| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 09/15/2011 | WO2011111609A1 Fine structure, mold for forming fine structure, and method for producing fine structure |
| 09/15/2011 | US20110223542 Patch production |
| 09/08/2011 | US20110215067 Acceleration sensor with protrusions facing stoppers |
| 09/07/2011 | CN102175932A Charge testing method in plasma environment and testing system |
| 09/07/2011 | CN101602482B Method for three-dimensionally capturing and rotating micromechanical member by using ultrasonic radiation force |
| 09/06/2011 | US8011916 Mold, imprint apparatus, and process for producing structure |
| 08/31/2011 | CN101837947B Multistable mechanism realizing method based on single bistable mechanism and external characteristics thereof |
| 08/31/2011 | CN101592578B Silicon cantilever sensor, preparation method and application thereof |
| 08/31/2011 | CN101362309B Polishing apparatus and method, substrate manufacturing method, and electronic apparatus manufacturing method |
| 08/30/2011 | CA2508475C Devices and methods for programmable microscale manipulation of fluids |
| 08/24/2011 | EP2360115A1 Method of producing a polymer stamp for the reproduction of devices comprising microstructures and nanostructures, a corresponding polymer stamp, and a corresponding device |
| 08/24/2011 | EP2360114A1 Method of producing a polymer stamp for the reproduction of devices comprising microstructures and nanostructures, a corresponding polymer stamp, a corresponding device and a fuel delivery system or water management system for fuel cells |
| 08/24/2011 | CN102164845A Robust high aspect ratio semiconductor device |
| 08/24/2011 | CN102161471A Method for fabricating semiconductor device |
| 08/23/2011 | US8004146 Electrically conductive thin film formed from an ionic liquid and carbon nanotubes having a high aspect ratio, and actuator element comprising the thin film |
| 08/18/2011 | DE102005061763B4 Verfahren und Vorrichtung zum Entformen Method and apparatus for demolding |
| 08/17/2011 | EP1602623B1 Method of moulding a microfluidic structure and mould |
| 08/16/2011 | US7997890 Device and method for lithography |
| 08/10/2011 | EP2355136A2 Method for manufacturing micro structure using x-ray exposure |
| 08/10/2011 | CN101073034B Method for imprint lithography at constant temperature |
| 08/09/2011 | US7993538 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
| 08/04/2011 | US20110188109 Electromechanical device with optical function separated from mechanical and electrical function |
| 08/04/2011 | US20110187386 Method of detecting mem device faults with single current pulse |
| 08/04/2011 | US20110186943 MEMS Package and Method for the Production Thereof |
| 08/04/2011 | DE102009049239A1 Microprocessing machine for processing micro component e.g. cylindrical micro component, has rotary drive comprising planar motors that exhibit different rotating axes, where motors are arranged at distance from each other |
| 08/03/2011 | EP1907160B1 Method of bonding of surfaces with an adhesive cured by laser |
| 07/27/2011 | EP2348359A1 Roller type nano-imprint device, mold roll for the roller type nano-imprint device, fixed roll for the roller type nano-imprint device, and nano-imprint sheet manufacturing method |
| 07/27/2011 | CN101798053B Fully compliant penta-stable mechanism and implementation method thereof |
| 07/27/2011 | CN101551284B Pressure sensor based on Si-Si direct bonding and manufacturing method thereof |
| 07/21/2011 | WO2011086989A1 Microfastener, microfastener production method, and microfastening element |
| 07/20/2011 | EP1230340B1 Methods for the electronic, homogeneous assembly and fabrication of devices |
| 07/19/2011 | US7982291 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 07/19/2011 | US7980661 Nozzle device incorporating movement sensor |
| 07/13/2011 | CN1890603B Methods and devices for fabricating three-dimensional nanoscale structures |
| 07/12/2011 | US7977131 Method for manufacturing nano-array electrode and photoelectric conversion device using same |
| 07/12/2011 | US7976761 Process of production of patterned structure |
| 07/12/2011 | CA2389314C Methods and apparatus for the electronic, homogeneous assembly and fabrication of devices |
| 07/07/2011 | DE102005045081B4 Suszeptor Susceptor |
| 07/06/2011 | EP2341030A2 Microelectromechanical system device and method of manufacturing the microelectromechanical system device |
| 07/05/2011 | US7972778 Method for detecting the presence of a single target nucleic acid in a sample |
| 07/05/2011 | US7972553 Method for imprint lithography at constant temperature |
| 07/05/2011 | US7972543 Process for producing microsphere with use of metal substrate having through-hole |
| 07/05/2011 | CA2491839C A method of forming a mold and molding a micro-device |
| 06/30/2011 | US20110159689 Printing plate and method for fabricating the same |
| 06/30/2011 | US20110159134 Method of producing a mold for imprint lithography, and mold |
| 06/29/2011 | CN102109626A Minute optical element |
| 06/29/2011 | CN102107853A Etching device of micro-nano ferroelectric domain structure based on atomic force microscope acoustic microscopy system |
| 06/23/2011 | WO2011072713A1 Cast polymer layer with high aspect radio |
| 06/21/2011 | US7964428 Micromechanical component and method for fabricating a micromechanical component |
| 06/21/2011 | US7964135 Method and apparatus for imprinting energy ray-setting resin, and discs and semiconductor devices with imprinted resin layer |
| 06/16/2011 | US20110140302 Capillary Imprinting Technique |
