method of manufacturing microstructure using same
05/26/2010CN101022255B Two-dimensional rotary remote operating method for micro structural components
05/20/2010US20100122654 Thermally controlled fluidic self-assembly
05/19/2010EP2185908A1 Cantilever-type sensor, as well as a substance sensing system and a substance sensing method that use the sensor
05/19/2010EP1340810B1 Apparatus for treating sample in microamount
05/19/2010CN101149559B Method for preparing ball-shaped bump biological microelectrode array
05/19/2010CN101059380B Flexible capacitance type touch sensor production method
05/18/2010US7719161 Method of designing rotary thermal actuator and rotary thermal actuator
05/18/2010US7717693 Modified metal mold for use in imprinting processes
05/18/2010US7717615 Process and apparatus for producing emulsion and microcapsules
05/13/2010US20100118370 Oscillating body apparatus and manufacturing method thereof, optical deflector and image forming apparatus
05/13/2010US20100117268 Fine mold and method for regenerating fine mold
05/12/2010EP2184766A2 Directional extruded bead control
05/12/2010CN101706835A Method for designing micro/nano-scale nonstandard product structure
05/12/2010CN101000800B XY stage module, method for fabricating the XY stage module, and storage system employing the same
05/11/2010US7713052 Processing method of fine structure and processing equipment for fine structure
05/06/2010WO2010049813A1 Integrated encapsulation for mems devices
05/06/2010WO2009102620A3 Methods for measurement and characterization of interferometric modulators
05/05/2010CN1763675B System and method for sensor replication for ensemble averaging in micro-electromechanical systems (MEMS)
05/05/2010CN101700870A Preparation method of carbon micron tube encapsulating tin nano material and application thereof
05/05/2010CN101700869A Method for preparing flexible substrate biological microelectrode array based on substrate graph
05/04/2010US7708926 Capillary imprinting technique
05/04/2010CA2384889C Temporary bridge for micro machined structures
04/2010
04/29/2010US20100103433 Differential critical dimension and overlay metrology apparatus and measurement method
04/28/2010CN101698467A Scribing method for MEMS wafer level packaging
04/27/2010US7704684 Methods and devices for fabricating three-dimensional nanoscale structures
04/27/2010US7704432 Imprint lithographic method for making a polymeric structure
04/27/2010US7703875 Printing nozzle arrangement having movement sensor
04/21/2010EP2177951A1 Method, system, holder and assembly for transferring templates during imprint lithography processes
04/21/2010CN1981236B Apparatus, system and method to vary dimensions of a substrate during nano-scale manufacturing
04/20/2010US7700247 Differential critical dimension and overlay metrology apparatus and measurement method
04/15/2010WO2009102622A3 Methods for measurement and characterization of interferometric modulators
04/14/2010CN101694494A Method for manufacturing micro-cantilever modified with antibody
04/14/2010CN101693516A Manufacture method of integrally molding miniature assembly body
04/14/2010CN101693513A Plastic micro-fluidic chip integrated with microelectrode and method for preparing the chip
04/14/2010CN101693178A Process and apparatus for producing microsphere, metal substrate and manufacturing method thereof
04/13/2010US7695689 tubular; electrochemistry
04/13/2010US7695092 Nozzle device with movement sensor
04/08/2010WO2010038717A1 Method for manufacturing functional device, and method for manufacturing semiconductor device provided with functional device
04/08/2010WO2010038174A1 Robust high aspect ratio semiconductor device
04/08/2010US20100086877 Pattern forming method and pattern form
04/08/2010US20100084565 Imprint lithography
04/07/2010EP2172320A1 Mold, method for production of the mold, and method for production of substrate having replicated fine pattern
04/07/2010CN101690871A A method of fabricating a membrane having a tapered pore
04/07/2010CN101043936B Process for producing microsphere with use of metal substrate having through-hole
04/06/2010US7691723 Bonding system having stress control
04/06/2010US7690912 Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same
04/01/2010WO2009046954A3 Method and arrangement for the production of nano-imprint stamps and micromechanically tunable filter/detector array
03/2010
03/30/2010US7687277 Thermally controlled fluidic self-assembly
03/30/2010US7686972 Method for manufacturing magnetic recording medium
03/30/2010US7686970 Imprint lithography
03/25/2010US20100074815 Master and Microreactor
03/25/2010US20100073429 Inkjet Nozzle Device With Cantilevered Actuating Arm
03/25/2010US20100072565 Soft Mems
03/24/2010EP2164433A2 Tethered airway implants and methods of using the same
03/24/2010CN101678584A Ultrasonic injection molding on a web
03/24/2010CN101678572A Mold, method for production of the mold, and method for production of substrate having replicated fine pattern
03/24/2010CN100595626C Systems and methods for measuring color and contrast in specular reflective devices
03/23/2010US7682861 Method for manufacturing a micromechanical motion sensor, and a micromechanical motion sensor
03/23/2010US7682552 Capacitive measurement method and system for nanoimprint process monitoring
03/18/2010US20100065986 Nanoimprint method and apparatus
03/18/2010US20100064818 Method of flip chip mounting pressure sensor dies to substrates and pressure sensors formed thereby
03/18/2010US20100064779 Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of the same
03/17/2010CN201423579Y Silicon chip clamping device
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