| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 03/22/2011 | US7909037 Tethered airway implants and methods of using the same |
| 03/17/2011 | US20110061884 Laser assisted system and method for bonding of surfaces; microcavity for packaging mems devices |
| 03/16/2011 | CN101398614B Method for making three-dimensional needlepoint electrode array based on parylene |
| 03/15/2011 | US7906059 Imprint lithography |
| 03/08/2011 | US7904185 System and method for sensor replication for ensemble averaging in micro-electromechanical system (MEMS) |
| 03/08/2011 | US7902038 Detachable substrate with controlled mechanical strength and method of producing same |
| 03/03/2011 | WO2011023470A1 Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter |
| 03/02/2011 | CN101983171A Method for the production of ceramic structures containing silicon |
| 02/24/2011 | US20110045248 Method for producing a microstructure |
| 02/24/2011 | US20110042348 Imprint method, imprint apparatus, and process for producing chip |
| 02/22/2011 | US7893595 Method for gap adjustment of two mechanical elements of a substantially planar micromechanical structure and corresponding electromechanical resonator |
| 02/22/2011 | US7892839 Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of the same |
| 02/17/2011 | US20110039365 Method for fabricating semiconductor device |
| 02/17/2011 | US20110036479 Micro fluid system support and manufacturing method thereof |
| 02/16/2011 | CN1928712B Mould for use in production structure and marking device |
| 02/16/2011 | CN101434377B Method for preparing organic glass micro-fluidic chip by infrared ray auxiliary mass polymerization |
| 02/15/2011 | US7887233 Thermal bend actuator material selection |
| 02/10/2011 | US20110034047 Negative Thermal Expansion System (NTES) Device for TCE Compensation in Elastomer Composites and Conductive Elastomer Interconnects in Microelectronic Packaging |
| 02/10/2011 | DE102008015916B4 Verfahren und Vorrichtung zum Testen und Kalibrieren von elektronischen Halbleiterbauelementen, die Schall in elektrische Signale umwandeln Method and device for testing and calibration of electronic semiconductor devices that convert sound into electrical signals |
| 02/09/2011 | CN101971239A Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 02/09/2011 | CN101970340A Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display |
| 02/08/2011 | US7883919 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer compsites and conductive elastomer interconnects in microelectronic packaging |
| 02/08/2011 | US7883606 Effecting pulsed electrical discharge between electrodes immersed in liquid, (ethanol or kerosene), to produce a plasma bubble associated with the (carbon) nano/microparticles produced; pulse duration <1000 microseconds, pulsed electrical discharge having a current amplitude of >1 ampere; efficiency |
| 02/03/2011 | WO2011013593A1 Actuator element and method for manufacturing actuator element |
| 02/03/2011 | US20110028293 Methods for Low Cost Manufacturing of Complex Layered Materials and Device |
| 02/03/2011 | US20110024948 Imprinting device and imprinting method |
| 02/03/2011 | DE102007059717B4 Vorrichtung und Verfahren zur Herstellung von Mikrobauteilen sowie Verwendung einer derartigen Vorrichtung Device and method for the production of micro-components and the use of such a device |
| 02/03/2011 | DE102005025367B4 Verfahren zum Ausbilden einer Struktur mit optimierter Raumform A method of forming a structure with optimized three-dimensional shape |
| 02/02/2011 | CN201729658U Multifunctional microplasticity forming system |
| 02/01/2011 | US7880113 Plasma discharge method and structure for verifying a hermetical seal |
| 01/27/2011 | US20110017390 Method and Article |
| 01/26/2011 | EP1057006B1 A method of producing a detector arrangement including a gas sensor, and a detector arrangement produced in accordance with the method |
| 01/26/2011 | CN1994859B Manufacture method of ripple structure film and mould possessing the structure |
| 01/26/2011 | CN101423187B Electrochemical corrosion insulation protection method of universal CMOS MEMS device |
| 01/25/2011 | CA2378190C Microfabricated elastomeric valve and pump systems |
| 01/19/2011 | CN1789109B Integration of micro-electro mechanical systems and active circuitry |
| 01/18/2011 | US7871687 Method of making microstructure device, and microstructure device made by the same |
| 01/13/2011 | US20110006784 Test method of microstructure body and micromachine |
| 01/12/2011 | CN101946278A Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 01/12/2011 | CN101946277A Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 01/12/2011 | CN101945818A Methods for measurement and characterization of interferometric modulators |
| 01/12/2011 | CN101941674A Method for manufacturing an electronic component |
| 01/12/2011 | CN101498580B Oscillation type silicon micro-gyroscope |
| 01/11/2011 | US7869055 Process control monitors for interferometric modulators |
| 01/11/2011 | US7867886 Method of enclosing a micro-electromechanical element |
| 01/05/2011 | EP2269947A2 Method for manufacturing and testing microfluidic chips |
| 01/05/2011 | EP2269160A1 Robotic device tester |
| 01/05/2011 | EP2268569A2 Method and arrangement for the production of nano-imprint stamps and micromechanically tunable filter/detector array |
