Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 99 - Subject matter not provided for in other groups of this subclass
Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
11/2010
11/10/2010EP1622750B1 Method, system, holder and assembly for transferring templates during imprint lithography processes
11/10/2010CN201626828U Cover plate for micro electro mechanical system (MEMS) packaging technology
11/09/2010US7828984 Imprint method, imprint apparatus, and process for producing chip
11/03/2010EP2246726A2 System and method for micro-electromechanical operating of an interferometric modulator
11/03/2010EP2246177A1 Roller type nano-imprint device, mold roll for the roller type nano-imprint device, fixed roll for the roller type nano-imprint device, and nano-imprint sheet manufacturing method
11/03/2010EP1371092B2 Method for structuring a flat substrate consisting of a glass-type material
10/2010
10/28/2010WO2010122499A2 Containers assembled in fluid and corresponding production
10/28/2010WO2010121846A1 Method and inspection system for testing of micro fabricated structures
10/28/2010US20100272845 Roller nanoimprint apparatus, mold roller for use in roller nanoimprint apparatus, fixing roller for use in roller nanoimprint apparatus, and production method of nanoimprint sheet
10/27/2010CN1833352B Actuator element and production method therefor
10/27/2010CN1789110B Wafer bonding of micro-electro mechanical systems to active circuitry
10/27/2010CN1662852B Multi-tiered lithographic template
10/27/2010CN101870452A Preparation method of MEMS (Micro Electro Mechanical Systems) metal wire biological microelectrode
10/21/2010US20100267182 Wafer bonding of micro-electro mechanical systems to active circuitry
10/21/2010US20100265481 Imaging optical system and projection exposure installation
10/20/2010EP2240330A2 Method for producing a microstructure
10/20/2010CN101065641B Method for controlling/regulating a physical quantity of a dynamic system
10/19/2010US7815425 Processing apparatus
10/14/2010WO2007079072A9 Microreactor glass diaphragm sensors
10/14/2010US20100260942 Method for producing polymer coating on particle surfaces
10/14/2010US20100258978 Roller nanoimprint apparatus, mold roller for use in roller nanoimprint apparatus, fixing roller for use in roller nanoimprint apparatus, and production method of nanoimprint sheet
10/13/2010EP2239127A1 Imprinting device and imprinting method
10/13/2010EP2237968A2 Method for producing a microstructure
10/13/2010CN101861281A Silicon-metal composite micromechanical part and method for producing same
10/13/2010CN101857190A Method for determining use reliability of MEMS (Micro-Electro-Mechanical System) sensor under application environment
10/13/2010CN101857189A Method for connecting carbon nano tube and metal
10/12/2010US7811849 Placing a MEMS part on an application platform using a guide mask
10/12/2010US7811077 Stamper, imprinting method, and method of manufacturing an information recording medium
10/07/2010US20100255411 Mask blank and method of manufacturing an imprint mold
10/07/2010US20100252177 Adhesive microstructures
10/07/2010US20100251913 Imprint lithography
10/06/2010CN101855586A Microelectromechanical device with optical function separated from mechanical and electrical function
10/06/2010CN101852707A Quartz crystal microbalance signal amplification method taking polystyrene spheres as template
10/06/2010CN101850946A Nanoscale-precision surface ironing treatment and micro-nano structure array processing platform
10/05/2010US7808253 Test method of microstructure body and micromachine
09/2010
09/30/2010WO2010110397A1 Microneedles, and production method and mold therefor
09/30/2010US20100243603 Silicon-metal composite micromechanical component and method of manufacturing the same
09/29/2010CN101122677B Manufacturing method for variable shape mirror
09/28/2010US7802873 Nozzle arrangement with a movement sensor for an inkjet printer
09/22/2010EP2230208A1 Electroplating mould and method for manufacturing the same
09/22/2010EP2230207A1 Electroplating mould and method for manufacturing the same
09/22/2010EP2230206A1 Electroplating mould and method for manufacturing same
09/22/2010CN101143700B Method for processing micro-machinery hot flow type sensor
09/21/2010US7800241 organosilicon and organometallic compounds within adhesion promoter layer having nanoscale ceramic grains applied wet-chemically
09/16/2010US20100231884 Imaging optical system and related installation and method
09/16/2010DE102005052509B4 Verfahren zum Herstellen einer Druckplatte A method for making a printing plate
09/15/2010CN101836165A Automated variable dimension mold and bottom block system