| 06/15/2011 | CN102092676A Method and system for preparing high-aspect ratio three-dimensional microstructures in batch |
| 06/15/2011 | CN101481084B Micro-inertial sensor with variable pitch capacitor |
| 06/15/2011 | CN101291873B Process for manufacturing micromechanical devices containing a getter material |
| 06/08/2011 | CN1894156B Method to test the hermeticity of a sealed cavity of microelement and the microelement to implementing the method |
| 06/08/2011 | CN102086022A Forming device of extruded type micro explosive column |
| 06/08/2011 | CN102086015A Support unit for microfluidic system and manufacturing method |
| 06/07/2011 | US7958462 Computer-readable non-transitory medium storing three-dimensional device simulation program and three-dimensional device simulation system |
| 06/07/2011 | US7956428 Microelectromechanical devices and fabrication methods |
| 06/01/2011 | EP2259997B1 Silicon-metal composite micromechanical part and method for producing same |
| 06/01/2011 | CN101700869B Method for preparing flexible substrate biological microelectrode array based on substrate graph |
| 06/01/2011 | CN101192002B Preparation method of magnetism remotely-controlled drive microstructure |
| 05/31/2011 | US7951635 Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use |
| 05/26/2011 | WO2011039070A3 Three-dimensional micro-structure, arrangement with at least two three-dimensional micro-structures, method for producing the micro-structure and use of the micro-structure |
| 05/25/2011 | CN101581601B Detection method, micro-electromechanical component and micro-detection structure of micro-mechanical structure |
| 05/25/2011 | CN101554990B Inter-time scale simulation method of micro electromechanical system (MEMS) |
| 05/25/2011 | CN101549850B Array lift-off technique based on micro-electro-mechanical system |
| 05/19/2011 | WO2010122499A3 Containers assembled in fluid and corresponding production |
| 05/19/2011 | DE102009052828A1 Method for producing micro cavity in infra red sensor, involves removing structure parts with filled micro cavities from liquid after complete immersion of structure parts that are guided together and interconnected to micro cavities |
| 05/18/2011 | CN102062826A Difference method-based MEMS device signal detection circuit |
| 05/17/2011 | US7944599 Electromechanical device with optical function separated from mechanical and electrical function |
| 05/17/2011 | US7942160 Valves and pumps for microfluidic systems and method for making microfluidic systems |
| 05/12/2011 | WO2011054046A1 Controlled release particles and method for preparation thereof |
| 05/12/2011 | DE102009018849A1 Master structure for embossing and/or printing foils in e.g. printing technology for structured application of liquid, has monocrystalline substrate area comprising thickness such that area is formed with curvature radius |
| 05/12/2011 | DE102005014513B4 Vorrichtung und Verfahren zum Temperieren eines Substrats, sowie Verfahren zur Herstellung der Vorrichtung Apparatus and method for controlling the temperature of a substrate, and to processes for producing the device |
| 05/11/2011 | CN102053490A Impression equipment |
| 05/10/2011 | US7938640 Roller nanoimprint apparatus, mold roller for use in roller nanoimprint apparatus, fixing roller for use in roller nanoimprint apparatus, and production method of nanoimprint sheet |
| 05/10/2011 | US7938514 Printing nozzle having fault sensor |
| 05/04/2011 | EP1444779B1 Method for gap adjustment of two mechanical elements of a substantially planar micro-mechanical structure and corresponding electromechanical resonator |
| 04/27/2011 | EP1687237B1 Method to test the hermeticity of a sealed cavity micromechanical device and the device to be so tested |
| 04/27/2011 | CN102037331A Methods for measurement and characterization of interferometric modulators |
| 04/27/2011 | CN101402443B Mould condition excitation cantilever arm fine beam and mould condition shape electrode width determining method thereof |
| 04/26/2011 | US7932728 Electrical conditioning of MEMS device and insulating layer thereof |
| 04/20/2011 | EP2312321A1 Microchip and process for producing microchip |
| 04/20/2011 | CN1994860B Silicon micromachine cantilever beam sensor driving structure, production method and uses under torsion mode |
| 04/20/2011 | CN102026910A Integrated microneedle array and a method for manufacturing the same |
| 04/20/2011 | CN102020237A Novel method for designing super oleophobic surface structure |
| 04/20/2011 | CN101279710B Method for judging wafer backside alignment overlay accuracy and wafer thereof |
| 04/14/2011 | WO2010074911A3 Apparatus and method of detecting microchip hermeticity |
| 04/13/2011 | EP2309130A2 Microfabricated elastomeric valve and pump systems |
| 04/13/2011 | CN101450788B Quartz wafer deep micropore processing equipment and method |
| 04/12/2011 | US7923897 Sonic fine-hole forming apparatus |
| 04/12/2011 | US7922474 Imprint lithography |
| 04/07/2011 | WO2011039070A2 Three-dimensional micro-structure, arrangement with at least two three-dimensional micro-structures, method for producing the micro-structure and use of the micro-structure |
| 04/06/2011 | CN102007066A Patch production |
| 04/05/2011 | US7919055 Method of forming a sealed channel of a microfluidic reactor and a microfluidic reactor comprising such channel |
| 03/29/2011 | US7915539 Electric part |
| 03/29/2011 | US7914691 Printing plate and method for fabricating the same |
| 03/23/2011 | CN201770470U Nano-precision surface ironing press treatment and micro-nano structure array processing platform |
| 03/22/2011 | US7910042 Capillary imprinting technique |