| Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599) |
|---|
| 04/25/2012 | EP2443517A1 Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter |
| 04/25/2012 | EP1968885B1 Production of piezoelectric suspended microcomponents by the sacrificial thick film method |
| 04/25/2012 | CN101219446B Extrusion head with planarized edge surface |
| 04/25/2012 | CN101112789B Process of production of patterned structure |
| 04/18/2012 | EP2440690A1 Method for manufacturing a metal microstructure and microstructure obtained according to said method |
| 04/18/2012 | CN102417158A 用于薄膜充气梁弯皱特性预报的壳膜模型 Shell membrane model for crimp feature film inflatable beams forecasts |
| 04/11/2012 | CN101308135B 一种制造芯片内微流体动态混合器的混合池的凸凹模具 Within a microfluidic chip manufacturing dynamic mixer mixing tank punch mold |
| 04/10/2012 | US8153941 Method of heating superposed components and heating apparatus therefor |
| 04/10/2012 | CA2721172C Microfabricated elastomeric valve and pump systems |
| 04/04/2012 | EP2434993A1 Method for producing a medical functional element comprising a self-supporting lattice structure |
| 04/04/2012 | EP1743217B1 Method for imprint lithography at constant temperature |
| 04/03/2012 | US8148251 Forming a semiconductor device |
| 03/28/2012 | CN101139080B Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use |
| 03/27/2012 | US8143082 Wafer bonding of micro-electro mechanical systems to active circuitry |
| 03/27/2012 | US8142850 Patterning a plurality of fields on a substrate to compensate for differing evaporation times |
| 03/27/2012 | US8142701 Method and device for producing a nanopatterned disc |
| 03/27/2012 | US8142700 Dry adhesives and methods for making dry adhesives |
| 03/21/2012 | CN102381676A Quartz micro needle surface nano metal chain and preparation method thereof |
| 03/20/2012 | US8137902 Method of manufacturing mechanical and micromechanical parts |
| 03/20/2012 | US8137569 Method of fabricating a membrane having a tapered pore |
| 03/20/2012 | US8136212 Method of fabricating structure having out-of-plane angular segment |
| 03/15/2012 | US20120063972 Device having regions of differing affinities to fluid, methods of making such devices, and methods of using such devices |
| 03/13/2012 | US8134370 Semiconductor device and method of controlling electrostatic actuator |
| 03/08/2012 | WO2012031111A1 System and method of leakage current compensation when sensing states of display elements |
| 03/08/2012 | WO2012031101A1 System and method of updating drive scheme voltages |
| 03/06/2012 | US8127617 Pressure sensor, manufacturing method thereof, and electronic component provided therewith |
| 03/06/2012 | CA2528309C Method for manufacturing microstructures having hollow microelements using fluidic jets during a molding operation |
| 02/28/2012 | US8124435 Method for manufacturing a microelectromechanical component, and a microelectromechanical component |
| 02/23/2012 | US20120045575 Method and device for producing a nanopatterned disc |
| 02/23/2012 | US20120045192 System and method for improving immersion scanner overlay performance |
| 02/22/2012 | CN101117207B 对于微型装置的抗粘连材料的原位应用 For the in situ application of anti-adhesion material of the micro-device |
| 02/21/2012 | US8119197 Metal mold for use in imprinting processes |
| 02/16/2012 | WO2012020132A1 Method for producing a mems apparatus with a high aspect ratio, and converter and capacitor |
| 02/16/2012 | CA2812365A1 Method for producing a mems apparatus with a high aspect ratio, and converter and capacitor |
| 02/15/2012 | EP2418544A2 Method and system for determining characteristics of substrates employing fluid geometries |
| 02/15/2012 | EP1192453B1 Molecular and atomic scale evaluation of biopolymers |
| 02/15/2012 | CN102354045A Imaging optical system, projection exposure device and microstructure component production method |
| 02/14/2012 | US8115988 System and method for micro-electromechanical operation of an interferometric modulator |
| 02/14/2012 | US8113816 Imprint device and imprint method |
| 02/09/2012 | WO2012017024A1 Microscale or nanoscale magnetic tweezers and process for fabricating such tweezers |
| 02/08/2012 | CN102344116A Multifunctional micro-plastic forming system |
| 02/02/2012 | WO2012014792A1 Physical quantity sensor and manufacturing method for same |
| 01/31/2012 | US8105860 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 01/31/2012 | US8104515 Microfabricated elastomeric valve and pump systems |
| 01/26/2012 | US20120019602 Printing nozzle arrangement having fault detector |
| 01/18/2012 | CN102320563A Measuring method for maximum ion boundary angle in plasma etching simulation |
| 01/11/2012 | CN101767820B Multi-facet spherical micro-nano-structure titanium dioxide and preparation method thereof |
| 01/11/2012 | CN101580244B Method for preparing mesoscopic material with controllable appearance |
| 01/04/2012 | CN101154035B Fine mold and method for regenerating fine mold |
| 12/29/2011 | US20110319300 Systems for Filling a Sample Array by Droplet Dragging |
| 12/28/2011 | CN102295265A 平面腔体微机电系统及相关结构、制造和设计结构的方法 Methods planar cavity micro-electromechanical systems and related structures, manufacturing and design structure |