09/15/2010CN101836151A Imaging optical system, projection exposure installation for micro-lithography comprising an imaging optical system of this type, and method for producing a microstructured component with a projection exposure installation of this type
09/15/2010CN101509788B Capacitance silicon micromechanical rainfall sensor
09/14/2010US7794225 Fine mold and method for regenerating fine mold
09/09/2010US20100227051 Metal mold for use in imprinting processes
09/09/2010US20100225342 Probe card and microstructure inspecting apparatus
09/08/2010EP2226830A2 Charged particle beam processing
09/07/2010US7790615 Electronic component packaging
09/07/2010US7789733 Method of manufacturing microneedle
09/07/2010US7789653 Imprinting apparatus
09/02/2010WO2010098234A1 Wafer bonding apparatus and method of bonding wafers
09/02/2010DE102005015584B4 Verfahren zur Herstellung eines mikromechanischen Bauteils A process for producing a micro mechanical component
09/01/2010EP2223758A2 Method for producing polymer coating on particle surfaces
09/01/2010CN101817500A Hydrophilic material surface super hydrophobic functional shift micro structure design method
09/01/2010CN101111362B Method and apparatus for producing three-dimensional structure
08/2010
08/31/2010US7785091 Processing apparatus and device manufacturing method
08/31/2010US7784765 Mold, method for producing the same and magnetic recording medium
08/25/2010EP1754108B1 Apparatus, system and method to vary dimensions of a substrate during nano-scale manufacturing
08/25/2010CN101392403B Method for preparing gold electrode pair
08/24/2010US7780812 Extrusion head with planarized edge surface
08/19/2010WO2010042645A3 Micro/nano-mechanical test system employing tensile test holder with push-to-pull transformer
08/19/2010WO2009134502A3 Methods for measurement and characterization of interferometric modulators
08/19/2010WO2009102644A3 Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display
08/18/2010CN101809499A Mask blank, and method for production of imprint mold
08/12/2010WO2009134501A3 Methods for measurement and characterization of interferometric modulators
08/12/2010US20100201728 Printing nozzle having fault sensor
08/12/2010US20100200782 Microfabricated Elastomeric Valve And Pump Systems
08/11/2010CN101802586A Cantilever-type sensor, as well as a substance sensing system and a substance sensing method that use the sensor
08/11/2010CN101798053A Fully compliant penta-stable mechanism and implementation method thereof
08/11/2010CN101143705B Method for preparing micrometer and submicron probe arrays
08/10/2010US7772287 Ejection drops; oil in water emulsion; ink jet printers
08/10/2010US7772041 Method of sealing or welding two elements to one another
08/05/2010US20100198169 Method of manufacturing microneedle
08/04/2010EP1709490B1 Differential critical dimension and overlay metrology
08/04/2010EP1639411B1 A nano impression lithographic process which involves the use of a die having a region able to generate heat
08/04/2010CN101293628B Process for manufacturing three-dimensional miniature mold
08/04/2010CN101071061B Process control monitor of interferometric modulators
07/2010
07/29/2010US20100188463 Nozzle device incoporating movement sensor
07/29/2010US20100186487 Cantilever-type sensor, as well as a substance sensing system and a substance sensing method that use the sensor
07/28/2010CN101786591A Micro-mechanical device and manufacture method thereof
07/28/2010CN101274742B Anti-current-rush bulk silicon etching equipment
07/27/2010US7763525 Method for positioning dicing line of wafer
07/27/2010US7762186 Imprint lithography
07/22/2010US20100185162 Method of manufacturing microneedle
07/22/2010US20100183760 Manufacturing micro-structured elements
07/21/2010CN101784938A Oscillating body apparatus and manufacturing method thereof, optical deflector and image forming apparatus
07/21/2010CN101139079B Plastic packaging method of microcomputer sensing and measuring element, and structure thereof
07/20/2010US7758791 Find mold and method for regenerating fine mold
07/15/2010WO2009102621A3 Methods for measurement and characterization of interferometric modulators
07/15/2010US20100175767 Microfabricated Elastomeric Valve and Pump Systems
07/15/2010DE102009006887B3 Verfahren und System zur Halbleiterprozesssteuerung und Überwachung unter Anwendung eines Datenqualitätsmaßes Method and system for semiconductor process control and monitoring using a data quality measure
07/14/2010EP2207061A2 A system to vary dimensions of a template
07/14/2010EP2206678A2 Method for producing bodies with microstructures and/or nanostructured surfaces and film with micropores and/or nanopores
07/13/2010US7754131 Device for transferring a pattern to an object
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 ... 36