| 01/05/2011 | CN101504426B Comb condenser type dual-spindle accelerometer |
| 12/30/2010 | US20100327471 Process and apparatus for producing emulsion and microcapsules |
| 12/30/2010 | DE102009038108A1 Method for applying micro or nano scale structures on solid bodies, involves pressing tip of needle shaped embossing tool by using position device on multiple different positions of surface of body |
| 12/29/2010 | WO2010149155A2 Method for marking objects by means of codes in the form of micro- and/or nano-sized structures |
| 12/29/2010 | EP2267531A2 Method to vary dimensions of a substrate during nano-scale manufacturing |
| 12/29/2010 | EP2265544A2 Method of forming an ultra-thin sheet suspended on a support member |
| 12/29/2010 | CN101567018B Temperature parameterized reduced-order modeling method for micro-electromechanical system |
| 12/29/2010 | CN101402444B Mould condition excitation both-end fine beam and mould condition shape electrode width determining method thereof |
| 12/28/2010 | US7858957 Illumination optics for projection microlithography |
| 12/22/2010 | EP2263972A1 Method for manufacturing a metal microstructure and microstructure obtained according to this method |
| 12/22/2010 | EP2263971A1 Composite micromechanical part and method for manufacturing same |
| 12/22/2010 | EP2263970A1 Method for exciting a mobile element of a microstructure |
| 12/22/2010 | EP2262722A1 Integrated microneedle array and a method for manufacturing thereof |
| 12/22/2010 | CN1906332B Nano-array electrode manufacturing method and photoelectric converter using same |
| 12/15/2010 | EP2261966A2 A chucking system to hold a substrate and a lithographic system including the chucking system |
| 12/15/2010 | EP2261171A1 Composite micromechanical part and method for manufacturing same |
| 12/15/2010 | EP2260995A1 Surface-structured polyurethane substrates and methods for producing the same |
| 12/15/2010 | EP2259997A1 Silicon-metal composite micromechanical part and method for producing same |
| 12/15/2010 | EP2030231B1 Method and device for monitoring a heat treatment of a microtechnological substrate |
| 12/09/2010 | US20100310773 Fine Metal Structure, Process for Producing the Same, Fine Metal Mold and Device |
| 12/09/2010 | US20100307786 Packaging For Micro Electro-Mechanical Systems And Methods Of Fabricating Thereof |
| 12/08/2010 | CN101909859A Roller type nano-imprint device, mold roll for the roller type nano-imprint device, fixed roll for the roller type nano-imprint device, and nano-imprint sheet manufacturing method |
| 12/08/2010 | CN101000463B System, method, and apparatus for membrane, pad, and stamper architecture |
| 12/07/2010 | US7846749 Method and device for monitoring a heat treatment of a microtechnological substrate |
| 12/07/2010 | CA2354270C Designs for non-contact laser capture microdissection |
| 12/02/2010 | WO2010137319A1 Method for producing pinholder-shaped microneedles, and microneedle |
| 12/02/2010 | WO2010136215A1 Method for producing a medical functional element comprising a self-supporting lattice structure |
| 12/02/2010 | US20100305516 Methods and moulds for use in fabricating side-ported microneedles |
| 12/01/2010 | EP2255870A2 A manufacturing method of a support unit for a microfluidic system |
| 12/01/2010 | EP2255355A1 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 12/01/2010 | CN101556290B Gas gyroscope for measuring the angular speed in any direction |
| 12/01/2010 | CN101551835B Angle parametrized macro modelling method of micro-electro-mechanism system |
| 12/01/2010 | CN101171536B Microreplicated article with defect-reducing surface |
| 11/24/2010 | EP2253583A2 Method of harvesting nanostructures from a substrate |
| 11/24/2010 | EP2252991A1 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 11/24/2010 | EP2252990A1 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same |
| 11/24/2010 | EP2252899A2 Methods for measurement and characterization of interferometric modulators |
| 11/24/2010 | EP2252546A2 Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display |
| 11/24/2010 | EP2252544A1 Methods for measurement and characterization of interferometric modulators |
| 11/24/2010 | EP1535315B1 Glass-type planar substrate, use thereof, and method for the production thereof |
| 11/23/2010 | US7838796 Stack structure cutting method and stack structure |
| 11/23/2010 | US7838323 Method for fabricating semiconductor device |
| 11/18/2010 | US20100290634 Method and device for testing and calibrating electronic semiconductor components which convert sound into electrical signals |
| 11/17/2010 | CN1952777B Imprint method, imprint apparatus, and process for producing chip |
| 11/17/2010 | CN101887105A Test structure of dielectric injection of microelectronic mechanical switch and preparation method thereof |
| 11/17/2010 | CN101407060B Microgripper based on MEMS technology and control system |
| 11/17/2010 | CN101071200B Process control monitor of interferometric modulators |
| 11/16/2010 | US7833880 Process for manufacturing micromechanical devices containing a getter material and devices so manufactured |
| 11/16/2010 | US7833484 Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of the same |
| 11/16/2010 | US7833458 Imprinting method and stamper |
| 11/16/2010 | CA2446157C Methods for screening substances in a microwell array |
| 11/10/2010 | EP2247527A1 Patch production |