| 12/28/2011 | CN102295264A 平面腔体微机电系统及相关结构、制造和设计结构的方法 Methods planar cavity micro-electromechanical systems and related structures, manufacturing and design structure |
| 12/28/2011 | CN102295263A Planar cavity mems and related structures, methods of manufacture and design structures |
| 12/28/2011 | CN101263429B 使用膜形成组合物的图案形成方法 Film-forming composition using a pattern forming method |
| 12/28/2011 | CN101206481B 基于双直线电机的高速高精度微冲压驱动系统 Based on the high-speed high-precision micro-stamping dual linear motor drive system |
| 12/28/2011 | CN101094804B 微机电系统封装件及其制造方法 MEMS package and method for manufacturing |
| 12/22/2011 | US20110311979 Method for detecting the presence of a single target nucleic acid in a sample |
| 12/21/2011 | CN101177236B 基于激光辅助加热的微器件弯曲成形方法及装置 Laser-based micro devices auxiliary heating method and apparatus for bending |
| 12/20/2011 | US8080181 Coextrusion ink chemistry for improved feature definition |
| 12/20/2011 | US8079305 Stamp for soft lithography, in particular micro contact printing and a method of preparing the same |
| 12/20/2011 | US8079278 End effector for nano manufacturing |
| 12/20/2011 | US8079246 Integrated MEMS metrology device using complementary measuring combs |
| 12/07/2011 | CN1866030B 探针卡及微小结构体的检查装置 Probe card inspection apparatus and micro structure |
| 12/07/2011 | CN101585508B 基于光敏触变胶膜的有机玻璃微流控芯片的制备方法 Preparation of photosensitive film based thixotropic plexiglass microfluidic chips |
| 12/07/2011 | CN101304942B Mems电容器麦克风及制造方法、箔片叠层、电子设备及使用 Mems condenser microphone and a method of manufacturing the foil laminate, and the use of the electronic device |
| 11/29/2011 | US8068208 System and method for improving immersion scanner overlay performance |
| 11/29/2011 | US8067159 Microfluidics; electromagnetics; electrophoresis; DNA sequence analysis |
| 11/24/2011 | US20110284499 Imprint method using a mold and process for producing structure using an imprint apparatus |
| 11/22/2011 | US8062494 Micro-machining dust removing device, micro-machining apparatus, and micro-machining dust removing method |
| 11/22/2011 | US8061212 Method of flip chip mounting pressure sensor dies to substrates and pressure sensors formed thereby |
| 11/16/2011 | CN101718667B Density sensor chip based on micro electro mechanical system technology and preparation method thereof |
| 11/16/2011 | CN101566502B Thermo-optical infrared detector and preparation method thereof |
| 11/15/2011 | US8057725 Capillary imprinting technique |
| 11/10/2011 | US20110276003 Integrated microneedle array and a method for manufacturing thereof |
| 11/09/2011 | CN102236030A Inertial measurement simulation analyzing method, terminal and system |
| 11/09/2011 | CN102234100A Pressing die |
| 11/09/2011 | CN101837943B Sensor for quantitatively measuring mechanical and electrical properties and microstructure and manufacturing method thereof |
| 11/09/2011 | CN101263077B A method of manufacturing a microsystem with interval |
| 11/02/2011 | EP2383776A1 Solid state nanopore device for evaluating biopolymers |
| 11/02/2011 | CN1639054B Micro fluid system support unit and manufacturing method thereof |
| 11/01/2011 | US8047835 Method of transcribing fine pattern and fine structure pattern transcription apparatus |
| 10/26/2011 | EP2380721A1 Method for fabricating a master |
| 10/19/2011 | EP1656242B1 Capillary imprinting technique |
| 10/19/2011 | CN101852707B Quartz crystal microbalance signal amplification method taking polystyrene spheres as template |
| 10/18/2011 | US8039950 Solder material lining a cover wafer attached to wafer substrate |
| 10/18/2011 | US8038252 Method of detecting MEM device faults with single current pulse |
| 10/13/2011 | WO2011126438A1 Free form printing of silicon micro- and nanostructures |
| 10/12/2011 | CN202007125U System for batch preparation of three-dimensional microstructures with large aspect ratio |
| 10/11/2011 | US8035824 Differential critical dimension and overlay metrology apparatus and measurement method |
| 10/05/2011 | CN101714543B Ceramic substrate for three-dimensional packaging of multi-chip system and packaging method thereof |
| 10/05/2011 | CN101096007B Support unit for micro fluid system, and method of manufacturing support unit for micro fluid system |
| 10/04/2011 | US8030180 Method of manufacturing a semiconductor device |
| 10/04/2011 | US8029745 Systems for filling a sample array by droplet dragging |
| 10/04/2011 | US8029717 Nanoimprint method and apparatus |
| 09/29/2011 | WO2011118391A1 Polymer actuator and method for producing same |
| 09/27/2011 | US8027089 Minute structure and its manufacturing method |
| 09/27/2011 | US8025831 Imprinting of supported and free-standing 3-D micro- or nano-structures |
| 09/21/2011 | CN101559914B Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof |
| 09/20/2011 | US8021593 Method of producing a three-dimensional structure and fine three-dimensional structure |
| 09/15/2011 | WO2011111815A1 Method for formation of concave-convex pattern using photocurable transcription sheet, and device for use in the method |