Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 99 - Subject matter not provided for in other groups of this subclass
Patents for B81C 99 - Subject matter not provided for in other groups of this subclass (3,599)
10/2012
10/11/2012US20120256615 Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display
10/11/2012US20120256346 Mold structures, and method of transfer of fine structures
10/10/2012CN101809499B Mask blank, and method for production of imprint mold
10/10/2012CN101700870B Preparation method of carbon micron tube encapsulating tin nano material and application thereof
10/10/2012CN101694494B Method for manufacturing micro-cantilever modified with antibody
10/10/2012CN101152955B Method of making microstructure device, and microstructure device made by the same
10/10/2012CN100998901B Porous silicon painless injection mironeedle array and its preparation method
10/04/2012US20120249122 Measurement and apparatus for electrical measurement of electrical drive parameters for a mems based display
10/03/2012CN102701146A Device for testing thickness of phosphorosilicate glass and polycrystalline silicon synchronously on line
10/02/2012US8278071 Method for detecting the presence of a single target nucleic acid in a sample
10/02/2012CA2428187C Method of fabricating sub-micron structures in transparent dielectric materials
09/2012
09/26/2012EP2502877A1 Method for manufacturing a composite part, in particular for a clock movement
09/26/2012CN101666974B Mold, imprint apparatus, and process for producing structure
09/25/2012US8273505 Mask blank and method of manufacturing an imprint mold
09/25/2012US8273257 Nanotube processing employing solid-condensed-gas-layers
09/19/2012CN202440304U Digitalized fluid particle manufacturing device
09/19/2012CN102674242A Preparation method of artificial microtube and application of artificial microtube as micromotor
09/19/2012CN101870452B Preparation method of MEMS (Micro Electro Mechanical Systems) metal wire biological microelectrode
09/19/2012CN101641281B Mold and mold production process
09/19/2012CN101160203B Machining method of microstructure and machining system of microstructure
09/18/2012US8268209 Pattern forming method and its mold
09/18/2012US8266791 Method of fabricating microfluidic structures for biomedical applications
09/11/2012US8263129 Methods for fabricating isolated micro-and nano-structures using soft or imprint lithography
09/06/2012US20120225243 Extensions of Self-Assembled Structures to Increased Dimensions via a "Bootstrap" Self-Templating Method
09/06/2012US20120223461 Imprinting device and imprinting method
09/05/2012CN101712451B One-step method for making carboxylic acid functional monofilm on surface of micro cantilever beam
09/05/2012CN101312904B Method for manufacturing a microelectromechanical component, and a microelectromechanical component
09/04/2012US8257925 Method for detecting the presence of a single target nucleic acid in a sample
08/2012
08/30/2012US20120219759 Single particle film etching mask and production method of single particle film etching mask, production method of micro structure with use of single particle film etching mask and micro structure produced by micro structure production method
08/29/2012CN101171522B Method and device for tempering a substrate
08/29/2012CN101085674B Microchannel cleaning method
08/23/2012US20120212468 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same
08/16/2012WO2012108316A1 Method for manufacturing substrate having micropore, and substrate
08/14/2012US8244092 System and method of testing humidity in a sealed MEMS device
08/14/2012US8241957 Negative thermal expansion system (NTES) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging
08/14/2012US8241550 Imprint lithography
08/09/2012WO2012104110A1 Method for producing a complex smooth micromechanical part
08/09/2012DE102008054993B4 Vorrichtung und Verfahren zur Herstellung eines Formkörpers mit Mikrostrukturen Apparatus and method for producing a molded article with microstructures
08/08/2012EP2484629A1 Perforated complex micromechanical part
08/08/2012EP2484628A1 Micromechanical item having low surface roughness
08/08/2012EP2483198A2 Three-dimensional micro-structure, arrangement with at least two three-dimensional micro-structures, method for producing the micro-structure and use of the micro-structure
08/08/2012CN102627258A Sub-micro self-supporting polyimide film and preparation method thereof
08/08/2012CN102627257A Method for preparing three-dimensional fluid channel in transparent material
08/07/2012US8236407 Process and apparatus for fabricating precise microstructures and polymeric molds for making same
08/07/2012US8236231 Ultrasonic injection molding on a web
08/02/2012WO2012101257A1 Microelectromechanical component and method for testing a microelectromechanical component
08/01/2012EP2010966B1 Alignment method
08/01/2012CN102616729A Structure and method for detecting whether narrow trench isolation grooves are etched to oxide layers based on silicon-on-insulator (SOI) silicon chip
08/01/2012CN101509933B Method for manufacturing micro-acceleration and micro-angular rate integration sensor
07/2012
07/31/2012US8231797 Process for producing air gaps in microstructures
07/26/2012WO2012098942A1 Method of producing finely structured gel
07/25/2012CN102608864A Method for manufacturing nanoscale component with large height-width ratio
07/25/2012CN101308136B Open mould for manufacturing chip microfluid dynamic mixer mixing pool
07/18/2012CN102583235A Method for preparing organic micro/nano structure by liquid phase chemical reaction method and patterning in situ
07/18/2012CN102583234A Digital fluid particle preparation device
07/17/2012US8221665 Manufacturing a replication tool, sub-master or replica
07/17/2012US8221190 Polishing apparatus cofigured to simultaneously polish two surfaces of a work
07/17/2012US8220704 Methods for low cost manufacturing of complex layered materials and device
07/12/2012WO2012094146A1 System and method for measuring a distance
07/11/2012CN102556934A Adjustable multistable mechanism and implementation method thereof
07/10/2012US8215944 Imprinting device and imprinting method
07/05/2012WO2012089998A2 Methods to improve the electrical conductivity for moulded plastic parts
07/04/2012CN102530852A Method for fabricating three-dimensional optical echo wall mode micro-cavity by using femtosecond laser
07/04/2012CN101509934B Micro-acceleration and micro-angular rate monolithic integration sensor
07/04/2012CN101479662B Printing form precursor and process for preparing a stamp from the precursor
07/04/2012CN101096008B Support unit for micro fluid system, and method of manufacturing support unit for micro fluid system
06/2012
06/27/2012CN102515092A Method for manufacturing micro-spring
06/27/2012CN101475138B Detection piezoresistance and method for ultrathin silicon micromechanical cantilever beam under torsion mode
06/20/2012EP1866654B1 Method and device for tempering a substrate
06/20/2012CN102510834A Three-dimensional micro-structure, arrangement with at least two three-dimensional micro-structures, method for producing the micro-structure and use of the micro-structure
06/20/2012CN102502483A Method for processing polymer micro-nano composite structure based on two separated moulds
06/20/2012CN101063747B Process control monitors for interferometric modulators
06/19/2012US8204703 Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display
06/19/2012US8202582 Single particle film etching mask and production method of single particle film etching mask, production method of micro structure with use of single particle film etching mask and micro structure produced by micro structure production method
06/13/2012CN101509888B Method for making silicone base integrable miniature glucose sensor
06/12/2012US8199314 System and method for improving immersion scanner overlay performance
06/07/2012WO2012072818A1 Method for measuring a microelectromechanical semiconductor component
06/07/2012WO2012072347A1 Method and device for measuring a microelectromechanical semiconductor component
06/05/2012US8193623 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
05/2012
05/30/2012EP2457880A1 Fluidic module fabrication with heterogeneous channel-forming laminates
05/30/2012EP1843972B1 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
05/30/2012CN102483585A 光谱纯度滤光片、光刻设备、和制造光谱纯度滤光片的方法 The spectral purity filters, lithographic apparatus and a method for manufacturing a spectral purity filter
05/30/2012CN101887105B Test structure of dielectric injection of microelectronic mechanical switch and preparation method thereof
05/30/2012CN101298315B Preparation of nano-tube contilever beam array
05/30/2012CN101142137B Method for fabricating a micromechanical component
05/23/2012CN101733845B Nano zirconia ceramic material micro-cutting process and device
05/22/2012US8183474 Microcomponent provided with a cavity delimited by a cap with enhanced mechanical resistance
05/18/2012WO2012063948A1 Method for cleaning fine pattern surface of mold, and imprinting device using same
05/17/2012US20120119312 Method for manufacturing a microelectromechanical component; and a microelectromechanical component
05/10/2012US20120114925 Method of fabricating a membrane having a tapered pore
05/09/2012CN101591000B Method for preparing doped zinc oxide with four-foot shaped micron structure
05/08/2012US8172564 Process and apparatus for fabricating precise microstructures and polymeric molds for making same
05/03/2012WO2012057102A1 Shaping die, microchip manufactured using die, and manufacturing apparatus for manufacturing microchip
05/03/2012WO2012057101A1 Microchip, microchip shaping die, and manufacturing apparatus for manufacturing microchip
05/02/2012EP1716588B1 Imprinting apparatus with independently actuating separable modules
05/02/2012CN101585509B Method of picking and translating a micro-mechanical component on a solid wall surface by ultrasonic radiation force
05/01/2012US8169426 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same
05/01/2012US8169041 MEMS package and method for the production thereof
04/2012
04/25/2012EP2444226A2 Ultrasonic injection molding on a web
04/25/2012EP2444225A2 Ultrasonic injection molding on a web
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